using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.RT.IOCore; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using SicPM.Devices; using System; using System.Collections.Generic; using System.Diagnostics; namespace SicPM.Routines { public class PMLidCloseRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, ArSupply, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetM1to16, SetPC, SetGroupJ, SetM291519to38, SetGasOut, SetTv, SetGasIn1, //V65,V67,V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetMfc19to26, SetTVCloseMode, SetTvPositionToZero, SetGasIn2, SetGroupJOpen, SetM291519to26, OpenFinal2, SetMfcFinal2, SetEPV1, SetEPV2, SetTvMode, RoutinePre, V27Open, V27Close, PressureTo1050, SetPressureUp, SetPressureDown, VentPumpOpen, PressureToMax, PressureToMin, SetPressUpOrDown1, SetPressUpOrDown2, WaitPressureDown, WaitPressureUp, SetMFCMode, SetPCMode, WaitPmTo1050, SetTvOpen, SetTvModeToPress, SetEPV22, SetV76, SetV75, SetV751, SetV761, CheckPM1000, SetMfc28to31Special, WaitPressUpTo1000, SetMfc28to31Default, SetPC567Close, SetPC567Mode, SetPC567Default, OpenEPV2, WaitV27Open, SetTvTo1150, WaitPressUpTo20, SetMfc28to31To0, WaitPressUpTo0, SetMfc28to31ToDefault, WaitPressDownTo20, CheckPMPt21000, SetPressureDown1, SetMfc28to31Default1, CheckFinal1Open, SetGroupV38, SetGroupV25, StartLoop, EndLoop, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay18, Notify1, Notify2, Notify3, Notify4, } private ModuleName moduleName; private PMModule _pmModule; private IoThrottleValve2 _IoThrottle; private IoInterLock _pmIoInterLock; List _lstPcList = new List { 1, 2, 3, 4, 5, 6, 7 }; private int _rotationCheckSpeed =0 ; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout=20; //旋转停止超时 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private int _pressureMaxDelay = 10; //到低压保持时间（采用固定值10s） private int _pressureMinDelay = 10; //到高压保持时间（采用固定值10s） private double _pressureMax; //Loop压力上限可设置600-800） private double _pressureMin; //Loop压力下限可设置 0-400） private int _pressureMinTimeout; private int _pressureMaxTimeout; private int _pressureLoopCount; //Loop次数 private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间 private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了) private int _throttleTimeout; //蝶阀调整到指定压力的超时时间 private int _EPV2OpenTimeDelay =10; //EPV2 private int _waitChamberTo1000TimeOut = 180; //等待腔体压力上升到1000的超时时间 private double _mfc28SpecialFlow = 15000; private double _mfc29SpecialFlow = 5000; private double _mfc31SpecialFlow = 10000; private int _EPV2OpenDelayTime = 9; private int _pmCleanTime = 20; //private int _routineTimeOut; private Stopwatch _swTimer = new Stopwatch(); public PMLidCloseRoutine(ModuleName module, PMModule pm) : base(module, pm) { moduleName = module; _pmModule = pm; Name = "Clean"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); _pmIoInterLock = DEVICE.GetDevice($"{Module}.PMInterLock"); } public override Result Start(params object[] objs) { Reset(); _mfc28SpecialFlow = SC.GetValue($"PM.{Module}.Mfc28FlowSpecail"); _mfc29SpecialFlow = SC.GetValue($"PM.{Module}.Mfc29FlowSpecail"); _mfc31SpecialFlow = SC.GetValue($"PM.{Module}.Mfc31FlowSpecail"); _EPV2OpenTimeDelay = SC.GetConfigItem($"PM.{Module}.EPV2OpenTimeDelayAlterEPV1Open").IntValue; _pmPressureMaxDiff = SC.GetValue($"PM.{Module}.ThrottlePressureMaxDiff"); _throttleTimeout = SC.GetValue($"PM.{Module}.ThrottlePressureTimeout"); _pressureLoopCount = SC.GetValue($"PM.{Module}.Clean.CycleCleanCount"); _pressureMin = SC.GetValue($"PM.{Module}.Clean.PumpBasePressure"); _pressureMinDelay = SC.GetValue($"PM.{Module}.Clean.PumpDelayTime"); _pressureMinTimeout = SC.GetValue($"PM.{Module}.Clean.PumpTimeout"); _pressureMax = SC.GetValue($"PM.{Module}.Clean.VentBasePressure"); _pressureMaxDelay = SC.GetValue($"PM.{Module}.Clean.VentDelayTime"); _pressureMaxTimeout = SC.GetValue($"PM.{Module}.Clean.VentTimeout"); _pmCleanTime = SC.GetValue($"PM.{Module}.Clean.CleanTime"); _EPV2OpenDelayTime = SC.GetValue($"PM.{Module}.TimeDelayAlterEPV2Open"); if (!_pmIoInterLock.SetPMLidCloseRoutineRunning(true, out string reason)) { EV.PostAlarmLog(Module, $"can not Clean,{reason}"); return Result.FAIL; } //Purge Succeed 清掉 _pmIoInterLock.DoLidOpenRoutineSucceed = false; //Clean Succeed 清掉 _pmIoInterLock.DoLidCloseRoutineSucceed = false; _checkPMPt2Over1000 = false; _checkPMPressureOver1000 = false; _finalOpen = false; currentPressureUpOrDown = PressureUpOrDown.None; _swTimer.Restart(); Notify($"Start LoopCount:{_pressureLoopCount}"); return Result.RUN; } //PM Clean public override Result Monitor() { try { SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed,false, _rotationCloseTimeout); SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.ArSupply, IoGroupName.ArSupply, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV38, IoGroupName.V38, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0); SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); CheckFinalIoStatue((int)RoutineStep.CheckFinal1Open); if (!_finalOpen) { SetMfcByGroup((int)RoutineStep.SetM291519to38, MfcGroupName.M291519to38, 0, 5); TimeDelay((int)RoutineStep.TimeDelay1, 5); } GetPressureConditionPT2((int)RoutineStep.CheckPMPt21000, 1000); if (!_checkPMPt2Over1000) { //1.打开EPV1,等待10s SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8); TimeDelay((int)RoutineStep.TimeDelay18, 1); SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay2, _EPV2OpenTimeDelay); } //2.打开进气系统 （V65,V67,V68) SetIoValueByGroup((int)RoutineStep.SetGasIn1, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout); //3.打开Final valves 和对应的MFC值 SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3); TimeDelay((int)RoutineStep.TimeDelay3, 3); SetIoValueByGroup((int)RoutineStep.OpenFinal1, IoGroupName.Final1, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal1, MfcGroupName.Final1, 3); TimeDelay((int)RoutineStep.TimeDelay4, 3); //4.打开J Valves SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M291519to26, 3); if (!_checkPMPt2Over1000) { //判断反应腔压力是否超过1000mbar GetPressureCondition((int)RoutineStep.CheckPM1000, 1000); if (!_checkPMPressureOver1000) { //设置M28,M29,M31 为特定值 SetMfc28to31Special((int)RoutineStep.SetMfc28to31Special, _mfc28SpecialFlow, _mfc29SpecialFlow, _mfc31SpecialFlow, 1); } //等待反应腔压力到达1000 NotifyInfo((int)RoutineStep.Notify1, "Wait PM Pressure over 1000 mbar"); WaitChamberPressUpTo((int)RoutineStep.WaitPressUpTo1000, 1000, _waitChamberTo1000TimeOut); SetMfcToDefaultByGroup((int)RoutineStep.SetMfc28to31Default, MfcGroupName.M28toM31, 0); } NotifyInfo((int)RoutineStep.Notify2, "Wait V27 open!"); WaitV27Open((int)RoutineStep.WaitV27Open,1000); TimeDelay((int)RoutineStep.TimeDelay5, _pmCleanTime); if (_checkPMPt2Over1000) { //1.打开EPV1,等待10s SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8); SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay2, _EPV2OpenTimeDelay); } //打开EPV2,等待9秒,打开蝶阀 SetIoValueByGroup((int)RoutineStep.OpenEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay6, _EPV2OpenDelayTime); SetThrottleEnableAndWait((int)RoutineStep.SetTvOpen, _IoThrottle, 10); SetThrottleToPressModeAndWait((int)RoutineStep.SetTvModeToPress, _IoThrottle, 10); SetThrottleToTargetAndNoWait((int)RoutineStep.SetTvTo1150, _IoThrottle, 1150); //打开V72 //SetIoValueByGroup((int)RoutineStep.VentPumpOpen, IoGroupName.VentPump, true, _IoValueOpenCloseTimeout); Loop((int)RoutineStep.StartLoop, _pressureLoopCount); SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing); SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, _pressureMin); WaitThrottleToPressureAndSetMfcSpecialForLidOpen((int)RoutineStep.WaitPressureDown, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _pressureMinTimeout); TimeDelay((int)RoutineStep.TimeDelay8, _pressureMinDelay); SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping); SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _pressureMax); WaitThrottleToPressureAndSetMfcSpecialForLidOpen((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _pressureMaxTimeout); TimeDelay((int)RoutineStep.TimeDelay9, _pressureMaxDelay); EndLoop((int)RoutineStep.EndLoop); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); SetRoutineRuningDo(); SetRoutineSuccessedDo(); return Result.DONE; } public override void Abort() { SetRoutineRuningDo(); PMDevice._ioThrottleValve.StopRamp(); PMDevice.SetMfcStopRamp(PMDevice.GetMfcListByGroupName(MfcGroupName.All)); base.Abort(); } private void SetRoutineRuningDo() { _pmIoInterLock.DoLidCloseRoutineRunning = false; } private void SetRoutineSuccessedDo() { _pmIoInterLock.SetLidClosedRoutineSucceed(true, out string reason); _pmIoInterLock.DoLidOpenRoutineSucceed = false; } //private void CheckRoutineTimeOut() //{ // if (_routineTimeOut > 10) // { // if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) // { // Notify($"Routine TimeOut! over {_routineTimeOut} s"); // throw (new RoutineFaildException()); // } // } //} } }