using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using System; using System.Collections.Generic; namespace SicPM.Routines { public class PMToBaseRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, ArSupply, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetM1to16, SetPC, SetGroupI, //V87-96 SetM19to38, SetGasOut, SetTv, SetGasIn1, //V65,V67,V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetM19to26, SetGasIn2, SetGroupJOpen, OpenFinal2, SetMfcFinal2, SetEPV1, SetEPV2, SetTVCloseMode, SetTvPositionToZero, SetMFCMode, SetPCMode, SetV76, SetV75, SetGroupV25, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay18, TimeDelayForEPV1, } private PMModule _pmModule; private IoThrottleValve2 _IoThrottle; private List _lstPcList = new List { 1, 2, 3, 4, 5, 6, 7 }; private int _rotationCloseTimeout = 20; //旋转停止超时 private int _IoValueOpenCloseTimeout = 10; //开关超时时间 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private double _timeDelayForEPV1=10; // 关闭EPV1前的等待时间 public PMToBaseRoutine(ModuleName module, PMModule pm) : base(module, pm) { Module = module.ToString(); _pmModule = pm; Name = "Isolation"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); } public override Result Start(params object[] objs) { Reset(); if (_pmModule.PT1.FeedBack < 1000) { Notify("Chamber Pressure Is Lower Than 1000 mbar,Can not Close EPV1!"); return Result.FAIL; } //_timeDelayForEPV1 = SC.GetValue($"PM.{Module}.Isolation.TimeDelayForEPV1"); Notify("Start"); return Result.RUN; } public override Result Monitor() { try { SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, 0, false, _rotationCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); //MFC设置模式,M1-16设置为默认值,PC设置为默认值 SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0); SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); //关闭V91到V96 SetIoValueByGroup((int)RoutineStep.OpenFinal1, IoGroupName.Final1, false, _IoValueOpenCloseTimeout); SetMfcByGroup((int)RoutineStep.SetMfcFinal1, MfcGroupName.Final1,0,5); TimeDelay((int)RoutineStep.TimeDelay1, 5); //关闭V87到90 SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout); SetMfcByGroup((int)RoutineStep.SetM19to26, MfcGroupName.M19toM31, 0,5); TimeDelay((int)RoutineStep.TimeDelay2, 5); //关闭先关EPV2,再关EPV1 SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle,8); TimeDelay((int)RoutineStep.TimeDelay18, 1); SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelayForEPV1, _timeDelayForEPV1); SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, false, _IoValueOpenCloseTimeout); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } Notify("Isolation Finished"); return Result.DONE; } public override void Abort() { } } }