using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using System; using System.Collections.Generic; using System.Diagnostics; namespace SicPM.Routines { public class PMToIdleRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, ArSupply, SetGroupA, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetMFCMode, SetPCMode, SetM1to16, SetPC, SetM291519to38, SetGroupJ, SetM19to38, SetGasOut, SetTv, SetGasIn1, //V65,V67,V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetMfc19to26, SetTVCloseMode, SetTvPositionToZero, CheckPM1000, SetGasIn2, SetGroupJOpen, SetM291519to26, SetGroupV38, OpenFinal2, SetMfcFinal2, WaitPmPressureUp, SetEPV1, SetEPV2, SetTvMode, SetEPVV1, SetMfc28to31Special, SetMfc28to31Default, SetPC567Close, SetPC567Mode, SetPC567Default, CheckFinal1Open, SetV76, SetV75, SetGroupV25, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay18, Notify1, } private IoThrottleValve2 _IoThrottle; List _lstPcList = new List { 1, 2, 3, 4, 5, 6, 7 }; private int _rotationCheckSpeed=0; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout; //旋转停止超时 private int _IoValueOpenCloseTimeout = 10; //开关超时时间 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private int _EPV2OpenTimeDelay = 10; private int _waitPMPressureUpTimeout = 300; //等待反应腔压力到达1000的超时时间 private double _mfc28SpecialFlow = 15000; private double _mfc29SpecialFlow = 5000; private double _mfc31SpecialFlow = 10000; private Stopwatch _swTimer = new Stopwatch(); public PMToIdleRoutine(ModuleName module, PMModule pm) : base(module, pm) { Module = module.ToString(); Name = "AtmIdle"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); _checkPMPressureOver1000 = false; } public override Result Start(params object[] objs) { Reset(); _checkPMPressureOver1000 = false; _rotationCloseTimeout = SC.GetValue($"PM.{Module}.RotationCloseTimeout"); _EPV2OpenTimeDelay = SC.GetValue($"PM.{Module}.EPV2OpenTimeDelayAlterEPV1Open"); _mfc28SpecialFlow = SC.GetValue($"PM.{Module}.Mfc28FlowSpecail"); _mfc29SpecialFlow = SC.GetValue($"PM.{Module}.Mfc29FlowSpecail"); _mfc31SpecialFlow = SC.GetValue($"PM.{Module}.Mfc31FlowSpecail"); currentPressureUpOrDown = PressureUpOrDown.None; _swTimer.Restart(); _finalOpen = false; Notify("Start"); return Result.RUN; } public override Result Monitor() { try { if (SC.GetValue("System.IsSimulatorMode")) { SetHeatEnable((int)RoutineStep.HeatEnable, true, _heatTimeOut); SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout); return Result.DONE; } SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout); SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.ArSupply, IoGroupName.ArSupply, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV38, IoGroupName.V38, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0); SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); CheckFinalIoStatue((int)RoutineStep.CheckFinal1Open); if (!_finalOpen) { SetMfcByGroup((int)RoutineStep.SetM291519to38, MfcGroupName.M291519to38, 0, 5); TimeDelay((int)RoutineStep.TimeDelay1, 5); } //1.打开抽气系统 (关闭EPV2,打开EPV1) SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8); TimeDelay((int)RoutineStep.TimeDelay18, 1); SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay2, _EPV2OpenTimeDelay); //2.打开进气系统 (V65,V67,V68) SetIoValueByGroup((int)RoutineStep.SetGasIn1, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout); //3.打开Final valves 和对应的MFC值 SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3); TimeDelay((int)RoutineStep.TimeDelay3, 3); SetIoValueByGroup((int)RoutineStep.OpenFinal1, IoGroupName.Final1, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal1, MfcGroupName.Final1, 3); TimeDelay((int)RoutineStep.TimeDelay4, 3); //5.打开J Valves SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M291519to26, 3); TimeDelay((int)RoutineStep.TimeDelay5, 3); //判断反应腔压力是否超过1000mbar GetPressureCondition((int)RoutineStep.CheckPM1000,1000); if (!_checkPMPressureOver1000) { //设置M28,M29,M31 为特定值 SetMfc28to31Special((int)RoutineStep.SetMfc28to31Special, _mfc28SpecialFlow, _mfc29SpecialFlow, _mfc31SpecialFlow, 1); } //等待反应腔压力到达1000 NotifyInfo((int)RoutineStep.Notify1, "Wait pm pressure to 1000 mbar!"); WaitPmPressureUPto((int)RoutineStep.WaitPmPressureUp, 1000, _waitPMPressureUpTimeout); //等待反应腔压力大于1000 SetMfcToDefaultByGroup((int)RoutineStep.SetMfc28to31Default, MfcGroupName.M28toM31, 0); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); return Result.DONE; } public override void Abort() { PMDevice._ioThrottleValve.StopRamp(); PMDevice.SetMfcStopRamp(PMDevice.GetMfcListByGroupName(MfcGroupName.All)); base.Abort(); } } }