297 lines
12 KiB
C#
297 lines
12 KiB
C#
using Aitex.Core.Common;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Mainframe.LLs;
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using Mainframe.LLs.Routines;
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using Mainframe.UnLoads;
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using Mainframe.UnLoads.Routines;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.UnLoad;
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namespace Mainframe.EFEMs.Routines
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{
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public class WaferRobotPickRoutine : EfemBaseRoutine
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{
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/* Pick From Cassette,LoadLock(需要开门),Aligner/Unload(需要开门)
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* 1.判断目标是否有Wafer
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* 2.判断是否需要开门（包括气压等）
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* 3.判断顶针是否上升
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* 4.伸出,吸住
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* 5.ActionDone
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* 6.关门
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*
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*
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* 5.顶针顶起
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6.Wafer机械手伸进来
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7.夹爪松开
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8.顶针下降
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9.wafer机械手吸住
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10.Wafer机械手退出
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*/
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//private LoadLock _loadLock;
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private EfemSlitValveRoutine _efemSlitValveOpenRoutine = new EfemSlitValveRoutine();
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private EfemSlitValveRoutine _efemSlitValveCloseRoutine = new EfemSlitValveRoutine();
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private UnLoadLiftRoutine _unLoadLiftDown = new UnLoadLiftRoutine();
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private UnLoadLiftRoutine _unLoadLiftUp = new UnLoadLiftRoutine();
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private UnLoadClawRoutine _unLoadClaw = new UnLoadClawRoutine();
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private UnLoadClawRoutine _unLoadClawOpen = new UnLoadClawRoutine();
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private LoadLockLiftRoutine _loadLockLiftDown = new LoadLockLiftRoutine();
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private LoadLockLiftRoutine _loadLockLiftUp = new LoadLockLiftRoutine();
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private LoadLockClawRoutine _loadLockClaw = new LoadLockClawRoutine();
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private LoadLockClawRoutine _loadLockClawOpen= new LoadLockClawRoutine();
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private LoadRotationHomeOffsetRoutine _loadRotationHomeRoutine = new LoadRotationHomeOffsetRoutine();
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//private AlignerAlignRoutine _alignRoutine = new AlignerAlignRoutine();
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private ModuleName _source;
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private int _sourceSlot;
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private int _pickTimeout;
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private bool ClampHasWafer = false;
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private bool _isSimulator = false;
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enum RoutineStep
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{
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CheckWaferStatuBeforePick,
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OpenSlowVent,
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OpenSlitValve,
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SetClawOpen,
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SetLiftUp,
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CheckRobotReady,
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SetClawOpen2,
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SetClaw,
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PickComplete,
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SetLiftDown,
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SetLiftDown2,
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TimeDelay1,
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ExtendForPick,
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CloaseSlitValve,
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Pick,
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CloseVacuum,
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SetExtendToDo,
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ClearRobortExtendToDo,
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CheckWaferStatusByRq,
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LoadRotationHome,
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CloseSlowVent
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}
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public WaferRobotPickRoutine()
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{
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Module = ModuleName.EFEM.ToString();
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Name = "WaferRobortPick";
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}
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public void Init(ModuleName source, int sourceSlot)
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{
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_source = source;
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_sourceSlot = sourceSlot;
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0))
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{
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Stop("Can not pick,WaferRobot has wafer");
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return Result.FAIL;
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}
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//Pick之前先,根据Sensor检测是否有盘
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if (!WaferManager.Instance.CheckHasWafer(_source, _sourceSlot))
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{
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EV.PostWarningLog(Module, $"Can not pick, {_source} slot {_sourceSlot} no wafer");
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return Result.FAIL;
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}
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if (_source == ModuleName.Load || _source == ModuleName.LoadLock)
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{
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if (_loadWaferClaw.State == ClawStateEnum.Open && !_llLift.IsDown)//夹爪打开,顶针在低位,说明没Wafer
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{
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EV.PostWarningLog(Module, $"Can not pick, Load Claw is open,Make sure wafer and Tray has Separated!");
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return Result.FAIL;
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}
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}
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if (_source == ModuleName.UnLoad )
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{
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if (_unLoadWaferClaw.State == ClawStateEnum.Open && !_unLoadLift.IsDown)//夹爪打开,顶针在低位,说明没Wafer
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{
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EV.PostWarningLog(Module, $"Can not pick, UnLoad Claw is open,Make sure wafer and Tray has Separated!");
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return Result.FAIL;
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}
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}
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if (WaferRobot.RobotState != RobotStateEnum.Idle)
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{
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EV.PostWarningLog(Module, $"Can not pick, WaferRobot is not Idle");
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return Result.FAIL;
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}
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if (_source == ModuleName.CassAL)
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{
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//检测凸片Sensor和有无Sensor
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if (_cassALWaferConvex.Value)
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{
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EV.PostWarningLog(Module, $"Can not pick,{_source} check wafer convex");
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return Result.FAIL;
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}
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if (!_cassAL6Inch.Value)
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{
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EV.PostWarningLog(Module, $"Can not pick,{_source} sensor check no cassette");
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return Result.FAIL;
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}
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if (WaferManager.Instance.GetWafer(_source, _sourceSlot).Status != WaferStatus.Normal)
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{
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EV.PostWarningLog(Module, $"Can not pick,wafer statu is error!");
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return Result.FAIL;
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}
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}
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else if (_source == ModuleName.CassAR)
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{
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//检测凸片Sensor和有无Sensor
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if (_cassARWaferConvex.Value)
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{
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EV.PostWarningLog(Module, $"Can not pick,{_source} check wafer convex");
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return Result.FAIL;
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}
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if (!_cassAR6Inch.Value)
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{
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EV.PostWarningLog(Module, $"Can not pick,{_source} sensor check no cassette");
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return Result.FAIL;
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}
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if (WaferManager.Instance.GetWafer(_source, _sourceSlot).Status != Aitex.Core.Common.WaferStatus.Normal)
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{
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EV.PostWarningLog(Module, $"Can not pick,wafer statu is error!");
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return Result.FAIL;
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}
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}
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// 如果从LoadLock或UnLoad取Wafer，打开ATM闸板阀前先开始Vent,获取Vent参数
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if (_source == ModuleName.LoadLock || _source == ModuleName.UnLoad)
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{
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if (_source == ModuleName.LoadLock)
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{
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_slowVentTimeout = SC.GetValue<int>("LoadLock.Vent.SlowVentTimeout");
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_ventBasePressure = SC.GetValue<double>("LoadLock.Vent.VentBasePressure");
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}
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else
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{
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_slowVentTimeout = SC.GetValue<int>("UnLoad.Vent.SlowVentTimeout");
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_ventBasePressure = SC.GetValue<double>("UnLoad.Vent.VentBasePressure");
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}
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}
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_isSimulator = SC.GetValue<bool>($"System.IsSimulatorMode");
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_efemSlitValveOpenRoutine.Init(_source, ModuleName.WaferRobot, true);
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_efemSlitValveCloseRoutine.Init(_source, ModuleName.WaferRobot, false);
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_unLoadLiftDown.Init(false);
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_unLoadLiftUp.Init(true);
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_unLoadClaw.Init(true);
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_unLoadClawOpen.Init(false);
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_loadLockLiftDown.Init(false);
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_loadLockLiftUp.Init(true);
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_loadLockClaw.Init(true,true);
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_loadLockClawOpen.Init(true,false);
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_pickTimeout = SC.GetConfigItem($"{ModuleName.WaferRobot}.MotionTimeout").IntValue;
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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if (_source == ModuleName.Aligner && !_isSimulator)
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{
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//关Aligner真空吸
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CloseVacuum((int)RoutineStep.CloseVacuum, 15);
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}
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CheckRobotReady((int)RoutineStep.CheckRobotReady, WaferRobot, _pickTimeout); //判断机械手当前是否空闲
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CheckWaferStatuBeforePick((int)RoutineStep.CheckWaferStatuBeforePick, WaferRobot, 10); //开始前先检查Wafer
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//执行Load Tray 找原点
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if ((_source == ModuleName.Load || _source == ModuleName.LoadLock) && WaferManager.Instance.CheckHasTray(_source, _sourceSlot))
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{
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ExecuteRoutine((int)RoutineStep.LoadRotationHome, _loadRotationHomeRoutine);
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}
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// 如果从LoadLock或UnLoad取Wafer，打开ATM闸板阀前先开始Vent
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if (_source == ModuleName.LoadLock || _source == ModuleName.UnLoad)
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{
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SlowVent((int)RoutineStep.OpenSlowVent, _source, _ventBasePressure, _slowVentTimeout);
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}
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ExecuteRoutine((int)RoutineStep.OpenSlitValve, _efemSlitValveOpenRoutine); //打开闸板阀
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SetWaferRobortExtendToDO((int)RoutineStep.SetExtendToDo, _source, 10); //设置ExtendToDO,用于检测InterLock
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if (_source == ModuleName.UnLoad)
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{
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ExecuteRoutine((int)RoutineStep.SetLiftUp, _unLoadLiftUp); //UnLoad,顶针上升
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}
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else if (_source == ModuleName.LoadLock || _source == ModuleName.Load)
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{
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ExecuteRoutine((int)RoutineStep.SetLiftUp, _loadLockLiftUp); //Load,顶针上升
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}
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ExtendForPick((int)RoutineStep.ExtendForPick, WaferRobot, _source, _sourceSlot, _pickTimeout); //机械手到位
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if(_source == ModuleName.UnLoad)
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{
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ExecuteRoutine((int)RoutineStep.SetClawOpen, _unLoadClawOpen); //UnLoad夹爪松开
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ExecuteRoutine((int)RoutineStep.SetLiftDown, _unLoadLiftDown);
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}
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else if (_source == ModuleName.LoadLock || _source == ModuleName.Load)
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{
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ExecuteRoutine((int)RoutineStep.SetClawOpen, _loadLockClawOpen); //Load夹爪松开
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ExecuteRoutine((int)RoutineStep.SetLiftDown, _loadLockLiftDown);
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}
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Pick((int)RoutineStep.Pick, WaferRobot, _source, _sourceSlot, _pickTimeout); //机械手吸住,收回
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ClearRobortExtendToDO((int)RoutineStep.ClearRobortExtendToDo);
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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ExecuteRoutine((int)RoutineStep.CloaseSlitValve, _efemSlitValveCloseRoutine); //关闭闸板阀
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// 如果从LoadLock或UnLoad取Wafer，关闭ATM闸板阀后结束Vent
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if (_source == ModuleName.LoadLock || _source == ModuleName.UnLoad)
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{
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CloseVentValve((int)RoutineStep.CloseSlowVent, _source);
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}
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException ex)
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{
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LOG.Error(ex.ToString());
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return Result.FAIL;
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}
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Notify($"Finish");
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return Result.DONE;
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}
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public override void Abort()
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{
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WaferRobot.Abort();
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base.Abort();
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}
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}
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}
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