168 lines
3.8 KiB
C#
168 lines
3.8 KiB
C#
using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using MECF.Framework.Common.Schedulers;
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using MECF.Framework.Common.SubstrateTrackings;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.UnLoad
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{
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public class UnLoad : BaseDevice, IDevice, IUnLoad
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{
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public virtual double ChamberPressure { get; }
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public virtual double ForelinePressure { get; }
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public virtual bool EnableLift { get; }
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public const int SlotCount = 1;
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public UnLoad(string module) : base(module, module, module, module)
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{
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}
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public virtual bool Initialize()
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{
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DATA.Subscribe($"{Name}.IsAtm", () => { return CheckAtm(); });
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DATA.Subscribe($"{Name}.IsVacuum", () => { return CheckVacuum(); });
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DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);
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DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure);
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DATA.Subscribe($"{Name}.EnableLift", () => { return EnableLift; });
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return true;
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}
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public virtual bool CheckAtm()
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{
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return false;
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}
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public virtual bool CheckVacuum()
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{
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return false;
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}
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public virtual bool CheckTransferPressure()
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{
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return false;
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}
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public virtual bool CheckIsPumping()
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{
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return false;
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}
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public virtual bool SetFastVentValve(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetSlowVentValve(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetFastPumpValve(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetSlowPumpValve(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual void Monitor()
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{
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}
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public virtual void Terminate()
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{
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}
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public virtual void Reset()
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{
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}
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public virtual bool CheckLidOpen()
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{
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return true;
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}
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public virtual bool CheckLidClose()
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{
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return true;
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}
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public virtual bool SetLift(bool isUp, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool CheckLiftUp()
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{
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return true;
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}
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public virtual bool CheckLiftDown()
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{
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return true;
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}
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public virtual bool CheckTrayClamped()
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{
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return true;
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}
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public virtual bool CheckTrayUnClamped()
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{
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return true;
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}
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public virtual bool SetTrayClamped(bool clamp, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool CheckWaferClamped()
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{
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return true;
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}
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public virtual bool CheckWaferUnClamped()
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{
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return true;
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}
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public virtual bool SetWaferClamped(bool clamp, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool CheckWaferPlaced()
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{
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return true;
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}
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public virtual bool CheckTrayPlaced()
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{
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return true;
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}
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public virtual bool CheckEnableTransfer(EnumTransferType type)
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{
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return false;
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}
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}
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}
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