275 lines
21 KiB
XML
275 lines
21 KiB
XML
<?xml version="1.0" ?>
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<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
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<VersionID Name="v20220628"/>
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<Action do="TM.DO_LoadSlowPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-0">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
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<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
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<Limit di="TM.DI_TMDryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
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<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
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<Limit di="TM.DI_UnloadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-157"/>
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<Limit di="TM.DI_UnloadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-158"/>
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<Limit di="TM.DI_LoadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_LoadFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-1">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
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<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
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<Limit di="TM.DI_TMDryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
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<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
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<Limit di="TM.DI_UnloadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-157"/>
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<Limit di="TM.DI_UnloadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-158"/>
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<Limit di="TM.DI_LoadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_LoadVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-5">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
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<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
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<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_TMSlowPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-2">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
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<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_TMFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-3">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
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<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_TMVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-6">
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_BufferVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-4">
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_UnloadSlowPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-62">
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<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
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<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
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<Limit di="TM.DI_TMDryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
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<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
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<Limit di="TM.DI_LoadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
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<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
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<Limit di="TM.DI_UnloadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-103"/>
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<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
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</Action>
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<Action do="TM.DO_UnloadFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-61">
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<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
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<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
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<Limit di="TM.DI_TMDryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
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<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
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<Limit di="TM.DI_LoadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
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<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
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<Limit di="TM.DI_UnloadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-103"/>
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<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
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</Action>
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<Action do="TM.DO_UnloadVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-7">
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<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
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<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
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<Limit di="TM.DI_UnloadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-157"/>
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<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
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<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
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</Action>
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<Action do="TM.DO_TMCyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-89">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_TMLeakCheckRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-90">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_TMPumpDownRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-91">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_TMServoPressRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-92">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_TMVentUpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-93">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
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<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-44"/>
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<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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</Action>
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<Action do="TM.DO_LoadCyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-94">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
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<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
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<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
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<Limit di="TM.DI_UnloadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-157"/>
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<Limit di="TM.DI_UnloadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-158"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_LoadLeakCheckRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-95">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
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<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
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<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
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<Limit di="TM.DI_UnloadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-157"/>
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<Limit di="TM.DI_UnloadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-158"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_LoadPumpDownRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-96">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
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<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
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<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
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<Limit di="TM.DI_UnloadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-157"/>
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<Limit di="TM.DI_UnloadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-158"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_LoadVentUpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-97">
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<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="TM.DI_LoadLSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
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<Limit di="TM.DI_LoadRSideDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
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<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
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<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
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<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
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</Action>
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<Action do="TM.DO_UnLoadCyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-98">
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<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
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<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
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<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
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<Limit di="TM.DI_LoadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
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<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
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<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
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<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
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</Action>
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<Action do="TM.DO_UnLoadLeakCheckRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-99">
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<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
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<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
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<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
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<Limit di="TM.DI_LoadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
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<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
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<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
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<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
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</Action>
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<Action do="TM.DO_UnLoadPumpDownRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-100">
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<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
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<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
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<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
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<Limit di="TM.DI_LoadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
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<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
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<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
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<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
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</Action>
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<Action do="TM.DO_UnLoadVentUpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-101">
|
|
<Limit di="TM.DI_UnloadStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-2"/>
|
|
<Limit di="TM.DI_UnloadSubStationDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-8"/>
|
|
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="TM.DI_TMToUnloadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-113"/>
|
|
<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
|
|
</Action>
|
|
<Action do="TM.DO_LoadDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-9">
|
|
<Limit do="TM.DO_VacRobotExtenLoadEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-19"/>
|
|
</Action>
|
|
<Action do="TM.DO_UnloadStationDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-11">
|
|
<Limit do="TM.DO_VacRobotExtendUnloadEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-20"/>
|
|
</Action>
|
|
<Action do="TM.DO_RectorADoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-13">
|
|
<Limit do="TM.DO_VacRobotExtendPMAEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-21"/>
|
|
</Action>
|
|
<Action do="TM.DO_RectorBDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-15">
|
|
<Limit do="TM.DO_VacRobotExtendPMBEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-22"/>
|
|
</Action>
|
|
<Action do="TM.DO_BufferStationDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-33">
|
|
<Limit do="TM.DO_VacRobotExtendBufferEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-23"/>
|
|
</Action>
|
|
<Action do="TM.DO_UnloadSubStationDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-31">
|
|
<Limit do="TM.DO_ATMRobotExtendUnloadEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-24"/>
|
|
<Limit di="TM.DI_UnloadStationGateINTK" value="false" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
</Action>
|
|
<Action do="TM.DO_LoadLSideDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-27">
|
|
<Limit do="TM.DO_ATMRobotExtendLoaLSideEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-25"/>
|
|
<Limit di="TM.DI_LoadLeftGateINTK" value="false" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
|
|
</Action>
|
|
<Action do="TM.DO_LoadRSideDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-29">
|
|
<Limit do="TM.DO_ATMRobotExtendLoaRSideEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-26"/>
|
|
<Limit di="TM.DI_LoadRightGateINTK" value="false" tip="" tip.zh-CN="" tip.en-US="DI-34"/>
|
|
</Action>
|
|
<Action do="TM.DO_LoadLSideDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-28">
|
|
<Limit di="TM.DI_LoadPressureATM" value="true" tip="" tip.zh-CN="" tip.en-US="DI-90"/>
|
|
</Action>
|
|
<Action do="TM.DO_LoadRSideDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-30">
|
|
<Limit di="TM.DI_LoadPressureATM" value="true" tip="" tip.zh-CN="" tip.en-US="DI-90"/>
|
|
</Action>
|
|
|
|
<Action do="TM.DO_VacRobotExtenLoadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-19">
|
|
<Limit di="TM.DI_LoadDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-1"/>
|
|
<Limit di="TM.DI_LoadLifterCYDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="TM.DI_LoadTrayCYOpend" value="true" tip="" tip.zh-CN="" tip.en-US="DI-69"/>
|
|
</Action>
|
|
<Action do="TM.DO_VacRobotExtendUnloadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-20">
|
|
<Limit di="TM.DI_UnloadStationDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-3"/>
|
|
<Limit di="TM.DI_UnloadStationLifterCYDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-75"/>
|
|
</Action>
|
|
<Action do="TM.DO_VacRobotExtendPMAEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-21">
|
|
<Limit di="TM.DI_ReactorADoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-5"/>
|
|
</Action>
|
|
<Action do="TM.DO_VacRobotExtendPMBEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-22">
|
|
<Limit di="TM.DI_ReactorBDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
|
|
</Action>
|
|
<Action do="TM.DO_VacRobotExtendBufferEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-23">
|
|
<Limit di="TM.DI_BufferStationDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
|
|
</Action>
|
|
<Action do="TM.DO_ATMRobotExtendUnloadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-24">
|
|
<Limit di="TM.DI_UnloadSubStationDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
|
|
</Action>
|
|
<Action do="TM.DO_ATMRobotExtendLoaLSideEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-25">
|
|
<Limit di="TM.DI_LoadPressureATM" value="true" tip="" tip.zh-CN="" tip.en-US="DI-90"/>
|
|
<Limit di="TM.DI_LoadLSideDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="TM.DI_LoadTrayCYOpend" value="true" tip="" tip.zh-CN="" tip.en-US="DI-69"/>
|
|
</Action>
|
|
<Action do="TM.DO_ATMRobotExtendLoaRSideEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-26">
|
|
<Limit di="TM.DI_LoadPressureATM" value="true" tip="" tip.zh-CN="" tip.en-US="DI-90"/>
|
|
<Limit di="TM.DI_LoadRSideDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="TM.DI_LoadLifterCYDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="TM.DI_LoadTrayCYOpend" value="true" tip="" tip.zh-CN="" tip.en-US="DI-69"/>
|
|
</Action>
|
|
</Interlock>
|