178 lines
5.7 KiB
C#
178 lines
5.7 KiB
C#
using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Mainframe.Devices;
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using MECF.Framework.Common.Equipment;
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namespace Mainframe.LLs.Routines
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{
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public class LoadLockPurgeRoutine : LoadLockBaseRoutine
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{
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enum RoutineStep
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{
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SlowPump,
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FastPump,
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PumpDelay,
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CloseFastValve,
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CloseSlowValve,
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SlowVent,
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FastVent,
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VentDelay,
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CloseFastVentValve,
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CloseSlowVentValve,
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StartLoop,
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LoopPump,
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LoopVent,
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StopLoop,
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TimeDelay1,
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TimeDelay2
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}
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private int _purgeCount;
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private int _routineTimeOut;
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private double _pumpSwitchPressure;
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private double _pumpBasePressure;
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private int _pumpDelayTime;
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private int _pumpTimeOut;
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private double _ventBasePressure;
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private int _ventDelayTime;
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private int _ventTimeOut;
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private IoInterLock _tmIoInterLock;
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private Stopwatch _swTimer = new Stopwatch();
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public LoadLockPurgeRoutine(ModuleName module)
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{
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Module = module.ToString();
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Name = "Purge";
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_tmIoInterLock = DEVICE.GetDevice<IoInterLock>("TM.IoInterLock");
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}
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public void Init()
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{
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (objs.Length ==2 && int.TryParse(objs[0].ToString(), out int purgeCount)&& int.TryParse(objs[1].ToString(), out int pumpDelayTime))
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{
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_purgeCount = purgeCount;
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_pumpDelayTime = pumpDelayTime;
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}
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else
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{
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_purgeCount = SC.GetValue<int>("LoadLock.Purge.CyclePurgeCount");
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_pumpDelayTime = SC.GetValue<int>("LoadLock.Purge.PumpDelayTime");
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}
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_routineTimeOut = SC.GetValue<int>("LoadLock.Purge.RoutineTimeOut");
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_pumpSwitchPressure = SC.GetValue<double>("LoadLock.Pump.SlowFastPumpSwitchPressure");
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_pumpBasePressure = SC.GetValue<double>("LoadLock.Purge.PumpBasePressure");
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_pumpTimeOut = SC.GetValue<int>("LoadLock.Purge.PumpTimeOut");
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_ventBasePressure = SC.GetValue<double>("LoadLock.Purge.VentBasePressure");
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_ventDelayTime = SC.GetValue<int>("LoadLock.Purge.VentDelayTime");
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_ventTimeOut = _pumpTimeOut;
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if (!LoadLockDevice.CheckLidClose())
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{
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EV.PostAlarmLog(Module, $"can not purge, lid is open");
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return Result.FAIL;
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}
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if (!TMDevice.SetFastPumpValve(false, out string reason))
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{
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EV.PostAlarmLog(Module, $"can not purge, TM fast pump value can not close");
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return Result.FAIL;
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}
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if (!TMDevice.CheckSlitValveClose(ModuleHelper.Converter(LoadLockDevice.Module)))
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{
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EV.PostAlarmLog(Module, $"Can not purge, slit valve is open");
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return Result.FAIL;
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}
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if (!TMDevice.SetTmToLLVent(false, out _))
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{
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EV.PostAlarmLog(Module, $"can not vent,can not close v85!");
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}
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if (!_tmIoInterLock.SetLLPurgeRoutineRunning(true, out reason))
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{
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EV.PostAlarmLog(Module, $"can not purge,{reason}");
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return Result.FAIL;
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}
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bool isAtmMode = SC.GetValue<bool>("System.IsATMMode");
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if (isAtmMode)
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{
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return Result.DONE;
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}
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_swTimer.Restart();
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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if (_purgeCount > 0)
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{
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Loop((int)RoutineStep.StartLoop, _purgeCount);
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SlowPump((int)RoutineStep.SlowPump, _pumpSwitchPressure, _pumpTimeOut);
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FastPump((int)RoutineStep.FastPump, _pumpBasePressure, _pumpTimeOut);
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TimeDelay((int)RoutineStep.PumpDelay, _pumpDelayTime);
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CloseFastPumpValve((int)RoutineStep.CloseFastValve);
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CloseSlowPumpValve((int)RoutineStep.CloseSlowValve);
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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SlowVent((int)RoutineStep.SlowVent, _ventBasePressure, _ventTimeOut);
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CloseVentValve((int)RoutineStep.CloseSlowVentValve);
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TimeDelay((int)RoutineStep.VentDelay, _ventDelayTime);
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EndLoop((int)RoutineStep.StopLoop);
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}
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_tmIoInterLock.DoLLCyclePurgeRoutineRunning = false;
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return Result.DONE;
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}
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public override void Abort()
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{
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_tmIoInterLock.DoLLCyclePurgeRoutineRunning = false;
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base.Abort();
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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}
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}
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