122 lines
3.3 KiB
C#
122 lines
3.3 KiB
C#
using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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namespace Mainframe.TMs.Routines
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{
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public class TMServoRoutine : TMBaseRoutine
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{
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enum RoutineStep
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{
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ChamberBalance,
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OpenTMToLLVent,
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CheckPressureCondition,
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SetSlitValve,
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LLRoutine,
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Delay,
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Delay1,
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CloseTMToLLVent,
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PumpDownToBase,
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}
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private TMPressureBalanceRoutine _balanceRoutine;
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private TMPressureBalancePidRoutine _pidBalanceRoutine;
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private SicTM _tm;
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private bool _needPressureBalance;
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private bool _userPidBalance;
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public TMServoRoutine()
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{
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Module = ModuleName.TM.ToString();
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Name = "ServoPressure";
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_tm = DEVICE.GetDevice<SicTM>($"{ ModuleName.System.ToString()}.{ ModuleName.TM.ToString()}");
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_balanceRoutine = new TMPressureBalanceRoutine();
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_pidBalanceRoutine = new TMPressureBalancePidRoutine();
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_balanceRoutine.Init(ModuleName.PM1);
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_pidBalanceRoutine.Init(ModuleName.PM1);
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_needPressureBalance = SC.GetValue<bool>("TM.NeedPressureBalance");
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_userPidBalance = SC.GetValue<bool>("TM.PressureBalanceUsePid");
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ModuleName[] modules = new ModuleName[] { ModuleName.LoadLock, ModuleName.PM1,ModuleName.Buffer, ModuleName.UnLoad};
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foreach (var moduleName in modules)
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{
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if (!_tm.CheckSlitValveClose(moduleName))
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{
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EV.PostAlarmLog(Module, $"Can not pump, {moduleName} slit valve not closed");
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return Result.FAIL;
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}
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}
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string reason;
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if (!_tm.SetFastPumpValve(false, out reason) || !_tm.SetFastVentValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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if (SC.GetValue<bool>("System.IsATMMode"))
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{
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return Result.DONE;
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}
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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if (_userPidBalance)
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{
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ExecuteRoutine((int)RoutineStep.ChamberBalance, _pidBalanceRoutine);
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}
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else
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{
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ExecuteRoutine((int)RoutineStep.ChamberBalance, _balanceRoutine);
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}
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify("Finished");
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return Result.DONE;
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}
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public override void Abort()
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{
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if (_userPidBalance)
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{
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_pidBalanceRoutine.Abort();
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}
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else
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{
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_balanceRoutine.Abort();
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}
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}
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}
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}
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