19 lines
433 B
C#
19 lines
433 B
C#
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using MECF.Framework.Common.Equipment;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.EFEM
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{
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public interface IEFEM
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{
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double ChamberPressure { get; }
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bool CheckSlitValveOpen(ModuleName module, ModuleName robot);
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bool CheckSlitValveClose(ModuleName module, ModuleName robot);
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bool SetSlitValve(ModuleName module, ModuleName robot, bool isOpen, out string reason);
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}
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}
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