2255 lines
110 KiB
XML
2255 lines
110 KiB
XML
<UserControl
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x:Class="SicUI.Client.Models.Platform.TM.EFEMView"
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xmlns="http://schemas.microsoft.com/winfx/2006/xaml/presentation"
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xmlns:x="http://schemas.microsoft.com/winfx/2006/xaml"
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xmlns:cal="http://www.caliburn.org"
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xmlns:controls="clr-namespace:SicUI.Controls.Mainframe"
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xmlns:ctrl="http://OpenSEMI.Ctrlib.com/presentation"
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xmlns:d="http://schemas.microsoft.com/expression/blend/2008"
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xmlns:deviceControl="clr-namespace:Aitex.Core.UI.DeviceControl;assembly=MECF.Framework.UI.Core"
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xmlns:i="http://schemas.microsoft.com/expression/2010/interactivity"
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xmlns:mc="http://schemas.openxmlformats.org/markup-compatibility/2006"
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xmlns:unitControls="clr-namespace:MECF.Framework.UI.Client.Ctrlib.UnitControls;assembly=MECF.Framework.UI.Client"
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d:DesignHeight="800"
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d:DesignWidth="1980"
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mc:Ignorable="d">
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<ScrollViewer
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HorizontalScrollBarVisibility="Auto"
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IsEnabled="{Binding IsPermission}"
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VerticalScrollBarVisibility="Auto">
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<Grid>
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<Grid.ColumnDefinitions>
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<ColumnDefinition Width="1*" />
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<ColumnDefinition Width="3.5*" />
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<ColumnDefinition Width="480" />
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</Grid.ColumnDefinitions>
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<Grid.RowDefinitions>
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<RowDefinition Height="520" />
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<RowDefinition Height="240" />
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</Grid.RowDefinitions>
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<TabControl
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Grid.RowSpan="2"
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Grid.Column="0"
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Margin="20,20,0,-20"
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HorizontalAlignment="Stretch"
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VerticalAlignment="Stretch"
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FontSize="12">
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<TabItem Header="Wafer Cassette">
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<StackPanel
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Margin="10,5"
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HorizontalAlignment="Left"
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VerticalAlignment="Top"
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Orientation="Horizontal">
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<StackPanel>
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<unitControls:FOUPFrontView
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Margin="0,0,0,0"
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UnitData="{Binding CassAL}"
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Visibility="{Binding IsLP1Installed, Converter={StaticResource BoolVisibilityConverter}}" />
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<StackPanel Orientation="Horizontal">
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<!--<Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1" Background="{DynamicResource Table_BG_Content}" Padding="1">-->
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<TextBox
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x:Name="TxtCassAL1"
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Width="50"
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Margin="5,0,0,0"
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HorizontalAlignment="Center"
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text=""
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TextWrapping="Wrap" />
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<!--</Border>-->
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<Label
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Width="20"
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Height="25"
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HorizontalAlignment="Center"
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VerticalAlignment="Center"
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Content="--"
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FontSize="13"
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IsEnabled="True" />
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<!--<Border BorderBrush="{DynamicResource Table_BD}" Height="25" BorderThickness="1" Background="{DynamicResource Table_BG_Content}" Padding="1" >-->
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<TextBox
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x:Name="TxtCassAL2"
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Width="50"
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text=""
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TextWrapping="Wrap" />
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<!--</Border>-->
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</StackPanel>
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<StackPanel Orientation="Horizontal">
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<Button
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Width="62"
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Height="24"
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Margin="1,2"
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Content="Create"
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FontSize="12">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="CreateWafer">
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<cal:Parameter Value="CassAL" />
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<cal:Parameter Value="{Binding ElementName=TxtCassAL1, Path=Text}" />
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<cal:Parameter Value="{Binding ElementName=TxtCassAL2, Path=Text}" />
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</cal:ActionMessage>
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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<Button
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Width="62"
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Height="24"
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Margin="0,2"
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Content="Delete"
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FontSize="12">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="DeleteWafer">
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<cal:Parameter Value="CassAL" />
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<cal:Parameter Value="{Binding ElementName=TxtCassAL1, Path=Text}" />
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<cal:Parameter Value="{Binding ElementName=TxtCassAL2, Path=Text}" />
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</cal:ActionMessage>
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</StackPanel>
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</StackPanel>
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<StackPanel Margin="5,0,0,0">
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<unitControls:FOUPFrontView
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Margin="0,0,0,0"
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UnitData="{Binding CassAR}"
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Visibility="{Binding IsLP1Installed, Converter={StaticResource BoolVisibilityConverter}}" />
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<StackPanel Orientation="Horizontal">
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<!--<Border BorderBrush="{DynamicResource Table_BD}" Height="25" BorderThickness="1" Background="{DynamicResource Table_BG_Content}" Padding="1" >-->
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<TextBox
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x:Name="TxtCassAR1"
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Width="50"
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Margin="5,0"
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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TextWrapping="Wrap" />
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<!--</Border>-->
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<Label
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Width="20"
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Height="25"
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HorizontalAlignment="Center"
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VerticalAlignment="Center"
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Content="--"
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FontSize="13"
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IsEnabled="True" />
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<!--<Border BorderBrush="{DynamicResource Table_BD}" Height="25" BorderThickness="1" Background="{DynamicResource Table_BG_Content}" Padding="1" >-->
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<TextBox
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x:Name="TxtCassAR2"
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Width="50"
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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TextWrapping="Wrap" />
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<!--</Border>-->
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</StackPanel>
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<StackPanel Orientation="Horizontal">
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<Button
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Width="62"
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Height="24"
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Margin="1,2"
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Content="Create"
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FontSize="12">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="CreateWafer">
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<cal:Parameter Value="CassAR" />
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<cal:Parameter Value="{Binding ElementName=TxtCassAR1, Path=Text}" />
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<cal:Parameter Value="{Binding ElementName=TxtCassAR2, Path=Text}" />
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</cal:ActionMessage>
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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<Button
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Width="62"
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Height="24"
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Margin="0,2"
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Content="Delete"
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FontSize="12">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="DeleteWafer">
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<cal:Parameter Value="CassAR" />
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<cal:Parameter Value="{Binding ElementName=TxtCassAR1, Path=Text}" />
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<cal:Parameter Value="{Binding ElementName=TxtCassAR2, Path=Text}" />
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</cal:ActionMessage>
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</StackPanel>
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</StackPanel>
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</StackPanel>
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</TabItem>
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<!--<TabItem Header="Tray Cassette">
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<unitControls:FOUPFrontView UnitData="{Binding CassBL}" Visibility="{Binding IsLP1Installed, Converter={StaticResource BoolVisibilityConverter}}" Margin="0,0,0,0"></unitControls:FOUPFrontView>
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</TabItem>-->
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</TabControl>
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<!-- 机械手操作Panel -->
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<StackPanel
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Grid.Row="1"
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Grid.Column="1"
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Height="230"
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HorizontalAlignment="Left"
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Orientation="Horizontal">
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<Grid Margin="20,10">
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<Grid.ColumnDefinitions>
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<ColumnDefinition Width="80" />
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<ColumnDefinition Width="100" />
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<ColumnDefinition Width="*" />
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</Grid.ColumnDefinitions>
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<Grid.RowDefinitions>
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<RowDefinition Height="24" />
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<RowDefinition Height="32" />
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<RowDefinition Height="32" />
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<RowDefinition Height="32" />
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<RowDefinition Height="32" />
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<RowDefinition Height="32" />
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</Grid.RowDefinitions>
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<Label
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Grid.Row="0"
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Grid.ColumnSpan="3"
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HorizontalContentAlignment="Center"
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VerticalContentAlignment="Center"
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Content="WaferRobot"
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Style="{DynamicResource Table_TitleStyle}" />
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<Border
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Grid.Row="1"
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Padding="5,1,0,1"
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Background="{DynamicResource Table_BG_Title}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<TextBlock
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text="Status"
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TextWrapping="Wrap" />
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</Border>
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<Border
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Grid.Row="1"
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Grid.Column="1"
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Padding="5,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="0,0,0,1">
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<TextBlock
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text="{Binding WaferRobotState}"
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TextAlignment="Center"
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TextWrapping="Wrap" />
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</Border>
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<Border
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Grid.Row="1"
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Grid.Column="2"
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Padding="5,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<StackPanel
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Margin="0,0,10,0"
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HorizontalAlignment="Left"
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Orientation="Horizontal">
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<Button
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Width="90"
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Height="24"
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Margin="4,0,0,0"
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Content="RESP"
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IsEnabled="{Binding IsTMEnableManualOperation}"
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Visibility="Collapsed">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="WaferRobotRESP" />
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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<Button
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Width="95"
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Height="24"
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Margin="4,0,0,0"
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Content="STAT"
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IsEnabled="{Binding IsTMEnableManualOperation}">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="WaferRobotSTAT" />
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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<Button
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Width="95"
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Height="24"
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Margin="4,0,0,0"
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Content="SVON"
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IsEnabled="{Binding IsTMEnableManualOperation}">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="WaferRobotSVON" />
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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<Button
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Width="95"
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Height="24"
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Margin="4,3,0,3"
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Content="Home"
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IsEnabled="{Binding IsTMEnableManualOperation}">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="WaferRobotHome" />
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</StackPanel>
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</Border>
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<Border
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Grid.Row="2"
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Padding="5,1,0,1"
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Background="{DynamicResource Table_BG_Title}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<TextBlock
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text="Module"
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TextWrapping="Wrap" />
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</Border>
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<Border
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Grid.Row="2"
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Grid.Column="1"
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Padding="5,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="0,0,0,1">
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<ComboBox
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Width="90"
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Height="25"
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ItemsSource="{Binding WaferModules}"
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SelectedItem="{Binding WaferSelectedModule}" />
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</Border>
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<Border
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Grid.Row="2"
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Grid.Column="2"
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Padding="5,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<StackPanel HorizontalAlignment="Left" Orientation="Horizontal">
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<Button
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Width="88"
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Height="24"
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Margin="5,0,0,0"
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Content="Extend"
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IsEnabled="{Binding IsTMEnableManualOperation}"
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Visibility="Collapsed">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="WaferRobotExtend" />
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</StackPanel>
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</Border>
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<Border
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Grid.Row="3"
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Padding="5,1,0,1"
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Background="{DynamicResource Table_BG_Title}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<TextBlock
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Margin="0,7.6"
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text="Slot"
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TextWrapping="Wrap" />
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</Border>
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<Border
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Grid.Row="3"
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Grid.Column="1"
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Padding="5,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="0,0,0,1">
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<ComboBox
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Width="90"
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Height="25"
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Margin="2.5,2"
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ItemsSource="{Binding WaferSlots}"
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SelectedItem="{Binding WaferSelectedSlot}" />
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</Border>
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<Border
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Grid.Row="2"
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Grid.Column="2"
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Padding="5,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<StackPanel HorizontalAlignment="Left" Orientation="Horizontal">
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<Button
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Width="95"
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Height="24"
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Margin="5,0,0,0"
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Content="Map"
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IsEnabled="{Binding WaferRobotEnable}">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="WaferRobotMap" />
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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<Button
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Width="95"
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Height="24"
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Margin="5,0,0,0"
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Content="RSR"
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IsEnabled="{Binding WaferRobotEnable}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="WaferRobotRSR" />
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</i:EventTrigger>
|
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</i:Interaction.Triggers>
|
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</Button>
|
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<Button
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Width="95"
|
|
Height="24"
|
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Margin="5,0,0,0"
|
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Content="Abort">
|
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<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="WaferRobotAbort" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<!--<TextBlock Text="Step" TextWrapping="Wrap" Foreground="{DynamicResource FG_Black}" FontSize="12" FontFamily="Arial" VerticalAlignment="Center" Margin="0,7.6,0,7.4" />-->
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|
</Border>
|
|
<Border
|
|
Grid.Row="4"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1" />
|
|
|
|
<Border
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|
Grid.Row="4"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel
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|
Margin="0,0,5,0"
|
|
HorizontalAlignment="Left"
|
|
Orientation="Horizontal">
|
|
<Button
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|
Width="70"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="Get1"
|
|
IsEnabled="{Binding WaferRobotEnable}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="WaferRobotGetSP">
|
|
<cal:Parameter Value="1" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
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Width="70"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="Get2"
|
|
IsEnabled="{Binding WaferRobotEnable}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="WaferRobotGetSP">
|
|
<cal:Parameter Value="2" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
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|
Width="70"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="Get3"
|
|
IsEnabled="{Binding WaferRobotEnable}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="WaferRobotGetSP">
|
|
<cal:Parameter Value="3" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="70"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="Get4"
|
|
IsEnabled="{Binding WaferRobotEnable}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="WaferRobotGetSP">
|
|
<cal:Parameter Value="4" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="70"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="Put1"
|
|
IsEnabled="{Binding WaferRobotEnable}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="WaferRobotPutSP">
|
|
<cal:Parameter Value="1" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="70"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="Put2"
|
|
IsEnabled="{Binding WaferRobotEnable}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="WaferRobotPutSP">
|
|
<cal:Parameter Value="2" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="70"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="Put3"
|
|
IsEnabled="{Binding WaferRobotEnable}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="WaferRobotPutSP">
|
|
<cal:Parameter Value="3" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="70"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="Put4"
|
|
IsEnabled="{Binding WaferRobotEnable}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="WaferRobotPutSP">
|
|
<cal:Parameter Value="4" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="5"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1" />
|
|
<Border
|
|
Grid.Row="5"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1" />
|
|
<Border
|
|
Grid.Row="5"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel HorizontalAlignment="Left" Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="InPutA"
|
|
IsEnabled="{Binding WaferRobotEnable}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="WaferRobotInPutA" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="OutPA"
|
|
IsEnabled="{Binding WaferRobotEnable}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="WaferRobotOutPA" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="ERR"
|
|
IsEnabled="{Binding WaferRobotEnable}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="WaferRobotERR" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
</Grid>
|
|
|
|
<Grid Margin="20,10,0,0">
|
|
<Grid.ColumnDefinitions>
|
|
<ColumnDefinition Width="80" />
|
|
<ColumnDefinition Width="100" />
|
|
<ColumnDefinition Width="*" />
|
|
</Grid.ColumnDefinitions>
|
|
<Grid.RowDefinitions>
|
|
<RowDefinition Height="24" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
</Grid.RowDefinitions>
|
|
<Label
|
|
Grid.Row="0"
|
|
Grid.ColumnSpan="3"
|
|
HorizontalContentAlignment="Center"
|
|
VerticalContentAlignment="Center"
|
|
Content="TrayRobot"
|
|
Style="{DynamicResource Table_TitleStyle}" />
|
|
|
|
<Border
|
|
Grid.Row="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Status"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding TrayRobotState}"
|
|
TextAlignment="Center"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel
|
|
Margin="0,0,10,0"
|
|
HorizontalAlignment="Left"
|
|
Orientation="Horizontal">
|
|
<Button
|
|
Width="90"
|
|
Height="24"
|
|
Margin="4,0,0,0"
|
|
Content="RESP"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}"
|
|
Visibility="Collapsed">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotRESP" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="90"
|
|
Height="24"
|
|
Margin="4,0,0,0"
|
|
Content="STAT"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotSTAT" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="90"
|
|
Height="24"
|
|
Margin="4,0,0,0"
|
|
Content="SVON"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotSVON" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
<Button
|
|
Width="90"
|
|
Height="24"
|
|
Margin="4,0,0,0"
|
|
Content="Home"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotHome" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Module"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<ComboBox
|
|
Width="90"
|
|
Height="25"
|
|
ItemsSource="{Binding TrayModules}"
|
|
SelectedItem="{Binding TraySelectedModule}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel HorizontalAlignment="Left" Orientation="Horizontal">
|
|
<Button
|
|
Width="88"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="Pick"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotPick" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="88"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="Place"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotPlace" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="88"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="Position"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}"
|
|
Visibility="Collapsed">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotExtend" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
Margin="0,7.6"
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Slot"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<ComboBox
|
|
Width="90"
|
|
Height="25"
|
|
Margin="2.5,2"
|
|
ItemsSource="{Binding TraySlots}"
|
|
SelectedItem="{Binding TraySelectedSlot}" />
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel HorizontalAlignment="Left" Orientation="Horizontal">
|
|
<Button
|
|
Width="88"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="Map"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotMap" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="88"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="RSR"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotRSR" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="88"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="Abort"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotAbort" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="5"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1" />
|
|
<Border
|
|
Grid.Row="5"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1" />
|
|
<Border
|
|
Grid.Row="5"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel HorizontalAlignment="Left" Orientation="Horizontal">
|
|
<Button
|
|
Width="88"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="InPutA"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotInPutA" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="88"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
Content="ERR"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="TrayRobotERR" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
</StackPanel>
|
|
</Border>
|
|
</Grid>
|
|
</StackPanel>
|
|
|
|
<!-- 显示EFEM控件 -->
|
|
<Grid Grid.Column="1">
|
|
<controls:EFEMControl Margin="50,140,0,0" />
|
|
<StackPanel Margin="880,20,0,0">
|
|
<TabControl
|
|
HorizontalAlignment="Left"
|
|
VerticalAlignment="Stretch"
|
|
FontSize="12">
|
|
<TabItem Header="Tray Cassette">
|
|
<unitControls:FOUPFrontView UnitData="{Binding CassBL}" />
|
|
</TabItem>
|
|
</TabControl>
|
|
</StackPanel>
|
|
|
|
<Canvas>
|
|
<TextBlock
|
|
Canvas.Left="228"
|
|
Canvas.Top="156"
|
|
FontFamily="Arial"
|
|
FontSize="18"
|
|
Text="UnLoad"
|
|
Visibility="{Binding IsBufferInstalled, Converter={StaticResource BoolVisibilityConverter}}" />
|
|
<TextBlock
|
|
Canvas.Left="77"
|
|
Canvas.Top="326"
|
|
FontFamily="Arial"
|
|
FontSize="18"
|
|
Text="Aliger"
|
|
Visibility="{Binding IsBufferInstalled, Converter={StaticResource BoolVisibilityConverter}}" />
|
|
<TextBlock
|
|
Canvas.Left="414"
|
|
Canvas.Top="394"
|
|
FontFamily="Arial"
|
|
FontSize="18"
|
|
Text="Load"
|
|
Visibility="{Binding IsBufferInstalled, Converter={StaticResource BoolVisibilityConverter}}" />
|
|
<TextBlock
|
|
Canvas.Left="388"
|
|
Canvas.Top="485"
|
|
FontFamily="Arial"
|
|
FontSize="18"
|
|
Text="CassAR"
|
|
Visibility="{Binding IsBufferInstalled, Converter={StaticResource BoolVisibilityConverter}}" />
|
|
<TextBlock
|
|
Canvas.Left="164"
|
|
Canvas.Top="484"
|
|
FontFamily="Arial"
|
|
FontSize="18"
|
|
Text="CassAL"
|
|
Visibility="{Binding IsBufferInstalled, Converter={StaticResource BoolVisibilityConverter}}" />
|
|
<TextBlock
|
|
Canvas.Left="590"
|
|
Canvas.Top="486"
|
|
FontFamily="Arial"
|
|
FontSize="18"
|
|
Text="CassBL"
|
|
Visibility="{Binding IsBufferInstalled, Converter={StaticResource BoolVisibilityConverter}}" />
|
|
</Canvas>
|
|
</Grid>
|
|
|
|
<!-- 右侧操作Panel列表 -->
|
|
<StackPanel
|
|
Grid.RowSpan="2"
|
|
Grid.Column="2"
|
|
HorizontalAlignment="Left"
|
|
VerticalAlignment="Top">
|
|
<Grid Margin="0,20,0,10">
|
|
<Grid.ColumnDefinitions>
|
|
<ColumnDefinition Width="80" />
|
|
<ColumnDefinition Width="40" />
|
|
<ColumnDefinition Width="130" />
|
|
<ColumnDefinition Width="40" />
|
|
<ColumnDefinition Width="130" />
|
|
</Grid.ColumnDefinitions>
|
|
<Grid.RowDefinitions>
|
|
<RowDefinition Height="24" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
</Grid.RowDefinitions>
|
|
<Label
|
|
Grid.Row="0"
|
|
Grid.ColumnSpan="5"
|
|
HorizontalContentAlignment="Center"
|
|
VerticalContentAlignment="Center"
|
|
Content="UnLoad"
|
|
Style="{DynamicResource Table_TitleStyle}" />
|
|
<Border
|
|
Grid.Row="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Pressure"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="1"
|
|
Grid.ColumnSpan="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,1,1">
|
|
<Grid>
|
|
<TextBlock
|
|
Margin="35"
|
|
HorizontalAlignment="Left"
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding UnLoadPressure, StringFormat=\{0:F1\}}"
|
|
TextWrapping="Wrap" />
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="4,0,40,0"
|
|
HorizontalAlignment="Right"
|
|
Content="Separate"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="UnLoadSeparate" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Grid>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Lift"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsULLiftUp}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="4,0,0,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Up"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="UnLoadLiftUp" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsULLiftDown}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="4,0,0,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Down"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="UnLoadLiftDown" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="WaferClaw"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsULWaferOpen}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Open"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="UnLoadWaferOpen" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsULWaferClamp}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Clamp"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="UnLoadWaferClamped" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
</Grid>
|
|
|
|
<Grid Margin="0,10">
|
|
<Grid.ColumnDefinitions>
|
|
<ColumnDefinition Width="80" />
|
|
<ColumnDefinition Width="40" />
|
|
<ColumnDefinition Width="130" />
|
|
<ColumnDefinition Width="40" />
|
|
<ColumnDefinition Width="130" />
|
|
</Grid.ColumnDefinitions>
|
|
<Grid.RowDefinitions>
|
|
<RowDefinition Height="24" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
</Grid.RowDefinitions>
|
|
<Label
|
|
Grid.Row="0"
|
|
Grid.ColumnSpan="5"
|
|
HorizontalContentAlignment="Center"
|
|
VerticalContentAlignment="Center"
|
|
Content="Load"
|
|
Style="{DynamicResource Table_TitleStyle}" />
|
|
<Border
|
|
Grid.Row="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Pressure"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="1"
|
|
Grid.ColumnSpan="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,1,1">
|
|
<Grid>
|
|
<TextBlock
|
|
Margin="35"
|
|
HorizontalAlignment="Left"
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding LoadPressure, StringFormat=\{0:F1\}}"
|
|
TextWrapping="Wrap" />
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="4,0,40,0"
|
|
HorizontalAlignment="Right"
|
|
Content="Group"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LoadGroup" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Grid>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Lift"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsLLLiftUp}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="4,0,0,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Up"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LLLiftUp" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsLLLiftDown}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="4,0,0,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Down"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LLLiftDown" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="WaferClaw"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsLLWaferOpen}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Open"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LLWaferOpen" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsLLWaferClamp}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Clamp"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LLWaferClamped" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="TrayClaw"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="4"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsLLTrayOpen}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="4"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Open"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LLTrayOpen" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="4"
|
|
Grid.Column="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsLLTrayClamp}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="4"
|
|
Grid.Column="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="24"
|
|
Margin="5,0,0,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Clamp"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="LLTrayClamped" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
</Grid>
|
|
|
|
<Grid Margin="0,10">
|
|
<Grid.ColumnDefinitions>
|
|
<ColumnDefinition Width="80" />
|
|
<ColumnDefinition Width="40" />
|
|
<ColumnDefinition Width="130" />
|
|
<ColumnDefinition Width="40" />
|
|
<ColumnDefinition Width="130" />
|
|
</Grid.ColumnDefinitions>
|
|
<Grid.RowDefinitions>
|
|
<RowDefinition Height="24" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
</Grid.RowDefinitions>
|
|
<Label
|
|
Grid.Row="0"
|
|
Grid.ColumnSpan="5"
|
|
HorizontalContentAlignment="Center"
|
|
VerticalContentAlignment="Center"
|
|
Content="SlitValve"
|
|
Style="{DynamicResource Table_TitleStyle}" />
|
|
|
|
<Border
|
|
Grid.Row="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="UnLoad"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsEfemUnLoadDoorOpen}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="5,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Open"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="OpenSlitValve">
|
|
<cal:Parameter Value="UnLoad" />
|
|
<cal:Parameter Value="WaferRobot" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsEfemUnLoadDoorClose}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="5,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Close"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="CloseSlitValve">
|
|
<cal:Parameter Value="UnLoad" />
|
|
<cal:Parameter Value="WaferRobot" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="LoadLeft"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsEfemLLLeftDoorOpen}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="5,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Open"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="OpenSlitValve">
|
|
<cal:Parameter Value="LoadLock" />
|
|
<cal:Parameter Value="WaferRobot" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsEfemLLLeftDoorClose}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="5,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Close"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="CloseSlitValve">
|
|
<cal:Parameter Value="LoadLock" />
|
|
<cal:Parameter Value="WaferRobot" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
Margin="0,7.6"
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="LoadRight"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="1"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsEfemLLRightDoorOpen}" />
|
|
</Border>
|
|
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="2"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="5,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Open"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="OpenSlitValve">
|
|
<cal:Parameter Value="LoadLock" />
|
|
<cal:Parameter Value="TrayRobot" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="3"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="0,0,0,1">
|
|
<deviceControl:AITSensor
|
|
Margin="3,0"
|
|
GreenColor="True"
|
|
LightOnValue="{Binding IsEfemLLRightDoorClose}" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="4"
|
|
Padding="5,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="5,0"
|
|
HorizontalAlignment="Left"
|
|
Content="Close"
|
|
IsEnabled="{Binding IsTMEnableManualOperation}">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="CloseSlitValve">
|
|
<cal:Parameter Value="LoadLock" />
|
|
<cal:Parameter Value="TrayRobot" />
|
|
</cal:ActionMessage>
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</Border>
|
|
</Grid>
|
|
|
|
<Grid Width="420" Margin="0,10">
|
|
<Grid.ColumnDefinitions>
|
|
<ColumnDefinition Width="80" />
|
|
<ColumnDefinition Width="*" />
|
|
<ColumnDefinition Width="100" />
|
|
<ColumnDefinition Width="100" />
|
|
</Grid.ColumnDefinitions>
|
|
<Grid.RowDefinitions>
|
|
<RowDefinition Height="24" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
<RowDefinition Height="32" />
|
|
</Grid.RowDefinitions>
|
|
<!-- Row 1 -->
|
|
<Label
|
|
Grid.Row="0"
|
|
Grid.ColumnSpan="4"
|
|
HorizontalContentAlignment="Center"
|
|
VerticalContentAlignment="Center"
|
|
Content="Aligner"
|
|
Style="{DynamicResource Table_TitleStyle}" />
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.RowSpan="2"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Title}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="Status"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.RowSpan="2"
|
|
Grid.Column="1"
|
|
Padding="5,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<TextBlock
|
|
HorizontalAlignment="Center"
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding AlignerStatus}"
|
|
TextWrapping="Wrap" />
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="2"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Home">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="AlignerHomeRoutine" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="1"
|
|
Grid.Column="3"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Abort"
|
|
ToolTip="Abort the motions in queue.">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="AlignerAbortRoutine" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
<!-- Row 2 -->
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="2"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<TextBlock
|
|
HorizontalAlignment="Center"
|
|
VerticalAlignment="Center"
|
|
FontFamily="Arial"
|
|
FontSize="12"
|
|
Foreground="{DynamicResource FG_Black}"
|
|
Text="{Binding AlignerHaveWafer}"
|
|
TextWrapping="Wrap" />
|
|
|
|
</StackPanel>
|
|
</Border>
|
|
<Border
|
|
Grid.Row="2"
|
|
Grid.Column="3"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="SME">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_SME" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
<!-- Row 3 -->
|
|
<Border
|
|
Grid.Row="3"
|
|
Grid.Column="0"
|
|
Grid.ColumnSpan="4"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="HOM"
|
|
IsEnabled="{Binding IsAlignerAbortEnable}"
|
|
ToolTip="Go back to HOME station.">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_HOM" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="MTM"
|
|
IsEnabled="{Binding IsAlignerAbortEnable}"
|
|
ToolTip="Move to the center of measurement.">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_MTM" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="DOC"
|
|
IsEnabled="{Binding IsAlignerAbortEnable}"
|
|
ToolTip="Check the wafer's existence.">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_DOC" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="Abort"
|
|
ToolTip="Abort the motions in queue.">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_Abort" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
<!-- Row 4 -->
|
|
<Border
|
|
Grid.Row="4"
|
|
Grid.Column="0"
|
|
Grid.ColumnSpan="4"
|
|
Padding="0,1,0,1"
|
|
Background="{DynamicResource Table_BG_Content}"
|
|
BorderBrush="{DynamicResource Table_BD}"
|
|
BorderThickness="1,0,1,1">
|
|
<StackPanel Orientation="Horizontal">
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="CVN"
|
|
IsEnabled="{Binding IsAlignerAbortEnable}"
|
|
ToolTip="Open vacuum and absorb the wafer.">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_CVN" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="BAL"
|
|
IsEnabled="{Binding IsAlignerAbortEnable}"
|
|
ToolTip="Side-finding.">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_BAL" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="CVF"
|
|
IsEnabled="{Binding IsAlignerAbortEnable}"
|
|
ToolTip="Close vacuum and loose the wafer.">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_CVF" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
<Button
|
|
Width="80"
|
|
Height="25"
|
|
Margin="10,0"
|
|
Content="ERS"
|
|
IsEnabled="{Binding IsAlignerAbortEnable}"
|
|
ToolTip="Clear alarms.">
|
|
<i:Interaction.Triggers>
|
|
<i:EventTrigger EventName="Click">
|
|
<cal:ActionMessage MethodName="Aligner_ERS" />
|
|
</i:EventTrigger>
|
|
</i:Interaction.Triggers>
|
|
</Button>
|
|
</StackPanel>
|
|
</Border>
|
|
</Grid>
|
|
|
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<Grid Width="420" Margin="0,10">
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<Grid.ColumnDefinitions>
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<ColumnDefinition Width="80" />
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<ColumnDefinition Width="*" />
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<ColumnDefinition Width="100" />
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<ColumnDefinition Width="100" />
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</Grid.ColumnDefinitions>
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<Grid.RowDefinitions>
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<RowDefinition Height="24" />
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<RowDefinition Height="32" />
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<RowDefinition Height="32" />
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</Grid.RowDefinitions>
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<Label
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Grid.Row="0"
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Grid.ColumnSpan="4"
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HorizontalContentAlignment="Center"
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VerticalContentAlignment="Center"
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Content="EFEM"
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Style="{DynamicResource Table_TitleStyle}" />
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<Border
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Grid.Row="1"
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Padding="5,1"
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Background="{DynamicResource Table_BG_Title}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<TextBlock
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text="Status"
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TextWrapping="Wrap" />
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</Border>
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<Border
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Grid.Row="1"
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Grid.Column="1"
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Padding="5,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<TextBlock
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HorizontalAlignment="Center"
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VerticalAlignment="Center"
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FontFamily="Arial"
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FontSize="12"
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Foreground="{DynamicResource FG_Black}"
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Text="{Binding EFEMStatus}"
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TextWrapping="Wrap" />
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</Border>
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<Border
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Grid.Row="1"
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Grid.Column="2"
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Padding="0,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<StackPanel Orientation="Horizontal">
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<Button
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Width="80"
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Height="25"
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Margin="10,0"
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Content="Home">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
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<cal:ActionMessage MethodName="EFEMHomeRoutine" />
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</StackPanel>
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</Border>
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<Border
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Grid.Row="1"
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Grid.Column="3"
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Padding="0,1,0,1"
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Background="{DynamicResource Table_BG_Content}"
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BorderBrush="{DynamicResource Table_BD}"
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BorderThickness="1,0,1,1">
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<StackPanel Orientation="Horizontal">
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<Button
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Width="80"
|
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Height="25"
|
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Margin="10,0"
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Content="Abort">
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<i:Interaction.Triggers>
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<i:EventTrigger EventName="Click">
|
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<cal:ActionMessage MethodName="EFEMAbortRoutine" />
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</i:EventTrigger>
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</i:Interaction.Triggers>
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</Button>
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</StackPanel>
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</Border>
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</Grid>
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</StackPanel>
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</Grid>
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</ScrollViewer>
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</UserControl>
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