172 lines
5.4 KiB
C#
172 lines
5.4 KiB
C#
using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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namespace Mainframe.LLs.Routines
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{
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public class LoadLockPrepareTransferRoutine : LoadLockBaseRoutine
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{
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enum RoutineStep
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{
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CheckForelinePressure,
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RequestPump,
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RequestPumpDelay,
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SlowPump,
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CloseSlowValve,
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FastPump,
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PumpDelay,
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CloseFastValve,
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Delay,
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SlowVent,
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CloseSlowVentValve,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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StartLoop,
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EndLoop,
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ClosePumpValveDelay
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}
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private double _pumpSwitchPressure = 100;
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private int _slowPumpTimeout = 100;
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private int _fastPumpTimeout = 100;
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private int _slowVentTimeout = 100;
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private double _targetPressure;
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private double _llVacPressure = 0;
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private double _balancePressureDiff = 0;
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private double _pumpBasePressure = 0;
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private int _purgeCount;
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private int _pumpDelayTime;
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public LoadLockPrepareTransferRoutine(ModuleName module)
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{
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Module = module.ToString();
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Name = "PrepareTransfer";
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_targetPressure = SC.GetValue<double>("TM.PressureBalance.BalancePressure");
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_llVacPressure = SC.GetValue<double>("LoadLock.VacuumPressureBase");
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_balancePressureDiff = SC.GetValue<double>("TM.PressureBalance.BalanceMaxDiffPressure");
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_pumpSwitchPressure = SC.GetValue<double>("LoadLock.Pump.SlowFastPumpSwitchPressure");
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_pumpBasePressure = SC.GetValue<double>("LoadLock.Purge.PumpBasePressure");
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_slowPumpTimeout = SC.GetValue<int>("LoadLock.Pump.SlowPumpTimeout");
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_fastPumpTimeout = SC.GetValue<int>("LoadLock.Pump.FastPumpTimeout");
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_slowVentTimeout = SC.GetValue<int>("LoadLock.Vent.SlowVentTimeout");
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//_purgeCount = SC.GetValue<int>("LoadLock.Purge.CyclePurgeCount");
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_pumpDelayTime = SC.GetValue<int>("LoadLock.Purge.PumpDelayTime");
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//PrepareTrasfer需要把压力调到VacuumBasePressure以下
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if (_targetPressure > _llVacPressure)
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{
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_targetPressure = _llVacPressure;
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}
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string reason;
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LockPump2(out reason);
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if (!LoadLockDevice.SetFastVentValve(false, out reason) || !LoadLockDevice.SetSlowVentValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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if (!LoadLockDevice.SetFastPumpValve(false, out reason) || !LoadLockDevice.SetSlowPumpValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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bool isAtmMode = SC.GetValue<bool>("System.IsATMMode");
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if (isAtmMode)
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{
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EV.PostInfoLog(Module, $"system in atm mode, {LoadLockDevice.Module} pump skipped");
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return Result.DONE;
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}
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if (!LoadLockDevice.CheckLidClose())
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{
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EV.PostAlarmLog(Module, $"Can not pump, door is open");
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return Result.FAIL;
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}
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if (!TMDevice.CheckSlitValveClose(ModuleHelper.Converter(LoadLockDevice.Module)))
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{
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EV.PostAlarmLog(Module, $"LoadLock Can not servo to pressure, slit valve is open");
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return Result.FAIL;
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}
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//if (Math.Abs(_targetPressure - LoadLockDevice.ChamberPressure) < _balancePressureDiff && LoadLockDevice.CheckVacuum())
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//{
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// return Result.DONE;
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//}
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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SlowPump((int)RoutineStep.SlowPump, _pumpSwitchPressure, _slowPumpTimeout);
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FastPump((int)RoutineStep.FastPump, _pumpBasePressure, _fastPumpTimeout);
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TimeDelay((int)RoutineStep.TimeDelay2, _pumpDelayTime);
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CloseFastPumpValve((int)RoutineStep.CloseFastValve);
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CloseSlowPumpValve((int)RoutineStep.CloseSlowValve);
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TimeDelay((int)RoutineStep.TimeDelay3, 1);
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SlowVent((int)RoutineStep.SlowVent, _targetPressure - 5, _slowVentTimeout);
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CloseVentValve((int)RoutineStep.CloseSlowVentValve);
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// 稍微等一下,确保DI状态更新
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TimeDelay((int)RoutineStep.ClosePumpValveDelay, 2);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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UnlockPump2();
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return Result.FAIL;
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}
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UnlockPump2();
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Notify("Finished");
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return Result.DONE;
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}
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public override void Abort()
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{
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LoadLockDevice.SetSlowPumpValve(false, out _);
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LoadLockDevice.SetFastPumpValve(false, out _);
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UnlockPump2();
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}
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}
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}
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