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DESKTOP-GPE37UV\THINKAPD 0fe32dc53e 调整Load腔Purge逻辑，自动判断Tray的来源，并在恰当时机进行Purge。 
PMPostTransferRoutine的Monitor()函数中，强制每次均升起隔热罩。
修正Mainframe界面中没有正确显示Load、UnLoad腔Purge次数的问题。
下述Routine中增加延时，已确保收到正确的DI信号：UnLoadPrepareTransferRoutine,TMPumpRoutine,LoadLockPumpRoutine, LoadLockPrepareTransferRoutine,
 		2022-11-14 16:42:44 +08:00
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PMBaseRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMButttomSectionMoveRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMChamberMoveBodyRoutine.cs 新增错误信息输出。 2022-10-09 23:40:32 +08:00
PMCleanRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMExchangeMoRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMHomeRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMLeakCheckRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMLidCloseRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMLidOpenRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMPcCalibrationRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMPostTransferRoutine.cs 调整Load腔Purge逻辑，自动判断Tray的来源，并在恰当时机进行Purge。 2022-11-14 16:42:44 +08:00
PMPrepareTransferRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMProcessAbortRoutine.cs PMProcessAbortRoutine中Mfc开始Ramp后，等待设定的时间。 2022-10-31 18:45:21 +08:00
PMProcessRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMPumpDownRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMPumpRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMPurgeRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMServoToPressure.cs Add project files. 2022-09-19 09:16:33 +08:00
PMStopHeatEnableRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMToAtmIdleRoutine.cs 新增软DO-186/187，以及其相关控制逻辑。 2022-10-24 13:47:42 +08:00
PMToBaseRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMToIdleRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMToIsolationRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00
PMToProcessIdleRoutine.cs 移除龙工修改的Recipe相关的代码，（验证后在推入主线） 2022-11-04 09:52:35 +08:00
PMVacIdleRoutine.cs 新增软DO-186/187，以及其相关控制逻辑。 2022-10-24 13:47:42 +08:00
PMVentRoutine.cs Add project files. 2022-09-19 09:16:33 +08:00