276 lines
9.9 KiB
C#
276 lines
9.9 KiB
C#
using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using SicPM.Devices;
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using System;
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using System.Collections.Generic;
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using System.Diagnostics;
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namespace SicPM.Routines
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{
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public class PMPumpRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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ArSupply,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetGroupJ,
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SetM1to16,
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SetPC,
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SetGroupI, //V87-96
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SetM2to40,
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SetM2to40_1,
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MfcAll,
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SetGasOut,
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SetTv,
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SetTv1,
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WaitTv1,
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SetGasIn1, //V65,V67,V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetGasIn2,
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SetGroupJOpen,
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OpenFinal2,
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SetMfcFinal2,
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PumpDownTimeout,
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SetTvMode,
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SetEPV1,
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SetEPV2,
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SetTVEnable,
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SetTVPressMode,
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SetTvPositionToZero,
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SetMFCMode,
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SetPCMode,
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SetTvOpen,
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SetTvModeToPress,
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SetTVto1050,
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OpenGasIn1,
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CloseGasIn1,
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CloseFinanl1,
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CloseFinanl2,
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SetGroupV38,
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SetV76,
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SetV75,
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SetV65,
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SetGroupV25,
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SetV31,
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SetV32,
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SetV35V36,
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SetTVPositionMode,
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SetTVPositionMax,
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CloseM32M35M37,
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CloseM36,
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CloseM38,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay12,
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TimeDelay13,
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TimeDelay14,
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}
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private PMModule _pmModule;
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private IoThrottleValve2 _IoThrottle;
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private IoInterLock _pmIoInterLock;
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List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7 };
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private int _rotationCheckSpeed =0 ; //设置旋转速度为0后检查是否转速低于此数值
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private int _rotationCloseTimeout; //旋转停止超时
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private int _IoValueOpenCloseTimeout = 10; //开关超时时间
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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private double _pumpBasePressure;
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private int _routineTimeOut;
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//private int _EPV2OpenDelayTime = 9;
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private Stopwatch _swTimer = new Stopwatch();
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public PMPumpRoutine(ModuleName module, PMModule pm) : base(module, pm)
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{
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Module = module.ToString();
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_pmModule = pm;
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Name = "PumpDown";
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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_pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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_pumpBasePressure= SC.GetValue<double>($"PM.{Module}.Pump.PumpBasePressure");
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_routineTimeOut = SC.GetValue<int>($"PM.{Module}.Pump.RoutineTimeOut");
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if (!_pmIoInterLock.SetPMPumpRoutineRunning(true, out string reason))
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{
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EV.PostAlarmLog(Module, $"can not Pump,{reason}");
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return Result.FAIL;
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}
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_swTimer.Restart();
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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//关闭V76,打开V75
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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//旋转停止,加热停止
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
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//关闭V72,打开V25
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SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
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//打开V31,打开V32
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SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
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//打开V35,打开V36
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SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
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//关闭B/C/E/F/H/K 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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//打开D/G 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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//设置MFC和PC的模式
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
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//M1-M16设定为default值(M2、M9、M15除外)
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
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//M2、M9、M15、M19-M40 MFC 3s ramp 到 default值
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SetMfcToDefaultByGroup((int)RoutineStep.SetM2to40_1, MfcGroupName.M2toM40, 3);
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//设置所有PC到默认值
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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//打开V68
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SetIoValueByGroup((int)RoutineStep.OpenGasIn1, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
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//打开V65
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SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
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//打开J阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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//打开EPV2
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay5, 3);
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//设置蝶阀Enable
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SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5);
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//设置蝶阀为压力模式
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
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//伺服压力设定值到0mbar
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SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure, _pmPressureMaxDiff, _throttleTimeout);
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//M2、M9、M15、M19-M40 MFC 3s ramp到0
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SetMfcByGroup((int)RoutineStep.SetM2to40, MfcGroupName.M2toM40, 0, 3);
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//等待腔体压力Pump到设定值
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WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pumpBasePressure, _pmPressureMaxDiff,_throttleTimeout);
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//蝶阀设置为位置模式,开度设置为最大
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SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);
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SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout);
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_pmIoInterLock.SetPMPumpRoutineRunning(false, out _);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_swTimer.Stop();
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return Result.DONE;
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}
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public override void Abort()
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{
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_pmIoInterLock.SetPMPumpRoutineRunning(false, out _);
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PMDevice.SetRotationServo(0, 0);
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base.Abort();
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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}
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}
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