200 lines
4.7 KiB
C#
200 lines
4.7 KiB
C#
using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs
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{
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public class TM : BaseDevice, IDevice, ITM
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{
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public virtual double ChamberPressure { get; }
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public virtual double ForelinePressure { get; }
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public TM(string module ) : base(module, module, module, module)
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{
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}
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public virtual bool Initialize()
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{
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DATA.Subscribe($"{Name}.IsAtm", () => { return CheckAtm(); });
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DATA.Subscribe($"{Name}.IsVacuum", () => { return CheckVacuum(); });
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DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);
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DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure);
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return true;
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}
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public virtual bool CheckAtm()
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{
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return false;
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}
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public virtual bool CheckVacuum()
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{
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return false;
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}
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public virtual bool CheckIsPumping()
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{
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return false;
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}
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public virtual bool SetFastVentValve(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetBufferVentValve(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetSlowVentValve(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetFastPumpValve(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetSlowPumpValve(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetTurboPumpIsoValve(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetTmToUnLoadVent(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetTmToLLVent(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetTurboPumpBackingValve(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetMfcVentValve(bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetAllValvesClose(out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetVentMfc(double flow, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool SetVentMfcFullFlow(out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool CheckTurboPumpStable()
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{
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return true;
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}
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public virtual bool CheckTurboPumpOn()
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{
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return true;
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}
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public virtual bool CheckTurboPumpOff()
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{
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return true;
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}
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public virtual bool CheckTurboPumpError()
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{
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return true;
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}
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public virtual bool TurboPumpOn()
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{
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return true;
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}
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public virtual bool TurboPumpOff()
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{
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return true;
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}
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public virtual IoSlitValve GetSlitValve(ModuleName module)
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{
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return null;
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}
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public virtual bool SetSlitValve(ModuleName module, bool isOpen, out string reason)
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{
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reason = string.Empty;
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return true;
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}
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public virtual bool CheckSlitValveOpen(ModuleName module)
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{
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return true;
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}
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public virtual bool CheckSlitValveClose(ModuleName module)
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{
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return true;
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}
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public virtual bool CheckIsoValveClose()
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{
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return true;
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}
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public virtual bool CheckIsoValveOpen()
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{
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return true;
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}
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public virtual void Monitor()
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{
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}
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public virtual void Terminate()
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{
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}
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public virtual void Reset()
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{
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}
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}
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}
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