112 lines
2.7 KiB
C#
112 lines
2.7 KiB
C#
namespace RecipeEditorLib.RecipeModel.Params
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{
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//Recipe列名编号(名称带_的为组名)
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public enum RecipColNo
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{
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Step_Information = 0,
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StepNo,
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Name,
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Time,
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SHFlow_SHTotalFlow,
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ArH2Switch,
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SHTotalFlow,
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CarrayGasFlow,
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SHTotalFlowSplitRatio,
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FlowSetMode,
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Pressure_Rotation,
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PressureSet,
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RotationSet,
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Temperature_ControlMode,
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PSUControlMode,
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PSUSetMode,
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SCRControlMode,
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SCRSetMode,
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Temperature_TempSetting,
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PSUInnerTempSet,
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PSUMiddleTempSet,
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PSUOuterTempSet,
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SCRTempSet,
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Temperature_HeaterOutput,
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PSUInnerRatioSet,
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PSUMiddleRatioSet,
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PSUOuterRatioSet,
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SCRUpperRatioSet,
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SCRMiddleRatioSet,
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SCRLowerRatioSet,
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SHFlow_SiSourceSi_SourceTotalFlow,
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SiSourceTotalFlow,
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SHFlow_SiSource_SiH4Flow,
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SiH4FlowMode,
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SiH4Flow,
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SHFlow_SiSource_TCSFlow,
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TCSFlowMode,
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TCSBubbLowFlow,
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TCSBubbHighFlow,
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TCSPushFlow,
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TCSBubbPressure,
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SHFlow_SiSource_HCLFlow,
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HCLFlowMode,
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HCLFlow,
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SHFlow_SiSource_SiSourSplit,
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SiSourceSplitRatio,
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SiSourcePushPressure,
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SiSourceInnerFlow,
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SiSourceMiddleFlow,
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SiSourceOuterFlow,
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SHFlow_CSource_CSourceTotalFlow,
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CSourceTotalFlow,
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SHFlow_CSource_C2H4Flow,
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C2H4FlowMode,
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C2H4Flow,
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SHFlow_CSource_CSourceSplit,
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CSourceSplitRatio,
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CSourcePushPressure,
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CSourceInnerFlow,
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CSourceMiddleFlow,
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CSourceOuterFlow,
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SHFlow_Dope_DopeTotalFlow,
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DopeTotalFlow,
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SHFlow_Dope_N2Flow,
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N2FlowMode,
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N2ActualFlow,
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N2LowFlow,
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DilutFlowForN2,
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DilutedN2Flow,
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N2PostDilutPressure,
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N2HighFlowMode,
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N2HighFlow,
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SHFlow_Dope_TMAFlow,
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TMAFlowMode,
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TMABubbFlow,
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TMAPushFlow,
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TMABubbPressure,
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SHFlow_Dope_DopeSplit,
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DopeSplitRatio,
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DopePushPressure,
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DopeInnerFlow,
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DopeMiddleFlow,
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DopeOuterFlow,
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SHFlow_SHPushFlow,
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SHPushTotalFlow,
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SHInnerFlow,
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SHMiddleFlow,
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SHOuterFlow,
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InnerPushFlow,
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MiddlePushFlow,
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OuterPushFlow,
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Purge_SHPeripheryPurge,
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SHPurgeFlow,
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GRPurgeMainFlow,
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Purge_ChamberPeripheryPurge,
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OpticPurgeMainFlow,
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ChamberPurgeFlow,
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RotationUpPurgeFlow,
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ShutterPurgeFlow,
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HeaterWFPurgeFlow,
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Purge_VentFlow,
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TotalVentFlow,
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VentPushFlow,
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VentPreExhaustPressure
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}
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}
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