THINKPAD 1851f226e2 新增错误信息输出。 ... PMChamberMoveBodyRoutine.cs中的GasConnectorTighten()方法、CheckLidTighten()方法、CheckLidSwingLock()方法中执行ExecuteAndWait()方法是，如果出错，则打印错误信息。		2022-10-09 23:40:32 +08:00
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PMBaseRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMButttomSectionMoveRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMChamberMoveBodyRoutine.cs	新增错误信息输出。	2022-10-09 23:40:32 +08:00
PMCleanRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMExchangeMoRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMHomeRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMLeakCheckRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMLidCloseRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMLidOpenRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMPcCalibrationRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMPostTransferRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMPrepareTransferRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMProcessAbortRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMProcessRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMPumpDownRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMPumpRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMPurgeRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMServoToPressure.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMStopHeatEnableRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMToAtmIdleRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMToBaseRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMToIdleRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMToIsolationRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMToProcessIdleRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMVacIdleRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00
PMVentRoutine.cs	Add project files.	2022-09-19 09:16:33 +08:00