176 lines
17 KiB
XML
176 lines
17 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
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<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" >
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<IoInterLocks assembly="Mainframe" classType="Mainframe.Devices.IoInterLock">
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<IoInterLock id="IoInterLock" module="TM" display="IoInterLock" schematicId="IoInterLock" unit=""
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doTmAtProcessPress="DO_TMAtProcessPress" doLLAtProcessPress="DO_LoadAtProcessPress" diTmAtATM="DI_TMPressure1ATM" diLoadLockAtATm="DI_LoadPressureATM"
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aiTmPressure="AI_TMPressure1" aiLLPressure="AI_LoadPressure" diTmUnderVac="DI_TMPressure1VAC"
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doTmCyclePurgeRoutineRunning="DO_TMCyclePurgeRoutineRunning" doTmLeakCheckRoutineRunning="DO_TMLeakCheckRoutineRunning" doTmPumpDownRoutineRunning="DO_TMPumpDownRoutineRunning"
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doTmServoPressRoutineRunning="DO_TMServoPressRoutineRunning" doTmVentUpRoutineRunning="DO_TMVentUpRoutineRunning" doLLCyclePurgeRoutineRunning="DO_LoadCyclePurgeRoutineRunning"
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doLLLeakCheckRoutineRunning="DO_LoadLeakCheckRoutineRunning" doLLPumpDownRoutineRunning="DO_LoadPumpDownRoutineRunning" doLLVentUpRoutineRunning="DO_LoadVentUpRoutineRunning"
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diVacRobotExtenLLEnableFB="DI_VacRobotExtenLoadEnableFB" diVacRobotExtendBufferEnableFB="DI_VacRobotExtendBufferEnableFB" diVacRobotExtendPMAEnableFB="DI_VacRobotExtendPMAEnableFB"
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diATMRobotExtendUnloadEnableFB="DI_ATMRobotExtendUnloadEnableFB" diATMRobotExtendLoadLSideEnableFB="DI_ATMRobotExtendLoadLSideEnableFB" diATMRobotExtendLoadRSideEnableFB="DI_ATMRobotExtendLoadRSideEnableFB"
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diVacRobotExtendUnloadEnableFB="DI_VacRobotExtendUnloadEnableFB" diVacRobotExtendPMBEnableFB="DI_VacRobotExtendPMBEnableFB"
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doVacRobotExtenLLEnable="DO_VacRobotExtenLoadEnable" doVacRobotExtendBufferEnable="DO_VacRobotExtendBufferEnable" doVacRobotExtendPMAEnable="DO_VacRobotExtendPMAEnable"
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doVacRobotExtendUnloadEnable="DO_VacRobotExtendUnloadEnable" doVacRobotExtendPMBEnable="DO_VacRobotExtendPMBEnable" doATMRobotExtendUnloadEnable="DO_ATMRobotExtendUnloadEnable"
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doATMRobotExtendLoaLSideEnable="DO_ATMRobotExtendLoaLSideEnable" doATMRobotExtendLoaRSideEnable="DO_ATMRobotExtendLoaRSideEnable"
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doRectorAATMTransferReady="DO_ReactorAATMTransferReady" doRectorAProcessTransferReady="DO_ReactorAProcessTransferReady" doPm1LidClosed="DO_PM1LidClosed"
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doUnLoadPurgeRoutineRunning="DO_UnLoadCyclePurgeRoutineRunning" doUnLoadLeakCheckRoutineRunning="DO_UnLoadLeakCheckRoutineRunning"
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doUnLoadPumpDownRoutineRunning="DO_UnLoadPumpDownRoutineRunning" doUnLoadVentUpRoutineRunning="DO_UnLoadVentUpRoutineRunning"
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/>
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</IoInterLocks>
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<IoMfcs classType="SicPM.Devices.IoMFC" assembly="SicPM">
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<IoMfc3 id="Mfc60" module="TM" display="Mfc60" schematicId="Mfc60" unit="sccm" aiFlow="AI_M60FlowRead" aoFlow="AO_M60FlowSetpoint" scBasePath="TM.MFC" aioType="float" />
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</IoMfcs>
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<TcAdses assembly="SicPM" classType="SicPM.Devices.SicAds">
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<TcAds id="MainPLC" module="PM1" display="" schematicId="" unit="" option="true" />
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<TcAds id="MainPLC" module="PM2" display="" schematicId="" unit="" option="true" />
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</TcAdses>
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<WcfPlcs assembly="MECF.Framework.Common" classType="MECF.Framework.Common.PLC.WcfPlc" >
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<WcfPlc id="MainPLC" module="PM1" display="" schematicId="" unit="" option="true" />
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<WcfPlc id="MainPLC" module="PM2" display="" schematicId="" unit="" option="true" />
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</WcfPlcs>
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<TcAdses assembly="Mainframe" classType="Mainframe.Devices.SicAds">
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<TcAds id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" />
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</TcAdses>
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<WcfPlcs assembly="MECF.Framework.Common" classType="MECF.Framework.Common.PLC.WcfPlc" >
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<WcfPlc id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" />
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</WcfPlcs>
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<IoSensors>
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<IoSensor id="TMLidClosed" module="TM" display="" schematicId="" unit="" di="DI_TMLidClosed" textOutTrigValue="false" warningText="" alarmText="Alarm525 TM Lid Opened [DI-12]" />
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<IoSensor id="LLLidClosed" module="LoadLock" display="" schematicId="" unit="" di="DI_LoadLidClosed" textOutTrigValue="false" warningText="" alarmText="Alarm526 LoadLid Opened [DI-13]" />
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<IoSensor id="UnloadLidClosed" module="UnLoad" display="" schematicId="" unit="" di="DI_UnloadStationLidClosed" textOutTrigValue="false" warningText="" alarmText="Alarm527 UnloadStation Lid Opened [DI-14]" />
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<IoSensor id="BufferLidClosed" module="Buffer" display="" schematicId="" unit="" di="DI_BufferStationLidClosed" textOutTrigValue="false" warningText="" alarmText="Alarm528 BufferStation Lid Opened [DI-15]" />
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<IoSensor id="BufferWaferHigh" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorHigh" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="BufferWaferMiddle" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorMid" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="BufferWaferLow" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorLow" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="LLTrayPresence" module="TM" display="" schematicId="" unit="" di="DI_LoadTrayPresence" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="LLWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_LoadWaferPlaced" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="UnLoadTrayPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="UnLoadWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="ForelineBasePressureReady" module="TM" display="" schematicId="" unit="" di="DI_ForelineBasePressureReady" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="LoadTrayHomeSensor" module="TM" display="" schematicId="" unit="" di="DI_LoadHomeTraySensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassALWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetLeftConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassARWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetRightConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassALInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetLeftInch6" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassARInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetRightInch6" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassBLInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_TrayCassetInch6" textOutTrigValue="true" warningText="" alarmText="" />
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<IoSensor id="CassBLWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_TrayCassetConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
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</IoSensors>
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<IoPumps classType="Mainframe.Devices.IoPump" assembly="Mainframe">
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<IoPump id="TMPump1" module="TM" display="Pump1" schematicId="TMPump1" unit="" diRunning="DI_TMDryPump1Running" diAlarm="DI_TMDryPump1Alarm" diWarning="DI_TMDryPump1Warning"/>
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<IoPump id="TMPump2" module="TM" display="Pump2" schematicId="TMPump2" unit="" diRunning="DI_TMDryPump2Running" diAlarm="DI_TMDryPump2Alarm" diWarning="DI_TMDryPump2Warning"/>
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</IoPumps>
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<IoValves>
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<IoValve id="LoadSlowPump" module="TM" display="V84" schematicId="LoadSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadSlowPumpFB" doOpen="DO_LoadSlowPump" />
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<IoValve id="LoadFastPump" module="TM" display="V83" schematicId="LoadFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadFastPumpFB" doOpen="DO_LoadFastPump"/>
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<IoValve id="TMSlowPump" module="TM" display="V82" schematicId="TMSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMSlowPumpFB" doOpen="DO_TMSlowPump"/>
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<IoValve id="TMFastPump" module="TM" display="V81" schematicId="TMFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMFastPumpFB" doOpen="DO_TMFastPump"/>
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<IoValve id="UnLoadSlowPump" module="TM" display="V123" schematicId="UnLoadSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadSlowPumpFB" doOpen="DO_UnloadSlowPump" />
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<IoValve id="UnLoadFastPump" module="TM" display="V122" schematicId="UnLoadFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadFastPumpFB" doOpen="DO_UnloadFastPump"/>
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<IoValve id="BufferVent" module="TM" display="V80" schematicId="BufferVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_BufferVentFB" doOpen="DO_BufferVent"/>
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<IoValve id="LoadVent" module="TM" display="V79" schematicId="LoadVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVentFB" doOpen="DO_LoadVent"/>
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<IoValve id="TMVent" module="TM" display="V77" schematicId="TMVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMVentFB" doOpen="DO_TMVent" />
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<IoValve id="UnLoadVent" module="TM" display="V78" schematicId="UnLoadVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadVentFB" doOpen="DO_UnloadVent"/>
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<IoValve id="TMLoadBanlance" module="TM" display="V85" schematicId="TMLoadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMLoadBanlanceFB" doOpen="DO_TMLoadBanlance"/>
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<IoValve id="TMUnLoadBanlance" module="TM" display="V124" schematicId="TMToUnloadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_TMToUnloadBanlance"/>
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</IoValves>
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<IoSlitValves>
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<IoSlitValve id="LoadLockDoor" module="TM" display="LLDoor" Type="" unit="" schematicId="LLDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadDoorOpened" diClose="DI_LoadDoorClosed" doOpen="DO_LoadDoorOpen" doClose="DO_LoadDoorClose" />
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<IoSlitValve id="PM1Door" module="TM" display="PM1Door" Type="" unit="" schematicId="PM1Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorADoorOpened" diClose="DI_ReactorADoorClosed" doOpen="DO_RectorADoorOpen" doClose="DO_RectorADoorClose" />
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<IoSlitValve id="PM2Door" module="TM" display="PM2Door" Type="" unit="" schematicId="PM2Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorBDoorOpened" diClose="DI_ReactorBDoorClosed" doOpen="DO_RectorBDoorOpen" doClose="DO_RectorBDoorClose" />
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<IoSlitValve id="UnLoadDoor" module="TM" display="UnLoadDoor" Type="" unit="" schematicId="UnLoadDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadStationDoorOpened" diClose="DI_UnloadStationDoorClosed" doOpen="DO_UnloadStationDoorOpen" doClose="DO_UnloadStationDoorClose" />
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<IoSlitValve id="BufferDoor" module="TM" display="BufferDoor" Type="" unit="" schematicId="BufferDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_BufferStationDoorOpened" diClose="DI_BufferStationDoorClosed" doOpen="DO_BufferStationDoorOpen" doClose="DO_BufferStationDoorClose" />
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<IoSlitValve id="UnLoadSubDoor" module="EFEM" display="UnLoadSubDoor" Type="" unit="" schematicId="UnLoadSubDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadSubStationDoorOpened" diClose="DI_UnloadSubStationDoorClosed" doOpen="DO_UnloadSubStationDoorOpen" doClose="DO_UnloadSubStationDoorClose" />
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<IoSlitValve id="LoadLockLSideDoor" module="EFEM" display="LLLSideDoor" Type="" unit="" schematicId="LLLSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadLSideDoorOpened" diClose="DI_LoadLSideDoorClosed" doOpen="DO_LoadLSideDoorOpen" doClose="DO_LoadLSideDoorClose" />
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<IoSlitValve id="LoadLockRSideDoor" module="EFEM" display="LLRSideDoor" Type="" unit="" schematicId="LLRSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadRSideDoorOpened" diClose="DI_LoadRSideDoorClosed" doOpen="DO_LoadRSideDoorOpen" doClose="DO_LoadRSideDoorClose" />
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</IoSlitValves>
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<IoPressureMeter3s>
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<IoPressureMeter3 id="LLPressure" module="TM" display="LLPressure" schematicId="LLPressure" unit="mbar" aioType="float" aiValue="AI_LoadPressure" formatString="F1" MaxValue="1500"/>
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<IoPressureMeter3 id="UnLoadPressure" module="TM" display="UnLoadPressure" schematicId="UnLoadPressure" unit="mbar" aioType="float" aiValue="AI_UnloadPressure" formatString="F1" MaxValue="1500"/>
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<IoPressureMeter3 id="TMPressure" module="TM" display="TMPressure" schematicId="TMPressure" unit="mbar" aioType="float" aiValue="AI_TMPressure1" formatString="F1" MaxValue="1500"/>
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<IoPressureMeter3 id="ForelinePressure" module="TM" display="ForelinePressure" schematicId="ForelinePressure" unit="mbar" aioType="float" aiValue="AI_TMPressure2" formatString="F1" MaxValue="1500"/>
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</IoPressureMeter3s>
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<IoTempMeters assembly="SicPM" classType="SicPM.Devices.IoTempMeter">
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<IoTempMeter module="UnLoad" id="UnLoadTemp" display="" schematicId="" aioType="float" aiFeedback="AI_UnloadTemp" />
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<IoTempMeter module="Buffer" id="BufferTemp" display="" schematicId="" aioType="float" aiFeedback="AI_BufferTemp" />
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</IoTempMeters>
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<IoLift4s>
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<IoLift4 id="LLLift" module="LoadLock" display="LLLift" schematicId="LLLift" unit="" aioType="" diUp="DI_LoadLifterCYUp" diDown="DI_LoadLifterCYDown" doUp="DO_LoadLifterCYUp" doDown="DO_LoadLifterCYDown" scTimeout="10"/>
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<IoLift4 id="UnLoadLift" module="UnLoad" display="UnLoadLift" schematicId="UnLoadLift" unit="" aioType="" diUp="DI_UnloadStationLifterCYUp" diDown="DI_UnloadStationLifterCYDown" doUp="DO_UnloadStationLifterCYUp" doDown="DO_UnloadStationLifterCYDown" scTimeout="10"/>
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</IoLift4s>
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<IoClaws>
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<IoClaw id="LLWaferClaw" module="LoadLock" display="LLWaferClaw" schematicId="LLWaferClaw" unit="" aioType="" diUp="DI_LoadWaferCYClamped" diDown="DI_LoadWafeCYOpened" doUp="DO_LoadWaferCYClamp" doDown="DO_LoadWaferCYOpen" scTimeout="10"/>
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<IoClaw id="LLTrayClaw" module="LoadLock" display="LLTrayClaw" schematicId="LLTrayClaw" unit="" aioType="" diUp="DI_LoadTrayCYClamped" diDown="DI_LoadTrayCYOpend" doUp="DO_LoadTrayCYClamp" doDown="DO_LoadTrayCYOpen" scTimeout="10"/>
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<IoClaw id="UnLoadWaferClaw" module="UnLoad" display="UnLoadWaferClaw" schematicId="UnLoadWaferClaw" unit="" aioType="" diUp="DI_UnloadStationWaferCYClamped" diDown="DI_UnloadStationWaferCYOpened" doUp="DO_UnloadStationWaferCYClamp" doDown="DO_UnloadStationWaferCYOpen" scTimeout="10"/>
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</IoClaws>
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<TMRobots assembly="Mainframe" classType="Mainframe.TMs.SicTMRobot">
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<TMRobot id="TMRobot" module="TMRobot" display="" schematicId="" unit="" />
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</TMRobots>
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<WaferRobots assembly="Mainframe" classType="Mainframe.EFEMs.SicWaferRobot">
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<WaferRobot id="WaferRobot" module="WaferRobot" display="" schematicId="" unit="" />
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</WaferRobots>
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<TrayRobots assembly="Mainframe" classType="Mainframe.EFEMs.SicTrayRobot">
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<TrayRobot id="TrayRobot" module="TrayRobot" display="" schematicId="" unit="" />
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</TrayRobots>
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<Aligners assembly="Mainframe" classType="Mainframe.Aligners.SicAligner">
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<Aligner id="Aligner" module="Aligner" display="" schematicId="" unit="" />
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</Aligners>
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<Cassettes assembly="Mainframe" classType="Mainframe.Cassettes.SicCassette">
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<Cassette id="CassAL" module="CassAL" display="" schematicId="" unit="" />
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<Cassette id="CassAR" module="CassAR" display="" schematicId="" unit="" />
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<Cassette id="CassBL" module="CassBL" display="" schematicId="" unit="" />
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</Cassettes>
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<LoadRotations assembly="Mainframe" classType="Mainframe.Devices.IoLoadRotation">
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<LoadRotation id="Rotation" module="Load" display="LoadRotation" schematicId="LoadRotation" unit=""
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diServoOn="DI_LdRotationServoOn" diServoBusy="DI_LdRotationBusy" diServoError="DI_LdRotationServoError" diMoveDone="DI_LdRotationMoveDone"
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diRelativeHomeDone="DI_LdRotationRelativeHomeDone" diOneCircleDone="DI_LdRotationOneCircleDone" diCCD1PosDone="DI_LdRotationCCD1PosDone"
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diCCD2PosDone="DI_LdRotationCCD2PosDone" doServoOn="DO_LdRotationServoOn" doServoReset="DO_LdRotationReset"
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doJogCW="DO_LdRotationJogCW" doJogCCW="DO_LdRotationJogCCW" doStop="DO_LdRotationStop" doMoveRelativeHome="DO_LdRotationMoveRelativeHome"
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doMoveOneCircle="DO_LdRotationMoveOneCircle" doMoveCCD1Pos="DO_LdRotationMoveCCD1Pos" doMoveCCD2Pos="DO_LdRotationMoveCCD2Pos"
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aiCurPos="AI_LdRotationRelativeDegree" aiCCD1Degree="AI_LdRotationCCD1Degree" aiCCD2Degree="AI_LdRotationCCD2Degree"
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aoCCD1Degree="AO_LdRotationCCD1Degree" aoHomeSpeed="AO_LdRotationSpeed" aoPosSpeed="AO_LdRotationPosSpeed" aoCCD2Degree="AO_LdRotationCCD2Degree"
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aoJogDegree="AO_LdRotationJogDegree" aoHomeOffset="AO_LdRotationHomeOffset"/>
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</LoadRotations>
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<TMs assembly="Mainframe" classType="Mainframe.TMs.SicTM">
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<TM id="TM" module="System" display="" schematicId="" unit="" DiTMLidClosedAlarm="DI_TMLidClosed" DiLLLidClosedAlarm="DI_LLLidClosed" DiBufferLidClosedAlarm="DI_BufferLidClosed" aiLLTemp="AI_LoadTemp" aiBufferTemp="AI_BufferTemp"/>
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</TMs>
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<EFEMs assembly="Mainframe" classType="Mainframe.EFEMs.SicEFEM">
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<Buffer id="EFEM" module="EFEM" display="" schematicId="" unit="" />
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</EFEMs>
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<LLs assembly="Mainframe" classType="Mainframe.LLs.SicLoadLock">
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<TM id="LoadLock" module="LoadLock" display="" schematicId="" unit="" />
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</LLs>
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<Unloads assembly="Mainframe" classType="Mainframe.UnLoads.SicUnLoad">
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<Unload id="UnLoad" module="UnLoad" display="" schematicId="" unit="" />
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</Unloads>
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<Buffers assembly="Mainframe" classType="Mainframe.Buffers.SicBuffer">
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<Buffer id="Buffer" module="Buffer" display="" schematicId="" unit="" />
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</Buffers>
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</DeviceModelDefine> |