450 lines
14 KiB
C#
450 lines
14 KiB
C#
using System;
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using System.Linq;
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using Aitex.Core.Common;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Fsm;
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using Aitex.Core.Util;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.Schedulers;
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using MECF.Framework.Common.SubstrateTrackings;
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using Mainframe.LLs;
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using SicRT.Equipments.Systems;
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using SicRT.Modules.Schedulers;
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namespace SicRT.Scheduler
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{
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public class SchedulerLoadLock : SchedulerModule
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{
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#region Variables
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private LoadLockModuleBase _ll = null;
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private ModuleName _taskRobot;
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private int _taskSlot;
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private int _entityTaskToken = (int)FSM_MSG.NONE;
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#endregion
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#region Constructors
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public SchedulerLoadLock(ModuleName module) : base(module.ToString())
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{
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_module = module.ToString();
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_ll = Singleton<EquipmentManager>.Instance.Modules[module] as LoadLockModuleBase;
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}
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#endregion
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#region Properties
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public override bool IsAvailable
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{
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get { return _ll.IsIdle && _ll.IsOnline && CheckTaskDone() && _ll.CheckSlitValveClosed(); }
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}
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public override bool IsOnline
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{
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get { return _ll.IsOnline; }
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}
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public override bool IsError
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{
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get { return _ll.IsError; }
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}
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public bool IsInPumping =>
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_task == TaskType.Pump || _task == TaskType.Purge || _task == TaskType.PrepareTransfer;
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/// <summary>
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/// 是否执行放Wafer后，TM放Tray前的Purge。
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/// <para>如果Tray来自TMRobot，放完Wafer马上Purge。</para>
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/// <para>如果Tray来自TrayCassette，放完Tray以后统一Purge。</para>
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/// </summary>
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public bool HasPurgedAfterWaferPlaced { get; private set; }
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/// <summary>
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/// 是否已执行组合后、TM取盘前的Purge.
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/// <para>无论Tray来自TMRobot还是TrayRobot，Group以后一定要Purge。</para>
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/// <para>Purge次数使用Sequence中的配置。</para>
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public bool HasPurgedAfterGrouped { get; private set; }
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#endregion
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public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
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{
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lock (SyncRoot)
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{
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_task = TaskType.PrepareTransfer;
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_taskRobot = robot;
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_taskSlot = slot;
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LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
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return _ll.PrepareTransfer(robot, Hand.Blade1, slot, type, out _);
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}
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}
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internal bool CheckAtAtm()
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{
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lock (SyncRoot)
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{
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SicLoadLock deviceLL = DEVICE.GetDevice<SicLoadLock>($"{_module}.{_module}");
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return deviceLL.CheckAtm();
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}
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}
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internal bool CheckAtVacuum()
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{
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lock (SyncRoot)
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{
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SicLoadLock deviceLL = DEVICE.GetDevice<SicLoadLock>($"{_module}.{_module}");
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return deviceLL.CheckVacuum();
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}
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}
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internal void SetJobStatue()
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{
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lock (SyncRoot)
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{
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SicLoadLock deviceLL = DEVICE.GetDevice<SicLoadLock>($"{_module}.{_module}");
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//deviceLL.SetJobDoneStatus();
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}
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}
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public override bool IsReadyForPick(ModuleName robot, int slot)
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{
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lock (SyncRoot)
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{
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if (robot == ModuleName.WaferRobot)
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{
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return _ll.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Pick, out _)
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&& WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
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}
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else if (robot == ModuleName.TMRobot || robot == ModuleName.TrayRobot)
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{
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return _ll.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Pick, out _)
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&& WaferManager.Instance.CheckHasTray(ModuleHelper.Converter(_module), slot);
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}
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return false;
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}
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}
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public override bool IsReadyForPlace(ModuleName robot, int slot)
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{
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lock (SyncRoot)
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{
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if (robot == ModuleName.WaferRobot)
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{
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return _ll.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Place, out _);
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}
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else if (robot == ModuleName.TMRobot || robot == ModuleName.TrayRobot)
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{
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return _ll.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Place, out _)
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&& WaferManager.Instance.CheckNoTray(ModuleHelper.Converter(_module), slot);
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}
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return false;
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}
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}
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/// <summary>
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/// 重置HasPurged和HasGrouped标记。
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/// </summary>
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public void ResetPurgedAndGroupedStatus()
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{
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lock (SyncRoot)
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{
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HasPurgedAfterWaferPlaced = false;
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HasPurgedAfterGrouped = false;
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}
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}
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public bool Vent()
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{
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lock (SyncRoot)
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{
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_task = TaskType.Vent;
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_entityTaskToken = _ll.InvokeVent();
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LogTaskStart(_task, $"{Module} vent to ATM");
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return _entityTaskToken != (int)FSM_MSG.NONE;
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}
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}
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public bool Pump()
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{
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lock (SyncRoot)
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{
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_entityTaskToken = _ll.InvokePump();
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if (_entityTaskToken != (int)FSM_MSG.NONE)
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{
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_task = TaskType.Pump;
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LogTaskStart(_task, $"{Module} pump to Vaccum");
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return true;
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}
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return false;
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}
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}
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/// <summary>
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/// Wafer放好后，如果Tray将从TMRobot喂进来，执行此Purge。
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/// <para>Purge次数有Configuration\LoadLock\Purge中的相关次数决定。</para>
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/// </summary>
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/// <param name="args"></param>
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/// <returns></returns>
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public bool PurgeAfterWaferPlaced(params object[] args)
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{
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lock (SyncRoot)
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{
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// 如果循环次数为0，则跳过此步骤。
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if (args is null || (args[0] is int cycle && cycle <= 0))
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{
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LogTaskStart(_task, " Purge after wafer placed was ignored since the cycle is zero");
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HasPurgedAfterGrouped = true;
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return true;
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}
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_entityTaskToken = _ll.InvokePurge(args);
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if (_entityTaskToken != (int)FSM_MSG.NONE)
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{
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_task = TaskType.Purge;
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LogTaskStart(_task, $" Purge after wafer placed");
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HasPurgedAfterWaferPlaced = true;
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return true;
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}
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return false;
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}
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}
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/// <summary>
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/// 当Wafer和Tray组合完毕后，执行此Purge。
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/// <para>组合完毕后无条件支持此Purge，Purge次数有Sequence设定。</para>
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/// </summary>
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/// <param name="args"></param>
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/// <returns></returns>
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public bool PurgeAfterGrouped(params object[] args)
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{
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lock (SyncRoot)
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{
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// 如果循环次数为0，则跳过此步骤。
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if (args is null || (args[0] is int cycle && cycle <= 0))
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{
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LogTaskStart(_task, " Purge after Grouping was ignored since the cycle is zero");
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HasPurgedAfterGrouped = true;
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return true;
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}
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_entityTaskToken = _ll.InvokePurge(args);
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if (_entityTaskToken != (int)FSM_MSG.NONE)
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{
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_task = TaskType.Purge;
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LogTaskStart(_task, $"Purge after grouping");
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HasPurgedAfterGrouped = true;
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return true;
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}
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return false;
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}
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}
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public bool GroupWaferTray()
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{
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lock (SyncRoot)
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{
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_entityTaskToken = _ll.InvokeGroupWaferTray();
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if (_entityTaskToken != (int)FSM_MSG.NONE)
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{
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_task = TaskType.Group;
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LogTaskStart(_task, $"{Module} start group wafer and tray");
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return true;
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}
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return false;
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}
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}
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public bool SeparateWaferTray()
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{
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throw new NotSupportedException();
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}
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public int? GetWaferPurgeCount(int slot)
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{
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lock (SyncRoot)
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{
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if (!WaferManager.Instance.CheckHasWafer(Module, slot))
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return null;
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WaferInfo wafer = WaferManager.Instance.GetWafer(Module, slot);
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if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
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return null;
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if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
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return null;
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if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules
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.Any(m => m == ModuleName.LoadLock || m == ModuleName.Load))
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return null;
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if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter.ContainsKey("PurgeCount"))
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return null;
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if (int.TryParse(
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wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PurgeCount"].ToString(),
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out int purgeCount))
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{
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return purgeCount;
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}
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return null;
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}
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}
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public int? GetWaferPumpDelayTime(int slot)
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{
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lock (SyncRoot)
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{
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if (!WaferManager.Instance.CheckHasWafer(Module, slot))
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return null;
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WaferInfo wafer = WaferManager.Instance.GetWafer(Module, slot);
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if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
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return null;
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if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
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return null;
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if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules
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.Any(m => m == ModuleName.LoadLock || m == ModuleName.Load))
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return null;
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if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter.ContainsKey("PumpDelayTime"))
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return null;
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if (int.TryParse(
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wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PumpDelayTime"]
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.ToString(), out int pumpDelayTime))
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{
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return pumpDelayTime;
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}
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return null;
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}
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}
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public override bool CheckWaferNextStepIsThis(ModuleName module, int slot)
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{
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lock (SyncRoot)
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{
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if (!WaferManager.Instance.CheckHasWafer(module, slot))
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return false;
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WaferInfo wafer = WaferManager.Instance.GetWafer(module, slot);
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if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
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return false;
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if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
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return false;
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if (!wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules
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.Any(m => m == ModuleName.LoadLock || m == ModuleName.Load))
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return false;
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return true;
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}
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}
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public override bool CheckWaferTrayGrouped()
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{
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lock (SyncRoot)
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{
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return !_ll.CheckWaferClamped() && WaferManager.Instance.CheckHasWafer(Module, 0);
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}
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}
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public override bool CheckWaferTraySeparated()
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{
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throw new NotSupportedException();
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}
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public override bool CheckSlitValveClosed()
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{
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lock (SyncRoot)
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{
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return _ll.CheckSlitValveClosed();
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}
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}
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public bool Monitor()
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{
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lock (SyncRoot)
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{
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return true;
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}
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}
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public string GetTaskRunning()
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{
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return $"{_task.ToString()}/{_taskRobot}";
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}
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public bool CheckTaskDone()
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{
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lock (SyncRoot)
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{
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bool ret = false;
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switch (_task)
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{
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case TaskType.None:
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ret = true;
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break;
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case TaskType.PrepareTransfer:
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ret = _ll.CheckAcked(
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_entityTaskToken); //&& _ll.CheckReadyForTransfer(_taskRobot, Hand.Blade1, _taskSlot, EnumTransferType.Place, out _);
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break;
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case TaskType.Cooling:
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ret = _ll.CheckAcked(_entityTaskToken);
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break;
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case TaskType.Vent:
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ret = _ll.CheckAcked(_entityTaskToken);
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break;
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case TaskType.Pump:
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ret = _ll.CheckAcked(_entityTaskToken);
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break;
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case TaskType.Purge:
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ret = _ll.CheckAcked(_entityTaskToken);
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break;
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case TaskType.Group:
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ret = _ll.CheckAcked(_entityTaskToken);
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break;
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case TaskType.Separate:
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ret = _ll.CheckAcked(_entityTaskToken);
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break;
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}
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if (ret && _task != TaskType.None)
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{
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LogTaskDone(_task, "");
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_task = TaskType.None;
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}
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return ret;
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}
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}
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}
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}
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