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Sic04/SicRT/Equipments/Schedulers
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DESKTOP-GPE37UV\THINKAPD eea091a572 UnLoad腔Purge参数设定从系统Configuration移至Sequence。 2022-11-23 10:24:01 +08:00
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SchedulerAligner.cs Add project files. 2022-09-19 09:16:33 +08:00
SchedulerBuffer.cs Add project files. 2022-09-19 09:16:33 +08:00
SchedulerCassette.cs Add project files. 2022-09-19 09:16:33 +08:00
SchedulerDBCallback.cs Add project files. 2022-09-19 09:16:33 +08:00
SchedulerLoadLock.cs Load腔Purge逻辑修改，无论Tray来自哪里，均只Purge一次。 2022-11-22 18:04:20 +08:00
SchedulerModule.cs 新增UnLoad模块CoolingAndPurgeRoutine。 2022-11-23 09:24:24 +08:00
SchedulerModuleFactory.cs Add project files. 2022-09-19 09:16:33 +08:00
SchedulerPM.cs Add project files. 2022-09-19 09:16:33 +08:00
SchedulerTMRobot.cs Add project files. 2022-09-19 09:16:33 +08:00
SchedulerTrayRobot.cs AutoTransfer优化。 2022-11-17 18:01:52 +08:00
SchedulerUnLoad.cs UnLoad腔Purge参数设定从系统Configuration移至Sequence。 2022-11-23 10:24:01 +08:00
SchedulerWaferRobot.cs AutoTransfer优化。 2022-11-17 18:01:52 +08:00