308 lines
10 KiB
C#
308 lines
10 KiB
C#
using System;
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using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Mainframe.Devices;
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using Mainframe.LLs;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
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namespace Mainframe.TMs.Routines
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{
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public class TMPumpRoutine : TMBaseRoutine
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{
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enum RoutineStep
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{
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//CheckForelinePressure,
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//RequestPump,
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//StartDelay,
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//RequestPumpDelay,
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//Pump,
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//PumpDelay,
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//Delay,
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CloseV77,
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CloseV80,
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SlowPump,
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FastPump,
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VaccumDelay,
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CloseValves,
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CLoseSlowValue,
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ClosePumpValveDelay,
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}
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//private SicTM _tm;
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private IoSensor _bufferLid;
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private IoSensor _tmLid;
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private Devices.IoPump _pumpType;
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private LoadLock _ll;
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private IoInterLock _tmIoInterLock;
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private double _forelineBasePressure;
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private double _pumpBasePressure;
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private double _slowFastPumpSwitchPressure;
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private int _waitForelineTimeout;
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private int _slowPumpTimeout;
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private int _fastPumpTime;
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private int _pumpDelayTime;
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private int _routineTimeOut;
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private bool _useSettingValue;
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private Stopwatch _swTimer = new Stopwatch();
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public TMPumpRoutine()
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{
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Module = ModuleName.TM.ToString();
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Name = "Pump";
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//_tm = DEVICE.GetDevice<SicTM>($"{ ModuleName.System.ToString()}.{ Module}");
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_ll = DEVICE.GetDevice<SicLoadLock>($"LoadLock.LoadLock");
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_bufferLid = DEVICE.GetDevice<IoSensor>($"Buffer.BufferLidClosed");
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_tmLid = DEVICE.GetDevice<IoSensor>($"TM.TMLidClosed");
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_pumpType = DEVICE.GetDevice<Devices.IoPump>($"TM.TMPump1");
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_tmIoInterLock = DEVICE.GetDevice<IoInterLock>("TM.IoInterLock");
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}
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public void Init()
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{
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_useSettingValue = false;
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}
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public void Init(double basePressure, int pumpDelayTime)
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{
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_pumpBasePressure = basePressure;
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_pumpDelayTime = pumpDelayTime;
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_useSettingValue = true;
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_forelineBasePressure = SC.GetValue<double>("TM.ForelinePressureBase");
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_slowFastPumpSwitchPressure = SC.GetValue<double>("TM.Pump.SlowFastPumpSwitchPressure");
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_waitForelineTimeout = SC.GetValue<int>("TM.WaitForelinePressureTimeout");
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_slowPumpTimeout = SC.GetValue<int>("TM.Pump.PumpSlowTimeout");
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_fastPumpTime = SC.GetValue<int>("TM.Pump.FastPumpTimeout");
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_routineTimeOut = SC.GetValue<int>("TM.Pump.RoutineTimeOut");
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if (!_useSettingValue)
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{
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_pumpBasePressure = SC.GetValue<double>("TM.Pump.PumpBasePressure");
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_pumpDelayTime = SC.GetValue<int>("TM.Pump.PumpDelayTime");
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}
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string reason;
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if (!TMDevice.SetFastPumpValve(false, out reason) || !TMDevice.SetFastVentValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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if (SC.GetValue<bool>("System.IsATMMode"))
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{
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EV.PostInfoLog(Module, $"system in atm mode, {TMDevice.Module} pump skipped");
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return Result.DONE;
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}
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if (SC.ContainsItem("TM.RunPumpRoutineEventBelowBasePressure") && !SC.GetValue<bool>("TM.RunPumpRoutineEventBelowBasePressure"))
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{
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if (TMDevice.ChamberPressure < _pumpBasePressure)
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{
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EV.PostInfoLog(Module, $"{TMDevice.Module} already under pump base pressure");
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return Result.DONE;
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}
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}
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ModuleName[] modules = new ModuleName[] { ModuleName.LoadLock, ModuleName.PM1 };
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foreach (var moduleName in modules)
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{
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if (!TMDevice.CheckSlitValveClose(moduleName))
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{
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EV.PostAlarmLog(Module, $"Can not pump, {moduleName} slit valve not closed");
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return Result.FAIL;
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}
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}
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if (!_ll.SetFastPumpValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not pump,LL fastPump can not close");
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return Result.FAIL;
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}
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if (!_bufferLid.Value)
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{
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EV.PostAlarmLog(Module, $"Can not pump,Buffer lid is not closed");
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return Result.FAIL;
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}
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if (!_tmLid.Value)
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{
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EV.PostAlarmLog(Module, $"Can not pump,TM lid is not closed");
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return Result.FAIL;
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}
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if (_pumpType.IsAlarm)
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{
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EV.PostAlarmLog(Module, $"can not pump,TM pump alarm");
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return Result.FAIL;
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}
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if (!_pumpType.IsRunning)
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{
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EV.PostAlarmLog(Module, $"can not pump,TM pump is not running");
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return Result.FAIL;
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}
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if (!TMDevice.SetTmToLLVent(false, out _))
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{
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EV.PostAlarmLog(Module, $"can not pump,can not close v85!");
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}
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if (!_tmIoInterLock.SetTMPumpRoutineRunning(true, out reason))
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{
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EV.PostAlarmLog(Module, $"can not pump,{reason}");
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return Result.FAIL;
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}
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_swTimer.Restart();
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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//CheckForelinePressure((int)RoutineStep.CheckForelinePressure, _tm, _forelineBasePressure, _waitForelineTimeout);
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//关闭V77
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CloseTMVent((int)RoutineStep.CloseV77);
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//关闭V80
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//CloseBufferVent((int)RoutineStep.CloseV80);
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//打开V82,等待压力低于200mbar(可配置)
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OpenSlowPump((int)RoutineStep.SlowPump, TMDevice, _slowFastPumpSwitchPressure, _slowPumpTimeout);
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//打开V81,压力达到0mbar(可配置)
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OpenFastPump((int)RoutineStep.FastPump, TMDevice, _pumpBasePressure, _fastPumpTime);
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//等待5s(可配置)
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TimeDelay((int)RoutineStep.VaccumDelay, _pumpDelayTime);
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//关闭
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CloseFastPump((int)RoutineStep.CloseValves, TMDevice);
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CloseSlowPump((int)RoutineStep.CLoseSlowValue, TMDevice);
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// 稍微等一下，确保DI状态更新
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TimeDelay((int)RoutineStep.ClosePumpValveDelay, 2);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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TMDevice.SetFastPumpValve(false, out _);
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TMDevice.SetSlowPumpValve(false, out _);
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return Result.FAIL;
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}
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_tmIoInterLock.DoTmPumpDownRoutineRunning = false;
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return Result.DONE;
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}
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public override void Abort()
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{
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_tmIoInterLock.DoTmPumpDownRoutineRunning = false;
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//_tm.SetFastPumpValve(false, out _);
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//_tm.SetSlowPumpValve(false, out _);
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base.Abort();
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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public void CheckPressure(int id, TM tm, double basePressure, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Check {tm.Name} pressure ");
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return true;
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}, () =>
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{
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return tm.ForelinePressure <= basePressure;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"{tm.Name} pressure can not lower than {basePressure} in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void CheckForelinePressure(int id, TM tm, double basePressure, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Check {tm.Name} foreline pressure ");
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return true;
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}, () =>
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{
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return tm.ForelinePressure <= basePressure;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"{tm.Name} foreline pressure can not lower than {basePressure} in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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}
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}
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