197 lines
6.3 KiB
C#
197 lines
6.3 KiB
C#
using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Mainframe.Devices;
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using MECF.Framework.Common.Equipment;
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namespace Mainframe.LLs.Routines
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{
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public class LoadLockPumpRoutine : LoadLockBaseRoutine
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{
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enum RoutineStep
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{
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CheckForelinePressure,
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RequestPump,
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RequestPumpDelay,
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SlowPump,
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CloseSlowValve,
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FastPump,
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PumpDelay,
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CloseFastValve,
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Delay,
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TimeDelay1,
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ClosePumpValveDelay
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}
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private double _pumpBasePressure=0;
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private double _forelineBasePressure;
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private double _pumpSwitchPressure;
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private int _waitForelineTimeout;
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private int _slowPumpTimeout;
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private int _fastPumpTimeout;
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private int _pumpDelayTime = 5;
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private int _routineTimeOut;
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private IoInterLock _tmIoInterLock;
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private bool _useSettingValue;
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private Stopwatch _swTimer = new Stopwatch();
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public LoadLockPumpRoutine(ModuleName module )
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{
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Module = module.ToString();
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Name = "Pump";
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_tmIoInterLock = DEVICE.GetDevice<IoInterLock>("TM.IoInterLock");
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}
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public void Init()
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{
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_useSettingValue = false;
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}
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public void Init(double basePressure, int pumpDelayTime)
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{
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_pumpBasePressure = basePressure;
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_pumpDelayTime = pumpDelayTime;
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_useSettingValue = true;
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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string reason;
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if (!LoadLockDevice.SetFastVentValve(false, out reason) || !LoadLockDevice.SetSlowVentValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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bool isAtmMode = SC.GetValue<bool>("System.IsATMMode");
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_forelineBasePressure = SC.GetValue<double>("LoadLock.ForelinePressureBase");
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_pumpSwitchPressure = SC.GetValue<double>("LoadLock.Pump.SlowFastPumpSwitchPressure");
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_waitForelineTimeout = SC.GetValue<int>("LoadLock.WaitForelinePressureTimeout");
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_slowPumpTimeout = SC.GetValue<int>("LoadLock.Pump.SlowPumpTimeout");
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_fastPumpTimeout = SC.GetValue<int>("LoadLock.Pump.FastPumpTimeout");
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_routineTimeOut = SC.GetValue<int>("LoadLock.Pump.RoutineTimeOut");
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if (!_useSettingValue)
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{
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_pumpBasePressure = SC.GetValue<double>("LoadLock.Pump.PumpBasePressure");
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_pumpDelayTime = SC.GetValue<int>("LoadLock.Pump.PumpDelayTime");
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}
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if (!TMDevice.SetFastPumpValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"can not pump, TM fast pump value can not close");
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return Result.FAIL;
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}
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if (isAtmMode)
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{
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EV.PostInfoLog(Module, $"system in atm mode, {LoadLockDevice.Module} pump skipped");
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return Result.DONE;
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}
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if (SC.ContainsItem("LoadLock.RunPumpRoutineEventBelowBasePressure") && !SC.GetValue<bool>("LoadLock.RunPumpRoutineEventBelowBasePressure"))
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{
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if (LoadLockDevice.ChamberPressure < _pumpBasePressure)
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{
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EV.PostInfoLog(Module, $"{LoadLockDevice.Module} already under pump base pressure");
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return Result.DONE;
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}
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}
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if (!LoadLockDevice.CheckLidClose())
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{
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EV.PostAlarmLog(Module, $"Can not pump, lid is open");
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return Result.FAIL;
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}
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if (!TMDevice.CheckSlitValveClose(ModuleHelper.Converter(LoadLockDevice.Module)))
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{
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EV.PostAlarmLog(Module, $"Can not pump, slit valve is open");
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return Result.FAIL;
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}
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if (!TMDevice.SetTmToLLVent(false, out _))
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{
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EV.PostAlarmLog(Module, $"can not pump,can not close v85!");
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}
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if (!_tmIoInterLock.SetLLPumpRoutineRunning(true, out reason))
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{
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EV.PostAlarmLog(Module, $"can not pump,{reason}");
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return Result.FAIL;
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}
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_swTimer.Restart();
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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TimeDelay((int)RoutineStep.RequestPumpDelay, 1);
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SlowPump((int)RoutineStep.SlowPump, _pumpSwitchPressure, _slowPumpTimeout);
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FastPump((int)RoutineStep.FastPump, _pumpBasePressure, _fastPumpTimeout);
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TimeDelay((int)RoutineStep.PumpDelay, _pumpDelayTime);
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CloseFastPumpValve((int)RoutineStep.CloseFastValve);
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CloseSlowPumpValve((int)RoutineStep.CloseSlowValve);
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// 稍微等一下,确保DI状态更新
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TimeDelay((int)RoutineStep.ClosePumpValveDelay, 2);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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LoadLockDevice.SetSlowPumpValve(false, out _);
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LoadLockDevice.SetFastPumpValve(false, out _);
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return Result.FAIL;
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}
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_tmIoInterLock.DoLLPumpDownRoutineRunning = false;
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return Result.DONE;
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}
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public override void Abort()
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{
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_tmIoInterLock.DoLLPumpDownRoutineRunning = false;
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base.Abort();
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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}
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}
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