279 lines
9.2 KiB
C#
279 lines
9.2 KiB
C#
using Aitex.Core.Common;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.IOCore;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.DataCenter;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.Schedulers;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.UnLoad;
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using System;
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using System.Xml;
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using MECF.Framework.RT.EquipmentLibrary.Core;
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namespace Mainframe.UnLoads
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{
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public class SicUnLoad : UnLoad
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{
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private IoLift4 _lift;
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private IoClaw _waferClaw;
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private IoSensor _lid;
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private IoValve _ventValve;
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private IoValve _slowPumpValve;
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private IoValve _fastPumpValve;
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private IoSensor _unLoadWaferPlaced;
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private IoSensor _unLoadTrayPlaed;
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private IoPressureMeter3 _forelineGuage;
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private IoPressureMeter3 _chamberGuage;
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private R_TRIG _trigWafer = new R_TRIG();
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private F_TRIG _trigNoWafer = new F_TRIG();
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private R_TRIG _trigSlowPumpLockerError = new R_TRIG();
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private R_TRIG _trigSlowPumpLockerNotExists = new R_TRIG();
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private IoSlitValve _EfemDoor;
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private IoSlitValve _VacDoor;
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private DeviceTimer _timerJobDone = new DeviceTimer();
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private double _balancePressureDiff = 0;
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public override double ChamberPressure
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{
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get
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{
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return _chamberGuage.Value;
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}
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}
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public override double ForelinePressure
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{
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get
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{
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return _forelineGuage.Value;
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}
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}
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public SicUnLoad(string module, XmlElement node, string ioModule = "") : base(module)
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{
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var attrModule = node.GetAttribute("module");
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base.Module = string.IsNullOrEmpty(attrModule) ? module : attrModule;
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base.Name = node.GetAttribute("id");
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base.Display = node.GetAttribute("display");
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}
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public override bool Initialize()
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{
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_slowPumpValve = DEVICE.GetDevice<IoValve>("TM.UnLoadSlowPump");
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_fastPumpValve = DEVICE.GetDevice<IoValve>("TM.UnLoadFastPump");
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_ventValve = DEVICE.GetDevice<IoValve>("TM.UnLoadVent");
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_lid = DEVICE.GetDevice<IoSensor>("UnLoad.UnloadLidClosed");
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_lift = DEVICE.GetDevice<IoLift4>("UnLoad.UnLoadLift");
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_waferClaw = DEVICE.GetDevice<IoClaw>("UnLoad.UnLoadWaferClaw");
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_unLoadWaferPlaced = DEVICE.GetDevice<IoSensor>("TM.UnLoadWaferPlaced");
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_unLoadTrayPlaed = DEVICE.GetDevice<IoSensor>("TM.UnLoadTrayPlaced");
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_chamberGuage = DEVICE.GetDevice<IoPressureMeter3>("TM.UnLoadPressure");
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_forelineGuage = DEVICE.GetDevice<IoPressureMeter3>("TM.ForelinePressure");
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_VacDoor = DEVICE.GetDevice<IoSlitValve>("TM.UnLoadDoor");
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_EfemDoor = DEVICE.GetDevice<IoSlitValve>("EFEM.UnLoadSubDoor");
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_balancePressureDiff = SC.GetValue<double>("TM.PressureBalance.BalanceMaxDiffPressure");
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return base.Initialize();
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}
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public override bool CheckAtm()
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{
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return _chamberGuage.Value >= SC.GetValue<double>("UnLoad.AtmPressureBase");
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}
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public override bool CheckVacuum()
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{
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return _chamberGuage.Value <= SC.GetValue<double>("UnLoad.VacuumPressureBase");
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}
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public override bool CheckTransferPressure()
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{
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return Math.Abs(SC.GetValue<double>("UnLoad.VacuumPressureBase") - _chamberGuage.Value) < _balancePressureDiff;
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}
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public override bool CheckIsPumping()
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{
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return _slowPumpValve.Status || _fastPumpValve.Status;
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}
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public override bool CheckLidClose()
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{
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return _lid.Value == true;
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}
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public override bool CheckLidOpen()
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{
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return _lid.Value != true;
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}
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public override bool SetLift(bool isUp, out string reason)
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{
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if(isUp)
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{
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return _lift.MoveUp(out reason);
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}
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else
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{
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return _lift.MoveDown(out reason);
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}
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}
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public override bool CheckLiftDown()
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{
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return _lift.IsDown;
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}
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public override bool CheckLiftUp()
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{
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return _lift.IsUp;
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}
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public override bool CheckWaferClamped()
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{
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return _waferClaw.IsClamp;
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}
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public override bool CheckWaferUnClamped()
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{
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return _waferClaw.IsUnClamp;
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}
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public override bool SetWaferClamped(bool clamp, out string reason)
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{
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return _waferClaw.SetValue(clamp, out reason);
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}
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public override bool CheckWaferPlaced()
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{
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return _unLoadWaferPlaced.Value;
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}
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public override bool CheckTrayPlaced()
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{
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return _unLoadTrayPlaed.Value;
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}
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public override bool SetSlowPumpValve(bool isOpen, out string reason)
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{
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var lockerOccupier = ModuleName.UnLoad.ToString();
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var lockerName = DeviceLockerManager.LockerNames.Pump2;
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/*reason = "";
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var ret = DeviceLockerManager.Results.Error;
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if (isOpen)
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// 锁定Pump2，注意结束后必须调用TryUnLock解除锁定。
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ret = DeviceLockerManager.Instance.TryLock(lockerName, lockerOccupier, out reason);
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// 如果锁不存在，说明源代码有错误
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_trigSlowPumpLockerNotExists.CLK = ret == DeviceLockerManager.Results.LockerNotExists;
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if (_trigSlowPumpLockerNotExists.Q)
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{
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LOG.Error($"Unable to lock the pump2, {reason}");
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return false;
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}
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// 没成功锁定，记录日志(仅第一次Error)并返回true，不要操作Pump2，并让程序继续跑，否则会报Alarm。
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_trigSlowPumpLockerError.CLK = ret == DeviceLockerManager.Results.Error;
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if (ret == DeviceLockerManager.Results.Error)
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{
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if (_trigSlowPumpLockerError.Q)
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LOG.Warning($"Unable to lock the pump2, {reason}");
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return true;
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}
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*/
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// 成功锁定后执行，
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var valveRet = _slowPumpValve.TurnValve(isOpen, out reason);
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var lockPump2 = DeviceLockerManager.Instance.GetLocker(DeviceLockerManager.LockerNames.Pump2);
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lockPump2?.TryUnlock(ModuleName.UnLoad.ToString(), out reason);
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/*// 如果Pump被关闭，则释放资源。
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if (!isOpen)
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{
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var ret = DeviceLockerManager.Instance.TryUnLock(lockerName, lockerOccupier, out reason);
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// 如果锁不存在，说明源代码有错误
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_trigSlowPumpLockerNotExists.CLK = ret == DeviceLockerManager.Results.LockerNotExists;
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if (_trigSlowPumpLockerNotExists.Q)
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{
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LOG.Error($"Unable to unlock the pump2, {reason}");
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return false;
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}
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// 没成功锁定，记录日志(仅第一次Error)并返回true，不要操作Pump2，并让程序继续跑，否则会报Alarm。
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_trigSlowPumpLockerError.CLK = ret == DeviceLockerManager.Results.Error;
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if (ret == DeviceLockerManager.Results.Error)
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{
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if (_trigSlowPumpLockerError.Q)
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LOG.Warning($"Unable to unlock the pump2, {reason}");
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return true;
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}
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}*/
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return valveRet;
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}
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public override bool SetFastPumpValve(bool isOpen, out string reason)
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{
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return _fastPumpValve.TurnValve(isOpen, out reason);
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}
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public override bool SetFastVentValve(bool isOpen, out string reason)
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{
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return _ventValve.TurnValve(isOpen, out reason);
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}
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public override bool SetSlowVentValve(bool isOpen, out string reason)
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{
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return _ventValve.TurnValve(isOpen, out reason);
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}
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public bool CheckSlitValveClosed()
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{
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return _VacDoor.IsClose && _EfemDoor.IsClose;
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}
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public override bool CheckEnableTransfer(EnumTransferType type)
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{
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return true;// CheckLiftUp() || CheckLiftDown();
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}
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public override void Monitor()
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{
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//增加过冲关闭Vent阀门
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if (_chamberGuage.FeedBack >= SC.GetValue<double>("UnLoad.VentMaxPressure") && SC.GetValue<double>("UnLoad.VentMaxPressure") > SC.GetValue<double>("UnLoad.AtmPressureBase"))
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{
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if (_ventValve.Status)
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{
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SetFastVentValve(false, out string reason);
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}
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}
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}
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public override void Reset()
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{
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DeviceLockerManager.Instance.GetLocker(DeviceLockerManager.LockerNames.Pump2)?.Reset();
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}
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}
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}
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