1751 lines
56 KiB
C#
1751 lines
56 KiB
C#
using System.Collections.Generic;
|
||
using System.Collections.ObjectModel;
|
||
using Aitex.Core.Common.DeviceData;
|
||
using Aitex.Core.Util;
|
||
using Caliburn.Micro;
|
||
using MECF.Framework.Common.OperationCenter;
|
||
using System;
|
||
using System.Linq;
|
||
using MECF.Framework.Common.DataCenter;
|
||
using MECF.Framework.UI.Client.CenterViews.Editors.Sequence;
|
||
using MECF.Framework.UI.Client.CenterViews.Editors.Recipe;
|
||
using MECF.Framework.UI.Client.ClientBase;
|
||
using System.Windows;
|
||
using RecipeEditorLib.DGExtension.CustomColumn;
|
||
using RecipeEditorLib.RecipeModel.Params;
|
||
using System.Windows.Controls;
|
||
using Caliburn.Micro.Core;
|
||
using System.Windows.Media;
|
||
using SicUI.Client;
|
||
using System.Windows.Threading;
|
||
using MECF.Framework.UI.Client.CenterViews.Editors;
|
||
using SicUI.Controls;
|
||
using SicUI.Controls.Dialogs;
|
||
using OpenSEMI.ClientBase;
|
||
|
||
namespace SicUI.Models.PMs
|
||
{
|
||
public class PMProcessViewModel : SicModuleUIViewModelBase, ISupportMultipleSystem, IHandle<ShowMonitorWinEvent>
|
||
{
|
||
private double _tmaFlowRatio = 1;
|
||
private double _tcsFlowRatio = 1;
|
||
private double _hclFlowRatio = 1;
|
||
private double _C2H4FlowRatio = 1;
|
||
private double _sih4FlowRatio = 1;
|
||
private double _pn2FlowRatio = 1;
|
||
|
||
#region properties
|
||
|
||
public bool IsPermission { get => this.Permission == 3; }
|
||
|
||
[Subscription("IsBusy")]
|
||
public bool IsBusy { get; set; }
|
||
|
||
[Subscription("Status")]
|
||
public string Status { get; set; }
|
||
|
||
public bool IsPMProcess => Status == "Process" || Status == "PostProcess" || Status == "Paused" || Status == "PMMacroPause" || Status == "PMMacro" || Status == "PostPMMacro";
|
||
public bool IsPreProcess => Status == "PreProcess" || Status == "PrePMMacro";
|
||
|
||
[Subscription("IsOnline")]
|
||
public bool IsOnline { get; set; }
|
||
|
||
[Subscription("Recipe.DeviceData")]
|
||
public AITDeviceData Recipe { get; set; }
|
||
public float[] RecipeData1 => RecipeData;
|
||
public float[] RecipeData = new float[] { 1, 2, 3, 4, 5, 6, 7, 8, 9, 9, 10, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 11, 1, 1, 1, 1, 11, 1, 1, 1, 1, 1, 1, 1, 1, 1, 11, 1, 11, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1 };
|
||
|
||
|
||
private string selectedRecipe;
|
||
public string SelectedRecipe
|
||
{
|
||
set
|
||
{
|
||
selectedRecipe = value;
|
||
}
|
||
get
|
||
{
|
||
return selectedRecipe;
|
||
}
|
||
}
|
||
|
||
public string SelectedRecipeDispaly
|
||
{
|
||
get
|
||
{
|
||
if (SelectedRecipe != null)
|
||
{
|
||
int index = SelectedRecipe.LastIndexOf(@"\");
|
||
if (index > 0)
|
||
{
|
||
return SelectedRecipe.Substring(index + 1);
|
||
}
|
||
}
|
||
return SelectedRecipe;
|
||
|
||
}
|
||
}
|
||
|
||
private string SelectedRecipePath { get; set; }
|
||
|
||
|
||
[Subscription("RecipeStepName")]
|
||
public string RecipeStepName { get; set; }
|
||
|
||
[Subscription("RecipeStepNumber")]
|
||
public int RecipeStepNumber { get; set; }
|
||
|
||
[Subscription("ArH2Switch")]
|
||
public string ArH2Switch { get; set; }
|
||
|
||
[Subscription("N2FlowMode")]
|
||
public string N2FlowMode { get; set; }
|
||
|
||
[Subscription("RecipeStepElapseTime")]
|
||
public int RecipeStepElapseTime { get; set; }
|
||
|
||
[Subscription("RecipeStepTime")]
|
||
public int RecipeStepTime { get; set; }
|
||
|
||
[Subscription("RecipeStepElapseTime2")]
|
||
public int RecipeStepElapseTime2 { get; set; }
|
||
|
||
[Subscription("RecipeTotalElapseTime")]
|
||
public int RecipeTotalElapseTime { get; set; }
|
||
|
||
[Subscription("RecipeTotalTime")]
|
||
public int RecipeTotalTime { get; set; }
|
||
|
||
[Subscription("RecipeTotalElapseTime2")]
|
||
public int RecipeTotalElapseTime2 { get; set; }
|
||
|
||
public string StepNumber
|
||
{
|
||
get
|
||
{
|
||
if (IsPMProcess)
|
||
{
|
||
return $"{RecipeStepNumber}";
|
||
}
|
||
else if (IsPreProcess)
|
||
{
|
||
return "0";
|
||
}
|
||
return "--";
|
||
|
||
}
|
||
set
|
||
{
|
||
|
||
}
|
||
}
|
||
|
||
public string StepName
|
||
{
|
||
get
|
||
{
|
||
if (IsPMProcess)
|
||
{
|
||
return $"{RecipeStepName}";
|
||
}
|
||
else if (IsPreProcess)
|
||
{
|
||
return "0";
|
||
}
|
||
return "--";
|
||
}
|
||
}
|
||
|
||
public string StepTime
|
||
{
|
||
get
|
||
{
|
||
if (IsPMProcess)
|
||
{
|
||
return $"{RecipeStepElapseTime}/{RecipeStepTime}";
|
||
}
|
||
else if (IsPreProcess)
|
||
{
|
||
return "0";
|
||
}
|
||
return "--";
|
||
|
||
}
|
||
}
|
||
|
||
public string RecipeTime
|
||
{
|
||
get
|
||
{
|
||
if (IsPMProcess)
|
||
{
|
||
return $"{RecipeTotalElapseTime}/{RecipeTotalTime}";
|
||
}
|
||
else if (IsPreProcess)
|
||
{
|
||
return "0";
|
||
}
|
||
return "--";
|
||
}
|
||
}
|
||
|
||
//qbh 20220523
|
||
private int x = 0;
|
||
private DispatcherTimer timer;
|
||
private WinProcessMonitor _winProcessMonitor = null;
|
||
|
||
public event EventHandler TimerEvent;
|
||
|
||
//
|
||
public RecipeData CurrentRecipe { get; set; } = new RecipeData();
|
||
public ObservableCollection<EditorDataGridTemplateColumnBase> Columns { get; set; } = new ObservableCollection<EditorDataGridTemplateColumnBase>();
|
||
|
||
private RecipeFormatBuilder _columnBuilder = new RecipeFormatBuilder();
|
||
|
||
public bool IsSelectButtonEnable => !string.IsNullOrEmpty(Status) && !Status.Equals("Process")
|
||
&& !Status.Equals("PreProcess") && !Status.Equals("PostProcess") && !Status.Equals("Paused") && !IsOnline;
|
||
public bool IsStartButtonEnable => !string.IsNullOrEmpty(SelectedRecipe) && !string.IsNullOrEmpty(Status)
|
||
&& !Status.Equals("Process") && !Status.Equals("PreProcess") && !Status.Equals("PostProcess") &&
|
||
!Status.Equals("PrePMMacro") && !Status.Equals("PMMacro") && !Status.Equals("PostPMMacro") &&
|
||
!Status.Equals("Paused") && !IsOnline;// !IsProcessRunning;
|
||
public bool IsStopButtonEnable => !string.IsNullOrEmpty(Status) && (Status.Equals("Process") || Status.Equals("PMMacro")) && !IsOnline;
|
||
public bool IsAbortButtonEnable => !string.IsNullOrEmpty(Status) && (Status.Equals("Process") || Status.Equals("PMMacro")) && !IsOnline; //|| Status.Equals("PreProcess") || Status.Equals("PostProcess") || Status.Equals("Paused"));//IsProcessRunning;
|
||
public bool IsPauseButtonEnable => !string.IsNullOrEmpty(Status) && (Status.Equals("Process") || Status.Equals("PMMacro")) && !IsOnline;
|
||
public bool IsSkipButtonEnable => !string.IsNullOrEmpty(Status) && Status.Equals("Process") && !IsOnline;
|
||
public bool IsContinueButtonEnable => !string.IsNullOrEmpty(Status) && (Status.Equals("Paused") || Status.Equals("PMMacroPause")) && !IsOnline;
|
||
|
||
public WaferInfo MLLWafer
|
||
{
|
||
get
|
||
{
|
||
if (ModuleManager.ModuleInfos["LLH"].WaferManager.Wafers.Count > 0)
|
||
return ModuleManager.ModuleInfos["LLH"].WaferManager.Wafers[0];
|
||
return null;
|
||
}
|
||
}
|
||
|
||
public bool MLLHasWafer
|
||
{
|
||
get
|
||
{
|
||
return MLLWafer.WaferStatus > 0;
|
||
}
|
||
}
|
||
|
||
public WaferInfo PMWafer
|
||
{
|
||
get
|
||
{
|
||
if (ModuleManager.ModuleInfos[SystemName].WaferManager.Wafers.Count > 0)
|
||
return ModuleManager.ModuleInfos[SystemName].WaferManager.Wafers[0];
|
||
return null;
|
||
}
|
||
}
|
||
|
||
public bool PMHasWafer => PMWafer.WaferStatus > 0;
|
||
|
||
public Dictionary<int, string> DicGas { get; set; }
|
||
|
||
public int MLLCurrentWafer { get; set; }
|
||
public int MLLTotalWafer { get; set; }
|
||
|
||
// public bool IsEnableGasMap => !IsBusy && IsMaintainMode;
|
||
|
||
//public string SystemName { get => throw new NotImplementedException(); set => throw new NotImplementedException(); }
|
||
|
||
public object View { get; set; }
|
||
|
||
public string CurrentProcessType { get; set; }
|
||
|
||
private bool needLoadRecipe = false;
|
||
|
||
#endregion
|
||
|
||
protected override void OnActivate()
|
||
{
|
||
try
|
||
{
|
||
if (String.IsNullOrEmpty(SelectedRecipePath))
|
||
{
|
||
needLoadRecipe = false;
|
||
SelectedRecipePath = (string)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.LastRecipeName");
|
||
if (!string.IsNullOrEmpty(SelectedRecipePath))
|
||
{
|
||
if (SelectedRecipePath.StartsWith("Sic\\Process"))
|
||
{
|
||
CurrentProcessType = "Process";
|
||
}
|
||
else if (SelectedRecipePath.StartsWith("Sic\\Routine"))
|
||
{
|
||
CurrentProcessType = "Routine";
|
||
}
|
||
UpdateRecipeFormat();
|
||
LoadData(SelectedRecipePath);
|
||
}
|
||
}
|
||
|
||
//流量需要乘以此系数
|
||
_tmaFlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.TMAFlowRatio");
|
||
_tcsFlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.TCSFlowRatio");
|
||
_hclFlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.HCLFlowRatio");
|
||
_C2H4FlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.C2H4FlowRatio");
|
||
_sih4FlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.SiH4FlowRatio");
|
||
_pn2FlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.PN2FlowRatio");
|
||
base.OnActivate();
|
||
}
|
||
catch (Exception ex)
|
||
{ }
|
||
}
|
||
protected override void OnDeactivate(bool close)
|
||
{
|
||
ActiveUpdateData = true;
|
||
base.OnDeactivate(close);
|
||
}
|
||
|
||
protected override void OnInitialize()
|
||
{
|
||
base.OnInitialize();
|
||
|
||
//权限
|
||
string roleID = BaseApp.Instance.UserContext.RoleID;
|
||
stepsVisibility = RoleAccountProvider.Instance.GetMenuPermission(roleID, "PM1.Process.Steps") == 3;
|
||
//qbh 20220523
|
||
TimerEvent = new EventHandler(myTimerEvent);
|
||
|
||
|
||
}
|
||
|
||
private bool stepsVisibility;
|
||
public bool StepsVisibility
|
||
{
|
||
get { return stepsVisibility; }
|
||
}
|
||
|
||
public void UpdateRecipeFormat()
|
||
{
|
||
this.Columns = this._columnBuilder.Build($"Sic\\{CurrentProcessType}", SystemName, false, ClientApp.Instance.UserContext.RoleName);
|
||
|
||
this.CurrentRecipe = new RecipeData();
|
||
CurrentRecipe.RecipeChamberType = _columnBuilder.RecipeChamberType;
|
||
CurrentRecipe.RecipeVersion = _columnBuilder.RecipeVersion;
|
||
|
||
CurrentRecipe.PopEnable.Add("Oes", _columnBuilder.OesConfig.Count > 0);
|
||
CurrentRecipe.PopEnable.Add("Vat", _columnBuilder.VatConfig.Count > 0);
|
||
CurrentRecipe.PopEnable.Add("FineTuning", _columnBuilder.FineTuningConfig.Count > 0);
|
||
}
|
||
|
||
protected override void Poll()
|
||
{
|
||
try
|
||
{
|
||
base.Poll();
|
||
string lastPath = (string)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.LastRecipeName");
|
||
|
||
if (SelectedRecipePath != lastPath)
|
||
{
|
||
needLoadRecipe = true;
|
||
}
|
||
SelectedRecipePath = lastPath;
|
||
if (SelectedRecipePath.StartsWith("Sic\\Process"))
|
||
{
|
||
CurrentProcessType = "Process";
|
||
}
|
||
else if (SelectedRecipePath.StartsWith("Sic\\Routine"))
|
||
{
|
||
CurrentProcessType = "Routine";
|
||
}
|
||
|
||
if (!string.IsNullOrEmpty(SelectedRecipePath))
|
||
{
|
||
var array = SelectedRecipePath.Split(new char[] { '\\' });
|
||
|
||
if (SelectedRecipe != array[array.Length - 1])
|
||
{
|
||
SelectedRecipe = array[array.Length - 1];
|
||
|
||
//if (SelectedRecipePath.StartsWith("Sic\\Process"))
|
||
//{
|
||
// InvokeClient.Instance.Service.DoOperation($"{SystemName}.Recipe.SetRecipeData", SelectedRecipePath);
|
||
//}
|
||
}
|
||
}
|
||
|
||
|
||
}
|
||
catch (Exception ex)
|
||
{
|
||
|
||
}
|
||
}
|
||
|
||
protected override void InvokeAfterUpdateProperty(Dictionary<string, object> data)
|
||
{
|
||
try
|
||
{
|
||
if (needLoadRecipe)
|
||
{
|
||
needLoadRecipe = false;
|
||
UpdateRecipeFormat();
|
||
OnViewLoaded(View);
|
||
LoadData(SelectedRecipePath);
|
||
}
|
||
|
||
base.InvokeAfterUpdateProperty(data);
|
||
}
|
||
catch (Exception ex)
|
||
{
|
||
|
||
}
|
||
}
|
||
|
||
// <summary>
|
||
/// 展开DataGrid列组。
|
||
/// </summary>
|
||
/// <param name="col"></param>
|
||
public void ExpandColumnsGroup(ExpanderColumn col)
|
||
{
|
||
foreach (var subCol in col.ChildColumns)
|
||
{
|
||
subCol.UpdateVisibility();
|
||
}
|
||
}
|
||
|
||
/// <summary>
|
||
/// 折叠DataGrid列组。
|
||
/// </summary>
|
||
/// <param name="col"></param>
|
||
public void CollapseColumnsGroup(ExpanderColumn col)
|
||
{
|
||
foreach (var subCol in col.ChildColumns)
|
||
{
|
||
subCol.Visibility = Visibility.Collapsed;
|
||
}
|
||
}
|
||
|
||
public void ParamsExpanded(ExpanderColumn col)
|
||
{
|
||
int index = this.Columns.IndexOf(col);
|
||
for (var i = index + 1; i < this.Columns.Count; i++)
|
||
{
|
||
if (this.Columns[i] is ExpanderColumn)
|
||
break;
|
||
this.Columns[i].Visibility = Visibility.Visible;
|
||
}
|
||
}
|
||
|
||
public void ParamsCollapsed(ExpanderColumn col)
|
||
{
|
||
int index = this.Columns.IndexOf(col);
|
||
for (var i = index + 1; i < this.Columns.Count; i++)
|
||
{
|
||
if (this.Columns[i] is ExpanderColumn)
|
||
break;
|
||
this.Columns[i].Visibility = Visibility.Collapsed;
|
||
}
|
||
}
|
||
|
||
protected override void OnViewLoaded(object view)
|
||
{
|
||
View = view;
|
||
base.OnViewLoaded(view);
|
||
RecipeFormatBuilder.ApplyTemplate((UserControl)view, this.Columns);
|
||
PMProcessView u = (PMProcessView)view;
|
||
u.dgCustom.Columns.Clear();
|
||
|
||
this.Columns.Apply((c) =>
|
||
{
|
||
c.Header = c;
|
||
u.dgCustom.Columns.Add(c);
|
||
|
||
});
|
||
u.dgCustom.ItemsSource = this.CurrentRecipe.Steps;
|
||
u.dgCustom.FrozenColumnCount = 4;
|
||
}
|
||
|
||
|
||
public void Select()
|
||
{
|
||
var dialog = new RecipeSelectDialogViewModel();
|
||
dialog.DisplayName = "Select Recipe";
|
||
|
||
var recipeProvider = new RecipeProvider();
|
||
var processType = QueryDataClient.Instance.Service.GetConfig("System.Recipe.SupportedProcessType");
|
||
if (processType == null)
|
||
{
|
||
processType = "Process,Routine";
|
||
}
|
||
|
||
var ProcessTypeFileList = new ObservableCollection<ProcessTypeFileItem>();
|
||
string[] recipeProcessType = ((string)processType).Split(',');
|
||
|
||
for (int i = 0; i < recipeProcessType.Length; i++)
|
||
{
|
||
var type = new ProcessTypeFileItem();
|
||
type.ProcessType = recipeProcessType[i];
|
||
var prefix = $"Sic\\{recipeProcessType[i]}";
|
||
var recipes = recipeProvider.GetXmlRecipeList(prefix);
|
||
type.FileListByProcessType = RecipeSequenceTreeBuilder.BuildFileNode(prefix, "", false, recipes)[0].Files;
|
||
ProcessTypeFileList.Add(type);
|
||
}
|
||
|
||
dialog.ProcessTypeFileList = ProcessTypeFileList;
|
||
|
||
WindowManager wm = new WindowManager();
|
||
bool? bret = wm.ShowDialog(dialog);
|
||
|
||
/*
|
||
if (!this.CheckColumnDataAvalible())
|
||
{
|
||
//return;
|
||
}*/
|
||
|
||
if ((bool)bret)
|
||
{
|
||
SelectedRecipePath = dialog.DialogResult;
|
||
|
||
if (SelectedRecipePath.StartsWith("Sic\\Process"))
|
||
{
|
||
CurrentProcessType = "Process";
|
||
}
|
||
else if (SelectedRecipePath.StartsWith("Sic\\Routine"))
|
||
{
|
||
CurrentProcessType = "Routine";
|
||
}
|
||
|
||
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SelectRecipe", SelectedRecipePath);
|
||
InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"PM.{SystemName}.LastRecipeName", SelectedRecipePath); // 记录最后一次工艺文件名称
|
||
|
||
UpdateRecipeFormat();
|
||
OnViewLoaded(View);
|
||
LoadData(SelectedRecipePath);
|
||
}
|
||
|
||
}
|
||
|
||
public bool CheckColumnDataAvalible()
|
||
{
|
||
//return true;
|
||
|
||
//if (CurrentProcessType == ProcessTypeFileList[1].ProcessType)
|
||
//{
|
||
// return true;
|
||
//}
|
||
|
||
List<string> lstNotCorrectInfo = new List<string>();
|
||
List<string> lstOutOfRange = new List<string>();
|
||
|
||
List<int> lstSplitColums = new List<int>()
|
||
{
|
||
(int)RecipColNo.SHTotalFlowSplitRatio,
|
||
(int)RecipColNo.SiSourceSplitRatio,
|
||
(int)RecipColNo.CSourceSplitRatio,
|
||
(int)RecipColNo.DopeSplitRatio
|
||
};
|
||
|
||
|
||
for (var a = 0; a < this.CurrentRecipe.Steps.Count; a++)
|
||
{
|
||
var invalidParam =
|
||
CurrentRecipe.Steps[a]
|
||
.Where(param => param is IParam p && p.IsValidated == false).ToList();
|
||
|
||
lstNotCorrectInfo.AddRange(invalidParam.Cast<IParam>()
|
||
.Select(iparam => $"(Step {a + 1}) {iparam.DisplayName}: {iparam.ValidationError}"));
|
||
|
||
/*for (int i = 0; i < this.Columns.Count; i++)
|
||
{
|
||
if (this.Columns[i] is DoubleColumn)
|
||
{
|
||
DoubleColumn column = (DoubleColumn)this.Columns[i];
|
||
double maxValue = column.Maximun;
|
||
double minValue = column.Minimun;
|
||
|
||
if (maxValue != minValue)
|
||
{
|
||
double cValue = 0;
|
||
if (!double.TryParse((this.CurrentRecipe.Steps[a][i] as DoubleParam).Value, out cValue))
|
||
{
|
||
if ((this.CurrentRecipe.Steps[a][i] as DoubleParam).Value != "Hold")
|
||
{
|
||
lstNotCorrectInfo.Add($"Step {a + 1} {column.DisplayName}: value {(this.CurrentRecipe.Steps[a][i] as DoubleParam).Value} is incorrect numerical format ");
|
||
(this.CurrentRecipe.Steps[a][i] as DoubleParam).Foreground = "Red";
|
||
}
|
||
}
|
||
else if (cValue > maxValue || cValue < minValue)
|
||
{
|
||
lstOutOfRange.Add($"Step {a + 1} {column.DisplayName}: value {cValue} is out of range {minValue}-{maxValue}");
|
||
(this.CurrentRecipe.Steps[a][i] as DoubleParam).Foreground = "Red";
|
||
}
|
||
}
|
||
}
|
||
else if (lstSplitColums.Contains(i))
|
||
{
|
||
double a1 = 0;
|
||
double a2 = 0;
|
||
double a3 = 0;
|
||
string[] arrSplitRatio = (this.CurrentRecipe.Steps[a][i] as StringParam).Value.Split(':');
|
||
if (arrSplitRatio.Length != 3
|
||
|| !double.TryParse(arrSplitRatio[0], out a1) || !double.TryParse(arrSplitRatio[1], out a2) || !double.TryParse(arrSplitRatio[2], out a3)
|
||
|| a1 <= 0 || a2 <= 0 || a3 <= 0)
|
||
{
|
||
lstNotCorrectInfo.Add($"(Step {i + 1}) {this.Columns[i].DisplayName}: value is not avalible!");
|
||
}
|
||
}
|
||
}*/
|
||
}
|
||
|
||
if (lstNotCorrectInfo.Count > 0 || lstOutOfRange.Count > 0)
|
||
{
|
||
string strInfo = "";
|
||
for (int i = 0; i < lstNotCorrectInfo.Count; i++)
|
||
{
|
||
strInfo += lstNotCorrectInfo[i] + "\r\n";
|
||
}
|
||
for (int i = 0; i < lstOutOfRange.Count; i++)
|
||
{
|
||
strInfo += lstOutOfRange[i] + "\r\n";
|
||
}
|
||
MessageBox.Show(strInfo, "Warning", MessageBoxButton.OK, MessageBoxImage.Warning);
|
||
return false;
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
public void DeleteProcessData()
|
||
{
|
||
|
||
}
|
||
|
||
private void LoadData(string selectedRecipePath)
|
||
{
|
||
CurrentRecipe.Clear();
|
||
|
||
var array = selectedRecipePath.Split(new char[] { '\\' });
|
||
|
||
string recipeName = array[array.Length - 1];
|
||
string prefixPath = SelectedRecipePath.Replace(recipeName, "");
|
||
|
||
var _recipeProvider = new RecipeProvider();
|
||
var recipeContent = _recipeProvider.ReadRecipeFile(prefixPath, recipeName);
|
||
|
||
if (string.IsNullOrEmpty(recipeContent))
|
||
{
|
||
MessageBox.Show($"{prefixPath}\\{recipeName} is empty, please confirm the file is valid.");
|
||
return;
|
||
}
|
||
|
||
CurrentRecipe.RecipeChamberType = _columnBuilder.RecipeChamberType;
|
||
CurrentRecipe.RecipeVersion = _columnBuilder.RecipeVersion;
|
||
|
||
CurrentRecipe.InitData(prefixPath, recipeName, recipeContent, Columns,
|
||
_columnBuilder.Configs, SystemName, null);
|
||
}
|
||
|
||
public void Start()
|
||
{
|
||
ChooseDialogBoxViewModel dialog = new ChooseDialogBoxViewModel();
|
||
dialog.DisplayName = "Tips";
|
||
dialog.InfoStr = "Please Check All Gas Ready Before Start Process!";
|
||
|
||
WindowManager wm = new WindowManager();
|
||
bool? bret = wm.ShowDialog(dialog);
|
||
if (!bret.HasValue || !bret.Value)
|
||
{
|
||
return;
|
||
}
|
||
|
||
var array = SelectedRecipePath.Split(new char[] { '\\' });
|
||
if (array[1] == "Process")
|
||
{
|
||
InvokeClient.Instance.Service.DoOperation($"{SystemName}.RunRecipe", SelectedRecipePath, false, true);
|
||
}
|
||
else if (array[1] == "Routine")
|
||
{
|
||
InvokeClient.Instance.Service.DoOperation($"{SystemName}.RunPMMacro", SelectedRecipePath);
|
||
}
|
||
}
|
||
|
||
public void Skip()
|
||
{
|
||
var ret = ShowYesNoDialog("Are you sure to skip the current recipe?", "Warn");
|
||
if (ret.HasValue && ret == true)
|
||
{
|
||
InvokeClient.Instance.Service.DoOperation($"{SystemName}.RecipeSkipStep");
|
||
}
|
||
}
|
||
|
||
public void Stop()
|
||
{
|
||
var ret = ShowYesNoDialog("Are you sure to stop the current recipe?", "Warn");
|
||
if (ret.HasValue && ret == true)
|
||
{
|
||
InvokeClient.Instance.Service.DoOperation($"{SystemName}.Abort");
|
||
}
|
||
|
||
}
|
||
|
||
public void Pause()
|
||
{
|
||
var ret = ShowYesNoDialog("Are you sure to pause the current recipe?", "Warn");
|
||
if (ret.HasValue && ret == true)
|
||
{
|
||
InvokeClient.Instance.Service.DoOperation($"{SystemName}.Pause");
|
||
}
|
||
}
|
||
|
||
public void Continue()
|
||
{
|
||
var ret = ShowYesNoDialog("Are you sure to continue to run the current recipe?", "Warn");
|
||
if (ret.HasValue && ret == true)
|
||
{
|
||
InvokeClient.Instance.Service.DoOperation($"{SystemName}.Continue", "Step continue");
|
||
}
|
||
}
|
||
|
||
public void Abort()
|
||
{
|
||
var ret = ShowYesNoDialog("Are you sure to abort the current recipe?", "Warn");
|
||
if (ret.HasValue && ret == true)
|
||
{
|
||
InvokeClient.Instance.Service.DoOperation($"{SystemName}.Abort");
|
||
}
|
||
}
|
||
|
||
/// <summary>
|
||
/// To fix issue 6: 对运行中的Job操作时弹出提示对话框。
|
||
/// </summary>
|
||
/// <param name="message"></param>
|
||
/// <param name="title"></param>
|
||
/// <returns></returns>
|
||
private static bool? ShowYesNoDialog(string message, string title)
|
||
{
|
||
var ret = DialogBox.ShowDialog(DialogButton.Yes | DialogButton.No, DialogType.CONFIRM, message, title);
|
||
if (ret == DialogButton.Yes)
|
||
return true;
|
||
|
||
return null;
|
||
}
|
||
|
||
#region 腔体绑定数据
|
||
[Subscription("TC1.L1InputTempSetPoint")]
|
||
public float L1InputTemp { get; set; }
|
||
|
||
[Subscription("TC1.L2InputTempSetPoint")]
|
||
public float L2InputTemp { get; set; }
|
||
|
||
[Subscription("TC1.L3InputTempSetPoint")]
|
||
public float L3InputTemp { get; set; }
|
||
|
||
[Subscription("TC2.L3InputTempSetPoint")]
|
||
public float SCRL3InputTemp { get; set; }
|
||
|
||
|
||
[Subscription("TC1.L1TargetSPSetPoint")]
|
||
public float L1TargetSP { get; set; }
|
||
|
||
[Subscription("TC1.L2TargetSPSetPoint")]
|
||
public float L2TargetSP { get; set; }
|
||
|
||
[Subscription("TC1.L3TargetSPSetPoint")]
|
||
public float L3TargetSP { get; set; }
|
||
|
||
[Subscription("TC2.L3TargetSPSetPoint")]
|
||
public float SCRL3TargetSP { get; set; }
|
||
|
||
[Subscription("TC1.TempCtrlTCIN")]
|
||
public float PM1Temprature { get; set; }
|
||
|
||
//底部温度
|
||
[Subscription("TC1.TempCtrlTCIN")]
|
||
public float TC1Temp2 { get; set; }
|
||
|
||
[Subscription("TC1.HeaterModeSetPoint")]
|
||
public float TC1HeaterMode { get; set; }
|
||
public string TC1Mode
|
||
{
|
||
get
|
||
{
|
||
switch (TC1HeaterMode)
|
||
{
|
||
case 0: return "Power";
|
||
case 1: return "Pyro";
|
||
}
|
||
return "Power";
|
||
|
||
}
|
||
}
|
||
|
||
[Subscription("TC2.HeaterModeSetPoint")]
|
||
public float TC2HeaterMode { get; set; }
|
||
public string TC2Mode
|
||
{
|
||
get
|
||
{
|
||
switch (TC2HeaterMode)
|
||
{
|
||
case 0: return "Power";
|
||
case 1: return "TC";
|
||
case 2: return "Pyro";
|
||
}
|
||
return "Power";
|
||
|
||
}
|
||
}
|
||
|
||
|
||
[Subscription("SCR1.PowerFeedBack")]
|
||
public float SCR1Power { get; set; }
|
||
|
||
[Subscription("SCR2.PowerFeedBack")]
|
||
public float SCR2Power { get; set; }
|
||
|
||
[Subscription("SCR3.PowerFeedBack")]
|
||
public float SCR3Power { get; set; }
|
||
|
||
[Subscription("PSU1.OutputPowerFeedBack")]
|
||
public float PSU1Power { get; set; }
|
||
|
||
[Subscription("PSU2.OutputPowerFeedBack")]
|
||
public float PSU2Power { get; set; }
|
||
|
||
[Subscription("PSU3.OutputPowerFeedBack")]
|
||
public float PSU3Power { get; set; }
|
||
|
||
|
||
[Subscription("PMServo.ActualSpeedFeedback")]
|
||
public float ActualSpeedFeedback { get; set; }
|
||
|
||
[Subscription("PT1.FeedBack")]
|
||
public float PT1Pressure { get; set; }
|
||
#endregion 腔体绑定数据
|
||
|
||
#region MFC
|
||
[Subscription("Mfc1.DeviceData")]
|
||
public AITMfcData Mfc1Data { get; set; }
|
||
|
||
[Subscription("Mfc2.DeviceData")]
|
||
public AITMfcData Mfc2Data { get; set; }
|
||
|
||
[Subscription("Mfc3.DeviceData")]
|
||
public AITMfcData Mfc3Data { get; set; }
|
||
|
||
[Subscription("Mfc4.DeviceData")]
|
||
public AITMfcData Mfc4Data { get; set; }
|
||
|
||
[Subscription("Mfc5.DeviceData")]
|
||
public AITMfcData Mfc5Data { get; set; }
|
||
|
||
[Subscription("Mfc6.DeviceData")]
|
||
public AITMfcData Mfc6Data { get; set; }
|
||
|
||
[Subscription("Mfc7.DeviceData")]
|
||
public AITMfcData Mfc7Data { get; set; }
|
||
|
||
[Subscription("Mfc8.DeviceData")]
|
||
public AITMfcData Mfc8Data { get; set; }
|
||
|
||
[Subscription("Mfc9.DeviceData")]
|
||
public AITMfcData Mfc9Data { get; set; }
|
||
|
||
[Subscription("Mfc10.DeviceData")]
|
||
public AITMfcData Mfc10Data { get; set; }
|
||
|
||
[Subscription("Mfc11.DeviceData")]
|
||
public AITMfcData Mfc11Data { get; set; }
|
||
|
||
[Subscription("Mfc12.DeviceData")]
|
||
public AITMfcData Mfc12Data { get; set; }
|
||
|
||
[Subscription("Mfc13.DeviceData")]
|
||
public AITMfcData Mfc13Data { get; set; }
|
||
|
||
[Subscription("Mfc14.DeviceData")]
|
||
public AITMfcData Mfc14Data { get; set; }
|
||
|
||
[Subscription("Mfc15.DeviceData")]
|
||
public AITMfcData Mfc15Data { get; set; }
|
||
|
||
[Subscription("Mfc16.DeviceData")]
|
||
public AITMfcData Mfc16Data { get; set; }
|
||
|
||
|
||
|
||
[Subscription("Mfc19.DeviceData")]
|
||
public AITMfcData Mfc19Data { get; set; }
|
||
|
||
[Subscription("Mfc20.DeviceData")]
|
||
public AITMfcData Mfc20Data { get; set; }
|
||
|
||
|
||
|
||
[Subscription("Mfc22.DeviceData")]
|
||
public AITMfcData Mfc22Data { get; set; }
|
||
|
||
[Subscription("Mfc23.DeviceData")]
|
||
public AITMfcData Mfc23Data { get; set; }
|
||
|
||
|
||
|
||
[Subscription("Mfc25.DeviceData")]
|
||
public AITMfcData Mfc25Data { get; set; }
|
||
|
||
[Subscription("Mfc26.DeviceData")]
|
||
public AITMfcData Mfc26Data { get; set; }
|
||
|
||
[Subscription("Mfc27.DeviceData")]
|
||
public AITMfcData Mfc27Data { get; set; }
|
||
|
||
[Subscription("Mfc28.DeviceData")]
|
||
public AITMfcData Mfc28Data { get; set; }
|
||
|
||
[Subscription("Mfc29.DeviceData")]
|
||
public AITMfcData Mfc29Data { get; set; }
|
||
|
||
|
||
[Subscription("Mfc30.DeviceData")]
|
||
public AITMfcData Mfc30Data { get; set; }
|
||
|
||
[Subscription("Mfc31.DeviceData")]
|
||
public AITMfcData Mfc31Data { get; set; }
|
||
|
||
|
||
|
||
[Subscription("Mfc32.DeviceData")]
|
||
public AITMfcData Mfc32Data { get; set; }
|
||
|
||
[Subscription("Mfc33.DeviceData")]
|
||
public AITMfcData Mfc33Data { get; set; }
|
||
|
||
|
||
|
||
[Subscription("Mfc35.DeviceData")]
|
||
public AITMfcData Mfc35Data { get; set; }
|
||
|
||
[Subscription("Mfc36.DeviceData")]
|
||
public AITMfcData Mfc36Data { get; set; }
|
||
|
||
[Subscription("Mfc37.DeviceData")]
|
||
public AITMfcData Mfc37Data { get; set; }
|
||
|
||
[Subscription("Mfc38.DeviceData")]
|
||
public AITMfcData Mfc38Data { get; set; }
|
||
|
||
[Subscription("Mfc40.DeviceData")]
|
||
public AITMfcData Mfc40Data { get; set; }
|
||
#endregion
|
||
|
||
#region Valve
|
||
|
||
[Subscription("V27.DeviceData")]
|
||
public AITValveData V27 { get; set; }
|
||
|
||
[Subscription("V25.DeviceData")]
|
||
public AITValveData V25 { get; set; }
|
||
|
||
[Subscription("V31.DeviceData")]
|
||
public AITValveData V31 { get; set; }
|
||
|
||
[Subscription("V32.DeviceData")]
|
||
public AITValveData V32 { get; set; }
|
||
|
||
[Subscription("V33.DeviceData")]
|
||
public AITValveData V33 { get; set; }
|
||
|
||
[Subscription("V33s.DeviceData")]
|
||
public AITValveData V33s { get; set; }
|
||
|
||
[Subscription("V35.DeviceData")]
|
||
public AITValveData V35 { get; set; }
|
||
|
||
[Subscription("V36.DeviceData")]
|
||
public AITValveData V36 { get; set; }
|
||
|
||
[Subscription("V37.DeviceData")]
|
||
public AITValveData V37 { get; set; }
|
||
|
||
[Subscription("V37s.DeviceData")]
|
||
public AITValveData V37s { get; set; }
|
||
|
||
|
||
[Subscription("V39.DeviceData")]
|
||
public AITValveData V39 { get; set; }
|
||
|
||
[Subscription("V39s.DeviceData")]
|
||
public AITValveData V39s { get; set; }
|
||
|
||
[Subscription("V40.DeviceData")]
|
||
public AITValveData V40 { get; set; }
|
||
|
||
[Subscription("V40s.DeviceData")]
|
||
public AITValveData V40s { get; set; }
|
||
|
||
|
||
[Subscription("V41.DeviceData")]
|
||
public AITValveData V41 { get; set; }
|
||
|
||
[Subscription("V41s.DeviceData")]
|
||
public AITValveData V41s { get; set; }
|
||
|
||
|
||
[Subscription("V42.DeviceData")]
|
||
public AITValveData V42 { get; set; }
|
||
|
||
[Subscription("V43.DeviceData")]
|
||
public AITValveData V43 { get; set; }
|
||
|
||
[Subscription("V43s.DeviceData")]
|
||
public AITValveData V43s { get; set; }
|
||
|
||
|
||
[Subscription("V45.DeviceData")]
|
||
public AITValveData V45 { get; set; }
|
||
|
||
|
||
[Subscription("V46.DeviceData")]
|
||
public AITValveData V46 { get; set; }
|
||
|
||
[Subscription("V46s.DeviceData")]
|
||
public AITValveData V46s { get; set; }
|
||
|
||
[Subscription("V48.DeviceData")]
|
||
public AITValveData V48 { get; set; }
|
||
|
||
[Subscription("V48s.DeviceData")]
|
||
public AITValveData V48s { get; set; }
|
||
|
||
|
||
[Subscription("V49.DeviceData")]
|
||
public AITValveData V49 { get; set; }
|
||
|
||
[Subscription("V50.DeviceData")]
|
||
public AITValveData V50 { get; set; }
|
||
|
||
[Subscription("V50s.DeviceData")]
|
||
public AITValveData V50s { get; set; }
|
||
|
||
[Subscription("V51.DeviceData")]
|
||
public AITValveData V51 { get; set; }
|
||
|
||
[Subscription("V51s.DeviceData")]
|
||
public AITValveData V51s { get; set; }
|
||
|
||
|
||
[Subscription("V52.DeviceData")]
|
||
public AITValveData V52 { get; set; }
|
||
|
||
[Subscription("V52s.DeviceData")]
|
||
public AITValveData V52s { get; set; }
|
||
|
||
[Subscription("V53.DeviceData")]
|
||
public AITValveData V53 { get; set; }
|
||
|
||
[Subscription("V53s.DeviceData")]
|
||
public AITValveData V53s { get; set; }
|
||
|
||
[Subscription("V54.DeviceData")]
|
||
public AITValveData V54 { get; set; }
|
||
|
||
[Subscription("V54s.DeviceData")]
|
||
public AITValveData V54s { get; set; }
|
||
|
||
[Subscription("V55.DeviceData")]
|
||
public AITValveData V55 { get; set; }
|
||
|
||
[Subscription("V56.DeviceData")]
|
||
public AITValveData V56 { get; set; }
|
||
|
||
[Subscription("V58.DeviceData")]
|
||
public AITValveData V58 { get; set; }
|
||
|
||
[Subscription("V58s.DeviceData")]
|
||
public AITValveData V58s { get; set; }
|
||
|
||
|
||
|
||
[Subscription("V59.DeviceData")]
|
||
public AITValveData V59 { get; set; }
|
||
|
||
[Subscription("V60.DeviceData")]
|
||
public AITValveData V60 { get; set; }
|
||
|
||
[Subscription("V61.DeviceData")]
|
||
public AITValveData V61 { get; set; }
|
||
|
||
[Subscription("V62.DeviceData")]
|
||
public AITValveData V62 { get; set; }
|
||
|
||
[Subscription("V63.DeviceData")]
|
||
public AITValveData V63 { get; set; }
|
||
|
||
[Subscription("V64.DeviceData")]
|
||
public AITValveData V64 { get; set; }
|
||
|
||
[Subscription("V65.DeviceData")]
|
||
public AITValveData V65 { get; set; }
|
||
|
||
|
||
[Subscription("V68.DeviceData")]
|
||
public AITValveData V68 { get; set; }
|
||
|
||
[Subscription("V69.DeviceData")]
|
||
public AITValveData V69 { get; set; }
|
||
|
||
[Subscription("V70.DeviceData")]
|
||
public AITValveData V70 { get; set; }
|
||
|
||
[Subscription("V72.DeviceData")]
|
||
public AITValveData V72 { get; set; }
|
||
|
||
[Subscription("V73.DeviceData")]
|
||
public AITValveData V73 { get; set; }
|
||
|
||
[Subscription("V74.DeviceData")]
|
||
public AITValveData V74 { get; set; }
|
||
|
||
[Subscription("V75.DeviceData")]
|
||
public AITValveData V75 { get; set; }
|
||
|
||
[Subscription("V76.DeviceData")]
|
||
public AITValveData V76 { get; set; }
|
||
|
||
[Subscription("V87.DeviceData")]
|
||
public AITValveData V87 { get; set; }
|
||
|
||
[Subscription("V88.DeviceData")]
|
||
public AITValveData V88 { get; set; }
|
||
|
||
[Subscription("V89.DeviceData")]
|
||
public AITValveData V89 { get; set; }
|
||
|
||
[Subscription("V90.DeviceData")]
|
||
public AITValveData V90 { get; set; }
|
||
|
||
[Subscription("V91.DeviceData")]
|
||
public AITValveData V91 { get; set; }
|
||
|
||
[Subscription("V92.DeviceData")]
|
||
public AITValveData V92 { get; set; }
|
||
|
||
[Subscription("V93.DeviceData")]
|
||
public AITValveData V93 { get; set; }
|
||
|
||
[Subscription("V94.DeviceData")]
|
||
public AITValveData V94 { get; set; }
|
||
|
||
[Subscription("V95.DeviceData")]
|
||
public AITValveData V95 { get; set; }
|
||
|
||
[Subscription("V96.DeviceData")]
|
||
public AITValveData V96 { get; set; }
|
||
|
||
[Subscription("V97.DeviceData")]
|
||
public AITValveData V97 { get; set; }
|
||
|
||
[Subscription("EPV1.DeviceData")]
|
||
public AITValveData EPV1 { get; set; }
|
||
|
||
[Subscription("EPV2.DeviceData")]
|
||
public AITValveData EPV2 { get; set; }
|
||
|
||
[Subscription("V99.DeviceData")]
|
||
public AITValveData V99 { get; set; }
|
||
|
||
[Subscription("V99s.DeviceData")]
|
||
public AITValveData V99s { get; set; }
|
||
|
||
|
||
#endregion
|
||
|
||
#region Pressure
|
||
[Subscription("Pressure1.DeviceData")]
|
||
public AITPressureMeterData PT1Data { get; set; }
|
||
|
||
[Subscription("Pressure2.DeviceData")]
|
||
public AITPressureMeterData PT2Data { get; set; }
|
||
[Subscription("Pressure3.DeviceData")]
|
||
public AITPressureMeterData PT3Data { get; set; }
|
||
|
||
|
||
[Subscription("Pressure4.DeviceData")]
|
||
public AITPressureMeterData PT4Data { get; set; }
|
||
[Subscription("Pressure5.DeviceData")]
|
||
public AITPressureMeterData PT5Data { get; set; }
|
||
[Subscription("Pressure6.DeviceData")]
|
||
public AITPressureMeterData PT6Data { get; set; }
|
||
|
||
[Subscription("Pressure7.DeviceData")]
|
||
public AITPressureMeterData PT7Data { get; set; }
|
||
|
||
[Subscription("PT1.DeviceData")]
|
||
public AITPressureMeterData ChamPress { get; set; }
|
||
|
||
[Subscription("PT2.DeviceData")]
|
||
public AITPressureMeterData ForelinePress { get; set; }
|
||
|
||
|
||
#endregion
|
||
|
||
#region 特气显示颜色
|
||
|
||
public SolidColorBrush PN2Color
|
||
{
|
||
get
|
||
{
|
||
if (IsPN2RunMode)
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(0, 0, 0));
|
||
}
|
||
else
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(255, 0, 0));
|
||
}
|
||
}
|
||
}
|
||
public SolidColorBrush C2H4Color
|
||
{
|
||
get
|
||
{
|
||
if (IsC2H4RunMode)
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(0, 0, 0));
|
||
}
|
||
else
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(255, 0, 0));
|
||
}
|
||
}
|
||
}
|
||
public SolidColorBrush SIH4Color
|
||
{
|
||
get
|
||
{
|
||
if (IsSiH4RunMode)
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(0, 0, 0));
|
||
}
|
||
else
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(255, 0, 0));
|
||
}
|
||
}
|
||
}
|
||
public SolidColorBrush HCLColor
|
||
{
|
||
get
|
||
{
|
||
if (IsHCLRunMode)
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(0, 0, 0));
|
||
}
|
||
else
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(255, 0, 0));
|
||
}
|
||
}
|
||
}
|
||
|
||
public SolidColorBrush TMAColor
|
||
{
|
||
get
|
||
{
|
||
if (IsTMARunMode)
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(0, 0, 0));
|
||
}
|
||
else
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(255, 0, 0));
|
||
}
|
||
}
|
||
}
|
||
|
||
public SolidColorBrush TCSColor
|
||
{
|
||
get
|
||
{
|
||
if (IsTCSRunMode)
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(0, 0, 0));
|
||
}
|
||
else
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(255, 0, 0));
|
||
}
|
||
}
|
||
}
|
||
|
||
public SolidColorBrush PN2FlowColor
|
||
{
|
||
get
|
||
{
|
||
if (IsPN2RunMode)
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 0, 255, 255));
|
||
}
|
||
else
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 190, 190, 190));
|
||
}
|
||
}
|
||
}
|
||
public SolidColorBrush C2H4FlowColor
|
||
{
|
||
get
|
||
{
|
||
if (IsC2H4RunMode)
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 0, 255, 255));
|
||
}
|
||
else
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 190, 190, 190));
|
||
}
|
||
}
|
||
}
|
||
public SolidColorBrush SIH4FlowColor
|
||
{
|
||
get
|
||
{
|
||
if (IsSiH4RunMode)
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 0, 255, 255));
|
||
}
|
||
else
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 190, 190, 190));
|
||
}
|
||
}
|
||
}
|
||
public SolidColorBrush HCLFlowColor
|
||
{
|
||
get
|
||
{
|
||
if (IsHCLRunMode)
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 0, 255, 255));
|
||
}
|
||
else
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 190, 190, 190));
|
||
}
|
||
}
|
||
}
|
||
|
||
public SolidColorBrush TMAFlowColor
|
||
{
|
||
get
|
||
{
|
||
if (IsTMARunMode)
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 0, 255, 255));
|
||
}
|
||
else
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 190, 190, 190));
|
||
}
|
||
}
|
||
}
|
||
|
||
public SolidColorBrush TCSFlowColor
|
||
{
|
||
get
|
||
{
|
||
if (IsTCSRunMode)
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 0, 255, 255));
|
||
}
|
||
else
|
||
{
|
||
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 190, 190, 190));
|
||
}
|
||
}
|
||
}
|
||
#endregion
|
||
|
||
|
||
|
||
public bool IsPN2RunMode => N2FlowMode == "Run";
|
||
public bool IsHCLRunMode => V54.IsOpen;
|
||
public bool IsSiH4RunMode => V55.IsOpen && !V56.IsOpen;
|
||
public bool IsC2H4RunMode => V59.IsOpen && !V60.IsOpen;
|
||
public bool IsTCSRunMode => V53.IsOpen;
|
||
public bool IsTMARunMode => V41.IsOpen && !V42.IsOpen;
|
||
|
||
|
||
public double ArFlow => CalArFlowSum();
|
||
public double H2Flow => CalH2FlowSum();
|
||
public double PN2Flow => GetPN2MFCFlow(IsPN2RunMode) * _pn2FlowRatio;
|
||
public double HCLFlow => GetHclMFCFlow(IsHCLRunMode) * _hclFlowRatio;
|
||
public double SiH4Flow => GetSiH4MFCFlow(IsSiH4RunMode) * _sih4FlowRatio;
|
||
public double C2H4Flow => GetC2H4MFCFlow(IsC2H4RunMode) * _C2H4FlowRatio;
|
||
public double TCSFlow => GetTCSMFCFlow(IsTCSRunMode) * _tcsFlowRatio;
|
||
public double TMAFlow => GetTMAMFCFlow(IsTMARunMode) * _tmaFlowRatio;
|
||
|
||
public bool ISPN2Flow => PN2Flow > 0 && IsPN2RunMode;
|
||
public bool ISHCLFlow => HCLFlow > 0 && IsHCLRunMode;
|
||
public bool ISSiH4Flow => SiH4Flow > 0 && IsSiH4RunMode;
|
||
public bool ISC2H4Flow => C2H4Flow > 0 && IsC2H4RunMode;
|
||
public bool ISArFlow => ArFlow > 0;
|
||
public bool ISH2Flow => H2Flow > 0;
|
||
public bool ISTCSFlow => TCSFlow > 0 && IsTCSRunMode;
|
||
public bool ISTMAFlow => TMAFlow > 0 && IsTMARunMode;
|
||
|
||
|
||
#region 计算Ar 和 H2 总流量
|
||
|
||
private double CalArFlowSum()
|
||
{
|
||
// 参与计算H2流量的MFC
|
||
double divFlowCount = 0;
|
||
var mfcs = new List<AITMfcData>();
|
||
if (!V32.IsOpen)
|
||
{
|
||
return 0;
|
||
}
|
||
|
||
if (V64.IsOpen != V65.IsOpen)
|
||
{
|
||
if (V65.IsOpen)
|
||
{
|
||
if (V97.IsOpen) mfcs.Add(Mfc40Data);
|
||
if (V91.IsOpen) mfcs.Add(Mfc33Data);
|
||
if (V87.IsOpen) mfcs.Add(Mfc27Data);
|
||
}
|
||
}
|
||
|
||
if (V33s.IsOpen && V35.IsOpen)
|
||
{
|
||
if (V97.IsOpen) mfcs.Add(Mfc40Data);
|
||
if (V91.IsOpen) mfcs.Add(Mfc33Data);
|
||
if (V90.IsOpen) mfcs.Add(Mfc31Data);
|
||
if (V89.IsOpen) mfcs.Add(Mfc29Data);
|
||
if (V88.IsOpen) mfcs.Add(Mfc28Data);
|
||
if (V87.IsOpen) mfcs.Add(Mfc27Data);
|
||
}
|
||
|
||
if (V33s.IsOpen && V36.IsOpen)
|
||
{
|
||
if (V63.IsOpen)
|
||
{
|
||
if (V90.IsOpen) mfcs.Add(Mfc25Data);
|
||
if (V89.IsOpen) mfcs.Add(Mfc26Data);
|
||
if (V88.IsOpen) mfcs.Add(Mfc15Data);
|
||
|
||
divFlowCount += IsC2H4RunMode ? GetC2H4MFCFlow(true) : 0;
|
||
|
||
}
|
||
|
||
if (V62.IsOpen)
|
||
{
|
||
if (V89.IsOpen) mfcs.Add(Mfc23Data);
|
||
if (V90.IsOpen) mfcs.Add(Mfc22Data);
|
||
if (V88.IsOpen) mfcs.Add(Mfc9Data);
|
||
|
||
divFlowCount += IsSiH4RunMode ? GetSiH4MFCFlow(true) : 0;
|
||
divFlowCount += IsHCLRunMode ? GetHclMFCFlow(true) : 0;
|
||
divFlowCount += IsTCSRunMode ? GetTCSMFCFlow(true) : 0;
|
||
|
||
}
|
||
|
||
if (V61.IsOpen)
|
||
{
|
||
if (V90.IsOpen) mfcs.Add(Mfc19Data);
|
||
if (V89.IsOpen) mfcs.Add(Mfc20Data);
|
||
if (V88.IsOpen) mfcs.Add(Mfc2Data);
|
||
|
||
|
||
divFlowCount += IsPN2RunMode ? GetPN2MFCFlow(true) : 0;
|
||
divFlowCount += IsTMARunMode ? GetTMAMFCFlow(true) : 0;
|
||
|
||
}
|
||
}
|
||
|
||
if (V68.IsOpen)
|
||
{
|
||
if (V96.IsOpen) mfcs.Add(Mfc38Data);
|
||
if (V95.IsOpen) mfcs.Add(Mfc37Data);
|
||
if (V94.IsOpen) mfcs.Add(Mfc36Data);
|
||
if (V93.IsOpen) mfcs.Add(Mfc35Data);
|
||
if (V92.IsOpen) mfcs.Add(Mfc32Data);
|
||
}
|
||
|
||
var flowCount = mfcs.Sum(mfcData => mfcData.FeedBack);
|
||
return (flowCount - divFlowCount > 0)? flowCount - divFlowCount:0 ;
|
||
}
|
||
|
||
|
||
private double CalH2FlowSum()
|
||
{
|
||
// 参与计算H2流量的MFC
|
||
var mfcs = new List<AITMfcData>();
|
||
|
||
if(!V31.IsOpen)
|
||
{
|
||
return 0;
|
||
}
|
||
|
||
if (V64.IsOpen != V65.IsOpen)
|
||
{
|
||
if (V64.IsOpen)
|
||
{
|
||
if (V97.IsOpen) mfcs.Add(Mfc40Data);
|
||
if (V91.IsOpen) mfcs.Add(Mfc33Data);
|
||
if (V87.IsOpen) mfcs.Add(Mfc27Data);
|
||
}
|
||
}
|
||
|
||
if (V33.IsOpen && V35.IsOpen)
|
||
{
|
||
if (V90.IsOpen) mfcs.Add(Mfc31Data);
|
||
if (V89.IsOpen) mfcs.Add(Mfc29Data);
|
||
if (V88.IsOpen) mfcs.Add(Mfc28Data);
|
||
}
|
||
|
||
if (V33.IsOpen && V35.IsOpen && V36.IsOpen && V63.IsOpen)
|
||
{
|
||
if (!V59.IsOpen)
|
||
{
|
||
if (V90.IsOpen) mfcs.Add(Mfc26Data);
|
||
if (V89.IsOpen) mfcs.Add(Mfc25Data);
|
||
if (V88.IsOpen) mfcs.Add(Mfc15Data);
|
||
}
|
||
|
||
if (!V58.IsOpen && V59.IsOpen && !V60.IsOpen)
|
||
{
|
||
if (V90.IsOpen) mfcs.Add(Mfc26Data);
|
||
if (V89.IsOpen) mfcs.Add(Mfc25Data);
|
||
if (V88.IsOpen) mfcs.Add(Mfc15Data);
|
||
}
|
||
|
||
if (V61.IsOpen)
|
||
{
|
||
if (V90.IsOpen) mfcs.Add(Mfc19Data);
|
||
if (V89.IsOpen) mfcs.Add(Mfc20Data);
|
||
if (V88.IsOpen) mfcs.Add(Mfc2Data);
|
||
}
|
||
}
|
||
|
||
var flowCount = mfcs.Sum(mfcData => mfcData.FeedBack);
|
||
return flowCount;
|
||
}
|
||
#endregion
|
||
|
||
private double GetC2H4MFCFlow(bool isRun)
|
||
{
|
||
double flow = 0;
|
||
|
||
if (V58.IsOpen == false) // V58关闭时通载气，不计算C2H4流量
|
||
return 0;
|
||
|
||
if (isRun)
|
||
{
|
||
// 气体进入反应腔
|
||
if (V59.IsOpen && !V60.IsOpen && V63.IsOpen && (V90.IsOpen || V89.IsOpen || V88.IsOpen))
|
||
{
|
||
flow = Mfc16Data.FeedBack;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
// 气体直接排走
|
||
if (!V59.IsOpen && V60.IsOpen)
|
||
{
|
||
flow = Mfc16Data.FeedBack;
|
||
}
|
||
}
|
||
return flow;
|
||
}
|
||
|
||
private double GetSiH4MFCFlow(bool isRun)
|
||
{
|
||
double flow = 0;
|
||
|
||
if (V52.IsOpen == false) // V52关闭时通载气，不计算SiH4流量
|
||
return 0;
|
||
|
||
if (isRun)
|
||
{
|
||
// 气体进入反应腔
|
||
if (V55.IsOpen && !V56.IsOpen && V62.IsOpen && (V90.IsOpen || V89.IsOpen || V88.IsOpen))
|
||
{
|
||
flow += Mfc14Data.FeedBack;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
// 气体直接排走
|
||
if (!V55.IsOpen && V56.IsOpen)
|
||
{
|
||
flow += Mfc14Data.FeedBack;
|
||
}
|
||
}
|
||
return flow;
|
||
}
|
||
|
||
|
||
private double GetHclMFCFlow(bool isRun)
|
||
{
|
||
double flow = 0;
|
||
|
||
if (V51.IsOpen == false) // V51关闭时通载气，不计算HCL流量
|
||
return 0;
|
||
|
||
if (isRun)
|
||
{
|
||
// 气体进入反应腔
|
||
if (V54.IsOpen && V62.IsOpen && (V90.IsOpen || V89.IsOpen || V88.IsOpen))
|
||
{
|
||
flow += Mfc13Data.FeedBack;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
// 气体直接排走
|
||
if (V51.IsOpen && !V54.IsOpen)
|
||
{
|
||
flow += Mfc13Data.FeedBack;
|
||
}
|
||
}
|
||
return flow;
|
||
}
|
||
|
||
private double GetPN2MFCFlow(bool isRun)
|
||
{
|
||
|
||
//新计算方式
|
||
double flow = 0;
|
||
if (IsPMProcess)
|
||
{
|
||
if (N2FlowMode == "Purge")
|
||
{
|
||
flow = 0;
|
||
}
|
||
else if (N2FlowMode == "Vent")
|
||
{
|
||
flow = Mfc4Data.FeedBack + Mfc5Data.FeedBack;
|
||
}
|
||
else if (N2FlowMode == "Run")
|
||
{
|
||
flow = Mfc6Data.FeedBack * Mfc4Data.FeedBack / (Mfc3Data.FeedBack + Mfc4Data.FeedBack);
|
||
|
||
if (V40.IsOpen)
|
||
{
|
||
flow += Mfc5Data.FeedBack;
|
||
}
|
||
}
|
||
}
|
||
|
||
return flow;
|
||
}
|
||
|
||
private double GetTCSMFCFlow(bool isRun)
|
||
{
|
||
double flow = 0;
|
||
if (isRun)
|
||
{
|
||
if (!V49.IsOpen && V48.IsOpen && V53.IsOpen && V62.IsOpen && (V90.IsOpen || V89.IsOpen || V88.IsOpen)) { flow += Mfc10Data.FeedBack + Mfc11Data.FeedBack; }
|
||
}
|
||
else
|
||
{
|
||
if (!V49.IsOpen && V48.IsOpen && !V53.IsOpen) { flow += Mfc10Data.FeedBack + Mfc11Data.FeedBack; }
|
||
}
|
||
return flow;
|
||
}
|
||
|
||
private double GetTMAMFCFlow(bool isRun)
|
||
{
|
||
double flow = 0;
|
||
if (isRun)
|
||
{
|
||
if (!V45.IsOpen && V43.IsOpen && V41.IsOpen && !V42.IsOpen && V61.IsOpen && (V90.IsOpen || V89.IsOpen || V88.IsOpen)) { flow += Mfc7Data.FeedBack; }
|
||
}
|
||
else
|
||
{
|
||
if (!V45.IsOpen && V43.IsOpen && !V41.IsOpen && V42.IsOpen) { flow += Mfc7Data.FeedBack; }
|
||
}
|
||
return flow;
|
||
}
|
||
|
||
//
|
||
public void ShowMonitorWindow()
|
||
{
|
||
if (Application.Current.Windows.OfType<WinProcessMonitor>().Any())
|
||
{
|
||
_winProcessMonitor.Activate();
|
||
}
|
||
else
|
||
{
|
||
_winProcessMonitor = new WinProcessMonitor(this)
|
||
{
|
||
dsFresh = new WinProcessMonitor.DataToMonitor()
|
||
};
|
||
|
||
_winProcessMonitor.Show();
|
||
InitTimer();
|
||
}
|
||
}
|
||
|
||
private void InitTimer()
|
||
{
|
||
|
||
//设置定时器
|
||
timer = new DispatcherTimer
|
||
{
|
||
Interval = new TimeSpan(10000000) //100分之一毫秒为单位
|
||
};
|
||
timer.Tick += new EventHandler(timer_Tick);
|
||
|
||
//开启定时器
|
||
timer.Start();
|
||
}
|
||
private void timer_Tick(object sender, EventArgs e)
|
||
{
|
||
try
|
||
{
|
||
TimerEvent(sender, e);
|
||
}
|
||
catch (Exception ex)
|
||
{
|
||
//MessageBox.Show(ex.Message, "异常");
|
||
//EV.PostWarningLog()
|
||
}
|
||
//throw new NotImplementedException();
|
||
|
||
}
|
||
private void myTimerEvent(object obj, System.EventArgs e)
|
||
{
|
||
_winProcessMonitor.dsFresh.RecipeName = SelectedRecipeDispaly;
|
||
_winProcessMonitor.dsFresh.StepNumber = StepNumber;
|
||
_winProcessMonitor.dsFresh.StepName = StepName;
|
||
_winProcessMonitor.dsFresh.StepTime = StepTime;
|
||
_winProcessMonitor.dsFresh.RecipeTime = RecipeTime;
|
||
//
|
||
_winProcessMonitor.dsFresh.PSUMOde = TC1Mode;
|
||
_winProcessMonitor.dsFresh.SCRMOde = TC2Mode;
|
||
//
|
||
_winProcessMonitor.dsFresh.Inner = PSU1Power.ToString();
|
||
_winProcessMonitor.dsFresh.Middle = PSU2Power.ToString();
|
||
_winProcessMonitor.dsFresh.Outer = PSU3Power.ToString();
|
||
|
||
_winProcessMonitor.dsFresh.U = SCR1Power.ToString();
|
||
_winProcessMonitor.dsFresh.M = SCR2Power.ToString();
|
||
_winProcessMonitor.dsFresh.L = SCR3Power.ToString();
|
||
//
|
||
_winProcessMonitor.dsFresh.TC1 = SCRL3InputTemp.ToString();
|
||
_winProcessMonitor.dsFresh.TC2 = L2InputTemp.ToString();
|
||
_winProcessMonitor.dsFresh.TC3 = L3InputTemp.ToString();
|
||
|
||
_winProcessMonitor.dsFresh.ChamPressFeedBack = ChamPress.FeedBack.ToString(ChamPress.FormatString);//ChamPress.ToString();
|
||
_winProcessMonitor.dsFresh.ActualSpeedFeedback = ActualSpeedFeedback.ToString();
|
||
_winProcessMonitor.dsFresh.PM1Temprature = PM1Temprature.ToString();
|
||
|
||
}
|
||
|
||
public void Handle(ShowMonitorWinEvent message)
|
||
{
|
||
ShowMonitorWindow();
|
||
}
|
||
}
|
||
}
|