307 lines
11 KiB
C#
307 lines
11 KiB
C#
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Mainframe.LLs;
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using Mainframe.UnLoads;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.HwAligner;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
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using System;
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namespace Mainframe.EFEMs
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{
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public class WaferRobotPlaceRoutine : EfemBaseRoutine
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{
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/* 1.Place to LoadLock(需要开门)/Aligner/Cassette
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* 2.判断目标是否无Wafer，判断Robot是否有Wafer
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* 3.判断是否需要开门（包括气压等）
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* 4.判断顶针是否上升
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* 5.伸出
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* 6.判断顶针上升
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* 7.ActionDone
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* 8.关门
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*
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机械手伸进来
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顶针顶起来
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夹爪夹住
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夹爪松开
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机械手退出
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顶针下降
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*/
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private EfemSlitValveRoutine _efemSlitValveOpenRoutine = new EfemSlitValveRoutine();
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private EfemSlitValveRoutine _efemSlitValveCloseRoutine = new EfemSlitValveRoutine();
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private LoadLockLiftRoutine _loadLockLiftDown = new LoadLockLiftRoutine();
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private LoadLockLiftRoutine _loadLockLiftUp = new LoadLockLiftRoutine();
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private LoadLockClawRoutine _loadLockClaw = new LoadLockClawRoutine();
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private LoadLockClawRoutine _loadLockClawOpen = new LoadLockClawRoutine();
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private UnLoadLiftRoutine _unLoadLiftDown = new UnLoadLiftRoutine();
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private UnLoadLiftRoutine _unLoadLiftUp = new UnLoadLiftRoutine();
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private UnLoadClawRoutine _unLoadClaw = new UnLoadClawRoutine();
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private UnLoadClawRoutine _unLoadClawOpen = new UnLoadClawRoutine();
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private HwAlignerGuide _alignerDevice;
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private ModuleName _target;
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private int _targetSlot;
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private int _placeTimeout;
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private int _alignerMoveTimeOut = 10;
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private bool _isSimulator = false;
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enum RoutineStep
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{
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SetLiftDown0,
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AlignerMoveTo,
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OpenSlitValve,
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SetLiftUp,
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CheckRobotReady,
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ExtendForPlace,
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PickComplete,
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SetLiftDown,
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CloseSlitValve,
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TimeDelay1,
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Place,
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SetClawOpen1,
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SetClawOpen2,
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SetClaw,
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AlignerCheckWafer,
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SetExtendToDo,
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ClearRobortExtendToDo,
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CheckWaferStatusByRq
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}
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public WaferRobotPlaceRoutine()
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{
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Module = ModuleName.EFEM.ToString();
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Name = "WaferRobotPlace";
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_alignerDevice = DEVICE.GetDevice<HwAlignerGuide>($"TM.HiWinAligner");
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}
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public void Init(ModuleName targetModule, int targetSlt)
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{
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_target = targetModule;
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_targetSlot = targetSlt;
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (!WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0))
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{
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Stop("Can not place,WaferRobot no wafer");
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return Result.FAIL;
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}
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//Place之前先,根据Sensor检测是否有盘
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if (WaferManager.Instance.CheckHasWafer(_target, _targetSlot))
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{
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EV.PostWarningLog(Module, $"Can not place, {_target} slot {_targetSlot} has wafer");
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return Result.FAIL;
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}
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if (WaferRobot.RobotState != RobotStateEnum.Idle)
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{
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EV.PostWarningLog(Module, $"Can not place, WaferRobot is not Idle");
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return Result.FAIL;
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}
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//LoadLock传感器是否需要检测有Wafer
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//if (_target == ModuleName.LoadLock || _target == ModuleName.Load)
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//{
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// if (_loadWaferPlaced.Value)
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// {
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// EV.PostWarningLog(Module, $"Can not place,{_target} sensor[DI-35] check have wafer");
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// return Result.FAIL;
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// }
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//}
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if (_target == ModuleName.CassAL)
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{
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if (!_cassAL6Inch.Value)
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{
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EV.PostWarningLog(Module, $"Can not place,{_target} sensor check no cassette");
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return Result.FAIL;
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}
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}
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else if (_target == ModuleName.CassAR)
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{
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if (!_cassAR6Inch.Value)
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{
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EV.PostWarningLog(Module, $"Can not place,{_target} sensor check no cassette");
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return Result.FAIL;
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}
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}
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_efemSlitValveOpenRoutine.Init(_target, ModuleName.WaferRobot, true);
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_efemSlitValveCloseRoutine.Init(_target, ModuleName.WaferRobot, false);
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_loadLockLiftDown.Init(false);
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_loadLockLiftUp.Init(true);
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_loadLockClaw.Init(true,true);
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_loadLockClawOpen.Init(true, false);
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_unLoadLiftDown.Init(false);
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_unLoadLiftUp.Init(true);
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_unLoadClaw.Init(true);
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_unLoadClawOpen.Init(false);
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_placeTimeout = SC.GetConfigItem($"{ModuleName.WaferRobot}.MotionTimeout").IntValue;
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_isSimulator = SC.GetValue<bool>($"System.IsSimulatorMode");
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_alignerMoveTimeOut = SC.GetValue<int>("HiWinAligner.AlignerMoveToCenterTimeOut");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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if (_target == ModuleName.Aligner && !_isSimulator)
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{
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AlignerCheckHaveWafer((int)RoutineStep.AlignerCheckWafer, 15); //发送指令检测是否有Wafer
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AlignerMoveToRobotPutPalce((int)RoutineStep.AlignerMoveTo, _alignerMoveTimeOut); //Aligner移动至测量中心点
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}
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if (_target == ModuleName.LoadLock)
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{
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ExecuteRoutine((int)RoutineStep.SetLiftDown0, _loadLockLiftDown);
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ExecuteRoutine((int)RoutineStep.SetClawOpen1, _loadLockClawOpen); //夹爪打开
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}
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else if (_target == ModuleName.UnLoad)
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{
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ExecuteRoutine((int)RoutineStep.SetLiftDown0, _unLoadLiftDown);
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ExecuteRoutine((int)RoutineStep.SetClawOpen1, _unLoadClawOpen); //夹爪打开
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}
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ExecuteRoutine((int)RoutineStep.OpenSlitValve, _efemSlitValveOpenRoutine); //打开闸板阀
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SetWaferRobortExtendToDO((int)RoutineStep.SetExtendToDo, _target, 10); //设置ExtendToDO,用于检测InterLock
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CheckRobotReady((int)RoutineStep.CheckRobotReady, WaferRobot, _placeTimeout); //判断机械手当前是否空闲
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ExtendForPlace((int)RoutineStep.ExtendForPlace, WaferRobot, _target, _targetSlot, _placeTimeout); //伸出,关真空
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//夹爪打开,顶针上升
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if (_target == ModuleName.LoadLock)
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{
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ExecuteRoutine((int)RoutineStep.SetLiftUp, _loadLockLiftUp);
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}
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else if (_target == ModuleName.UnLoad)
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{
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ExecuteRoutine((int)RoutineStep.SetLiftUp, _unLoadLiftUp);
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}
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Place((int)RoutineStep.Place, WaferRobot, _target, _targetSlot, _placeTimeout); //机械手收回
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if (_target == ModuleName.LoadLock)
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{
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ExecuteRoutine((int)RoutineStep.SetClaw, _loadLockClaw);
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ExecuteRoutine((int)RoutineStep.SetLiftDown, _loadLockLiftDown);
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}
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else if (_target == ModuleName.UnLoad)
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{
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ExecuteRoutine((int)RoutineStep.SetClaw, _unLoadClaw);
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ExecuteRoutine((int)RoutineStep.SetLiftDown, _unLoadLiftDown);
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}
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ClearRobortExtendToDO((int)RoutineStep.ClearRobortExtendToDo);
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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CheckWaferStatuAfterPlace((int)RoutineStep.CheckWaferStatusByRq, WaferRobot, 10); //结束后检查Wafer
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ExecuteRoutine((int)RoutineStep.CloseSlitValve, _efemSlitValveCloseRoutine); //关闭闸板阀
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException ex)
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{
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LOG.Error(ex.ToString());
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return Result.FAIL;
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}
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Notify($"Finish");
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return Result.DONE;
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}
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public override void Abort()
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{
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WaferRobot.Abort();
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WaferRobot.Stop();
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base.Abort();
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}
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protected void AlignerMoveToRobotPutPalce(int id, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Move to Robot Put Place");
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_alignerDevice.MoveToRobotPutPlace();
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return true;
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}, () =>
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{
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return !_alignerDevice.IsBusy;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"Aligner Move to Robot Put Place Timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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protected void AlignerCheckHaveWafer(int id, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Aligner check wafer exist or not");
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_alignerDevice.CheckWaferLoad();
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return true;
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}, () =>
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{
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if (!_alignerDevice.IsBusy)
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{
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if (_alignerDevice.HaveWafer)
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{
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Notify($"Check result : aligner have wafer, can not place to aligner");
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return null;
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}
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else
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{
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return true;
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}
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}
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return false;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"Aligner Move to Robot Put Place Timeout, over {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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}
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}
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