From 53be7f3980a0af83e98e7e64eb0a782984ae8812 Mon Sep 17 00:00:00 2001 From: "DESKTOP-GPE37UV\\THINKAPD" Date: Mon, 3 Apr 2023 10:01:17 +0800 Subject: [PATCH] =?UTF-8?q?=E4=BF=AE=E6=AD=A3=E7=BC=BA=E5=B0=91PM1.Process?= =?UTF-8?q?.ProcessMonitorWindow=E6=9D=83=E9=99=90=E9=85=8D=E7=BD=AE?= =?UTF-8?q?=E7=9A=84=E9=A1=B9=E7=9B=AE=E7=9A=84=E9=97=AE=E9=A2=98=E3=80=82?= MIME-Version: 1.0 Content-Type: text/plain; charset=UTF-8 Content-Transfer-Encoding: 8bit --- .../Recipe/Sic/Content/RecipeFormat.xml | 1 + .../Recipe/Sic/Content/RecipeFormat.xml | 1 + SicRT/Config/Account/Account.xml | 208 +++++++++--------- 3 files changed, 110 insertions(+), 100 deletions(-) diff --git a/Modules/SicPM1/Config/Recipe/Sic/Content/RecipeFormat.xml b/Modules/SicPM1/Config/Recipe/Sic/Content/RecipeFormat.xml index 6662aed..049032f 100644 --- a/Modules/SicPM1/Config/Recipe/Sic/Content/RecipeFormat.xml +++ b/Modules/SicPM1/Config/Recipe/Sic/Content/RecipeFormat.xml @@ -15,6 +15,7 @@ + diff --git a/Modules/SicPM2/Config/Recipe/Sic/Content/RecipeFormat.xml b/Modules/SicPM2/Config/Recipe/Sic/Content/RecipeFormat.xml index cbde35b..de277c8 100644 --- a/Modules/SicPM2/Config/Recipe/Sic/Content/RecipeFormat.xml +++ b/Modules/SicPM2/Config/Recipe/Sic/Content/RecipeFormat.xml @@ -15,6 +15,7 @@ + diff --git a/SicRT/Config/Account/Account.xml b/SicRT/Config/Account/Account.xml index 4b22fc8..52e79ed 100644 --- a/SicRT/Config/Account/Account.xml +++ b/SicRT/Config/Account/Account.xml @@ -3,109 +3,117 @@ - Header,3;Overview,3;TM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;ProcessHistory,3;RealTimeCharting,3;DataHistory,3;JobList,3; - Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;mainPM2,3; - processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;Uid,3;Step,3;Name,3;Time,3;Growth Rate,3;1. Ar/H2 Switch,3;2. SH Total Flow,3; - 3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3; - 10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;14. PSU Outer Temp Set,3;15. SCR Temp Set,3; - 16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3; - 22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;26. TCS Bubb Low Flow (M11),3;27. TCS Bubb High Flow (M10),3; - 28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3; - 34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C2H4 Flow Mode,3; - 39. C2H4 Flow (M16),3;42. C Source Split Ratio,3;43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3; - 46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3; - 52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3; - 58. TMA Push Flow (M8),3;59. TMA Bubb Pressure (PC2),3;60. Dope Split Ratio,3;61. Dope Push Pressure (PC5),3;62. Dope Inner Flow (M20),3; - 63. Dope Middle Flow (M19),3;64. Dope Outer Flow (M2),3;65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3; - 69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. Optic Purge Flow (M33),3; - 74. GasRing Purge Flow (M32),3;75. Chamber Purge Flow (M35),3;76. Rotation-Up Purge Flow (M36),3;77. Shutter Purge Flow (M37),3; - 78. Heater-WF Purge Flow (M38),3;79. Total Vent Flow,3;80. Vent Push Flow (M1),3;81. Vent Pre-Exhaust Pressure (PC4),3;Operation.Overview.Operation,3; - Operation.Overview.RunningMode,3;PM1.Main.ReactorStatus,3;PM1.Main.ReactorService,3;PM1.Process.Steps,3;Platform.Mainframe.PM1,3; - Platform.Mainframe.Buffer,3;Platform.Mainframe.LL,3;Platform.Mainframe.TM,3;Platform.Mainframe.PreHeat,3;Recipe.Behaviour.AllowEditCellAccessPerm,3; - Recipe.Behaviour.ShowValuesInRecipeEditor,3;Recipe.Behaviour.ShowValueInProcessView,3;Recipe.Behaviour.AllowSaveInProcessView,3; - Recipe.Behaviour.AllowRipInProcessView,3;Step1,3;Step2,3;Step3,3;Step4,3;Step5,3;Step6,3;Step7,3;Step8,3;Step9,3;Step10,3;Step11,3;Step12,3;Step13,3;Step14,3; - Step15,3;Step16,3;Step17,3;Step18,3;Step19,3;Step20,3;Step21,3;Step22,3;Step23,3;Step24,3;Step25,3;Step26,3;Step27,3;Step28,3;Step29,3;Step30,3;Step31,3; - Step32,3;Step33,3;Step34,3;Step35,3;Step36,3;Step37,3;Step38,3;Step39,3;Step40,3;Step41,3;Step42,3;Step43,3;Step44,3;Step45,3;Step46,3;Step47,3;Step48,3; - Step49,3;Step50,3; - + Header,3;Overview,3;TM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;ProcessHistory,3;RealTimeCharting,3;DataHistory,3;JobList,3; + Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;mainPM2,3; + processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;Uid,3;Step,3;Name,3;Time,3;Growth Rate,3;1. Ar/H2 Switch,3;2. SH Total Flow,3; + 3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3; + 10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;14. PSU Outer Temp Set,3;15. SCR Temp Set,3; + 16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3; + 22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;26. TCS Bubb Low Flow (M11),3;27. TCS Bubb High Flow (M10),3; + 28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3; + 34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C2H4 Flow Mode,3; + 39. C2H4 Flow (M16),3;42. C Source Split Ratio,3;43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3; + 46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3; + 52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3; + 58. TMA Push Flow (M8),3;59. TMA Bubb Pressure (PC2),3;60. Dope Split Ratio,3;61. Dope Push Pressure (PC5),3;62. Dope Inner Flow (M20),3; + 63. Dope Middle Flow (M19),3;64. Dope Outer Flow (M2),3;65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3; + 69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. Optic Purge Flow (M33),3; + 74. GasRing Purge Flow (M32),3;75. Chamber Purge Flow (M35),3;76. Rotation-Up Purge Flow (M36),3;77. Shutter Purge Flow (M37),3; + 78. Heater-WF Purge Flow (M38),3;79. Total Vent Flow,3;80. Vent Push Flow (M1),3;81. Vent Pre-Exhaust Pressure (PC4),3;Operation.Overview.Operation,3; + Operation.Overview.RunningMode,3;PM1.Main.ReactorStatus,3;PM1.Main.ReactorService,3;PM1.Process.Steps,3;Platform.Mainframe.PM1,3; + Platform.Mainframe.Buffer,3;Platform.Mainframe.LL,3;Platform.Mainframe.TM,3;Platform.Mainframe.PreHeat,3; + PM1.Process.ProcessMonitorWindow,3; + Recipe.Behaviour.AllowEditCellAccessPerm,3;Recipe.Behaviour.ShowValuesInRecipeEditor,3;Recipe.Behaviour.ShowValueInProcessView,3;Recipe.Behaviour.AllowSaveInProcessView,3; + Recipe.Behaviour.AllowRipInProcessView,3; + Step1,3;Step2,3;Step3,3;Step4,3;Step5,3;Step6,3;Step7,3;Step8,3;Step9,3;Step10,3;Step11,3;Step12,3;Step13,3;Step14,3; + Step15,3;Step16,3;Step17,3;Step18,3;Step19,3;Step20,3;Step21,3;Step22,3;Step23,3;Step24,3;Step25,3;Step26,3;Step27,3;Step28,3;Step29,3;Step30,3;Step31,3; + Step32,3;Step33,3;Step34,3;Step35,3;Step36,3;Step37,3;Step38,3;Step39,3;Step40,3;Step41,3;Step42,3;Step43,3;Step44,3;Step45,3;Step46,3;Step47,3;Step48,3; + Step49,3;Step50,3; + - Header,3;Overview,3;TM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;ProcessHistory,3;RealTimeCharting,3;DataHistory,3;JobList,3; - Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;mainPM2,3; - processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;Uid,3;Step,3;Name,3;Time,3;Growth Rate,3;1. Ar/H2 Switch,3;2. SH Total Flow,3; - 3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3; - 10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;14. PSU Outer Temp Set,3;15. SCR Temp Set,3; - 16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3; - 22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;26. TCS Bubb Low Flow (M11),3;27. TCS Bubb High Flow (M10),3; - 28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3; - 34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C2H4 Flow Mode,3; - 39. C2H4 Flow (M16),3;42. C Source Split Ratio,3;43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3; - 46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3; - 52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3; - 58. TMA Push Flow (M8),3;59. TMA Bubb Pressure (PC2),3;60. Dope Split Ratio,3;61. Dope Push Pressure (PC5),3;62. Dope Inner Flow (M20),3; - 63. Dope Middle Flow (M19),3;64. Dope Outer Flow (M2),3;65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3; - 69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. Optic Purge Flow (M33),3; - 74. GasRing Purge Flow (M32),3;75. Chamber Purge Flow (M35),3;76. Rotation-Up Purge Flow (M36),3;77. Shutter Purge Flow (M37),3; - 78. Heater-WF Purge Flow (M38),3;79. Total Vent Flow,3;80. Vent Push Flow (M1),3;81. Vent Pre-Exhaust Pressure (PC4),3;Operation.Overview.Operation,3; - Operation.Overview.RunningMode,3;PM1.Main.ReactorStatus,3;PM1.Main.ReactorService,3;PM1.Process.Steps,3;Platform.Mainframe.PM1,3; - Platform.Mainframe.Buffer,3;Platform.Mainframe.LL,3;Platform.Mainframe.TM,3;Platform.Mainframe.PreHeat,3;Recipe.Behaviour.AllowEditCellAccessPerm,3; - Recipe.Behaviour.ShowValuesInRecipeEditor,3;Recipe.Behaviour.ShowValueInProcessView,3;Recipe.Behaviour.AllowSaveInProcessView,3; - Recipe.Behaviour.AllowRipInProcessView,3;Step1,3;Step2,3;Step3,3;Step4,3;Step5,3;Step6,3;Step7,3;Step8,3;Step9,3;Step10,3;Step11,3;Step12,3;Step13,3;Step14,3; - Step15,3;Step16,3;Step17,3;Step18,3;Step19,3;Step20,3;Step21,3;Step22,3;Step23,3;Step24,3;Step25,3;Step26,3;Step27,3;Step28,3;Step29,3;Step30,3;Step31,3; - Step32,3;Step33,3;Step34,3;Step35,3;Step36,3;Step37,3;Step38,3;Step39,3;Step40,3;Step41,3;Step42,3;Step43,3;Step44,3;Step45,3;Step46,3;Step47,3;Step48,3; - Step49,3;Step50,3; - + Header,3;Overview,3;TM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;ProcessHistory,3;RealTimeCharting,3;DataHistory,3;JobList,3; + Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;mainPM2,3; + processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;Uid,3;Step,3;Name,3;Time,3;Growth Rate,3;1. Ar/H2 Switch,3;2. SH Total Flow,3; + 3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3; + 10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;14. PSU Outer Temp Set,3;15. SCR Temp Set,3; + 16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3; + 22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;26. TCS Bubb Low Flow (M11),3;27. TCS Bubb High Flow (M10),3; + 28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3; + 34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C2H4 Flow Mode,3; + 39. C2H4 Flow (M16),3;42. C Source Split Ratio,3;43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3; + 46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3; + 52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3; + 58. TMA Push Flow (M8),3;59. TMA Bubb Pressure (PC2),3;60. Dope Split Ratio,3;61. Dope Push Pressure (PC5),3;62. Dope Inner Flow (M20),3; + 63. Dope Middle Flow (M19),3;64. Dope Outer Flow (M2),3;65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3; + 69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. Optic Purge Flow (M33),3; + 74. GasRing Purge Flow (M32),3;75. Chamber Purge Flow (M35),3;76. Rotation-Up Purge Flow (M36),3;77. Shutter Purge Flow (M37),3; + 78. Heater-WF Purge Flow (M38),3;79. Total Vent Flow,3;80. Vent Push Flow (M1),3;81. Vent Pre-Exhaust Pressure (PC4),3;Operation.Overview.Operation,3; + Operation.Overview.RunningMode,3;PM1.Main.ReactorStatus,3;PM1.Main.ReactorService,3;PM1.Process.Steps,3;Platform.Mainframe.PM1,3; + Platform.Mainframe.Buffer,3;Platform.Mainframe.LL,3;Platform.Mainframe.TM,3;Platform.Mainframe.PreHeat,3; + PM1.Process.ProcessMonitorWindow,3; + Recipe.Behaviour.AllowEditCellAccessPerm,3;Recipe.Behaviour.ShowValuesInRecipeEditor,3;Recipe.Behaviour.ShowValueInProcessView,3;Recipe.Behaviour.AllowSaveInProcessView,3; + Recipe.Behaviour.AllowRipInProcessView,3; + Step1,3;Step2,3;Step3,3;Step4,3;Step5,3;Step6,3;Step7,3;Step8,3;Step9,3;Step10,3;Step11,3;Step12,3;Step13,3;Step14,3; + Step15,3;Step16,3;Step17,3;Step18,3;Step19,3;Step20,3;Step21,3;Step22,3;Step23,3;Step24,3;Step25,3;Step26,3;Step27,3;Step28,3;Step29,3;Step30,3;Step31,3; + Step32,3;Step33,3;Step34,3;Step35,3;Step36,3;Step37,3;Step38,3;Step39,3;Step40,3;Step41,3;Step42,3;Step43,3;Step44,3;Step45,3;Step46,3;Step47,3;Step48,3; + Step49,3;Step50,3; + - Header,3;Overview,3;TM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;ProcessHistory,3;RealTimeCharting,3;DataHistory,3;JobList,3; - Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;mainPM2,3; - processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;Uid,3;Step,3;Name,3;Time,3;Growth Rate,3;1. Ar/H2 Switch,3;2. SH Total Flow,3; - 3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3; - 10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;14. PSU Outer Temp Set,3;15. SCR Temp Set,3; - 16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3; - 22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;26. TCS Bubb Low Flow (M11),3;27. TCS Bubb High Flow (M10),3; - 28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3; - 34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C2H4 Flow Mode,3; - 39. C2H4 Flow (M16),3;42. C Source Split Ratio,3;43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3; - 46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3; - 52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3; - 58. TMA Push Flow (M8),3;59. TMA Bubb Pressure (PC2),3;60. Dope Split Ratio,3;61. Dope Push Pressure (PC5),3;62. Dope Inner Flow (M20),3; - 63. Dope Middle Flow (M19),3;64. Dope Outer Flow (M2),3;65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3; - 69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. Optic Purge Flow (M33),3; - 74. GasRing Purge Flow (M32),3;75. Chamber Purge Flow (M35),3;76. Rotation-Up Purge Flow (M36),3;77. Shutter Purge Flow (M37),3; - 78. Heater-WF Purge Flow (M38),3;79. Total Vent Flow,3;80. Vent Push Flow (M1),3;81. Vent Pre-Exhaust Pressure (PC4),3;Operation.Overview.Operation,3; - Operation.Overview.RunningMode,3;PM1.Main.ReactorStatus,3;PM1.Main.ReactorService,3;PM1.Process.Steps,3;Platform.Mainframe.PM1,3; - Platform.Mainframe.Buffer,3;Platform.Mainframe.LL,3;Platform.Mainframe.TM,3;Platform.Mainframe.PreHeat,3;Recipe.Behaviour.AllowEditCellAccessPerm,3; - Recipe.Behaviour.ShowValuesInRecipeEditor,3;Recipe.Behaviour.ShowValueInProcessView,3;Recipe.Behaviour.AllowSaveInProcessView,3; - Recipe.Behaviour.AllowRipInProcessView,3;Step1,3;Step2,3;Step3,3;Step4,3;Step5,3;Step6,3;Step7,3;Step8,3;Step9,3;Step10,3;Step11,3;Step12,3;Step13,3;Step14,3; - Step15,3;Step16,3;Step17,3;Step18,3;Step19,3;Step20,3;Step21,3;Step22,3;Step23,3;Step24,3;Step25,3;Step26,3;Step27,3;Step28,3;Step29,3;Step30,3;Step31,3; - Step32,3;Step33,3;Step34,3;Step35,3;Step36,3;Step37,3;Step38,3;Step39,3;Step40,3;Step41,3;Step42,3;Step43,3;Step44,3;Step45,3;Step46,3;Step47,3;Step48,3; - Step49,3;Step50,3; - + Header,3;Overview,3;TM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;ProcessHistory,3;RealTimeCharting,3;DataHistory,3;JobList,3; + Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;mainPM2,3; + processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;Uid,3;Step,3;Name,3;Time,3;Growth Rate,3;1. Ar/H2 Switch,3;2. SH Total Flow,3; + 3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3; + 10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;14. PSU Outer Temp Set,3;15. SCR Temp Set,3; + 16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3; + 22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;26. TCS Bubb Low Flow (M11),3;27. TCS Bubb High Flow (M10),3; + 28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3; + 34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C2H4 Flow Mode,3; + 39. C2H4 Flow (M16),3;42. C Source Split Ratio,3;43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3; + 46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3; + 52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3; + 58. TMA Push Flow (M8),3;59. TMA Bubb Pressure (PC2),3;60. Dope Split Ratio,3;61. Dope Push Pressure (PC5),3;62. Dope Inner Flow (M20),3; + 63. Dope Middle Flow (M19),3;64. Dope Outer Flow (M2),3;65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3; + 69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. Optic Purge Flow (M33),3; + 74. GasRing Purge Flow (M32),3;75. Chamber Purge Flow (M35),3;76. Rotation-Up Purge Flow (M36),3;77. Shutter Purge Flow (M37),3; + 78. Heater-WF Purge Flow (M38),3;79. Total Vent Flow,3;80. Vent Push Flow (M1),3;81. Vent Pre-Exhaust Pressure (PC4),3;Operation.Overview.Operation,3; + Operation.Overview.RunningMode,3;PM1.Main.ReactorStatus,3;PM1.Main.ReactorService,3;PM1.Process.Steps,3;Platform.Mainframe.PM1,3; + Platform.Mainframe.Buffer,3;Platform.Mainframe.LL,3;Platform.Mainframe.TM,3;Platform.Mainframe.PreHeat,3; + PM1.Process.ProcessMonitorWindow,3; + Recipe.Behaviour.AllowEditCellAccessPerm,3;Recipe.Behaviour.ShowValuesInRecipeEditor,3;Recipe.Behaviour.ShowValueInProcessView,3;Recipe.Behaviour.AllowSaveInProcessView,3; + Recipe.Behaviour.AllowRipInProcessView,3; + Step1,3;Step2,3;Step3,3;Step4,3;Step5,3;Step6,3;Step7,3;Step8,3;Step9,3;Step10,3;Step11,3;Step12,3;Step13,3;Step14,3; + Step15,3;Step16,3;Step17,3;Step18,3;Step19,3;Step20,3;Step21,3;Step22,3;Step23,3;Step24,3;Step25,3;Step26,3;Step27,3;Step28,3;Step29,3;Step30,3;Step31,3; + Step32,3;Step33,3;Step34,3;Step35,3;Step36,3;Step37,3;Step38,3;Step39,3;Step40,3;Step41,3;Step42,3;Step43,3;Step44,3;Step45,3;Step46,3;Step47,3;Step48,3; + Step49,3;Step50,3; + - Header,3;Overview,3;TM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;ProcessHistory,3;RealTimeCharting,3;DataHistory,3;JobList,3; - Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;mainPM2,3; - processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;Uid,3;Step,3;Name,3;Time,3;Growth Rate,3;1. Ar/H2 Switch,3;2. SH Total Flow,3; - 3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3; - 10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;14. PSU Outer Temp Set,3;15. SCR Temp Set,3; - 16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3; - 22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;26. TCS Bubb Low Flow (M11),3;27. TCS Bubb High Flow (M10),3; - 28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3; - 34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C2H4 Flow Mode,3; - 39. C2H4 Flow (M16),3;42. C Source Split Ratio,3;43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3; - 46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3; - 52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3; - 58. TMA Push Flow (M8),3;59. TMA Bubb Pressure (PC2),3;60. Dope Split Ratio,3;61. Dope Push Pressure (PC5),3;62. Dope Inner Flow (M20),3; - 63. Dope Middle Flow (M19),3;64. Dope Outer Flow (M2),3;65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3; - 69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. Optic Purge Flow (M33),3; - 74. GasRing Purge Flow (M32),3;75. Chamber Purge Flow (M35),3;76. Rotation-Up Purge Flow (M36),3;77. Shutter Purge Flow (M37),3; - 78. Heater-WF Purge Flow (M38),3;79. Total Vent Flow,3;80. Vent Push Flow (M1),3;81. Vent Pre-Exhaust Pressure (PC4),3;Operation.Overview.Operation,3; - Operation.Overview.RunningMode,3;PM1.Main.ReactorStatus,3;PM1.Main.ReactorService,3;PM1.Process.Steps,3;Platform.Mainframe.PM1,3; - Platform.Mainframe.Buffer,3;Platform.Mainframe.LL,3;Platform.Mainframe.TM,3;Platform.Mainframe.PreHeat,3;Recipe.Behaviour.AllowEditCellAccessPerm,3; - Recipe.Behaviour.ShowValuesInRecipeEditor,3;Recipe.Behaviour.ShowValueInProcessView,3;Recipe.Behaviour.AllowSaveInProcessView,3; - Recipe.Behaviour.AllowRipInProcessView,3;Step1,3;Step2,3;Step3,3;Step4,3;Step5,3;Step6,3;Step7,3;Step8,3;Step9,3;Step10,3;Step11,3;Step12,3;Step13,3;Step14,3; - Step15,3;Step16,3;Step17,3;Step18,3;Step19,3;Step20,3;Step21,3;Step22,3;Step23,3;Step24,3;Step25,3;Step26,3;Step27,3;Step28,3;Step29,3;Step30,3;Step31,3; - Step32,3;Step33,3;Step34,3;Step35,3;Step36,3;Step37,3;Step38,3;Step39,3;Step40,3;Step41,3;Step42,3;Step43,3;Step44,3;Step45,3;Step46,3;Step47,3;Step48,3; - Step49,3;Step50,3; - + Header,3;Overview,3;TM,3;Device,3;ioPlatform,3;LeakCheck,3;Sequence,3;Recipe,3;EventLog,3;ProcessHistory,3;RealTimeCharting,3;DataHistory,3;JobList,3; + Charting,3;Config,3;Account,3;Role,3;Runtime,3;Alarm,3;mainPM1,3;processPM1,3;ioPM1,3;motionPM1,3;heaterPM1,3;alarmPM1,3;MFCFlowPM1,3;mainPM2,3; + processPM2,3;ioPM2,3;motionPM2,3;heaterPM2,3;alarmPM2,3;MFCFlowPM2,3;Uid,3;Step,3;Name,3;Time,3;Growth Rate,3;1. Ar/H2 Switch,3;2. SH Total Flow,3; + 3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3; + 10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;14. PSU Outer Temp Set,3;15. SCR Temp Set,3; + 16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3; + 22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;26. TCS Bubb Low Flow (M11),3;27. TCS Bubb High Flow (M10),3; + 28. TCS Push Flow (M12),3;29. TCS Bubb Pressure (PC3),3;30. HCl Flow Mode,3;31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3; + 34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C2H4 Flow Mode,3; + 39. C2H4 Flow (M16),3;42. C Source Split Ratio,3;43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3; + 46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3; + 52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;54. N2 High Flow Mode,3;55. N2 High Flow (M5),3;56. TMA Flow Mode,3;57. TMA Bubb Flow (M7),3; + 58. TMA Push Flow (M8),3;59. TMA Bubb Pressure (PC2),3;60. Dope Split Ratio,3;61. Dope Push Pressure (PC5),3;62. Dope Inner Flow (M20),3; + 63. Dope Middle Flow (M19),3;64. Dope Outer Flow (M2),3;65. SH Push Total Flow,3;66. SH Inner Flow,3;67. SH Middle Flow,3;68. SH Outer Flow,3; + 69. Inner Push Flow (M29),3;70. Middle Push Flow (M31),3;71. Outer Push Flow (M28),3;72. SH Purge Flow (M27),3;73. Optic Purge Flow (M33),3; + 74. GasRing Purge Flow (M32),3;75. Chamber Purge Flow (M35),3;76. Rotation-Up Purge Flow (M36),3;77. Shutter Purge Flow (M37),3; + 78. Heater-WF Purge Flow (M38),3;79. Total Vent Flow,3;80. Vent Push Flow (M1),3;81. Vent Pre-Exhaust Pressure (PC4),3;Operation.Overview.Operation,3; + Operation.Overview.RunningMode,3;PM1.Main.ReactorStatus,3;PM1.Main.ReactorService,3;PM1.Process.Steps,3;Platform.Mainframe.PM1,3; + Platform.Mainframe.Buffer,3;Platform.Mainframe.LL,3;Platform.Mainframe.TM,3;Platform.Mainframe.PreHeat,3; + PM1.Process.ProcessMonitorWindow,3; + Recipe.Behaviour.AllowEditCellAccessPerm,3;Recipe.Behaviour.ShowValuesInRecipeEditor,3;Recipe.Behaviour.ShowValueInProcessView,3;Recipe.Behaviour.AllowSaveInProcessView,3; + Recipe.Behaviour.AllowRipInProcessView,3; + Step1,3;Step2,3;Step3,3;Step4,3;Step5,3;Step6,3;Step7,3;Step8,3;Step9,3;Step10,3;Step11,3;Step12,3;Step13,3;Step14,3; + Step15,3;Step16,3;Step17,3;Step18,3;Step19,3;Step20,3;Step21,3;Step22,3;Step23,3;Step24,3;Step25,3;Step26,3;Step27,3;Step28,3;Step29,3;Step30,3;Step31,3; + Step32,3;Step33,3;Step34,3;Step35,3;Step36,3;Step37,3;Step38,3;Step39,3;Step40,3;Step41,3;Step42,3;Step43,3;Step44,3;Step45,3;Step46,3;Step47,3;Step48,3; + Step49,3;Step50,3; +