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系统配置中移除MFC的StableTime设置项。

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DESKTOP-GPE37UV\THINKAPD 2023-03-09 19:29:25 +08:00
parent b3325af4d8
commit 595d24d906
1 changed files with 33 additions and 66 deletions
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SicRT/Config/System.sccfg
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@ -679,231 +679,198 @@
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc2">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc3">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc4">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc5">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc6">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc7">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc8">
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc9">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc10">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc11">
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc12">
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc13">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc14">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc15">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc16">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc19">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc20">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc22">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc23">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc25">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc26">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc27">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc28">
<config default="50000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc29">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="750" name="DefaultSetPoint" description="DefaultSetPoint" max="15000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc31">
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc32">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc33">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc35">
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc36">
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc37">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc38">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc40">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
</configs>
@ -1230,231 +1197,231 @@
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc2">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc3">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc4">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc5">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc6">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc7">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc8">
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc9">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc10">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc11">
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc12">
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc13">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc14">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc15">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc16">
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc19">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc20">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc22">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc23">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc25">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc26">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc27">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc28">
<config default="50000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc29">
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="750" name="DefaultSetPoint" description="DefaultSetPoint" max="15000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc31">
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc32">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc33">
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc35">
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc36">
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc37">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc38">
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
<configs name="Mfc40">
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
</configs>
</configs>