系统配置中移除MFC的StableTime设置项。
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@ -679,231 +679,198 @@
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc2">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc3">
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<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc4">
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<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc5">
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<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc6">
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<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc7">
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<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc8">
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<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc9">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc10">
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<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc11">
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<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc12">
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<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc13">
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<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc14">
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<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc15">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc16">
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<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc19">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc20">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc22">
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<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc23">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc25">
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<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc26">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc27">
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<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc28">
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<config default="50000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc29">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="750" name="DefaultSetPoint" description="DefaultSetPoint" max="15000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc31">
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<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc32">
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<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc33">
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<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc35">
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<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
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</configs>
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<configs name="Mfc36">
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<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc37">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc38">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc40">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
</configs>
|
||||
|
@ -1230,231 +1197,231 @@
|
|||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc2">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc3">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc4">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc5">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc6">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc7">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc8">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc9">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc10">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc11">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc12">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc13">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc14">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc15">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc16">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc19">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc20">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc22">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc23">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc25">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc26">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc27">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc28">
|
||||
<config default="50000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc29">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="750" name="DefaultSetPoint" description="DefaultSetPoint" max="15000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc31">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc32">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc33">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc35">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc36">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc37">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc38">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
<configs name="Mfc40">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="10" name="StableTime" description="Stable Time" max="10000" min="0" paramter="" tag="" unit="s" type="Double" visible="true"/>
|
||||
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
||||
</configs>
|
||||
</configs>
|
||||
|
|
Loading…
Reference in New Issue