113 lines
3.7 KiB
C#
113 lines
3.7 KiB
C#
using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.EFEM;
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using System.Collections.Generic;
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using System.Xml;
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namespace Mainframe.EFEMs
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{
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public class SicEFEM : EFEM
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{
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private ModuleName _module;
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private IoSlitValve _slitvalveUnLoad;
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private IoSlitValve _slitvalveLoadLockLeft;
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private IoSlitValve _slitvalveLoadLockRight;
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public SicEFEM(string module, XmlElement node, string ioModule = "") : base(module)
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{
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var attrModule = node.GetAttribute("module");
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base.Module = string.IsNullOrEmpty(attrModule) ? module : attrModule;
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base.Name = node.GetAttribute("id");
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base.Display = node.GetAttribute("display");
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base.DeviceID = node.GetAttribute("schematicId");
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_module = ModuleHelper.Converter(Module);
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}
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public override bool Initialize()
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{
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_slitvalveUnLoad = DEVICE.GetDevice<IoSlitValve>("EFEM.UnLoadSubDoor");
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_slitvalveLoadLockLeft = DEVICE.GetDevice<IoSlitValve>("EFEM.LoadLockLSideDoor");
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_slitvalveLoadLockRight = DEVICE.GetDevice<IoSlitValve>("EFEM.LoadLockRSideDoor");
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return base.Initialize();
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}
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public override double AtmPressureBase
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{
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get
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{
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return SC.GetValue<double>("EFEM.AtmPressureBase");
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}
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}
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public override bool CheckSlitValveOpen(ModuleName module,ModuleName robot)
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{
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if (robot == ModuleName.WaferRobot)
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{
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if (module == ModuleName.LoadLock)
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{
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return _slitvalveLoadLockLeft.IsOpen;
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}
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else if (module == ModuleName.UnLoad)
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{
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return _slitvalveUnLoad.IsOpen;
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}
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return true;
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}
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else if (robot == ModuleName.TrayRobot && module == ModuleName.LoadLock)
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{
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return _slitvalveLoadLockRight.IsOpen;
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}
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return true;
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}
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public override bool CheckSlitValveClose(ModuleName module, ModuleName robot)
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{
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if (robot == ModuleName.WaferRobot)
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{
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if (module == ModuleName.LoadLock)
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{
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return _slitvalveLoadLockLeft.IsClose;
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}
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else if (module == ModuleName.UnLoad)
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{
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return _slitvalveUnLoad.IsClose;
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}
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return true;
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}
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else if (robot == ModuleName.TrayRobot && module == ModuleName.LoadLock)
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{
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return _slitvalveLoadLockRight.IsClose;
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}
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return true;
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}
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public override bool SetSlitValve(ModuleName module, ModuleName robot, bool isOpen, out string reason)
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{
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reason = string.Empty;
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if (robot == ModuleName.WaferRobot)
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{
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if (module == ModuleName.LoadLock)
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{
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return _slitvalveLoadLockLeft.SetSlitValve(isOpen, out reason);
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}
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else if (module == ModuleName.UnLoad)
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{
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return _slitvalveUnLoad.SetSlitValve(isOpen, out reason);
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}
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return true;
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}
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else if (robot == ModuleName.TrayRobot && module == ModuleName.LoadLock)
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{
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return _slitvalveLoadLockRight.SetSlitValve(isOpen, out reason);
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}
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return true;
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}
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}
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}
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