144 lines
4.7 KiB
Plaintext
144 lines
4.7 KiB
Plaintext
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待修复问题:
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Sic 系统更新历史记录
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Sic06 2023-01-11 Version 1.0.4.5
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1.取消Unload CoolingAndPurge,改用Cooling和Purge分开,防止CoolingAndPurge占用过多
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Sic06 2022-12-21 Version 1.0.3.4
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1.Load旋转Routine增加先Reset后ServoOn步骤
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2.解决有时最后的Tray不回Cassette的BUG
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3.Load和Unload的伺服压力若Vent大气增加延时再关Vent阀
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4.ReturnAllWafer功能中增加当Load腔有Tray暂时不取Buffer中次数使用完的Tray
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Sic06 2022-12-20 Version 1.0.2.3
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1.所有模块在模块运行时也可切Offline
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2.解决Load腔快抽阀有时关闭的BUG
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3.修改PostTransfer流程,先开旋转等待5s再升隔热罩
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4.增加PM1/PM2根据Process的结束时间来决定谁先Pick的功能
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Sic06 2022-12-17 Version 1.0.2.2
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1.所有模块在模块运行时也可切Offline
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2.解决Load腔快抽阀有时关闭的BUG
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3.修改PostTransfer流程,先开旋转等待5s再升隔热罩
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Sic06 2022-12-16 Version 1.0.2.1
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1.暂时取消磁流体转速检测功能
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Sic06 2022-12-15 Version 1.0.2.0
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1.优化Aligner流程,手动放Wafer取消Aligner动作
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2.取消DO-64/65/67/68相关动作
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3.PreProcess不等待旋转到位再升隔热罩
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4.优化系统参数
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5.取消所有关于自动校正功率功能
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Sic06 2022-12-14 Version 1.0.1.9
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1、重新整理Aligner所有功能
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Sic06 2022-12-14 Version 1.0.1.8
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1、Aligner驱动优化;
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Sic06 2022-12-13 Version 1.0.1.7
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1、显示Aligner的“消除报警”按钮,方便操作;
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Sic06 2022-12-12 Version 1.0.1.6
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1、AE优化:显式设置 SubscriptionAttribute.FLAG.SaveDB 的DATA注册;
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Sic06 2022-12-09 Version 1.0.1.5
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1、CoolingWater 的 Interlock 报警更正;
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Sic06 2022-12-08 Version 1.0.1.4
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1、PM1/PM2的 DI401-414删除掉;
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2、PM/PM1-PM2的CoolingWater的文字和IO对应;
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3、修改CoolWater的相应的IO(黄色);
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Sic06 2022-12-08 Version 1.0.1.3
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1.MFC07和MFC08 Offline是否报警根据AB腔TMA是否安装决定
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2.Log Save Days默认设置为180天
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3.取消PlacePVInnerTempLimit和PickPVInnerTempLimit参数,
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打开PM闸板阀取消Inner温度检查,取消侧壁测温
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4.解决PM在满足条件下有时无法开腔的BUG
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5.取消Recipe中关于修改TMA参数的报警
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6.Load和TM LeakCheck Routine使用自身的Pump和Vent参数
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7.取消所有SlitValve打开或关闭中关于Buffer的检查,增加PM2的检查
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8.Aligner和PM1、PM2 Wafer增加旋转动画
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9.优化AutoRun流程
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10.解决开启Interlock仿真跑片隔热罩报警问题
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11.PM Purge最终压力改为Purge自身参数
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Sic06 2022-12-08 Version 1.0.1.2
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1.冷却水路IO修改:U6/U11/U12/U13;
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Sic06 2022-12-07 Version 1.0.1.1
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1.优化AutoRun,TMRobot等Unload完全Ready再去PM腔取盘,
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防止Tray长时间在TMRobot上
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2.修改V85阀的动画
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Sic06 2022-12-06 Version 1.0.1.0
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1.Load和Unload加锁,防止同时Pump
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2.修改V111阀门,改从M27后面进气
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3.修改V124动画流向
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4.Unload增加3次Purge配置,分别为传Tray,取Tray,取Wafer时配置Purge
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5.TMRobot放Tray到Buffer后增加Purge配置
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6.修改TM Purge气压仿真速率,提升仿真速度
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Sic06 2022-12-02 Version 1.0.0.9
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1.AE驱动优化;
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Sic06 2022-12-01 Version 1.0.0.8
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1.HiwinAligner 优化;
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2.V75由常开改为常闭
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3.重新整理优化ReturnAllWafer功能
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4.RecipeConfig放到和PM同级别目录,改BUG,RecipeConfig参数人工修改后,最新数据不能同步到新添加的Recipe
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测试发现
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5.PM Monitor悬浮框信息备注PM1&PM2 信息,方便区分
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6.PM Process界面monitor按钮可以连续点击,出现多个Monitor界面,修改完成
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7.去除TrayUsedForWhichPM属性的使用,改用TrayOrigSlot属性
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Sic06 2022-11-25 Version 1.0.0.7
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1.HiwinAligner 优化;
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Sic06 2022-11-24 Version 1.0.0.6
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1.暂时取消MFC07/MFC08 Offline报警
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2.优化EFEM Moudle,将WaferRobot和TrayRobot拆分出来
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3.重新整理AutoRun
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4.取消Buffer闸板阀,界面显示常开状态,取消Routine中关于
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Buffer闸板阀操作,取消所有检查Buffer闸板阀条件状态
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Sic06 2022-11-24 Version 1.0.0.5
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1.PSU、SCR超限检测,状态Process 和 ProcessIdle两种状态下;
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Sic06 2022-11-24 Version 1.0.0.5
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1.PSU、SCR超限检测,状态Process 和 ProcessIdle两种状态下;
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Sic06 2022-11-18 Version 1.0.0.4
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1.AE改成4通道测温;
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Sic06 2022-11-15 Version 1.0.0.3
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1. 取消创建Wafer自带Job功能
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2.取消Unload切换为Offline的所有限制
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Sic06 2022-11-14 Version 1.0.0.2
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1. 更新AlarmCode
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2.更新水路报警等信息
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3.增加PSU和SCR电流电压报警功能
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Sic06 2022-11-10 Version 1.0.0.1
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1. AlarmCode PM1 PM2 更新
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Sic06 2022-11-02 Version 1.0.0.0
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1. 首次上传程序
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