2023-01-13 10:57:37 +08:00
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待修复问题：
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---------------------------------------------------------------------------------
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Sic 系统更新历史记录
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---------------------------------------------------------------------------------
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2023-03-30 13:46:42 +08:00
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Sic06 2023-03-30 Version 1.0.9.28
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1.修改Vent流程
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2.PM增加MFC5控制，涉及UI和Recipe等
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Sic06 2023-03-29 Version 1.0.9.27
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1.V94/V96开阀判断阀状态，如果开的则不动作，阀关的话对应MFC流量先Ramp到0，再开阀
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2023-03-29 10:26:55 +08:00
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Sic06 2023-03-27 Version 1.0.8.26
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- 关闭气阀时，关闭MFC
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MFC Valve
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M27 V87
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M33 V91
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M40 V97
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M31 V90
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M29 V89
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M28 V88
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M38 V96
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M37 V95
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M36 V94
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M35 V93
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M32 V92
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Sic06 2023-03-27 Version 1.0.8.25
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1.PM Clean和Purge Routine中增加开V94,V96需等到腔体压力大于950功能
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2.ProcessAbortRoutine中增加将PSU和SCR的Ratio设置为0动作
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3.系统配置参数SlowFastVentSwitchPressure的最小值设置为0
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4.AutoRun中TM从Buffer取Tray到PM时始终关闭HeaterEnable
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Sic06 2023-03-22 Version 1.0.8.24
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1.PM ProcessAbortRoutine中关于阀的操作改为不等待反馈
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Sic06 2023-03-21 Version 1.0.8.23
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1.修复WaferRobot和TrayRobot收到错误信息，重复查询问题
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Sic06 2023-03-20 Version 1.0.7.22
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1.关闭阀门时，先关闭MFC，同时关闭阀门，已修改TM的 V77和MFC60，PM的MFC32 35~38，
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Sic06 2023-03-14 Version 1.0.6.21
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1.点击Reset按钮清除LogList中Alarm信息
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Sic06 2023-03-13 Version 1.0.6.20
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1.TMPurgeRoutine时，修改MFC60打开相关设置
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Sic06 2023-03-09 Version 1.0.6.19
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1.解决PM ValIdle参数报错问题
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2.解决PM 设置蝶阀模式时可能Pressure还在ramp,导致报错问题
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Sic06 2023-03-07 Version 1.0.6.18
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|
1.解决TMRobot向Unload Place过程中Unload可能PrepareTransfer的问题
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Sic06 2023-03-03 Version 1.0.6.17
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|
1.PM PreProcess过程中若报警也执行宕机流程
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Sic06 2023-02-26 Version 1.0.6.16
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|
|
1.PM Mfc14量程改为660
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|
2023-02-24 09:19:37 +08:00
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Sic06 2023-02-22 Version 1.0.6.15
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|
1.Purge最大时间改为100000s
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2.解决SCR Interlock问题
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3.TMRobot Pick Load根据Wafer夹爪判断传Tray和Wafer信息
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4.Load腔非Idle情况下TMRobot不能Pick和Place
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|
2023-02-20 16:51:07 +08:00
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|
Sic06 2023-02-17 Version 1.0.6.14
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|
|
1.解决Load腔CCD拍照逻辑问题
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|
2023-02-15 14:13:24 +08:00
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Sic06 2023-02-14 Version 1.0.6.13
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|
|
1.修正PM执行Recipe时报StepUid找不到执行函数的问题
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Sic06 2023-02-14 Version 1.0.6.12
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|
1.PM Purge结束增加是否打开Final阀功能
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2.增加PM SCREnable Interlock
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3.增加PM Service模式下不准切换Online功能
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|
4.ProcessAbort Rounite中增加等待MFC流量到达再往下执行
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5.ProcessAbort Routine中增加关闭V72，打开V25流程
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6.优化电阻检测名称
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7.TM界面所有Module Online及Offline按钮权限放开
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8.删除VacIdle参数
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9.修改PM气路图的V72阀的气路走向错误
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|
10.重新整理PM MO Change TMA/TCS Routine
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|
Sic06 2023-02-13 Version 1.0.5.11
|
|
|
|
|
|
1、AE的历史数据从Charting拉不出来
|
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|
2、AE的数据不在PM模块，ProcessHistory中没有AE的数据
|
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|
Sic06 2023-02-06 Version 1.0.4.10
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|
|
|
|
|
1.解决WaferRobot手动从Casseset到Load Aligner不执行问题
|
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|
Sic06 2023-02-06 Version 1.0.4.9
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|
|
|
|
|
1.修正HwinRobot命令返回？后无法正确读取Error信息的问题
|
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|
Sic06 2023-01-28 Version 1.0.4.8
|
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|
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|
|
1优化HWinRobot通讯，执行Pick和Place指令之前先查询控制器ERR。
|
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|
2修正HwinRobot命令返回？后无法正确读取Error信息的问题。
|
|
|
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|
|
|
2023-01-29 15:02:44 +08:00
|
|
|
|
Sic06 2023-01-28 Version 1.0.4.7
|
|
|
|
|
|
1.C2H4改为C3H8，涉及UI，IO，Interlock,Recipe等
|
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|
Sic06 2023-01-28 Version 1.0.4.6
|
|
|
|
|
|
1.修改权限相关默认值
|
|
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|
|
2023-01-13 10:57:37 +08:00
|
|
|
|
Sic06 2023-01-11 Version 1.0.4.5
|
|
|
|
|
|
1.取消Unload CoolingAndPurge,改用Cooling和Purge分开,防止CoolingAndPurge占用过多
|
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|
|
Sic06 2022-12-21 Version 1.0.3.4
|
|
|
|
|
|
1.Load旋转Routine增加先Reset后ServoOn步骤
|
|
|
|
|
|
2.解决有时最后的Tray不回Cassette的BUG
|
|
|
|
|
|
3.Load和Unload的伺服压力若Vent大气增加延时再关Vent阀
|
|
|
|
|
|
4.ReturnAllWafer功能中增加当Load腔有Tray暂时不取Buffer中次数使用完的Tray
|
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|
Sic06 2022-12-20 Version 1.0.2.3
|
|
|
|
|
|
1.所有模块在模块运行时也可切Offline
|
|
|
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|
|
2.解决Load腔快抽阀有时关闭的BUG
|
|
|
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|
|
3.修改PostTransfer流程，先开旋转等待5s再升隔热罩
|
|
|
|
|
|
4.增加PM1/PM2根据Process的结束时间来决定谁先Pick的功能
|
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|
|
Sic06 2022-12-17 Version 1.0.2.2
|
|
|
|
|
|
1.所有模块在模块运行时也可切Offline
|
|
|
|
|
|
2.解决Load腔快抽阀有时关闭的BUG
|
|
|
|
|
|
3.修改PostTransfer流程，先开旋转等待5s再升隔热罩
|
|
|
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|
|
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|
|
Sic06 2022-12-16 Version 1.0.2.1
|
|
|
|
|
|
1.暂时取消磁流体转速检测功能
|
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|
Sic06 2022-12-15 Version 1.0.2.0
|
|
|
|
|
|
1.优化Aligner流程，手动放Wafer取消Aligner动作
|
|
|
|
|
|
2.取消DO-64/65/67/68相关动作
|
|
|
|
|
|
3.PreProcess不等待旋转到位再升隔热罩
|
|
|
|
|
|
4.优化系统参数
|
|
|
|
|
|
5.取消所有关于自动校正功率功能
|
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|
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|
|
|
|
|
|
|
Sic06 2022-12-14 Version 1.0.1.9
|
|
|
|
|
|
1、重新整理Aligner所有功能
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-12-14 Version 1.0.1.8
|
|
|
|
|
|
1、Aligner驱动优化；
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-12-13 Version 1.0.1.7
|
|
|
|
|
|
1、显示Aligner的“消除报警”按钮，方便操作；
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-12-12 Version 1.0.1.6
|
|
|
|
|
|
1、AE优化：显式设置 SubscriptionAttribute.FLAG.SaveDB 的DATA注册;
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-12-09 Version 1.0.1.5
|
|
|
|
|
|
1、CoolingWater 的 Interlock 报警更正；
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-12-08 Version 1.0.1.4
|
|
|
|
|
|
1、PM1/PM2的 DI401-414删除掉；
|
|
|
|
|
|
2、PM/PM1-PM2的CoolingWater的文字和IO对应；
|
|
|
|
|
|
3、修改CoolWater的相应的IO（黄色）；
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-12-08 Version 1.0.1.3
|
|
|
|
|
|
1.MFC07和MFC08 Offline是否报警根据AB腔TMA是否安装决定
|
|
|
|
|
|
2.Log Save Days默认设置为180天
|
|
|
|
|
|
3.取消PlacePVInnerTempLimit和PickPVInnerTempLimit参数，
|
|
|
|
|
|
打开PM闸板阀取消Inner温度检查,取消侧壁测温
|
|
|
|
|
|
4.解决PM在满足条件下有时无法开腔的BUG
|
|
|
|
|
|
5.取消Recipe中关于修改TMA参数的报警
|
|
|
|
|
|
6.Load和TM LeakCheck Routine使用自身的Pump和Vent参数
|
|
|
|
|
|
7.取消所有SlitValve打开或关闭中关于Buffer的检查，增加PM2的检查
|
|
|
|
|
|
8.Aligner和PM1、PM2 Wafer增加旋转动画
|
|
|
|
|
|
9.优化AutoRun流程
|
|
|
|
|
|
10.解决开启Interlock仿真跑片隔热罩报警问题
|
|
|
|
|
|
11.PM Purge最终压力改为Purge自身参数
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-12-08 Version 1.0.1.2
|
|
|
|
|
|
1.冷却水路IO修改：U6/U11/U12/U13；
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-12-07 Version 1.0.1.1
|
|
|
|
|
|
1.优化AutoRun,TMRobot等Unload完全Ready再去PM腔取盘，
|
|
|
|
|
|
防止Tray长时间在TMRobot上
|
|
|
|
|
|
2.修改V85阀的动画
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-12-06 Version 1.0.1.0
|
|
|
|
|
|
1.Load和Unload加锁，防止同时Pump
|
|
|
|
|
|
2.修改V111阀门，改从M27后面进气
|
|
|
|
|
|
3.修改V124动画流向
|
|
|
|
|
|
4.Unload增加3次Purge配置，分别为传Tray,取Tray,取Wafer时配置Purge
|
|
|
|
|
|
5.TMRobot放Tray到Buffer后增加Purge配置
|
|
|
|
|
|
6.修改TM Purge气压仿真速率，提升仿真速度
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-12-02 Version 1.0.0.9
|
|
|
|
|
|
1.AE驱动优化；
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-12-01 Version 1.0.0.8
|
|
|
|
|
|
1.HiwinAligner 优化；
|
|
|
|
|
|
2.V75由常开改为常闭
|
|
|
|
|
|
3.重新整理优化ReturnAllWafer功能
|
|
|
|
|
|
4.RecipeConfig放到和PM同级别目录,改BUG,RecipeConfig参数人工修改后，最新数据不能同步到新添加的Recipe
|
|
|
|
|
|
测试发现
|
|
|
|
|
|
5.PM Monitor悬浮框信息备注PM1&PM2 信息，方便区分
|
|
|
|
|
|
6.PM Process界面monitor按钮可以连续点击，出现多个Monitor界面，修改完成
|
|
|
|
|
|
7.去除TrayUsedForWhichPM属性的使用,改用TrayOrigSlot属性
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-11-25 Version 1.0.0.7
|
|
|
|
|
|
1.HiwinAligner 优化；
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-11-24 Version 1.0.0.6
|
|
|
|
|
|
1.暂时取消MFC07/MFC08 Offline报警
|
|
|
|
|
|
2.优化EFEM Moudle，将WaferRobot和TrayRobot拆分出来
|
|
|
|
|
|
3.重新整理AutoRun
|
|
|
|
|
|
4.取消Buffer闸板阀，界面显示常开状态，取消Routine中关于
|
|
|
|
|
|
Buffer闸板阀操作，取消所有检查Buffer闸板阀条件状态
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-11-24 Version 1.0.0.5
|
|
|
|
|
|
1.PSU、SCR超限检测，状态Process 和 ProcessIdle两种状态下；
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-11-24 Version 1.0.0.5
|
|
|
|
|
|
1.PSU、SCR超限检测，状态Process 和 ProcessIdle两种状态下；
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-11-18 Version 1.0.0.4
|
|
|
|
|
|
1.AE改成4通道测温；
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-11-15 Version 1.0.0.3
|
|
|
|
|
|
1. 取消创建Wafer自带Job功能
|
|
|
|
|
|
2.取消Unload切换为Offline的所有限制
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Sic06 2022-11-14 Version 1.0.0.2
|
|
|
|
|
|
1. 更新AlarmCode
|
|
|
|
|
|
2.更新水路报警等信息
|
|
|
|
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3.增加PSU和SCR电流电压报警功能
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Sic06 2022-11-10 Version 1.0.0.1
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1. AlarmCode PM1 PM2 更新
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Sic06 2022-11-02 Version 1.0.0.0
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1. 首次上传程序
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