Step,3;Name,3;Time,3;1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;
7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3;10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;
14. PSU Outer Temp Set,3;15. SCR Temp Set,3;16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;
20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3;22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;
31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3;34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;
36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C3H8 Flow Mode,3;39. C3H8 Flow (M16),3;42. C Source Split Ratio,3;
43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3;46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;
48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3;52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;
Step,3;Name,3;Time,3;1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;
7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3;10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;
14. PSU Outer Temp Set,3;15. SCR Temp Set,3;16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;
20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3;22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;
31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3;34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;
36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C3H8 Flow Mode,3;39. C3H8 Flow (M16),3;42. C Source Split Ratio,3;
43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3;46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;
48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3;52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;
Step,3;Name,3;Time,3;1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;
7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3;10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;
14. PSU Outer Temp Set,3;15. SCR Temp Set,3;16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;
20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3;22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;
31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3;34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;
36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C3H8 Flow Mode,3;39. C3H8 Flow (M16),3;42. C Source Split Ratio,3;
43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3;46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;
48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3;52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;
Step,3;Name,3;Time,3;1. Ar/H2 Switch,3;2. SH Total Flow,3;3. Carray Gas Flow (M40),3;4. SH Total Flow Split Ratio,3;5. Flow Set Mode,3;6. Pressure Set,3;
7. Rotation Set,3;8. PSU Control Mode,3;9. PSU Set Mode,3;10. SCR Control Mode,3;11. SCR Set Mode,3;12. PSU Inner Temp Set,3;13. PSU Middle Temp Set,3;
14. PSU Outer Temp Set,3;15. SCR Temp Set,3;16. PSU Inner Ratio Set,3;17. PSU Middle Ratio Set,3;18. PSU Outer Ratio Set,3;19. SCR Upper Ratio Set,3;
20. SCR Middle Ratio Set,3;21. SCR Lower Ratio Set,3;22. Si Source Total Flow,3;23. SiH4 Flow Mode,3;24. SiH4 Flow (M14),3;25. TCS Flow Mode,3;
31. HCl Flow (M13),3;32. Si Source Split Ratio,3;33. Si Source Push Pressure (PC6),3;34. Si Source Inner Flow (M23),3;35. Si Source Middle Flow (M22),3;
36. Si Source Outer Flow (M9),3;37. C Source Total Flow,3;38. C3H8 Flow Mode,3;39. C3H8 Flow (M16),3;42. C Source Split Ratio,3;
43. C Source Push Pressure (PC7),3;44. C Source Inner Flow (M26),3;45. C Source Middle Flow (M25),3;46. C Source Outer Flow (M15),3;47. Dope Total Flow,3;
48. N2 Flow Mode,3;49. N2 Actual Flow,3;50. N2 Low Flow (M4),3;51. Dilut Flow For N2 (M3),3;52. Diluted N2 Flow (M6),3;53. N2 Post Dilut Pressure (PC1),3;