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• v1.0.6.12 fd9127bedf

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  v1.0.6.12 Stable

  liang.su released this 2023-04-07 17:28:46 +08:00 | 0 commits to master since this release

  Version 1.0.6.12

  2023-04-07

  • Bug修复
    • 修正WaferRobot从UL取盘后，反复从Aligner取放盘的问题
  • 新特性
    • PM1和PM2气路图中增加进入反应腔的总进气量实时统计

  Downloads

  • Source Code (ZIP)
  • Source Code (TAR.GZ)
  • Sic07_Setup_v1.0.6.12.exe
    21 MiB