489 lines
14 KiB
C#
489 lines
14 KiB
C#
using Aitex.Core.RT.DataCenter;
|
||
using Aitex.Core.RT.Device;
|
||
using Aitex.Core.RT.Event;
|
||
using Aitex.Core.RT.Log;
|
||
using Aitex.Core.RT.OperationCenter;
|
||
using Aitex.Core.RT.SCCore;
|
||
using Aitex.Core.Util;
|
||
using MECF.Framework.Common.Communications;
|
||
using System;
|
||
using System.Collections.Generic;
|
||
using System.Linq;
|
||
using System.Text;
|
||
|
||
namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.HwAligner
|
||
{
|
||
public class HwAlignerGuide : BaseDevice, IConnection, IDevice
|
||
{
|
||
private HwAlignerGuideConnection _connection;
|
||
|
||
private bool _activeMonitorStatus;
|
||
|
||
private R_TRIG _trigCommunicationError = new R_TRIG();
|
||
private R_TRIG _trigRetryConnect = new R_TRIG();
|
||
private bool bIsDisconnect = false;
|
||
|
||
private PeriodicJob _thread;
|
||
|
||
private LinkedList<HandlerBase> _lstHandler = new LinkedList<HandlerBase>();
|
||
|
||
private object _locker = new object();
|
||
|
||
private bool _enableLog = true;
|
||
|
||
private string _scRoot;
|
||
|
||
public bool HaveWafer
|
||
{
|
||
get; set;
|
||
}
|
||
|
||
public string Address
|
||
{
|
||
get; set;
|
||
}
|
||
|
||
public bool IsConnected
|
||
{
|
||
get
|
||
{
|
||
return _connection != null && _connection.IsConnected;
|
||
}
|
||
}
|
||
|
||
private bool isBusy;
|
||
public bool IsBusy
|
||
{
|
||
get
|
||
{
|
||
return isBusy || _lstHandler.Count > 0;
|
||
}
|
||
}
|
||
|
||
|
||
public bool Connect()
|
||
{
|
||
return true;
|
||
}
|
||
|
||
public bool Disconnect()
|
||
{
|
||
return true;
|
||
}
|
||
|
||
public HwAlignerGuide(string module, string scRoot, string name) : base(module, name, name, name)
|
||
{
|
||
|
||
_scRoot = scRoot;
|
||
_activeMonitorStatus = true;
|
||
}
|
||
|
||
public bool Initialize()
|
||
{
|
||
string portName = SC.GetStringValue($"{Name}.Address");
|
||
Address = portName;
|
||
_enableLog = SC.GetValue<bool>($"{Name}.EnableLogMessage");
|
||
|
||
_connection = new HwAlignerGuideConnection(portName);
|
||
_connection.EnableLog(_enableLog);
|
||
|
||
if (_connection.Connect())
|
||
{
|
||
EV.PostInfoLog(Module, $"{Module}.{Name} connected");
|
||
}
|
||
|
||
isBusy = false;
|
||
_thread = new PeriodicJob(500, OnTimer, $"{Name} MonitorHandler", true);
|
||
//
|
||
SetData();
|
||
SetOP();
|
||
//
|
||
ConnectionManager.Instance.Subscribe($"{Name}", this);
|
||
|
||
return true;
|
||
}
|
||
private void SetData()
|
||
{
|
||
//DATA.Subscribe($"{Module}.{Name}.HwisBusy", () => isBusy);
|
||
DATA.Subscribe($"{Module}.{Name}.HwHaveWafer", () => HaveWafer);
|
||
}
|
||
/// <summary>
|
||
/// 设置操作
|
||
/// </summary>
|
||
private void SetOP()
|
||
{
|
||
|
||
//------------------------------------------------------------
|
||
//参数保存
|
||
OP.Subscribe($"{Module}.{Name}.HwSaveParameters", (cmd, param) =>
|
||
{
|
||
Set("SPS", "SPS");
|
||
return true;
|
||
});
|
||
//读取/设定晶圆尺寸
|
||
OP.Subscribe($"{Module}.{Name}.HwWaferSize", (cmd, param) =>
|
||
{
|
||
Set("WSZ","WSZ" + " " + param[0]);
|
||
return true;
|
||
});
|
||
//晶圆种类
|
||
OP.Subscribe($"{Module}.{Name}.HwWaferType", (cmd, param) =>
|
||
{
|
||
Set("_WT","_WT" + " " + param[0]);
|
||
return true;
|
||
});
|
||
//寻边材质
|
||
OP.Subscribe($"{Module}.{Name}.HwWaferMaterial", (cmd, param) =>
|
||
{
|
||
Set("GLM", "GLM" + " " + param[0]);
|
||
return true;
|
||
});
|
||
//晶圆方向
|
||
OP.Subscribe($"{Module}.{Name}.HwWaferOrientation", (cmd, param) =>
|
||
{
|
||
Set("FWO", "FWO" + " " + param[0]);
|
||
return true;
|
||
});
|
||
|
||
//------------------------------------------------------------
|
||
|
||
//原点复归
|
||
OP.Subscribe($"{Module}.{Name}.HwHome", (cmd, param) =>
|
||
{
|
||
Set("HOM", "HOM");
|
||
return true;
|
||
});
|
||
|
||
//晶圆确认
|
||
OP.Subscribe($"{Module}.{Name}.HwCheckWafer", (cmd, param) =>
|
||
{
|
||
this.HaveWafer = false;
|
||
Set("DOC", "DOC");
|
||
return true;
|
||
});
|
||
|
||
//开启真空
|
||
OP.Subscribe($"{Module}.{Name}.HwVacuumOn", (cmd, param) =>
|
||
{
|
||
Set("CVN", "CVN");
|
||
return true;
|
||
});
|
||
|
||
//寻边补正
|
||
OP.Subscribe($"{Module}.{Name}.HwAlign", (cmd, param) =>
|
||
{
|
||
Set("BAL", "BAL");
|
||
return true;
|
||
});
|
||
|
||
//关闭真空
|
||
OP.Subscribe($"{Module}.{Name}.HwVacuumOff", (cmd, param) =>
|
||
{
|
||
Set("CVF", "CVF");
|
||
return true;
|
||
});
|
||
|
||
//读取真空值
|
||
OP.Subscribe($"{Module}.{Name}.HwCVD", (cmd, param) =>
|
||
{
|
||
Set("CVD", "CVD");
|
||
return true;
|
||
});
|
||
|
||
//移至测量中心点
|
||
OP.Subscribe($"{Module}.{Name}.HwMoveToMeasurement", (cmd, param) =>
|
||
{
|
||
Set("MTM", "MTM");
|
||
return true;
|
||
});
|
||
|
||
//读取最后错误信息
|
||
OP.Subscribe($"{Module}.{Name}.HwPER", (cmd, param) =>
|
||
{
|
||
Set("PER", "PER");
|
||
return true;
|
||
});
|
||
|
||
//清除报警
|
||
OP.Subscribe($"{Module}.{Name}.HwClearError", (cmd, param) =>
|
||
{
|
||
Set("ERS", "ERS");
|
||
return true;
|
||
});
|
||
|
||
//马达激磁
|
||
OP.Subscribe($"{Module}.{Name}.HwSetMagnetizerEnable", (cmd, param) =>
|
||
{
|
||
Set("SME11","SME11");
|
||
return true;
|
||
});
|
||
|
||
//Not Used------------------------------------------------------------
|
||
//相对位移
|
||
OP.Subscribe($"{Module}.{Name}.HwMVR", (cmd, param) =>
|
||
{
|
||
Set("MVR","MVR");
|
||
return true;
|
||
});
|
||
|
||
//
|
||
OP.Subscribe($"{Module}.{Name}.HwAbort", (cmd, param) =>
|
||
{
|
||
Abort();
|
||
return true;
|
||
});
|
||
|
||
|
||
}
|
||
|
||
public void Abort()
|
||
{
|
||
|
||
}
|
||
|
||
//--------------------------------------------------------
|
||
public void Set(string sName, string sCmd, int iTimeOut = 30)
|
||
{
|
||
_lstHandler.Clear();
|
||
lock (_locker)
|
||
{
|
||
_lstHandler.AddLast(new HwAlignerGuideSetAHandler(this, sName, sCmd, iTimeOut));
|
||
}
|
||
}
|
||
|
||
private void NotifyError(string errorInfo)
|
||
{
|
||
string _errorInfo = $"Hiwin Aligner Command :" + errorInfo;
|
||
EV.PostAlarmLog(Module, _errorInfo);
|
||
LOG.Write($"{Module}.{Name} " + _errorInfo);
|
||
}
|
||
|
||
private void NotifyWarning(string warningInfo)
|
||
{
|
||
string _warningInfo = $"Hiwin Aligner Command :" + warningInfo;
|
||
EV.PostWarningLog(Module, _warningInfo);
|
||
LOG.Write($"{Module}.{Name} " + _warningInfo);
|
||
}
|
||
|
||
//--------------------------------------------------------
|
||
public int _connecteTimes { get; set; }
|
||
private bool OnTimer()
|
||
{
|
||
try
|
||
{
|
||
_connection.MonitorTimeout();
|
||
|
||
//若断，重连
|
||
if ((!_connection.IsConnected) || _connection.IsCommunicationError || this.bIsDisconnect)
|
||
{
|
||
|
||
_trigRetryConnect.CLK = this.bIsDisconnect;
|
||
//
|
||
if (_connection.Connect())
|
||
{
|
||
this.bIsDisconnect = false;
|
||
//
|
||
EV.PostInfoLog(Module, $"{Module}.{Name} connected");
|
||
LOG.Write($"{Module}.{Name} connected");
|
||
|
||
}
|
||
else
|
||
{
|
||
if (_trigRetryConnect.Q)
|
||
{
|
||
EV.PostInfoLog(Module, $"Trying to connect {Module}.{Name} with address: {_connection.Address}");
|
||
LOG.Write($"Trying to connect {Module}.{Name} with address: {_connection.Address}");
|
||
}
|
||
}
|
||
|
||
}
|
||
|
||
|
||
//处理命令队列
|
||
HandlerBase handler = null;
|
||
if (!_connection.IsBusy)
|
||
{
|
||
lock (_locker)
|
||
{
|
||
if (_lstHandler.Count == 0 && _activeMonitorStatus && !isBusy)
|
||
{
|
||
//Query();
|
||
}
|
||
|
||
if (_lstHandler.Count > 0)
|
||
{
|
||
handler = _lstHandler.First.Value;
|
||
|
||
_lstHandler.RemoveFirst();
|
||
}
|
||
}
|
||
|
||
if (handler != null)
|
||
{
|
||
if (!this.isBusy)
|
||
{
|
||
this.isBusy = true;
|
||
_connection.Execute(handler);
|
||
}
|
||
}
|
||
}
|
||
//
|
||
return true;
|
||
|
||
}
|
||
catch (Exception ex)
|
||
{
|
||
LOG.Write(ex);
|
||
}
|
||
|
||
return true;
|
||
}
|
||
|
||
internal void NoteError()
|
||
{
|
||
|
||
}
|
||
|
||
public void Monitor()
|
||
{
|
||
try
|
||
{
|
||
_connection.EnableLog(_enableLog);
|
||
//if (_connecteTimes < 4) return;
|
||
_trigCommunicationError.CLK = _connection.IsCommunicationError;
|
||
if (_trigCommunicationError.Q)
|
||
{
|
||
EV.PostAlarmLog(Module, $"{Module}.{Name} communication error, {_connection.LastCommunicationError}");
|
||
}
|
||
}
|
||
catch (Exception ex)
|
||
{
|
||
LOG.Write(ex);
|
||
}
|
||
}
|
||
|
||
public void Terminate()
|
||
{
|
||
try
|
||
{
|
||
if (_connection != null)
|
||
{
|
||
_connection.Disconnect();
|
||
_connection = null;
|
||
}
|
||
}
|
||
catch (Exception ex)
|
||
{
|
||
LOG.Write(ex);
|
||
}
|
||
|
||
}
|
||
|
||
public void Reset()
|
||
{
|
||
this.bIsDisconnect = _connection.IsCommunicationError;
|
||
_connecteTimes = 0;
|
||
_connection.SetCommunicationError(false, "");
|
||
_enableLog = SC.GetValue<bool>($"{Name}.EnableLogMessage");
|
||
|
||
_trigCommunicationError.RST = true;
|
||
_trigRetryConnect.RST = true;
|
||
|
||
_lstHandler.Clear();
|
||
this.isBusy = false;
|
||
this.HaveWafer = false; //需要重新检测wafer
|
||
}
|
||
|
||
public bool PraseDataA(string name, byte[] buffer,out bool bResult)
|
||
{
|
||
bResult = true;
|
||
string sAnswer = Encoding.ASCII.GetString(buffer);
|
||
if (sAnswer.Contains("END"))
|
||
{
|
||
if(name.Contains("DOC"))
|
||
{
|
||
if ( sAnswer.Contains("1\r\nEND"))
|
||
{
|
||
this.HaveWafer = true;
|
||
}
|
||
else
|
||
{
|
||
this.HaveWafer = false;
|
||
}
|
||
}
|
||
|
||
if(name.Contains("CVD"))
|
||
{
|
||
if(sAnswer != null)
|
||
{
|
||
string vacValue = sAnswer.Replace("\r\nEND\r\n", "");
|
||
NotifyWarning($"the aligner vacuum value is {vacValue}");
|
||
}
|
||
}
|
||
|
||
if (name.Contains("PER"))
|
||
{
|
||
if (sAnswer != null)
|
||
{
|
||
string errCode = sAnswer.Replace("\r\nEND\r\n", "");
|
||
NotifyWarning($"the aligner lastest err code is {errCode}");
|
||
}
|
||
}
|
||
|
||
this.isBusy = false;
|
||
return true;
|
||
}
|
||
else if (sAnswer.Contains("ERR"))
|
||
{
|
||
lock (_locker)
|
||
{
|
||
_lstHandler.Clear();
|
||
}
|
||
//可以根据命令名称分类错误类型，也可以直接处理错误编码
|
||
if(name.Contains("HOM"))
|
||
{
|
||
//do nothing
|
||
}
|
||
//这里直接处理错误编码
|
||
if(sAnswer.Contains("0101"))
|
||
{
|
||
NotifyError("原点复归动作异常。");
|
||
}
|
||
if (sAnswer.Contains("0301"))
|
||
{
|
||
NotifyError("发生开启真空后，压力感测器侦测负压状态低于-50kPa。");
|
||
}
|
||
if (sAnswer.Contains("0401"))
|
||
{
|
||
NotifyError("执行寻边指令(BAL)前，X轴马达位置不在测量中心点。");
|
||
}
|
||
if (sAnswer.Contains("0402"))
|
||
{
|
||
NotifyError("执行寻边指令(BAL)前，Y轴马达位置不在测量中心点。");
|
||
}
|
||
if (sAnswer.Contains("0403"))
|
||
{
|
||
NotifyError("在执行一次搜寻过程中，动作失败，θ轴马达超过控制位置。");
|
||
}
|
||
if (sAnswer.Contains("0412"))
|
||
{
|
||
NotifyError("寻边指令中,负压(真空)异常.");
|
||
}
|
||
|
||
isBusy = false;
|
||
return true;
|
||
}
|
||
else
|
||
{
|
||
isBusy = true;
|
||
|
||
return false;
|
||
}
|
||
|
||
}
|
||
|
||
|
||
|
||
}
|
||
}
|