806 lines
32 KiB
C#
806 lines
32 KiB
C#
using System;
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using System.Collections.Generic;
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using System.IO.Ports;
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using System.Linq;
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using System.Text;
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using Aitex.Core.Common.DeviceData;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using MECF.Framework.Common.Communications;
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using MECF.Framework.Common.Device.Bases;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Common;
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using Newtonsoft.Json;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using System.Threading;
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using Aitex.Core.Common;
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using Aitex.Core.RT.DataCenter;
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using System.Text.RegularExpressions;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.JEL;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
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using Aitex.Core.RT.Device.Devices;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.JelAligner
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{
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public class JelAlignerEG : JelAligner, IConnection
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{
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/* SAL3262HV model: for 2-inch to 6-inch wafer
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SAL3362HV model: for 3-inch to 6-inch wafer
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SAL3482HV model: for 4-inch to 8-inch wafer
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SAL38C3HV model: for 8-inch to 12-inch wafer*/
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public JelAlignerEG(string module, string name, string scRoot, IoSensor[] dis, IoTrigger[] dos, int alignerType = 0, string robotModel = "") :
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base(module, name,scRoot,dis,dos,alignerType,robotModel)
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{
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isSimulatorMode = SC.ContainsItem("System.IsSimulatorMode") ? SC.GetValue<bool>("System.IsSimulatorMode") : false;
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_robotModel = robotModel;
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_scRoot = scRoot;
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_diWaferPresent = dis[0];
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//ResetPropertiesAndResponses();
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//RegisterSpecialData();
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//_enableLog = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableLogMessage");
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//_bodyNumber = SC.GetValue<int>($"{_scRoot}.{Name}.BodyNumber");
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//PortName = SC.GetStringValue($"{_scRoot}.{Name}.PortName");
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//TimelimitAlginerHome = SC.GetValue<int>($"{_scRoot}.{Name}.TimeLimitAlignerHome");
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//TimelimitForAlignWafer = SC.GetValue<int>($"{_scRoot}.{Name}.TimeLimitForAlignWafer");
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//_connection = new JelAlignerConnection(PortName);
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//_connection.EnableLog(_enableLog);
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//if (_connection.Connect())
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//{
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// EV.PostInfoLog(Module, $"{Module}.{Name} connected");
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//}
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//_thread = new PeriodicJob(100, OnTimer, $"{Module}.{Name} MonitorHandler", true);
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}
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private IoSensor _diWaferPresent;
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public override bool OnTimer()
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{
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try
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{
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if (!_connection.IsConnected || _connection.IsCommunicationError)
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{
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lock (_locker)
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{
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_lstMoveHandler.Clear();
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}
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_trigRetryConnect.CLK = !_connection.IsConnected;
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if (_trigRetryConnect.Q)
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{
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_connection.SetPortAddress(SC.GetStringValue($"{_scRoot}.{Name}.PortName"));
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if (!_connection.Connect())
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{
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EV.PostAlarmLog(Module, $"Can not connect with {_connection.Address}, {Module}.{Name}");
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}
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else
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{
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}
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}
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return true;
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}
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HandlerBase handler = null;
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DateTime dtstart = DateTime.Now;
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lock (_locker)
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{
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while (_lstMoveHandler.Count > 0 && _lstMonitorHandler.Count == 0)
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{
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if (!_connection.IsBusy)
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{
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if (YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd &&
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XAxisStatus == JelAxisStatus.NormalEnd)
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{
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handler = _lstMoveHandler.First.Value;
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_connection.Execute(handler);
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_lstMoveHandler.RemoveFirst();
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}
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else
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{
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_connection.Execute(new JelAlignerReadHandler(this, ""));
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}
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}
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else
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{
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_connection.MonitorTimeout();
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_trigCommunicationError.CLK = _connection.IsCommunicationError;
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if (_trigCommunicationError.Q)
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{
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_lstMoveHandler.Clear();
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OnError($"{Module}.{Name} communication error, {_connection.LastCommunicationError}");
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}
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}
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if (DateTime.Now - dtstart > TimeSpan.FromSeconds(150))
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{
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_lstMonitorHandler.Clear();
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_lstMoveHandler.Clear();
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OnError("Robot action timeout");
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}
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}
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while (_lstMonitorHandler.Count > 0)
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{
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if (!_connection.IsBusy)
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{
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handler = _lstMonitorHandler.First.Value;
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_connection.Execute(handler);
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_lstMonitorHandler.RemoveFirst();
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}
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if (DateTime.Now - dtstart > TimeSpan.FromSeconds(150))
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{
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_lstMonitorHandler.Clear();
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_lstMoveHandler.Clear();
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OnError("Robot action timeout");
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}
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}
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}
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}
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catch (Exception ex)
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{
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LOG.Write(ex);
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}
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return true;
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}
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private void ResetPropertiesAndResponses()
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{
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}
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private void RegisterSpecialData()
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{
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DATA.Subscribe($"{Module}.{Name}.CurrentReadRoutine", () => CurrentReadRoutine);
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DATA.Subscribe($"{Module}.{Name}.CurrentReadSpeedData", () => CurrentReadSpeedData);
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DATA.Subscribe($"{Module}.{Name}.CurrentReadAData", () => CurrentReadAData);
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DATA.Subscribe($"{Module}.{Name}.IsLeftArmPressureSensorON", () => IsLeftArmPressureSensorON);
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DATA.Subscribe($"{Module}.{Name}.IsRightArmPressureSensorON", () => IsRightArmPressureSensorON);
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DATA.Subscribe($"{Module}.{Name}.YAxisAndThetaAxisStatus", () => YAxisAndThetaAxisStatus.ToString());
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DATA.Subscribe($"{Module}.{Name}.XAxisStatus", () => XAxisStatus.ToString());
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DATA.Subscribe($"{Module}.{Name}.CurrentCompoundCommandStatus", () => CurrentCompoundCommandStatus.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadCassetNumber", () => ReadCassetNumber.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadSlotNumber", () => ReadSlotNumber.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadBankNumber", () => ReadBankNumber.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadPosLeftArmPostion", () => ReadPosLeftArmPostion);
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DATA.Subscribe($"{Module}.{Name}.ReadPosRightArmPostion", () => ReadPosRightArmPostion.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadPosZAxisPostion", () => ReadPosZAxisPostion.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadPosThetaAxisPostion", () => ReadPosThetaAxisPostion.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadParameterMax", () => ReadParameterMax.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadParameterMin", () => ReadParameterMin.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadParameterValue", () => ReadParameterValue.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingFirstSlotPosition", () => MappingFirstSlotPosition.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingGateWidth", () => MappingGateWidth.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingMaxDetectWidth", () => MappingMaxDetectWidth.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingMinDetectWidth", () => MappingMinDetectWidth.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingSlotsNumber", () => MappingSlotsNumber.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingSpeed", () => MappingSpeed.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingStopPostion", () => MappingStopPostion.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingTopSlotPostion", () => MappingTopSlotPostion.ToString());
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DATA.Subscribe($"{Module}.{Name}.IsMappingSensorON", () => IsMappingSensorON.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingWaferResult", () => MappingWaferResult.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingWidthResult", () => MappingWidthResult.ToString());
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}
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private int _bodyNumber;
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private string _robotModel; //T-00902H
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//public int BodyNumber { get => _bodyNumber; }
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private string _address = "";
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//public string Address { get => _address; }
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private bool isSimulatorMode;
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private string _scRoot;
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private PeriodicJob _thread;
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//protected JelAlignerConnection _connection;
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private R_TRIG _trigError = new R_TRIG();
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private R_TRIG _trigCommunicationError = new R_TRIG();
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private R_TRIG _trigRetryConnect = new R_TRIG();
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private R_TRIG _trigActionDone = new R_TRIG();
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private LinkedList<HandlerBase> _lstMoveHandler = new LinkedList<HandlerBase>();
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private LinkedList<HandlerBase> _lstMonitorHandler = new LinkedList<HandlerBase>();
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private bool _isAligned;
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private bool _isOnHomedPostion;
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//public int TimelimitAlginerHome { get; private set; }
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//public int TimelimitForAlignWafer { get; private set; }
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private object _locker = new object();
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private bool _enableLog;
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#region ParseHandler
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private void ParseRobotStatus(string data)
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{
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if (data.Length < 2) return;
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YAxisAndThetaAxisStatus = (JelAxisStatus)Convert.ToInt16(data.ToArray()[0].ToString());
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XAxisStatus = (JelAxisStatus)Convert.ToInt16(data.ToArray()[1].ToString());
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if (YAxisAndThetaAxisStatus == JelAxisStatus.SensorError || YAxisAndThetaAxisStatus == JelAxisStatus.CommandError)
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{
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IsBusy = false;
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OnError($"YAxisAndThetaAxisStatus is {YAxisAndThetaAxisStatus}");
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}
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if (XAxisStatus == JelAxisStatus.SensorError || XAxisStatus == JelAxisStatus.CommandError)
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{
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IsBusy = false;
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OnError($"XAxisStatus is {XAxisStatus}");
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}
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}
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private void ParseRobotPostion(string axis, string data)
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{
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float _floatvalue;
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if (!float.TryParse(data, out _floatvalue)) return;
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if (axis == "1")
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{
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RightArmPostion = _floatvalue;
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PositionAxis1 = _floatvalue;
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}
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if (axis == "2")
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{
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ThetaAxisPostion = _floatvalue;
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PositionAxis2 = _floatvalue;
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}
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if (axis == "3")
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{
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LeftArmPostion = _floatvalue;
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PositionAxis3 = _floatvalue;
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}
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if (axis == "4")
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{
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ZAxisPostion = _floatvalue;
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PositionAxis4 = _floatvalue;
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}
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}
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#endregion
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public override bool IsNeedChangeWaferSize(WaferSize wz)
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{
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return false;
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}
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protected override bool fReset(object[] param)
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{
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if (!_connection.IsConnected)
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{
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_enableLog = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableLogMessage");
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_bodyNumber = SC.GetValue<int>($"{_scRoot}.{Name}.BodyNumber");
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PortName = SC.GetStringValue($"{_scRoot}.{Name}.PortName");
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TimelimitAlginerHome = SC.GetValue<int>($"{_scRoot}.{Name}.TimeLimitAlignerHome");
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TimelimitForAlignWafer = SC.GetValue<int>($"{_scRoot}.{Name}.TimeLimitForAlignWafer");
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_connection = new JelAlignerConnection(PortName);
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if (_connection.Connect())
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{
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EV.PostInfoLog(Module, $"{Module}.{Name} connected");
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}
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}
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_trigError.RST = true;
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_connection.SetCommunicationError(false, "");
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_trigCommunicationError.RST = true;
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_enableLog = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableLogMessage");
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_connection.EnableLog(_enableLog);
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_trigRetryConnect.RST = true;
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_lstMoveHandler.Clear();
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_lstMonitorHandler.Clear();
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_connection.ForceClear();
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lock (_locker)
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{
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_lstMonitorHandler.AddLast(new JelAlignerRawCommandHandler(this, $"${BodyNumber}RD\r"));
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_lstMonitorHandler.AddLast(new JelAlignerReadHandler(this, ""));
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_lstMonitorHandler.AddLast(new JelAlignerReadHandler(this, "WIS1"));
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}
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return true;
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}
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protected override bool fMonitorReset(object[] param)
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{
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_isAligned = false;
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return true;
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//if (XAxisStatus == JelAxisStatus.NormalEnd
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// && (YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
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// && _lstMoveHandler.Count == 0
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// && _lstMonitorHandler.Count == 0
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// && !_connection.IsBusy)
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//{
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// IsBusy = false;
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// return true;
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//}
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//if (_lstMonitorHandler.Count == 0 && _lstMoveHandler.Count == 0 && !_connection.IsBusy)
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// _connection.Execute(new JelAlignerReadHandler(this, ""));
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//return false;
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}
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protected override bool fStartInit(object[] param)
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{
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lock (_locker)
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{
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int alignspeed = AlginerSpeedSetPoint * 8191 / 100;
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_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "W0"));
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_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
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_lstMoveHandler.AddLast(new JelAlignerSetHandler(this, "WSP", alignspeed.ToString()));
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_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WU"));
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_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
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_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WUC"));
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_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
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_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WT"));
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_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
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}
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_isAligned = false;
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_isOnHomedPostion = false;
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_dtActionStart = DateTime.Now;
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return true;
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}
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public override WaferSize GetCurrentWaferSize()
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{
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return WaferSize.WS12;
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}
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private DateTime _dtActionStart;
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protected override bool fMonitorInit(object[] param)
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{
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_isAligned = false;
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if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds((double)TimelimitAlginerHome))
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OnError("Init timeout");
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if (_lstMoveHandler.Count == 0
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&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
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&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
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{
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IsBusy = false;
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_isOnHomedPostion = true;
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if (IsWaferPresent(0) && WaferManager.Instance.CheckNoWafer(RobotModuleName, 0))
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{
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WaferManager.Instance.CreateWafer(RobotModuleName, 0,
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WaferStatus.Normal, GetCurrentWaferSize());
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}
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if (!IsWaferPresent(0) && WaferManager.Instance.CheckHasWafer(RobotModuleName, 0))
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{
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EV.PostAlarmLog("System", $"There's no phisical wafer on {RobotModuleName},but it has wafer information on.");
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//WaferManager.Instance.DeleteWafer(RobotModuleName, 0);
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}
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return true;
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}
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if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
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_connection.Execute(new JelAlignerReadHandler(this, ""));
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return false;
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}
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protected override bool fStartHome(object[] param)
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{
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lock (_locker)
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{
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int alignspeed = AlginerSpeedSetPoint * 8191 / 100;
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_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "W0"));
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_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
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_lstMoveHandler.AddLast(new JelAlignerSetHandler(this, "WSP", alignspeed.ToString()));
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_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WU"));
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_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
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_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WUC"));
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_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
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_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WT"));
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_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
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}
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_isAligned = false;
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_dtActionStart = DateTime.Now;
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return true;
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}
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protected override bool fMonitorHome(object[] param)
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{
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if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds((double)TimelimitAlginerHome))
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OnError("Home timeout");
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if (_lstMoveHandler.Count == 0
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&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
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&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
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{
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IsBusy = false;
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_isOnHomedPostion = true;
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return true;
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}
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if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
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_connection.Execute(new JelAlignerReadHandler(this, ""));
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return false;
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}
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public override bool IsReady()
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{
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return AlignerState == AlignerStateEnum.Idle && !IsBusy;
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}
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public override bool IsWaferPresent(int slotindex)
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{
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if (_diWaferPresent != null)
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return _diWaferPresent.Value;
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return WaferManager.Instance.CheckHasWafer(RobotModuleName, slotindex);
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}
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public override bool IsNeedPrepareBeforePlaceWafer()
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{
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return !_isOnHomedPostion;
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}
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protected override bool fStartLiftup(object[] param) //Ungrip
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{
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_dtActionStart = DateTime.Now;
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lock (_locker)
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{
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_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WU"));
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_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
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}
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return true;
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}
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protected override bool fMonitorLiftup(object[] param)
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{
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if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(TimelimitForAlignWafer))
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OnError("Aligner lift up timeout");
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if (_lstMoveHandler.Count == 0
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&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
|
|
&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|
{
|
|
IsBusy = false;
|
|
_isAligned = false;
|
|
_isOnHomedPostion = false;
|
|
return true;
|
|
}
|
|
if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|
|
|
return false;
|
|
}
|
|
|
|
protected override bool fStartLiftdown(object[] param)
|
|
{
|
|
_dtActionStart = DateTime.Now;
|
|
lock (_locker)
|
|
{
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WD"));
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|
}
|
|
return true;
|
|
}
|
|
protected override bool fMonitorLiftdown(object[] param)
|
|
{
|
|
if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(TimelimitForAlignWafer))
|
|
OnError("Aligner lift down timeout");
|
|
|
|
if (_lstMoveHandler.Count == 0
|
|
&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
|
|
&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|
{
|
|
IsBusy = false;
|
|
_isAligned = true;
|
|
_isOnHomedPostion = false;
|
|
return true;
|
|
}
|
|
if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|
return false;
|
|
}
|
|
|
|
protected override bool fStartAlign(object[] param)
|
|
{
|
|
//WaferSize wz = WaferManager.Instance.GetWaferSize(RobotModuleName, 0);
|
|
//if (wz != GetCurrentWaferSize())
|
|
//{
|
|
// EV.PostAlarmLog("System", "Wafer size is not match, can't do alignment");
|
|
// return false;
|
|
//}
|
|
_isOnHomedPostion = false;
|
|
|
|
double aligneangle = (double)param[0];
|
|
|
|
while (aligneangle < 0 || aligneangle > 360)
|
|
{
|
|
if (aligneangle < 0)
|
|
aligneangle += 360;
|
|
if (aligneangle > 360)
|
|
aligneangle -= 360;
|
|
}
|
|
//int speed = SC.GetValue<int>($"{_scRoot}.{Name}.AlignSpeed");
|
|
|
|
int intangle = (int)(aligneangle * 76799 / 360);
|
|
CurrentNotch = aligneangle;
|
|
lock (_locker)
|
|
{
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WC")); //Close grip
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WD")); //Align
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|
//_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WA")); //Move down
|
|
//_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|
_lstMoveHandler.AddLast(new JelAlignerSetHandler(this, "WOP", intangle.ToString()));
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WOF"));
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WU")); //Move Up
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WUC")); //Ungrip
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WT"));
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|
}
|
|
_dtActionStart = DateTime.Now;
|
|
return true;
|
|
}
|
|
protected override bool fMonitorAligning(object[] param)
|
|
{
|
|
if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(TimelimitForAlignWafer))
|
|
OnError("Alignment timeout");
|
|
if (_lstMoveHandler.Count == 0
|
|
&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
|
|
&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|
{
|
|
IsBusy = false;
|
|
|
|
_isOnHomedPostion = true;
|
|
return true;
|
|
}
|
|
if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|
return false;
|
|
}
|
|
|
|
protected override bool fStop(object[] param)
|
|
{
|
|
return true;
|
|
}
|
|
|
|
protected override bool FsmAbort(object[] param)
|
|
{
|
|
return true;
|
|
}
|
|
protected override bool fClear(object[] param)
|
|
{
|
|
return true;
|
|
}
|
|
protected override bool fStartReadData(object[] param)
|
|
{
|
|
return true;
|
|
}
|
|
protected override bool fStartSetParameters(object[] param)
|
|
{
|
|
_dtActionStart = DateTime.Now;
|
|
_currentSetParameter = param[0].ToString();
|
|
switch (_currentSetParameter)
|
|
{
|
|
case "WaferSize":
|
|
if (GetWaferState() != RobotArmWaferStateEnum.Absent)
|
|
{
|
|
EV.PostAlarmLog("System", "Can't set wafersize when wafer is not absent");
|
|
return false;
|
|
}
|
|
_currentSetWaferSize = (WaferSize)param[1];
|
|
|
|
if (WaferManager.Instance.CheckHasWafer(RobotModuleName, 0))
|
|
{
|
|
WaferManager.Instance.UpdateWaferSize(RobotModuleName, 0, _currentSetWaferSize);
|
|
}
|
|
string strpara;
|
|
switch (_currentSetWaferSize)
|
|
{
|
|
case WaferSize.WS2:
|
|
case WaferSize.WS3:
|
|
case WaferSize.WS4:
|
|
case WaferSize.WS5:
|
|
case WaferSize.WS6:
|
|
case WaferSize.WS8:
|
|
strpara = _currentSetWaferSize.ToString().Replace("WS", "");
|
|
break;
|
|
case WaferSize.WS12:
|
|
strpara = "9";
|
|
break;
|
|
default:
|
|
return false;
|
|
}
|
|
lock (_locker)
|
|
{
|
|
_lstMonitorHandler.AddLast(new JelAlignerMoveHandler(this, "WAS", strpara));
|
|
_lstMonitorHandler.AddLast(new JelAlignerReadHandler(this, "WAS"));
|
|
}
|
|
break;
|
|
}
|
|
return true;
|
|
}
|
|
private string _currentSetParameter;
|
|
private WaferSize _currentSetWaferSize = WaferSize.WS0;
|
|
protected override bool fMonitorSetParamter(object[] param)
|
|
{
|
|
IsBusy = false;
|
|
if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(TimelimitForAlignWafer))
|
|
OnError("Set parameter timeout");
|
|
switch (_currentSetParameter)
|
|
{
|
|
case "WaferSize":
|
|
if (_lstMonitorHandler.Count == 0 && _lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|
{
|
|
if (_currentSetWaferSize != Size)
|
|
{
|
|
OnError($"Fail to set wafer size,set:{_currentSetWaferSize},return:{Size}");
|
|
}
|
|
if (_currentSetWaferSize == WaferSize.WS12)
|
|
{
|
|
|
|
return true;
|
|
}
|
|
if (_currentSetWaferSize == WaferSize.WS8)
|
|
{
|
|
return true;
|
|
}
|
|
return true;
|
|
}
|
|
break;
|
|
}
|
|
return false;
|
|
}
|
|
protected override bool fStartUnGrip(object[] param)
|
|
{
|
|
lock (_locker)
|
|
{
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WDF"));
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|
}
|
|
_diStartUngrip = DateTime.Now;
|
|
return true;
|
|
}
|
|
private DateTime _diStartUngrip;
|
|
protected override bool fMonitorUnGrip(object[] param)
|
|
{
|
|
if (DateTime.Now - _diStartUngrip > TimeSpan.FromSeconds(10))
|
|
OnError("UnGrip timeout");
|
|
if (_lstMoveHandler.Count == 0
|
|
&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
|
|
&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|
{
|
|
IsBusy = false;
|
|
return true;
|
|
}
|
|
if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|
return false;
|
|
}
|
|
protected override bool fStartGrip(object[] param)
|
|
{
|
|
lock (_locker)
|
|
{
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WUC"));
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|
}
|
|
_diStartUngrip = DateTime.Now;
|
|
return true;
|
|
}
|
|
protected override bool fMonitorGrip(object[] param)
|
|
{
|
|
if (DateTime.Now - _diStartUngrip > TimeSpan.FromSeconds(10))
|
|
OnError("Grip timeout");
|
|
if (_lstMoveHandler.Count == 0
|
|
&& !_connection.IsBusy)
|
|
{
|
|
if (XAxisStatus == JelAxisStatus.NormalEnd && YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|
{
|
|
IsBusy = false;
|
|
return true;
|
|
}
|
|
else
|
|
{
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|
}
|
|
}
|
|
|
|
|
|
return false;
|
|
}
|
|
protected override bool fResetToReady(object[] param)
|
|
{
|
|
return true;
|
|
}
|
|
|
|
protected override bool fError(object[] param)
|
|
{
|
|
return true;
|
|
}
|
|
|
|
public override void OnError(string errortext)
|
|
{
|
|
_isAligned = false;
|
|
_isOnHomedPostion = false;
|
|
_lstMonitorHandler.Clear();
|
|
_lstMoveHandler.Clear();
|
|
base.OnError(errortext);
|
|
}
|
|
|
|
public override bool IsNeedRelease
|
|
{
|
|
get => !_isOnHomedPostion;
|
|
}
|
|
|
|
protected override bool fStartPrepareAccept(object[] param)
|
|
{
|
|
_dtActionStart = DateTime.Now;
|
|
lock (_locker)
|
|
{
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WU"));
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WUC"));
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WT"));
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|
}
|
|
return true;
|
|
}
|
|
|
|
|
|
protected override bool fMonitorPrepareAccept(object[] param)
|
|
{
|
|
if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds((double)TimelimitAlginerHome))
|
|
OnError("Home timeout");
|
|
if (_lstMoveHandler.Count == 0
|
|
&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
|
|
&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|
{
|
|
IsBusy = false;
|
|
_isAligned = false;
|
|
_isOnHomedPostion = true;
|
|
return true;
|
|
}
|
|
if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|
|
|
return false;
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
|
|
}
|
|
}
|