2647 lines
225 KiB
XML
2647 lines
225 KiB
XML
<?xml version="1.0" ?>
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<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
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<Action do="PM1.DO_H2Supply(V31)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-1">
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<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
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<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
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<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
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<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
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<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
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<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
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<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
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<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
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<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
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<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
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<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
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<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
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<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
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<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
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<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
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</Action>
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<Action do="PM1.DO_ArSupply(V32)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-2">
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<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
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<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
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<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
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<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
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<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
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<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
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<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
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<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
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<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
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<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
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<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
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<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
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<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
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<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
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</Action>
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<Action do="PM1.DO_SHH2/ArSwitch(V33)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-3">
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<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
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<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
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<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
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<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
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<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
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<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
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<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
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<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
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<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
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<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
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<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
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<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
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<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
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<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
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<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
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<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
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<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
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<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
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</Action>
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<Action do="PM1.DO_ChamBodyArPurge(V68)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-39">
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<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
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<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
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<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
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<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
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<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
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<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
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<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
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<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
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<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
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<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
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<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
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<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
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<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
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<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
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</Action>
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<Action do="PM1.DO_H2ArLine1(V35)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-5">
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<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
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<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
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<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
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<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
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<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
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<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
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<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
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<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
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<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
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<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
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<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
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<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
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<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
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</Action>
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<Action do="PM1.DO_H2ArLine2(V36)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-6">
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<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
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<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
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<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
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<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
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<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
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<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
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<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
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<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
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<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
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<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
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<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
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<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
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<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
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</Action>
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<Action do="PM1.DO_DilutedN2Run/Vent(V39)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-9">
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<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
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<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
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<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
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<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
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<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
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<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
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<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
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<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
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<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
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<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
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<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
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<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
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<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
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<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
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<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
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<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
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<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
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<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
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<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
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<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
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<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
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<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
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<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
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<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
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<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
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<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
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<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
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<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
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<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
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<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
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<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
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<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
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<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
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<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
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<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
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<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
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<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
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<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
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<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
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<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
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<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
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|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
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|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
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|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
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|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
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|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
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|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
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|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
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|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
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|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
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|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
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|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
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|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
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|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_HighN2Run/Vent(V40)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-10">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_TMARun(V41)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-11">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_TCSRun/Vent(V53)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-23">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_HCLRun/Vent(V54)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-24">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_SiH4Run(V55)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-25">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
|
|
<Action do="PM1.DO_C2H4Run(V59)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-29">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
|
|
<Action do="PM1.DO_TMARelease(V43)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-13">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_TCSRelease(V48)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-18">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_TMABypass(V45)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-15">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_TCSBypass(V49)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-19">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_TMAVac(V46)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-16">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_TCSVac(V50)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-20">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_N2Switch(V37)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-7">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_HCLSwitch(V51)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-21">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_SiH4Switch(V52)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-22">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_C2H4Switch(V58)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-28">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ReactorLeakCheck(V69)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-42">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_GasBoxVentPump(V72)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-45">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_MOVac(V73)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-46">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_GasboxLeakCheck(V74)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-47">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_DORVac(V75)" value="false" tip="" tip.zh-CN="" tip.en-US="DO-48">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_DORRefill(V76)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-49">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_EPV2" value="true" tip="" tip.zh-CN="" tip.en-US="DO-122">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_HeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-56">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
</Action>
|
|
<Action do="PM1.DO_InnerHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-57">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_MiddleHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-58">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_OuterHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-59">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-64">
|
|
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
|
|
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
|
|
<Limit di="PM1.DI_SusceptorAtSafeSpeed" value="false" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ChamLidPushButtonLocal" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyEndLatchBW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
|
|
<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
|
|
<Limit di="PM1.DI_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
|
|
<Limit di="PM1.DI_SHLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-108"/>
|
|
<Limit di="PM1.DI_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-118"/>
|
|
<Limit di="PM1.DI_MiddleLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-122"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-65">
|
|
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
|
|
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
|
|
<Limit di="PM1.DI_SusceptorAtSafeSpeed" value="false" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ChamLidPushButtonLocal" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyEndLatchBW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
|
|
<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
|
|
<Limit di="PM1.DI_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
|
|
<Limit di="PM1.DI_SHLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-108"/>
|
|
<Limit di="PM1.DI_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-118"/>
|
|
<Limit di="PM1.DI_MiddleLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-122"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ChamMoveBodyUpAirBrake" value="true" tip="" tip.zh-CN="" tip.en-US="DO-66">
|
|
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
|
|
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ChamMoveBodyForward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-67">
|
|
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
|
|
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ChamLidPushButtonLocal" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyUpLatchFW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyDown" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
|
|
<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ChamMoveBodyBackward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-68">
|
|
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
|
|
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ChamLidPushButtonLocal" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyUpLatchFW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyDown" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyEnd" value="false" tip="" tip.zh-CN="" tip.en-US="DI-100"/>
|
|
<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-69">
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_SHGasConnectorTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-70">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-71">
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
<Limit di="PM1.DI_SHLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-107"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_SHLidTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-72">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
<Limit di="PM1.DI_SHLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-107"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_SHLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-73">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
<Limit di="PM1.DI_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_SHLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-74">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
<Limit di="PM1.DI_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ChamMoveBodyBrakerForward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-75">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyUpLatchFW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ChamMoveBodyBrakerBackward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-76">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyDown" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyEndLatchBW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
|
|
<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-83">
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
<Limit di="PM1.DI_MiddleLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-121"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_MiddleLidTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-84">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
<Limit di="PM1.DI_MiddleLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-121"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_MiddleLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-85">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
<Limit di="PM1.DI_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-118"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_MiddleLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-86">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
|
|
<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
|
|
<Limit di="PM1.DI_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-118"/>
|
|
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ChamMoveBodyUpDownEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-100">
|
|
<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
|
|
</Action>
|
|
<Action do="PM1.DO_SHPurgeFinal(V87)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-40">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_OuterGasFinal(V88)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-41">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_CarryGasFinal(V97)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-54">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_InnerGasFinal(V89)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-112">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_MiddleGasFinal(V90)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-113">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_OpticPurgeFinal(V91)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-114">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_GasRingPurgeFinal(V92)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-115">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ChamberPurgeFinal(V93)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-116">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_RotationUpPurgeFinal(V94)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-117">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ConfinementRingFinal(V95)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-118">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_HeaterWFFinal(V96)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-119">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_PurgeValve" value="true" tip="" tip.zh-CN="" tip.en-US="DO-111">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ConfinementRingJogDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-163">
|
|
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ConfinementRingMoveDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-169">
|
|
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
|
|
</Action>
|
|
|
|
<Action do="PM1.DO_TVEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-140">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
|
|
<Action do="PM1.DO_CyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-176">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ExchangeMoRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-177">
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_CleanRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-178">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_PurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-179">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_PumpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-180">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_VentRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-181">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ProcessIdleRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-185">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ATMIdleRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-186">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_VACIdleRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-187">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ProcessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-174">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_VACTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-182">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_ATMTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-183">
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
<Action do="PM1.DO_PreprocessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-175">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
<Action do="PM1.DO_PostProcessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-184">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
</Action>
|
|
|
|
<Action do="PM1.DO_SCR1Enable" value="true" tip="DO_SCR1Enable" tip.zh-CN="" tip.en-US="DO-134">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
|
|
<Action do="PM1.DO_SCR2Enable" value="true" tip="DO_SCR2Enable" tip.zh-CN="" tip.en-US="DO-135">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
|
|
<Action do="PM1.DO_SCR3Enable" value="true" tip="DO_SCR3Enable" tip.zh-CN="" tip.en-US="DO-136">
|
|
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
|
|
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
|
|
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
|
|
<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
|
|
<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
|
|
<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
|
|
<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
|
|
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
|
|
<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
|
|
<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
|
|
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
|
|
<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
|
|
<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
|
|
<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
|
|
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
|
|
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
|
|
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
|
|
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
|
|
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
|
|
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
|
|
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
|
|
<Limit di="PM1.DI_PowerRackExhaustDPSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-29"/>
|
|
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
|
|
|
|
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
|
|
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
|
|
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
|
|
<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
|
|
|
|
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
|
|
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
|
|
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
|
|
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
|
|
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
|
|
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
|
|
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
|
|
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
|
|
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
|
|
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
|
|
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
|
|
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
|
|
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
|
|
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
|
|
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
|
|
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
|
|
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
|
|
<Limit do="PM1.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
|
|
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
|
|
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
|
|
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
|
|
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
|
|
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
|
|
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
|
|
<Limit do="PM1.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
|
|
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
|
|
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
|
|
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
|
|
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
|
|
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
|
|
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
|
|
</Action>
|
|
|
|
</Interlock>
|