947 lines
38 KiB
C#
947 lines
38 KiB
C#
using System;
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using System.Collections.Generic;
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using System.Diagnostics;
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using Aitex.Core.Common;
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using Aitex.Core.Common.DeviceData;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using SicPM2.RecipeExecutions;
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using SicPM2.Routines;
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namespace SicPM2.RecipeRoutine
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{
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public enum RecipeContinueMode
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{
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None,
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WaferReturnAndJobStop,
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RecipeCompleted,
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StepContinue,
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StepRestart,
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RecipeRestart,
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NextStep,
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}
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public enum RoutineType
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{
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DefaultRoutine,
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AtmRoutine,
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VacRoutine,
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ProcessIdleRoutine,
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PumpRoutine,
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VentRoutine,
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PurgeRoutine,
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CleanRoutine,
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ExchangeMORoutine,
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IsolationRoutine,
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LeakCheckRoutine,
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AbortRoutine
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}
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public partial class PMMacroRoutine : PMBaseRoutine
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{
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enum RoutineStep
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{
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WaitProcess,
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}
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enum RecipeRunningState
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{
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Error,
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RecipeCompleted,
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ExecStep,
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TimeWait,
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ConditionWait,
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StepCompleted,
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Paused,
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}
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private object _recipeLocker = new object();
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private RecipeRunningState _state = RecipeRunningState.ExecStep;
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private RecipeRunningState _pausedState = RecipeRunningState.ExecStep;
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private DeviceTimer _estimatedTimeCalcTimer = new DeviceTimer();//用于定时计算工艺程序估计的结束时间
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private double _curStepElpasedTimeBeforePaused;
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private double _curStepElpasedTimeBeforePaused2;
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//前序所有步总的时间
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private double _preStepTotalTime;
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public RecipeContinueMode ContinueAction { get; set; }
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public DateTime _recipeStartTime
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{
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get;
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private set;
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}
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public string CurrentRecipeContent { get; private set; }
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private int _currentStepNumber;
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private int _dummyStepCount;
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public int CurStepTotalLoopCount
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{
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get;
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private set;
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}
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public double CurStepTotalTime
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{
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get
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{
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if (PmDevice.RecipeRunningInfo.RecipeStepList == null || PmDevice.RecipeRunningInfo.RecipeStepList.Count == 0 || _state == RecipeRunningState.RecipeCompleted || _state == RecipeRunningState.Error)
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return 0;
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return PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime * 1000;
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}
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}
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public int CurrentLoopCount
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{
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get;
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private set;
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}
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public int CurStartLoopStep;
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private DeviceTimer _stepTimer = new DeviceTimer();
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private DeviceTimer _stepTimer2 = new DeviceTimer();
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private DeviceTimer _recipeTimer = new DeviceTimer();
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public bool IsPaused
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{
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private set;
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get;
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}
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private double CurStepLeftTime
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{
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get
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{
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return _stepTimer.GetTotalTime() - _stepTimer.GetElapseTime();
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}
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}
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public double EstimatedTotalLeftTime
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{
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get;
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private set;
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}
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private RecipeDBCallback _dbCallback;
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private Fdc _fdc;
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private int _currentStepIndex = 99;
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private IoInterLock _pmInterLock;
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private string _recipeName;
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private RoutineType _routineType;
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#region Parse
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private bool _isPSUHeaterJumpMode;
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private bool _isSCRHeaterJumpMode;
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private bool _isMFCJumpMode;
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#endregion
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public PMMacroRoutine(ModuleName module, PM2Module pm1) : base(module, pm1)
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{
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Module = module.ToString();
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Name = "Routine";
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_dbCallback = new RecipeDBCallback();
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_fdc = new Fdc(Module);
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_pmInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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}
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public void Init(string recipeName, RoutineType routineType = RoutineType.DefaultRoutine)
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{
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_recipeName = recipeName;
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_routineType = routineType;
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}
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public bool SetRoutineRunning(bool eValue,out string reason)
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{
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reason = string.Empty;
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if(_routineType == RoutineType.ProcessIdleRoutine)
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{
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if (!_pmInterLock.SetPMProcessIdleRunning(eValue, out reason))
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{
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return false;
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}
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}
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else if (_routineType == RoutineType.CleanRoutine)
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{
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if (!_pmInterLock.SetPMCleanRoutineRunning(eValue, out reason))
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{
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return false;
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}
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}
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else if (_routineType == RoutineType.PurgeRoutine)
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{
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if (!_pmInterLock.SetPMPurgeRoutineRunning(eValue, out reason))
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{
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return false;
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}
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}
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else if (_routineType == RoutineType.PumpRoutine)
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{
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if (!_pmInterLock.SetPMPumpRoutineRunning(eValue, out reason))
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{
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return false;
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}
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}
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else if (_routineType == RoutineType.VentRoutine)
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{
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if (!_pmInterLock.SetPMVentRoutineRunning(eValue, out reason))
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{
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return false;
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}
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}
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else if (_routineType == RoutineType.ExchangeMORoutine)
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{
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if (!_pmInterLock.SetPMExchangeMoRoutineRunning(eValue, out reason))
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{
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return false;
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}
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}
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else if (_routineType == RoutineType.VacRoutine)
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{
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}
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else if (_routineType == RoutineType.AtmRoutine)
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{
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}
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else
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{
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if (!_pmInterLock.SetPMProcessRunning(eValue, out reason))
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{
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return false;
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}
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}
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return true;
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}
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public override Result Start(params object[] param)
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{
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Reset();
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//解析Recipe
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if (!RecipeParser.Parse(_recipeName, Module, out var recipeHead, out var recipeSteps, out string reason))
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{
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Stop($"Load recipe {_recipeName} failed, {reason}");
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return Result.FAIL;
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}
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if(!SetRoutineRunning(true,out reason))
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{
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EV.PostAlarmLog(Module, $"can not run Routine, {reason}");
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return Result.FAIL;
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}
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if (_routineType == RoutineType.PurgeRoutine)
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{
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_pmInterLock.DoLidCloseRoutineSucceed = false;
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}
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else if (_routineType == RoutineType.CleanRoutine)
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{
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_pmInterLock.DoLidOpenRoutineSucceed = false;
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}
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//先打开加热
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PmDevice.SetHeatEnable(true);
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_currentStepIndex = 99;
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//设置当前Step/当前循环步/当前总循环步为0
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_currentStepNumber = 0;
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CurStartLoopStep = 0;
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CurrentLoopCount = CurrentLoopCount = 0;
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_preStepTotalTime = 0;
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_dummyStepCount = 0;
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_estimatedTimeCalcTimer.Start(1000);
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PmDevice.RecipeRunningInfo.RecipeName = _recipeName;
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PmDevice.RecipeRunningInfo.Head = recipeHead;
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PmDevice.RecipeRunningInfo.RecipeStepList = recipeSteps;
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PmDevice.RecipeRunningInfo.InnerId = Guid.NewGuid();
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PmDevice.RecipeRunningInfo.BeginTime = DateTime.Now;
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PmDevice.RecipeRunningInfo.TotalTime = CalcRecipeTime();
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_state = RecipeRunningState.ExecStep;
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_recipeTimer.Start(int.MaxValue);
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_dbCallback.RecipeStart(PmDevice.Module, 0, PmDevice.RecipeRunningInfo.InnerId.ToString(), PmDevice.RecipeRunningInfo.RecipeName);
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_dbCallback.RecipeUpdateStatus(PmDevice.RecipeRunningInfo.InnerId.ToString(), "InProcess");
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WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0, EnumWaferProcessStatus.InProcess);
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_fdc.Reset();
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Notify($"Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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if (!PmDevice.CheckEnableRunProcess(out string reason))
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{
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EV.PostAlarmLog(Module, reason);
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return Result.FAIL;
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}
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MonitorRecipeEndTime();
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MonitorRecipeRunInfo();
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lock (_recipeLocker)
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{
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try
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{
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switch (_state)
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{
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case RecipeRunningState.ExecStep:
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{
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PmDevice.ResetToleranceChecker();
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if (ContinueAction != RecipeContinueMode.StepContinue)
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{
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_curStepElpasedTimeBeforePaused = 0;
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_curStepElpasedTimeBeforePaused2 = 0;
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}
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ContinueAction = RecipeContinueMode.None;
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if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsLoopStartStep)
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{
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CurStartLoopStep = _currentStepNumber;
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CurStepTotalLoopCount = PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].LoopCount;
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}
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_stepTimer.Start(PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime * 1000 - _curStepElpasedTimeBeforePaused);
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if (!_stepTimer2.IsIdle())
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{
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_curStepElpasedTimeBeforePaused2 += _stepTimer2.GetElapseTime();
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_stepTimer2.Stop();
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}
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_stepTimer2.Start(int.MaxValue);
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Notify($"Running step {_currentStepNumber + 1} : {PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName}");
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if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsDummyStep)
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{
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_dummyStepCount++;
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}
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//执行工艺程序命令
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foreach (var recipeCmd in PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands.Keys)
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{
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if (recipeCmd == "SusHeaterSetMode")
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{
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if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd] == "Jump")
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_isPSUHeaterJumpMode = true;
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else
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_isPSUHeaterJumpMode = false;
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continue;
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}
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if (recipeCmd == "WWHeaterSetMode")
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{
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if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd] == "Jump")
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_isSCRHeaterJumpMode = true;
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else
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_isSCRHeaterJumpMode = false;
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continue;
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}
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if (recipeCmd == "FlowSetMode")
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{
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if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd] == "Jump")
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_isMFCJumpMode = true;
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else
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_isMFCJumpMode = false;
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continue;
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}
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if (IsCmdSkip(recipeCmd)) // 不是注册的方法，需要跳过
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continue;
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if (!OP.CanDoOperation($"{Module}.{recipeCmd}", out reason, PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd]))
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{
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EV.PostAlarmLog(Module, $"Can not execute {recipeCmd}, {reason}");
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return Result.FAIL;
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}
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else
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{
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int time = (int)PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime * 1000;
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if (recipeCmd.StartsWith("TC1") && _isPSUHeaterJumpMode)
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{
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time = 1;
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}
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if (recipeCmd.StartsWith("TC2") && _isSCRHeaterJumpMode)
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{
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time = 1;
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}
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if (recipeCmd.StartsWith("Mfc") && recipeCmd.EndsWith(".Ramp") && !PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsDummyStep)
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{
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if (_isMFCJumpMode)
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{
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time = 1;
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}
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}
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if ((recipeCmd == "TV.SetPressure"
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|| recipeCmd == "PMServo.SetActualSpeed"
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|| recipeCmd.StartsWith("Pressure") && recipeCmd.EndsWith(".Ramp")
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|| recipeCmd.StartsWith("Mfc") && recipeCmd.EndsWith(".Ramp"))
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&& !PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsDummyStep)
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{
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if (_currentStepNumber >= 1)
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{
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int previousStepNumber = _currentStepNumber - 1;
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if (PmDevice.RecipeRunningInfo.RecipeStepList[previousStepNumber].IsDummyStep)
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previousStepNumber = _currentStepNumber - 2;
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if (PmDevice.RecipeRunningInfo.RecipeStepList[previousStepNumber].RecipeCommands.ContainsKey(recipeCmd))
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{
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string previousValue = PmDevice.RecipeRunningInfo.RecipeStepList[previousStepNumber].RecipeCommands[recipeCmd];
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string currentValue = PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd];
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if (previousValue == currentValue)
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{
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time = 1;
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}
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}
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}
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}
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if (recipeCmd.EndsWith(AITValveOperation.GVTurnValve)) // 阀门
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{
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OP.DoOperation($"{Module}.{recipeCmd}", PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd]);
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}
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else
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{
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OP.DoOperation($"{Module}.{recipeCmd}", out string reason1, time, PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands[recipeCmd]);
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}
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}
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}
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if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].EndBy == EnumEndByCondition.ByTime)
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_state = RecipeRunningState.TimeWait;
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else
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_state = RecipeRunningState.ConditionWait;
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_dbCallback.RecipeStepStart(PmDevice.RecipeRunningInfo.InnerId.ToString(), _currentStepNumber, PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName, (float)PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime);
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_fdc.Start(PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands);
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}
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break;
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case RecipeRunningState.TimeWait:
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{
|
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if (IsPaused)
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{
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_state = RecipeRunningState.Paused;
|
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}
|
||
|
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if (_stepTimer.IsTimeout())
|
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{
|
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_state = RecipeRunningState.StepCompleted;
|
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}
|
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}
|
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break;
|
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|
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case RecipeRunningState.ConditionWait:
|
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{
|
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//如果暂停，则进入暂停状态
|
||
if (IsPaused)
|
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{
|
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_state = RecipeRunningState.Paused;
|
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}
|
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|
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//设置的压力
|
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double.TryParse(PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeCommands["TV.SetPressure"], out double setPressure);
|
||
|
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//实时反馈的压力
|
||
double feedBackPressure = DEVICE.GetDevice<IoPressure>($"{Module}.PT1").FeedBack;
|
||
|
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double _pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
|
||
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if(Math.Abs(setPressure - feedBackPressure) <= _pmPressureMaxDiff)
|
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{
|
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_state = RecipeRunningState.StepCompleted;
|
||
}
|
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}
|
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break;
|
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|
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case RecipeRunningState.Paused:
|
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PmDevice.PauseRecipe(out reason);
|
||
if (!_stepTimer.IsIdle())
|
||
{
|
||
_curStepElpasedTimeBeforePaused += _stepTimer.GetElapseTime();
|
||
_stepTimer.Stop();
|
||
}
|
||
switch (ContinueAction)
|
||
{
|
||
case RecipeContinueMode.None:
|
||
break;
|
||
case RecipeContinueMode.WaferReturnAndJobStop:
|
||
//Singleton<RouteManager>.Instance.CheckToPostMessage((int)RouteManager.MSG.StopJob);
|
||
_state = RecipeRunningState.Error;
|
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break;
|
||
case RecipeContinueMode.RecipeCompleted:
|
||
_state = RecipeRunningState.RecipeCompleted;
|
||
break;
|
||
case RecipeContinueMode.StepContinue:
|
||
_state = RecipeRunningState.ExecStep;
|
||
break;
|
||
case RecipeContinueMode.StepRestart:
|
||
_state = RecipeRunningState.ExecStep;
|
||
break;
|
||
case RecipeContinueMode.RecipeRestart:
|
||
_currentStepNumber = 0;
|
||
_state = RecipeRunningState.ExecStep;
|
||
break;
|
||
case RecipeContinueMode.NextStep:
|
||
_state = RecipeRunningState.StepCompleted;
|
||
break;
|
||
}
|
||
break;
|
||
|
||
case RecipeRunningState.StepCompleted:
|
||
{
|
||
_preStepTotalTime += CurStepTotalTime/1000;
|
||
|
||
//放在前面，stepnumber后面会被更新
|
||
_stepTimer2.Stop();
|
||
|
||
_dbCallback.RecipeStepEnd(PmDevice.RecipeRunningInfo.InnerId.ToString(), _currentStepNumber, _fdc.DataList);
|
||
_fdc.Stop();
|
||
|
||
if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsLoopEndStep)
|
||
{
|
||
CurrentLoopCount++;
|
||
if (CurrentLoopCount >= CurStepTotalLoopCount)
|
||
{
|
||
CurrentLoopCount = CurStepTotalLoopCount = 0;
|
||
CurStartLoopStep = 0;
|
||
_currentStepNumber++;
|
||
}
|
||
else
|
||
{
|
||
_currentStepNumber = CurStartLoopStep;
|
||
}
|
||
}
|
||
else
|
||
{
|
||
_currentStepNumber++;
|
||
}
|
||
|
||
|
||
//判断最后一步是否执行完
|
||
if (_currentStepNumber >= PmDevice.RecipeRunningInfo.RecipeStepList.Count)
|
||
{
|
||
_currentStepNumber = PmDevice.RecipeRunningInfo.RecipeStepList.Count - 1;
|
||
_state = RecipeRunningState.RecipeCompleted;
|
||
}
|
||
else
|
||
{
|
||
_state = RecipeRunningState.ExecStep;
|
||
}
|
||
}
|
||
break;
|
||
|
||
case RecipeRunningState.RecipeCompleted:
|
||
{
|
||
_recipeTimer.Stop();
|
||
|
||
if (!SetRoutineRunning(false, out reason))
|
||
{
|
||
EV.PostAlarmLog(Module, $"can not run Process, {reason}");
|
||
return Result.FAIL;
|
||
}
|
||
|
||
//设置Succeed状态
|
||
if(_routineType == RoutineType.PurgeRoutine)
|
||
{
|
||
_pmInterLock.SetLidOpenRoutineSucceed(true, out reason);
|
||
}
|
||
else if (_routineType == RoutineType.CleanRoutine)
|
||
{
|
||
_pmInterLock.SetLidClosedRoutineSucceed(true, out reason);
|
||
}
|
||
|
||
//设置当前Step/当前循环步/当前总循环步为0
|
||
_currentStepNumber = 0;
|
||
CurStartLoopStep = 0;
|
||
CurrentLoopCount = CurrentLoopCount = 0;
|
||
|
||
|
||
Notify("Finished");
|
||
return Result.DONE;
|
||
}
|
||
|
||
case RecipeRunningState.Error:
|
||
{
|
||
if (!SetRoutineRunning(false, out reason))
|
||
{
|
||
EV.PostAlarmLog(Module, $"can not run Process, {reason}");
|
||
return Result.FAIL;
|
||
}
|
||
|
||
return Result.DONE;
|
||
}
|
||
default:
|
||
break;
|
||
}
|
||
}
|
||
catch (Exception ex)
|
||
{
|
||
PmDevice.SetHeaterStopRamp();
|
||
PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
|
||
PmDevice.SetRotationStopRamp();
|
||
|
||
if (!SetRoutineRunning(false, out reason))
|
||
{
|
||
EV.PostAlarmLog(Module, $"can not run Process, {reason}");
|
||
return Result.FAIL;
|
||
}
|
||
|
||
LOG.Write(ex);
|
||
return Result.FAIL;
|
||
}
|
||
}
|
||
|
||
return Result.RUN;
|
||
}
|
||
|
||
|
||
private void MonitorRecipeRunInfo()
|
||
{
|
||
PmDevice.RecipeRunningInfo.StepNumber = _currentStepNumber + 1 - _dummyStepCount; //CurStepNum start from 0, ignore dummy step
|
||
PmDevice.RecipeRunningInfo.StepName = PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName;
|
||
PmDevice.RecipeRunningInfo.StepTime = PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime;
|
||
PmDevice.RecipeRunningInfo.StepElapseTime = _stepTimer.IsIdle() ? _curStepElpasedTimeBeforePaused / 1000 : (_stepTimer.GetElapseTime() + _curStepElpasedTimeBeforePaused) / 1000;
|
||
PmDevice.RecipeRunningInfo.TotalElapseTime = CalcElapseRecipeTime();
|
||
|
||
PmDevice.RecipeRunningInfo.StepElapseTime2 = _stepTimer2.IsIdle() ? _curStepElpasedTimeBeforePaused2 / 1000 : (_stepTimer2.GetElapseTime() + _curStepElpasedTimeBeforePaused2) / 1000;
|
||
PmDevice.RecipeRunningInfo.TotalElapseTime2 = _recipeTimer.GetElapseTime() / 1000;
|
||
|
||
if (_currentStepIndex != PmDevice.RecipeRunningInfo.StepNumber)
|
||
{
|
||
Notify($"Start Recipe: Step:{PmDevice.RecipeRunningInfo.StepNumber} Name:{PmDevice.RecipeRunningInfo.StepName} ");
|
||
_currentStepIndex = PmDevice.RecipeRunningInfo.StepNumber;
|
||
}
|
||
}
|
||
|
||
public override void Abort()
|
||
{
|
||
_state = RecipeRunningState.RecipeCompleted;
|
||
|
||
_dbCallback.RecipeFailed(PmDevice.RecipeRunningInfo.InnerId.ToString());
|
||
_fdc.Stop();
|
||
|
||
PmDevice.RecipeRunningInfo.StepName = string.Empty;
|
||
PmDevice.RecipeRunningInfo.StepNumber = 0;
|
||
PmDevice.RecipeRunningInfo.StepTime = 0;
|
||
PmDevice.RecipeRunningInfo.StepElapseTime = 0;
|
||
PmDevice.RecipeRunningInfo.TotalTime = 0;
|
||
PmDevice.RecipeRunningInfo.TotalElapseTime = 0;
|
||
|
||
if (!SetRoutineRunning(false, out string reason))
|
||
{
|
||
EV.PostAlarmLog(Module, $"can not run Process, {reason}");
|
||
}
|
||
//根据Routine类型执行Abort
|
||
SetRoutineAbort();
|
||
|
||
base.Abort();
|
||
}
|
||
|
||
private List<string> _lstGroup1 = new List<string>() { "V46", "V46s", "V73" };
|
||
private List<string> _lstGroup2 = new List<string>() { "V46", "V46s" };
|
||
private List<string> _lstGroup3 = new List<string>() { "V43", "V43s", "V45" };
|
||
|
||
//默认为TMA换源参数
|
||
private int mfc7Or10 = 7;
|
||
private int mfc8Or12 = 8;
|
||
private int mfc11 = 11;
|
||
private int pc2Or3 = 2;
|
||
|
||
public void SetRoutineAbort()
|
||
{
|
||
if (_routineType == RoutineType.ProcessIdleRoutine)
|
||
{
|
||
PmDevice._ioThrottleValve.StopRamp();
|
||
PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
|
||
PmDevice.SetHeaterStopRamp();
|
||
PmDevice.SetRotationStopRamp();
|
||
PmDevice.SetRotationServo(0, 0);
|
||
}
|
||
else if (_routineType == RoutineType.CleanRoutine)
|
||
{
|
||
PmDevice._ioThrottleValve.StopRamp();
|
||
PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
|
||
PmDevice.SetRotationServo(0, 0);
|
||
}
|
||
else if (_routineType == RoutineType.PurgeRoutine)
|
||
{
|
||
PmDevice._ioThrottleValve.StopRamp();
|
||
PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
|
||
PmDevice.SetRotationServo(0, 0);
|
||
}
|
||
else if (_routineType == RoutineType.PumpRoutine)
|
||
{
|
||
PmDevice.SetRotationServo(0, 0);
|
||
}
|
||
else if (_routineType == RoutineType.VentRoutine)
|
||
{
|
||
PmDevice._ioThrottleValve.StopRamp();
|
||
PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
|
||
PmDevice.SetRotationServo(0, 0);
|
||
}
|
||
else if (_routineType == RoutineType.ExchangeMORoutine)
|
||
{
|
||
PmDevice.SetIoValue(_lstGroup1, false);
|
||
PmDevice.SetIoValue(_lstGroup2, false);
|
||
PmDevice.SetMfcValueToDefault(new List<int> { mfc7Or10 });
|
||
PmDevice.SetMfcValueToDefault(new List<int> { mfc8Or12 });
|
||
PmDevice.SetMfcValueToDefault(new List<int> { mfc11 });
|
||
PmDevice.SetPCValueToDefault(new List<int> { pc2Or3 });
|
||
PmDevice.SetRotationServo(0, 0);
|
||
}
|
||
else if (_routineType == RoutineType.VacRoutine)
|
||
{
|
||
PmDevice.SetRotationServo(0, 0);
|
||
}
|
||
}
|
||
|
||
public void ExitProcess()
|
||
{
|
||
if (_state == RecipeRunningState.RecipeCompleted)
|
||
{
|
||
_dbCallback.RecipeComplete(PmDevice.RecipeRunningInfo.InnerId.ToString());
|
||
_fdc.Stop();
|
||
}
|
||
else
|
||
{
|
||
_dbCallback.RecipeFailed(PmDevice.RecipeRunningInfo.InnerId.ToString());
|
||
_fdc.Stop();
|
||
}
|
||
}
|
||
|
||
public void PauseRecipe()
|
||
{
|
||
if (_state != RecipeRunningState.TimeWait && _state != RecipeRunningState.ConditionWait)
|
||
return;
|
||
|
||
if (!IsPaused)
|
||
{
|
||
IsPaused = true;
|
||
_pausedState = _state;
|
||
_state = RecipeRunningState.Paused;
|
||
}
|
||
}
|
||
|
||
public void SkipCurrentRecipeStep()
|
||
{
|
||
if (_state == RecipeRunningState.ConditionWait || _state == RecipeRunningState.TimeWait)
|
||
{
|
||
_state = RecipeRunningState.StepCompleted;
|
||
}
|
||
}
|
||
|
||
protected int CalcRecipeTime()
|
||
{
|
||
double total = 0;
|
||
for (int i = 0; i < PmDevice.RecipeRunningInfo.RecipeStepList.Count; i++)
|
||
{
|
||
if (!PmDevice.RecipeRunningInfo.RecipeStepList[i].IsDummyStep) // 不统计虚拟Step的时间
|
||
{
|
||
int loopTimes = PmDevice.RecipeRunningInfo.RecipeStepList[i].LoopCount == 0 ? 1 : PmDevice.RecipeRunningInfo.RecipeStepList[i].LoopCount;
|
||
total += PmDevice.RecipeRunningInfo.RecipeStepList[i].StepTime * loopTimes;
|
||
}
|
||
}
|
||
|
||
return (int)total;
|
||
}
|
||
|
||
protected int CalcElapseRecipeTime()
|
||
{
|
||
double total = 0;
|
||
//for (int i = 0; i < _currentStepNumber; i++)
|
||
//{
|
||
// if (!PMDevice.RecipeRunningInfo.RecipeStepList[i].IsDummyStep) // 不统计虚拟Step的时间
|
||
// {
|
||
// total += PMDevice.RecipeRunningInfo.RecipeStepList[i].StepTime;
|
||
// }
|
||
//}
|
||
total = _preStepTotalTime;
|
||
total += PmDevice.RecipeRunningInfo.StepElapseTime;
|
||
|
||
return (int)total;
|
||
}
|
||
|
||
protected void MonitorRecipeEndTime()
|
||
{
|
||
try
|
||
{
|
||
if (!_estimatedTimeCalcTimer.IsTimeout())
|
||
return;
|
||
_estimatedTimeCalcTimer.Start(1000);
|
||
|
||
EstimatedTotalLeftTime = 0;
|
||
|
||
if (_state == RecipeRunningState.RecipeCompleted)
|
||
return;
|
||
|
||
if (!(_currentStepNumber >= 0 && _currentStepNumber <= PmDevice.RecipeRunningInfo.RecipeStepList.Count - 1))
|
||
return;
|
||
|
||
if (CurStepLeftTime > 0)
|
||
{
|
||
EstimatedTotalLeftTime = CurStepLeftTime;
|
||
}
|
||
|
||
int nextBegin = _currentStepNumber;
|
||
bool IsInLoop = false;
|
||
int iNum1 = 0;
|
||
int iNum2 = 0;
|
||
//int j=i;
|
||
for (int j = _currentStepNumber; j < PmDevice.RecipeRunningInfo.RecipeStepList.Count; j++)
|
||
{
|
||
if (PmDevice.RecipeRunningInfo.RecipeStepList[j].IsLoopEndStep)
|
||
{
|
||
iNum2 = j;
|
||
IsInLoop = true;
|
||
break;
|
||
}
|
||
else if (j > _currentStepNumber && PmDevice.RecipeRunningInfo.RecipeStepList[j].IsLoopStartStep)
|
||
{
|
||
IsInLoop = false;
|
||
break;
|
||
}
|
||
}
|
||
|
||
if (IsInLoop)
|
||
{
|
||
iNum1 = _currentStepNumber;
|
||
for (int j = _currentStepNumber; j >= 0; j--)
|
||
{
|
||
if (PmDevice.RecipeRunningInfo.RecipeStepList[j].IsLoopStartStep)
|
||
{
|
||
iNum1 = j;
|
||
break;
|
||
}
|
||
}
|
||
|
||
for (int j = _currentStepNumber + 1; j <= iNum2; j++)
|
||
{
|
||
EstimatedTotalLeftTime += PmDevice.RecipeRunningInfo.RecipeStepList[j].StepTime * 1000 * (PmDevice.RecipeRunningInfo.RecipeStepList[iNum1].LoopCount - CurrentLoopCount + 1);
|
||
}
|
||
|
||
for (int j = iNum1; j <= _currentStepNumber; j++)
|
||
{
|
||
EstimatedTotalLeftTime += PmDevice.RecipeRunningInfo.RecipeStepList[j].StepTime * 1000 * (PmDevice.RecipeRunningInfo.RecipeStepList[iNum1].LoopCount - CurrentLoopCount);
|
||
}
|
||
|
||
nextBegin = iNum2 + 1;
|
||
}
|
||
else
|
||
{
|
||
nextBegin++;
|
||
}
|
||
|
||
for (int j = nextBegin; j < PmDevice.RecipeRunningInfo.RecipeStepList.Count; j++)
|
||
{
|
||
if (PmDevice.RecipeRunningInfo.RecipeStepList[j].IsLoopStartStep)
|
||
{
|
||
//j=i;
|
||
iNum1 = j;
|
||
iNum2 = j + 1;
|
||
double lr1 = 0;
|
||
for (int m = j; m < PmDevice.RecipeRunningInfo.RecipeStepList.Count; m++)
|
||
{
|
||
lr1 += PmDevice.RecipeRunningInfo.RecipeStepList[m].StepTime * 1000;
|
||
if (PmDevice.RecipeRunningInfo.RecipeStepList[m].IsLoopEndStep)
|
||
{
|
||
iNum2 = m;
|
||
break;
|
||
}
|
||
}
|
||
EstimatedTotalLeftTime += lr1 * PmDevice.RecipeRunningInfo.RecipeStepList[iNum1].LoopCount;
|
||
j = iNum2;
|
||
}
|
||
else
|
||
{
|
||
EstimatedTotalLeftTime += PmDevice.RecipeRunningInfo.RecipeStepList[j].StepTime * 1000;
|
||
}
|
||
}
|
||
}
|
||
catch (Exception ex)
|
||
{
|
||
LOG.Write(ex);
|
||
}
|
||
}
|
||
|
||
public void SetContinue(string continueMode)
|
||
{
|
||
switch (continueMode)
|
||
{
|
||
case "Step continue":
|
||
ContinueAction = RecipeContinueMode.StepContinue;
|
||
break;
|
||
case "Step restart":
|
||
ContinueAction = RecipeContinueMode.StepRestart;
|
||
break;
|
||
case "Next step":
|
||
ContinueAction = RecipeContinueMode.NextStep;
|
||
break;
|
||
case "Recipe restart":
|
||
ContinueAction = RecipeContinueMode.RecipeRestart;
|
||
break;
|
||
case "Recipe complete":
|
||
ContinueAction = RecipeContinueMode.RecipeCompleted;
|
||
break;
|
||
case "Wafer return and job stop":
|
||
ContinueAction = RecipeContinueMode.WaferReturnAndJobStop;
|
||
break;
|
||
}
|
||
|
||
IsPaused = false;
|
||
|
||
PmDevice.ResetToleranceChecker();
|
||
}
|
||
}
|
||
}
|