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<?xml version="1.0" encoding="utf-8"?>
<Aitex >
<TableRecipeFormat RecipeChamberType= "Sic" RecipeVersion= "1.0" >
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<!-- ########################################### -->
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<Catalog DisplayName= "StepInfo" >
<Group DisplayName= "Step Information" >
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnly" DisplayName= "Step" UnitName= "" ControlName= "StepNo" />
<Step ModuleName= "" DeviceType= "" InputType= "TextInput" DisplayName= "Name" UnitName= "" ControlName= "Name" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "Time" UnitName= "s" ControlName= "Time" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "EndBy" UnitName= "" ControlName= "EndBy" Description= "" >
<Item DisplayName= "ByTime" ControlName= "ByTime" />
<Item DisplayName= "ByPressure" ControlName= "ByPressure" />
</Step>
</Group>
</Catalog>
<Catalog DisplayName= "LoopInfo" >
<Group DisplayName= "Loop Setting" >
<Step ModuleName= "" DeviceType= "" DisplayName= "LoopStart" ControlName= "LoopStart" InputType= "ReadOnlySelection" UnitName= "" Description= "Loop Start" >
<Item DisplayName= "False" ControlName= "False" />
<Item DisplayName= "True" ControlName= "True" />
</Step>
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<Step ModuleName= "" DeviceType= "" DisplayName= "LoopEnd" ControlName= "LoopEnd" InputType= "ReadOnlySelection" UnitName= "" Description= "Loop End" >
<Item DisplayName= "False" ControlName= "False" />
<Item DisplayName= "True" ControlName= "True" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "DoubleInput" DisplayName= "LoopTimes" UnitName= "" ControlName= "LoopTimes" InputMode= "" Min= "0" Max= "10000" Description= "" />
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</Group>
</Catalog>
<Catalog DisplayName= "Temperature -> Pressure -> Rotation" >
<Group DisplayName= "Pressure -> Rotation" >
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "1. Pressure Set" UnitName= "mbar" ControlName= "TV.SetPressure" InputMode= "" Min= "0" Max= "1200" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "2. Rotation Set" UnitName= "rpm" ControlName= "PMServo.SetActualSpeed" InputMode= "" Min= "0" Max= "10000" Description= "" />
</Group>
<Group DisplayName= "Temperature -> Control Mode" >
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "3. TV Enable" UnitName= "" ControlName= "TV.SetTVEnableRoutine" Description= "" >
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<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Enable" ControlName= "Enable" />
<Item DisplayName= "Disable" ControlName= "Disable" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "3. TV Mode" UnitName= "" ControlName= "TV.SetMode" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Position" ControlName= "Position" />
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<Item DisplayName= "Pressure" ControlName= "Pressure" />
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<Item DisplayName= "Close" ControlName= "Close" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "4. PSU Control Mode" UnitName= "" ControlName= "TC1.SetHeaterMode" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "PyroAuto" ControlName= "PyroAuto" />
<Item DisplayName= "PyroFollow" ControlName= "PyroFollow" />
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<Item DisplayName= "Power" ControlName= "Power" />
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<Item DisplayName= "Pyro" ControlName= "Pyro" />
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</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "5. PSU Set Mode" UnitName= "" ControlName= "SusHeaterSetMode" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Ramp" ControlName= "Ramp" />
<Item DisplayName= "Jump" ControlName= "Jump" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "6. SCR Control Mode" UnitName= "" ControlName= "TC2.SetHeaterMode2" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Pyro" ControlName= "Pyro" />
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<Item DisplayName= "Power" ControlName= "Power" />
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</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "7. SCR Set Mode" UnitName= "" ControlName= "WWHeaterSetMode" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Ramp" ControlName= "Ramp" />
<Item DisplayName= "Jump" ControlName= "Jump" />
</Step>
</Group>
<Group DisplayName= "Temperature -> Temp Setting" >
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<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "8. PSU Inner Temp Set" UnitName= "℃" ControlName= "TC1.SetL1TargetSP" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "9. PSU Middle Temp Set" UnitName= "℃" ControlName= "TC1.SetL2TargetSP" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "10. PSU Outer Temp Set" UnitName= "℃" ControlName= "TC1.SetL3TargetSP" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "11. SCR Temp Set" UnitName= "℃" ControlName= "TC2.SetL3TargetSP" InputMode= "" Min= "0" Max= "10000" Description= "" />
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</Group>
<Group DisplayName= "Temperature -> Heater Output" >
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<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "12. PSU Inner Ratio Set" UnitName= "%" ControlName= "TC1.RecipeSetL1Ratio" InputMode= "" Min= "0" Max= "100" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "13. PSU Middle Ratio Set" UnitName= "%" ControlName= "TC1.RecipeSetL2Ratio" InputMode= "" Min= "0" Max= "100" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "14. PSU Outer Ratio Set" UnitName= "%" ControlName= "TC1.RecipeSetL3Ratio" InputMode= "" Min= "0" Max= "100" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "15. SCR Upper Ratio Set" UnitName= "%" ControlName= "TC2.RecipeSetL1Ratio" InputMode= "" Min= "0" Max= "100" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "16. SCR Middle Ratio Set" UnitName= "%" ControlName= "TC2.RecipeSetL2Ratio" InputMode= "" Min= "0" Max= "100" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "17. SCR Lower Ratio Set" UnitName= "%" ControlName= "TC2.RecipeSetL3Ratio" InputMode= "" Min= "0" Max= "100" Description= "" />
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</Group>
</Catalog>
<Catalog DisplayName= "Air Operated Valve" >
<Group DisplayName= "Gas Supply" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "18. H2.Supply(V31)" UnitName= "" ControlName= "V31.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "19. Ar.Supply(V32)" UnitName= "" ControlName= "V32.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "20. H2Ar.Line1(V35)" UnitName= "" ControlName= "V35.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "21. H2Ar.Line2(V36)" UnitName= "" ControlName= "V36.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
</Group>
<Group DisplayName= "A (Ar/H2 Switch)" >
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "23. Carrier Gas Ar(V65)" UnitName= "" ControlName= "V65.GVTurnValve" Description= "" >
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<Item DisplayName= "Hold" ControlName= "Hold" />
<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Ar" ControlName= "Ar" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "24. GasRing.Ar.Purge(V67)" UnitName= "" ControlName= "V67.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Ar" ControlName= "Ar" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "25. ChamBody.Ar.Purge(V68)" UnitName= "" ControlName= "V68.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Ar" ControlName= "Ar" />
</Step>
</Group>
<Group DisplayName= "B (H2 Supply)" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "26. SH.H2/Ar Switch(V33)" UnitName= "" ControlName= "V33.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Ar" ControlName= "Ar" />
<Item DisplayName= "H2" ControlName= "H2" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "27. Carrier Gas H2(V64)" UnitName= "" ControlName= "V64.GVTurnValve" Description= "" >
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<Item DisplayName= "Hold" ControlName= "Hold" />
<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "28. GasRing.H2.Purge(V66)" UnitName= "" ControlName= "V66.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "H2" ControlName= "H2" />
</Step>
</Group>
<Group DisplayName= "C (MO Bypass)" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "29. TMA Release(V43)" UnitName= "" ControlName= "V43.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "30. TCS Release(V48)" UnitName= "" ControlName= "V48.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
</Group>
<Group DisplayName= "D (MO Bypass)" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "31. TMA.Bypass(V45)" UnitName= "" ControlName= "V45.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "32. TCS Bypass(V49)" UnitName= "" ControlName= "V49.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
</Group>
<Group DisplayName= "E (MO VAC)" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "33. TMA VAC(V46)" UnitName= "" ControlName= "V46.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "34. TCS VAC(V50)" UnitName= "" ControlName= "V50.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
</Group>
<Group DisplayName= "F (RUN/VENT)" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "35. Diluted N2 Run(V39)" UnitName= "" ControlName= "V39.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "36. High N2 Run(V40)" UnitName= "" ControlName= "V40.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "37. TMA Run(V41)" UnitName= "" ControlName= "V41.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "38. TCS Run(V53)" UnitName= "" ControlName= "V53.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "39. HCL Run(V54)" UnitName= "" ControlName= "V54.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "40. SiH4.Run(V55)" UnitName= "" ControlName= "V55.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "41. C3H8.Run(V59)" UnitName= "" ControlName= "V59.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
</Group>
<Group DisplayName= "G (VENT)" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "42. TMA Vent(V42)" UnitName= "" ControlName= "V42.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "43. SiH4.Vent(V56)" UnitName= "" ControlName= "V56.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "44. C3H8.Vent(V60)" UnitName= "" ControlName= "V60.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
</Group>
<Group DisplayName= "H (H2/ProcessGas Switch)" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "45. HCL.Switch(V51)" UnitName= "" ControlName= "V51.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "46. SiH4.Switch(V52)" UnitName= "" ControlName= "V52.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "47. C3H8.Switch(V58)" UnitName= "" ControlName= "V58.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "48. N2.Switch(V37s)" UnitName= "" ControlName= "V37s.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "49. High N2Flow(V38)" UnitName= "" ControlName= "V38.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
</Group>
<Group DisplayName= "I (Final Valve)" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "50. SH/OpticPurge.Final(V87)" UnitName= "" ControlName= "V87.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "51. OuterGas.Final(V88)" UnitName= "" ControlName= "V88.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "52. InnerGas.Final(V89)" UnitName= "" ControlName= "V89.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "53. MiddleGas.Final(V90)" UnitName= "" ControlName= "V90.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "54. GasRingPurge.Final(V91)" UnitName= "" ControlName= "V91.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "55. HeaterUpPurge.Final(V92)" UnitName= "" ControlName= "V92.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "56. ChamberPurge.Final(V93)" UnitName= "" ControlName= "V93.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "57. RotationUpPurge.Final(V94)" UnitName= "" ControlName= "V94.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "58. ConfinementRing.Final(V95)" UnitName= "" ControlName= "V95.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "59. HeaterWF.Final(V96)" UnitName= "" ControlName= "V96.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "60. Carry Gas.Final(V97)" UnitName= "" ControlName= "V97.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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</Group>
<Group DisplayName= "J (Run Final)" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "61. Dopping.Final(V61)" UnitName= "" ControlName= "V61.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "62. Silane.Final(V62)" UnitName= "" ControlName= "V62.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "63. Propane.Final(V63)" UnitName= "" ControlName= "V63.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
</Group>
<Group DisplayName= "K (Leak Check)" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "64. Gasbox Leak Check(V74)" UnitName= "" ControlName= "V74.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "65. Reactor Leak Check(V69)" UnitName= "" ControlName= "V69.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "66. MO Vac(V73)" UnitName= "" ControlName= "V73.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
</Group>
<Group DisplayName= "GasBox.Vent.Pump" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "67. GasBox.Vent.Pump(V72)" UnitName= "" ControlName= "V72.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
</Group>
<Group DisplayName= "GasBox.Vent.Bypass" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "68. GasBox.Vent.Pump(V25)" UnitName= "" ControlName= "V25.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
</Group>
<Group DisplayName= "DOR Valve" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "69. DOR.Vac(V75)" UnitName= "" ControlName= "V75.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "70. DOR.Refill(V76)" UnitName= "" ControlName= "V76.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
</Group>
<Group DisplayName= "EPV" >
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<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "71. EPV1" UnitName= "" ControlName= "EPV1.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
<Step ModuleName= "" DeviceType= "" InputType= "ReadOnlySelection" DisplayName= "72. EPV2" UnitName= "" ControlName= "EPV2.GVTurnValve" Description= "" >
<Item DisplayName= "Hold" ControlName= "Hold" />
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<Item DisplayName= "Close" ControlName= "Close" />
<Item DisplayName= "Open" ControlName= "Open" />
</Step>
</Group>
</Catalog>
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<Catalog DisplayName= "StepInfo" >
<Group DisplayName= "MFC" >
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<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "73. Vent Push Flow (M1)" UnitName= "sccm" ControlName= "Mfc1.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "74.Dilut Flow For N2 (M3)" UnitName= "sccm" ControlName= "Mfc3.Ramp" InputMode= "" Min= "0" Max= "30000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "75.N2 Low Flow (M4)" UnitName= "sccm" ControlName= "Mfc4.Ramp" InputMode= "" Min= "0" Max= "5000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "76.N2 High Flow (M5)" UnitName= "sccm" ControlName= "Mfc5.Ramp" InputMode= "" Min= "0" Max= "20000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "77. Diluted N2 Flow (M6)" UnitName= "sccm" ControlName= "Mfc6.Ramp" InputMode= "" Min= "0" Max= "500" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "78.TMA Bubb Flow (M7)" UnitName= "sccm" ControlName= "Mfc7.Ramp" InputMode= "" Min= "0" Max= "500" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "79.TMA Push Flow (M8)" UnitName= "sccm" ControlName= "Mfc8.Ramp" InputMode= "" Min= "0" Max= "1000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "80.TCS Bubb High Flow (M10)" UnitName= "sccm" ControlName= "Mfc10.Ramp" InputMode= "" Min= "0" Max= "5000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "81.TCS Bubb Low Flow (M11)" UnitName= "sccm" ControlName= "Mfc11.Ramp" InputMode= "" Min= "0" Max= "1000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "82.TCS Push Flow (M12)" UnitName= "sccm" ControlName= "Mfc12.Ramp" InputMode= "" Min= "0" Max= "1000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "83.HCl Flow (M13)" UnitName= "sccm" ControlName= "Mfc13.Ramp" InputMode= "" Min= "0" Max= "5000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "84.SiH4 Flow (M14)" UnitName= "sccm" ControlName= "Mfc14.Ramp" InputMode= "" Min= "0" Max= "500" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "85.C Source Push Flow (M15)" UnitName= "sccm" ControlName= "Mfc15.Ramp" InputMode= "" Min= "0" Max= "30000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "86.Dope Push Flow (M2)" UnitName= "sccm" ControlName= "Mfc2.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "87. Si Source Push Flow (M9)" UnitName= "sccm" ControlName= "Mfc9.Ramp" InputMode= "" Min= "0" Max= "30000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "88.C3H8 Flow (M16)" UnitName= "sccm" ControlName= "Mfc16.Ramp" InputMode= "" Min= "0" Max= "500" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "89.Dope Middle Flow (M19)" UnitName= "sccm" ControlName= "Mfc19.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "90. Dope Inner Flow (M20)" UnitName= "sccm" ControlName= "Mfc20.Ramp" InputMode= "" Min= "0" Max= "5000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "91.Si Source Middle Flow (M22)" UnitName= "sccm" ControlName= "Mfc22.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "92.Si Source Inner Flow (M23)" UnitName= "sccm" ControlName= "Mfc23.Ramp" InputMode= "" Min= "0" Max= "5000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "93.C Source Middle Flow (M25)" UnitName= "sccm" ControlName= "Mfc25.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "94.C Source Inner Flow (M26)" UnitName= "sccm" ControlName= "Mfc26.Ramp" InputMode= "" Min= "0" Max= "5000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "95. SH Purge Flow (M27)" UnitName= "sccm" ControlName= "Mfc27.Ramp" InputMode= "" Min= "0" Max= "1000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "96. Outer Push Flow (M28)" UnitName= "sccm" ControlName= "Mfc28.Ramp" InputMode= "" Min= "0" Max= "50000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "97. Inner Push Flow (M29)" UnitName= "sccm" ControlName= "Mfc29.Ramp" InputMode= "" Min= "0" Max= "10000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "98.Middle Push Flow (M31)" UnitName= "sccm" ControlName= "Mfc31.Ramp" InputMode= "" Min= "0" Max= "20000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "99. Surrounding Flow (M40)" UnitName= "sccm" ControlName= "Mfc40.Ramp" InputMode= "" Min= "0" Max= "100000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "100. GR Purge Main Flow (M32)" UnitName= "sccm" ControlName= "Mfc32.Ramp" InputMode= "" Min= "0" Max= "30000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "101. Heater-Up Purge Flow (M33)" UnitName= "sccm" ControlName= "Mfc33.Ramp" InputMode= "" Min= "0" Max= "30000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "102. Chamber Purge Flow (M35)" UnitName= "sccm" ControlName= "Mfc35.Ramp" InputMode= "" Min= "0" Max= "30000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "103. Rotation-Up Purge Flow (M36)" UnitName= "sccm" ControlName= "Mfc36.Ramp" InputMode= "" Min= "0" Max= "30000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "104. Shutter Purge Flow (M37)" UnitName= "sccm" ControlName= "Mfc37.Ramp" InputMode= "" Min= "0" Max= "20000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "105. Heater-WF Purge Flow (M38)" UnitName= "sccm" ControlName= "Mfc38.Ramp" InputMode= "" Min= "0" Max= "20000" Description= "" />
<!-- <Step ModuleName="" DeviceType="" InputType="DoubleTextInput" DisplayName="106. Balance C Flow (M39)" UnitName="sccm" ControlName="Mfc39.Ramp" InputMode="" Min="0" Max="50" Description=""/> -->
</Group>
<Group DisplayName= "PC" >
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "107.N2 Post Dilut Pressure (PC1)" UnitName= "mbar" ControlName= "Pressure1.Ramp" InputMode= "" Min= "0" Max= "3000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "108. TMA Bubb Pressure (PC2)" UnitName= "mbar" ControlName= "Pressure2.Ramp" InputMode= "" Min= "0" Max= "3000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "109.TCS Bubb Pressure (PC3)" UnitName= "mbar" ControlName= "Pressure3.Ramp" InputMode= "" Min= "0" Max= "3000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "110. Vent Pre-Exhaust Pressure (PC4)" UnitName= "mbar" ControlName= "Pressure4.Ramp" InputMode= "" Min= "0" Max= "3000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "111. Dope Pre-Split Pressure (PC5)" UnitName= "mbar" ControlName= "Pressure5.Ramp" InputMode= "" Min= "0" Max= "3000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "112.Si Source Pre-Split Pressure (PC6)" UnitName= "mbar" ControlName= "Pressure6.Ramp" InputMode= "" Min= "0" Max= "3000" Description= "" />
<Step ModuleName= "" DeviceType= "" InputType= "DoubleTextInput" DisplayName= "113.C Source Pre-Split Pressure (PC7)" UnitName= "mbar" ControlName= "Pressure7.Ramp" InputMode= "" Min= "0" Max= "3000" Description= "" />
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</Group>
</Catalog>
<!-- ************************************************************* -->
<ProcessConfig DisplayName= "ProcessConfig" >
<Configs DisplayName= "Process Config" >
</Configs>
</ProcessConfig>
</TableRecipeFormat>
<TableRecipeSchema >
<xs:schema attributeFormDefault= "unqualified" elementFormDefault= "qualified" xmlns:xs= "http://www.w3.org/2001/XMLSchema" >
<xs:simpleType name= "processType" >
<xs:restriction base= "xs:string" >
<xs:enumeration value= "Process" />
<xs:enumeration value= "Clean" />
</xs:restriction>
</xs:simpleType>
<xs:simpleType name= "booleanType" >
<xs:restriction base= "xs:string" >
<xs:enumeration value= "0" />
<xs:enumeration value= "1" />
<xs:enumeration value= "False" />
<xs:enumeration value= "True" />
<xs:enumeration value= "false" />
<xs:enumeration value= "true" />
</xs:restriction>
</xs:simpleType>
<xs:element name= "TableRecipeData" >
<xs:complexType >
<xs:sequence >
<xs:element maxOccurs= "unbounded" name= "Step" >
<xs:complexType >
<xs:sequence >
<xs:element name= "Mfc" >
<xs:complexType >
<xs:attribute name= "Flow.Gas1" type= "xs:double" use= "optional" />
<xs:attribute name= "Flow.Gas2" type= "xs:double" use= "optional" />
<xs:attribute name= "Flow.Gas3" type= "xs:double" use= "optional" />
<xs:attribute name= "Flow.Gas4" type= "xs:double" use= "optional" />
</xs:complexType>
</xs:element>
</xs:sequence>
<xs:attribute name= "StepNo" type= "xs:string" use= "required" />
<xs:attribute name= "Name" type= "xs:string" use= "required" />
<xs:attribute name= "Loop" type= "xs:string" use= "required" />
<xs:attribute name= "Type" type= "xs:string" use= "required" />
<xs:attribute name= "StepTime" type= "xs:time" use= "optional" />
</xs:complexType>
</xs:element>
</xs:sequence>
<xs:attribute name= "RecipeChamberType" type= "xs:string" fixed= "Strip" use= "required" />
<xs:attribute name= "RecipeProcessType" type= "xs:string" use= "required" />
<xs:attribute name= "RecipeVersion" type= "xs:string" fixed= "1.0" use= "required" />
<xs:attribute name= "CreatedBy" type= "xs:string" use= "required" />
<xs:attribute name= "CreationTime" type= "xs:dateTime" use= "required" />
<xs:attribute name= "LastRevisedBy" type= "xs:string" use= "required" />
<xs:attribute name= "LastRevisionTime" type= "xs:dateTime" use= "required" />
<xs:attribute name= "Description" type= "xs:string" use= "required" />
</xs:complexType>
</xs:element>
</xs:schema>
</TableRecipeSchema>
</Aitex>