1.PM开腔时关闭V75后延时2s再打开V76阀

Modules/Mainframe/PMs/Routines/PMChamberMoveBodyRoutine.cs

@@ -69,7 +69,8 @@ namespace SicModules.PMs.Routines
             TimeDelay1,
             TimeDelay2,
             TimeDelay3,
-            TimeDelay4
+            TimeDelay4,
+            TimeDelay5,
         }
 
         public PMChamberMoveBodyRoutine(ModuleName module, PMModule pm1) : base(module, pm1)
@@ -160,6 +161,7 @@ namespace SicModules.PMs.Routines
             {
                 //开启V76
                 SetIoValueByName((int)RoutineStep.CloseTv75, "V75", false, 2);
+                TimeDelay((int)RoutineStep.TimeDelay5 2);
                 SetIoValueByName((int)RoutineStep.StepSetTv76, "V76", true, 2);
 
                 TimeDelay((int)RoutineStep.TimeDelay0, 2);

SicRT/Properties/AssemblyInfo.cs

@@ -51,5 +51,5 @@ using System.Windows;
 // 可以指定所有值，也可以使用以下所示的 "*" 预置版本号和修订号
 // 方法是按如下所示使用“*”: :
 
-[assembly: AssemblyVersion("1.3.0.40927")]
+[assembly: AssemblyVersion("1.3.0.41008")]
 [assembly: AssemblyInformationalVersion("自动通用版（有EFEM）")]

SicRT/ReleaseNotes.md

@@ -3,6 +3,12 @@
 Auto-GE 自动通用版（适用有EFEM设备）
 
 ----
+## Version 1.3.0.41008
+- Bug修复
+    - 
+- 新特性
+	-1.PM开腔时关闭V75后延时2s再打开V76阀 
+
 ## Version 1.3.0.40927
 - Bug修复
     - 修改PM加热界面控温模式显示

SicUI/Properties/AssemblyInfo.cs

@@ -54,5 +54,5 @@ using System.Windows;
 // You can specify all the values or you can default the Build and Revision Numbers 
 // by using the '*' as shown below:
 
-[assembly: AssemblyVersion("1.3.0.40927")]
+[assembly: AssemblyVersion("1.3.0.41008")]
 [assembly: AssemblyInformationalVersion("自动通用版（有EFEM）")]