传盘压力参数一键设置
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@ -176,6 +176,11 @@ namespace SicModules.TMs.Routines
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return Result.FAIL;
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}
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if (_slowFastVentSwitchPressure > _ventBasePressure)
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{
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_slowFastVentSwitchPressure = _ventBasePressure;
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}
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_swTimer.Restart();
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Notify("Start");
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return Result.RUN;
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@ -1602,6 +1602,8 @@
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</configs>
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</configs>
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<configs name="TM">
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<config default="300" name="ProcessPressure" description="传盘压力基准" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
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<config default="20" name="VacuumPressureBaseOffset" description="传盘压力Offset" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
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<config default="192.168.1.102:102" name="SiemensIP" description="Siemens IP Address" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="S1500" name="SiemensType" visible="false" description="Siemens Type" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="960" name="AtmPressureBase" description="判断大气压的时候,压力值需要大于该值" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
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@ -33,6 +33,7 @@ using SicModules.UnLoads;
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using Aitex.Core.RT.DBCore;
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using MECF.Framework.UI.Core.TrayCoating;
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using System.Data;
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using Aitex.Core.RT.Log;
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namespace SicRT.Equipments.Systems
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{
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@ -213,9 +214,51 @@ namespace SicRT.Equipments.Systems
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_auto = new AutoTransfer();
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_returnAll = new ReturnAllWafer();
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SC.RegisterValueChangedCallback("TM.ProcessPressure", SetTansferPressure);
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return true;
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}
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private void SetTansferPressure(object value)
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{
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try
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{
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double.TryParse(value.ToString(), out double dbValue);
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double offset = SC.GetValue<double>("TM.VacuumPressureBaseOffset");
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double basePressure = offset + dbValue;
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SC.SetItemValue("TM.PressureBalance.BalancePressure", dbValue);
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SC.SetItemValue("TM.VacuumPressureBase", basePressure);
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SC.SetItemValue("TM.Purge.VentBasePressure", dbValue);
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SC.SetItemValue("PM.VacuumPressureBase", basePressure);
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SC.SetItemValue("PM.PM1.ProcessIdle.FinalPressure", value);
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SC.SetItemValue("PM.PM1.PreProcess.ChamberPressure", value);
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SC.SetItemValue("PM.PM2.ProcessIdle.FinalPressure", value);
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SC.SetItemValue("PM.PM2.PreProcess.ChamberPressure", value);
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SC.SetItemValue("LoadLock.VacuumPressureBase", basePressure);
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SC.SetItemValue("LoadLock.Purge.VentBasePressure", value);
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SC.SetItemValue("UnLoad.VacuumPressureBase", basePressure);
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SC.SetItemValue("UnLoad.Purge.VentBasePressure", value);
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}
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catch (Exception ex)
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{
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EV.PostWarningLog("System", ex.Message);
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}
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}
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private void InitModules()
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{
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var tm = new TMModule(ModuleName.TM);
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@ -51,6 +51,6 @@ using System.Windows;
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// 可以指定所有值,也可以使用以下所示的 "*" 预置版本号和修订号
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// 方法是按如下所示使用“*”: :
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[assembly: AssemblyVersion("1.0.13.22")]
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[assembly: AssemblyVersion("1.0.13.23")]
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@ -1,6 +1,15 @@
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# Sic 系统更新历史记录
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## Version 1.0.13.23
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**2023-04-26**
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- Bug修复
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- 无
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- 新特性
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- 传盘压力参数一键设置
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## Version 1.0.13.22
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**2023-04-23**
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@ -31,6 +31,4 @@ using System.Runtime.InteropServices;
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//
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// You can specify all the values or you can default the Build and Revision Numbers
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// by using the '*' as shown below:
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// [assembly: AssemblyVersion("1.0.*")]
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[assembly: AssemblyVersion("1.1.1.0")]
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[assembly: AssemblyFileVersion("1.1.1.0")]
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[assembly: AssemblyVersion("1.0.13.23")]
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@ -54,5 +54,5 @@ using System.Windows;
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// You can specify all the values or you can default the Build and Revision Numbers
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// by using the '*' as shown below:
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[assembly: AssemblyVersion("1.0.13.22")]
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[assembly: AssemblyVersion("1.0.13.23")]
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