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将寻边器所属Module改为EFEM。

This commit is contained in:
Mikk 2023-05-18 17:43:50 +08:00
parent 5e09007414
commit c8f9198614
6 changed files with 21 additions and 21 deletions
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2
Modules/Mainframe/Aligners/AlignerModule.cs
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@ -142,7 +142,7 @@ namespace SicModules.Aligners
private void InitDevice()
{
_alignerDevice = DEVICE.GetDevice<HwAlignerGuide>($"TM.HiWinAligner");
_alignerDevice = DEVICE.GetDevice<HwAlignerGuide>($"EFEM.HiWinAligner");
}
private void InitFsm()

2
Modules/Mainframe/Aligners/Routines/Base/AlignerBaseRoutine.cs
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@ -14,7 +14,7 @@ namespace SicModules.Aligners.Routines.Base
protected AlignerBaseRoutine() : base(ModuleName.Aligner.ToString())
{
_alignerDevice = DEVICE.GetDevice<HwAlignerGuide>($"TM.HiWinAligner");
_alignerDevice = DEVICE.GetDevice<HwAlignerGuide>($"EFEM.HiWinAligner");
}

2
Modules/Mainframe/EFEMs/Routines/Base/EfemBaseRoutine.cs
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@ -62,7 +62,7 @@ namespace SicModules.EFEMs.Routines.Base
_trayRobot = DEVICE.GetDevice<SicTrayRobot>($"TrayRobot.TrayRobot");
_efemDevice = DEVICE.GetDevice<SicEFEM>($"EFEM.EFEM");
_loadTrayHomeSensor = DEVICE.GetDevice<IoSensor>($"TM.LoadTrayHomeSensor");
_alignerDevice = DEVICE.GetDevice<HwAlignerGuide>($"TM.HiWinAligner");
_alignerDevice = DEVICE.GetDevice<HwAlignerGuide>($"EFEM.HiWinAligner");
_loadWaferPlaced = DEVICE.GetDevice<IoSensor>($"TM.LLWaferPlaced");
_loadTrayPresence = DEVICE.GetDevice<IoSensor>($"TM.LLTrayPresence");
_cassBLWaferConvex = DEVICE.GetDevice<IoSensor>($"TM.CassBLWaferConvexSensor");

2
SicRT/Equipments/Systems/DeviceManager.cs
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@ -94,7 +94,7 @@ namespace SicRT.Instances
if (SC.GetConfigItem("HiWinAligner.EnableDevice").BoolValue)
{
var HwAligner = new HwAlignerGuide("TM", "HiWinAligner", "HiWinAligner");
var HwAligner = new HwAlignerGuide("EFEM", "HiWinAligner", "HiWinAligner");
HwAligner.Initialize();
QueueDevice(HwAligner);
}

18
SicUI/Models/Maintenances/TM/DeviceViewModel.cs
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@ -60,13 +60,13 @@ namespace SicUI.Client.Models.Platform.TM
public bool LdRotationBtnEnable => !LdRotationIsBusy && !LdRotationIsServoError && !LoadLockIsOnline;
#region AutoTransferCondition
[Subscription("TM.HiWinAligner.HwWaferSize")]
[Subscription("EFEM.HiWinAligner.HwWaferSize")]
public string WaferSize { get; set; }
[Subscription("TM.HiWinAligner.HwWaferType")]
[Subscription("EFEM.HiWinAligner.HwWaferType")]
public string WaferType { get; set; }
[Subscription("TM.HiWinAligner.HwWaferMaterial")]
[Subscription("EFEM.HiWinAligner.HwWaferMaterial")]
public string WaferMaterialData { get; set; }
[Subscription("TM.HiWinAligner.HwWaferOrientation")]
[Subscription("EFEM.HiWinAligner.HwWaferOrientation")]
public string WaferOrientation { get; set; }
public void AutoTransferCond(string sCond)
@ -252,15 +252,15 @@ namespace SicUI.Client.Models.Platform.TM
//qbh 20220701
public void Aligner_WaferSize(string sValue)
{
InvokeClient.Instance.Service.DoOperation($"TM.HiWinAligner.HwWaferSize", WaferSizeSelected);
InvokeClient.Instance.Service.DoOperation($"EFEM.HiWinAligner.HwWaferSize", WaferSizeSelected);
}
public void Aligner_WaferType(string sValue)
{
InvokeClient.Instance.Service.DoOperation($"TM.HiWinAligner.HwWaferType", WaferTypeSelected);
InvokeClient.Instance.Service.DoOperation($"EFEM.HiWinAligner.HwWaferType", WaferTypeSelected);
}
public void Aligner_WaferMaterial(string sValue)
{
InvokeClient.Instance.Service.DoOperation($"TM.HiWinAligner.HwWaferMaterial", WaferMaterialSelected);
InvokeClient.Instance.Service.DoOperation($"EFEM.HiWinAligner.HwWaferMaterial", WaferMaterialSelected);
}
public void Aligner_WaferOrientation(string sValue)
{
@ -280,11 +280,11 @@ namespace SicUI.Client.Models.Platform.TM
EV.PostWarningLog("TM", "Aligner parameter error: Wafer Orientation degree should be in 0-3599.");
return;
}
InvokeClient.Instance.Service.DoOperation($"TM.HiWinAligner.HwWaferOrientation", sDegree);
InvokeClient.Instance.Service.DoOperation($"EFEM.HiWinAligner.HwWaferOrientation", sDegree);
}
public void Aligner_SaveParameters()
{
InvokeClient.Instance.Service.DoOperation($"TM.HiWinAligner.HwSaveParameters");
InvokeClient.Instance.Service.DoOperation($"EFEM.HiWinAligner.HwSaveParameters");
}
#endregion

16
SicUI/Models/Maintenances/TM/EFEMViewModel.cs
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@ -124,48 +124,48 @@ namespace SicUI.Models.Maintenances.TM
//开启真空
public void Aligner_CVN()
{
InvokeClient.Instance.Service.DoOperation($"TM.HiWinAligner.HwVacuumOn");
InvokeClient.Instance.Service.DoOperation($"EFEM.HiWinAligner.HwVacuumOn");
}
//晶圆寻边与辅正
public void Aligner_BAL()
{
InvokeClient.Instance.Service.DoOperation($"TM.HiWinAligner.HwAlign");
InvokeClient.Instance.Service.DoOperation($"EFEM.HiWinAligner.HwAlign");
}
//关闭真空
public void Aligner_CVF()
{
InvokeClient.Instance.Service.DoOperation($"TM.HiWinAligner.HwVacuumOff");
InvokeClient.Instance.Service.DoOperation($"EFEM.HiWinAligner.HwVacuumOff");
}
//读取真空值
public void Aligner_CVD()
{
InvokeClient.Instance.Service.DoOperation($"TM.HiWinAligner.HwCVD");
InvokeClient.Instance.Service.DoOperation($"EFEM.HiWinAligner.HwCVD");
}
//移至测量中心点
public void Aligner_MTM()
{
InvokeClient.Instance.Service.DoOperation($"TM.HiWinAligner.HwMoveToMeasurement");
InvokeClient.Instance.Service.DoOperation($"EFEM.HiWinAligner.HwMoveToMeasurement");
}
//读取最后的错误信息
public void Aligner_PER()
{
InvokeClient.Instance.Service.DoOperation($"TM.HiWinAligner.HwPER");
InvokeClient.Instance.Service.DoOperation($"EFEM.HiWinAligner.HwPER");
}
//清除报警
public void Aligner_ERS()
{
InvokeClient.Instance.Service.DoOperation($"TM.HiWinAligner.HwClearError");
InvokeClient.Instance.Service.DoOperation($"EFEM.HiWinAligner.HwClearError");
}
public void Aligner_Abort()
{
InvokeClient.Instance.Service.DoOperation($"TM.HiWinAligner.HwAbort");
InvokeClient.Instance.Service.DoOperation($"EFEM.HiWinAligner.HwAbort");
}
public void AlignerAbortRoutine()