diff --git a/SicRT/Equipments/AutoTransfer.cs b/SicRT/Equipments/AutoTransfer.cs index 4c5c6bd5..421c5f0d 100644 --- a/SicRT/Equipments/AutoTransfer.cs +++ b/SicRT/Equipments/AutoTransfer.cs @@ -2191,13 +2191,13 @@ namespace SicRT.Modules return; } - //对应Buffer有Tray则返回 - if(_load.GetWaferInfo(0).TrayOriginSlot % 2 == 0 && _buffer.HasTray(0)) + //对应Buffer和PM有Tray则返回 + if(_load.GetWaferInfo(0).TrayOriginSlot % 2 == 0 && _buffer.HasTray(0) && _pm1.HasTray(0)) { return; } - if (_load.GetWaferInfo(0).TrayOriginSlot % 2 == 1 && _buffer.HasTray(1)) + if (_load.GetWaferInfo(0).TrayOriginSlot % 2 == 1 && _buffer.HasTray(1) && _pm2.HasTray(0)) { return; } @@ -2266,12 +2266,10 @@ namespace SicRT.Modules return; } - //pick UnLoad有Tray,TM无Tray,LoadLock没有Tray,UnLoad分离完成 + //pick UnLoad有Tray,TM无Tray,UnLoad分离完成 bool canPickUnLoad = _tmRobot.NoTray(0) && _tmRobot.NoWafer(0) - && _unload.HasTray(0) - && _load.NoTray(0); - //&& _unload.GetWaferInfo(0).ProcessState == WaferProcessStatus.Completed; + && _unload.HasTray(0); if (canPickUnLoad) { //需要UnLoad把石墨盘和Wafer分离完成 @@ -2282,11 +2280,6 @@ namespace SicRT.Modules if (_unload.IsReadyForPick(ModuleName.TMRobot, 0)) { - //if (_load.IsInPumping) - //{ - // return; - //} - if (_tmRobot.Pick(_unload.Module, 0, Hand.Blade1)) { _unload.WaitTransfer(ModuleName.TMRobot);