1.PM ProcessAbort增加将PSU和SCR设置为Power模式
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@ -14,6 +14,8 @@ namespace SicModules.PMs.Routines
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private enum RoutineStep
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{
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HeatEnable,
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SetPSUMode,
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SetSCRMode,
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SetPSURatio,
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SetSCRRatio,
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SetRotation,
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@ -81,6 +83,10 @@ namespace SicModules.PMs.Routines
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//停止加热
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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//设置模式为Power
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SetPSUHeatMode((int)RoutineStep.SetPSUMode,0);
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SetSCRHeatMode((int)RoutineStep.SetSCRMode, 0);
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//设定功率为0
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SetPSUHeatRatio((int)RoutineStep.SetPSURatio, 0, 0, 0);
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SetSCRHeatRatio((int)RoutineStep.SetSCRRatio, 0, 0, 0);
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@ -8,6 +8,7 @@ Auto-GE 自动通用版(适用有EFEM设备)
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- Bug修复
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-修正AutoTranfer时TMRobot不取Buffer中已用完次数的Tray的问题
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- 新特性
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- PM ProcessAbort增加将PSU和SCR设置为Power模式
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## Version 1.3.1.40319
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