Han Qiang Qiang
|
f9e503b36c
|
整理多片机问题点
1.Recipe不能运行问题
2.V30问题
3.泵问题
4.Recipe中磁流体设置问题
5.Recipe中HCLSourSplitRatio设置问题
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2024-07-08 09:25:18 +08:00 |
Han Qiang Qiang
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cc3fcd2e29
|
删除无用Device配置项
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2024-06-27 13:15:03 +08:00 |
Han Qiang Qiang
|
36acbf4c86
|
1修改PM开腔兼容性问题
2修改MFC17相关问题
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2024-06-26 15:50:10 +08:00 |
Han Qiang Qiang
|
671567ff45
|
1修改开关腔相应Routine,
2更新dll,更新开腔互锁
3修改界面数据绑定
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2024-06-25 17:38:49 +08:00 |
Han Qiang Qiang
|
5a52d6cc6e
|
1修改Load腔伺服函数名
2修改Load伺服相关动作
3修改PM初始化
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2024-06-24 13:26:44 +08:00 |
Han Qiang Qiang
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fbce8e1101
|
磁流体速度设定,不需要Ramp,删除时间参数
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2024-06-20 10:27:06 +08:00 |
SIC1016\caipeilun
|
eb45106ef3
|
Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop
# Conflicts:
# Modules/Mainframe/gitversion.json
# SicRT/gitversion.json
# SicSimulator/gitversion.json
# SicUI/gitversion.json
|
2024-06-18 10:04:58 +08:00 |
SIC1016\caipeilun
|
11bd3eaf5a
|
routine修改
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2024-06-18 09:47:32 +08:00 |
Han Qiang Qiang
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258187b9d9
|
屏蔽V25强制Interlock
修改测试内容
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2024-06-16 10:01:21 +08:00 |
Han Qiang Qiang
|
a2beffeb1d
|
添加V25对应的DI点
修改仿真中不能ProcessIdle问题点
临时屏蔽仿真中V25相关内容
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2024-06-14 14:05:51 +08:00 |
SIC1016\caipeilun
|
b4362b2345
|
routine purge
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2024-06-13 16:38:12 +08:00 |
SIC1016\caipeilun
|
00515bf654
|
Merge branch '多片机/multiplate-develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into 多片机/multiplate-develop
# Conflicts:
# Modules/Mainframe/Config/PM/PM1/interlockPM1.xml
# Modules/Mainframe/gitversion.json
# SicRT/gitversion.json
# SicSimulator/Config/_ioDefinePM.xml
# SicSimulator/gitversion.json
# SicUI/gitversion.json
|
2024-06-13 09:15:15 +08:00 |
SIC1016\caipeilun
|
621d12fa1d
|
routine改到vac idle
|
2024-06-13 09:07:33 +08:00 |
Han Qiang Qiang
|
40e6aca84f
|
测试Interlock流程
修改传盘流程临时保存
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2024-06-13 08:59:38 +08:00 |
Han Qiang Qiang
|
ac8c261437
|
1修改气阀打开不对应问题
2修改PM的IO,水温的还需要继续优化
3TM的IO好多和逻辑相关,只修改小部分,后面继续修改
4界面添加泵,绑定数据还需要沟通
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2024-05-28 11:17:00 +08:00 |
Han Qiang Qiang
|
0dc417d74a
|
修改RT中使用错误的伺服对象问题
|
2024-05-23 15:53:47 +08:00 |
Han Qiang Qiang
|
712c702ec8
|
Merge branch 'develop' into 多片机/multiplate-develop
# Conflicts:
# ThirdParty/MECF.Framework/MECF.Framework.Common.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
# ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
# ThirdParty/MECF.Framework/Sicentury.Core.dll
# ThirdParty/MECF.Framework/Sicentury.Localization.dll
# ThirdParty/MECF.Framework/zh/Sicentury.Localization.resources.dll
|
2024-05-22 16:30:48 +08:00 |
HCL
|
94118de389
|
1.PostTransfer升隔热罩延时改为可配置
|
2024-05-21 16:36:40 +08:00 |
HCL
|
89e48d49d9
|
1.Preprocess等待温度超时修改为600s
|
2024-05-20 16:19:52 +08:00 |
HCL
|
bd951e3a67
|
1.修正PostProcess结束后DO-PostProcessRunning未设置false的问题
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2024-05-15 16:51:37 +08:00 |
HCL
|
ef513b441f
|
1.修正Interlock有时不起作用的BUG
2.在PreProcess、Procss、PostProcess过程中检查对应的DO-PreProcessRunning、DO-ProcessRunning、DO-PostProcessRunning信号,
- 若为false则PM宕机
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2024-05-07 15:03:05 +08:00 |
Han Qiang Qiang
|
c3c9a610d9
|
Merge branch 'develop' into 多片机/multiplate-develop
|
2024-05-06 10:20:52 +08:00 |
Han Qiang Qiang
|
d1bf33b2d6
|
修改Routine相关内容
|
2024-04-26 08:54:54 +08:00 |
Han Qiang Qiang
|
f3458dd5aa
|
修改Routine
|
2024-04-24 17:44:50 +08:00 |
Liang Su
|
8bc589ebf5
|
refactor(Heater): 优化Heater操作视图,优化HeatStrategy等枚举定义。
更新Common库至f05010b。
FlowMode、TCModes、HeatStrategy等枚举从DicMode对象中移出至Aitex.Core.RT.Device.PmDevices命名空间。
PMHeaterView视图从SicUI项目中移除,移至UI.Client库。
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2024-04-24 09:21:23 +08:00 |
Liang Su
|
3a1914b0cd
|
refactor(TC): 重构IoTC
更新库文件cd8c814,重构IoTC对象。
所有HeaterControlMode枚举更名为HeatStrategy。
移除IoTC的SetTargetSPAll方法,PMModuleDevice对象的EnableHeater方法中使用SetTargetSP方法设置目标温度。
修正PMHeaterView视图中无法将PSU和SCR手动设置到Pyro模式的问题。现在将原Pyro模式扩展为PyroAuto和PyroFollow模式。
|
2024-04-24 09:21:22 +08:00 |
Han Qiang Qiang
|
b5c8409119
|
修改Routine内容
|
2024-04-23 18:34:00 +08:00 |
Han Qiang Qiang
|
885a16d79a
|
修改PMToAtmIdleRoutine
修改PMToProcessIdleRoutine
|
2024-04-23 14:11:48 +08:00 |
Han Qiang Qiang
|
094d3814aa
|
修改AtmIdleRoutine
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2024-04-22 18:21:49 +08:00 |
HCL
|
991e114075
|
1.修正PM Clean和Purge流程问题
|
2024-04-22 10:44:51 +08:00 |
HCL
|
e291bb7fdf
|
1.PM ProcessAbort增加将PSU和SCR设置为Power模式
|
2024-04-09 08:54:02 +08:00 |
HCL
|
f8b014ff39
|
Merge branch 'WaferTrayInfo' into develop
# Conflicts:
# SicRT/ReleaseNotes.md
# ThirdParty/MECF.Framework/MECF.Framework.Common.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
# ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
|
2024-04-07 10:32:53 +08:00 |
HCL
|
08e2380624
|
1.进度更新
|
2024-03-28 13:24:05 +08:00 |
HCL
|
4544de2ac7
|
1.Routine时间修改
|
2024-03-27 14:13:06 +08:00 |
HCL
|
7a7c1caa10
|
Merge branch 'develop' into WaferTrayInfo
# Conflicts:
# SicRT/Properties/AssemblyInfo.cs
# SicRT/ReleaseNotes.md
# SicUI/Properties/AssemblyInfo.cs
# ThirdParty/MECF.Framework/MECF.Framework.Common.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
# ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
|
2024-03-27 13:35:36 +08:00 |
HCL
|
23554a905f
|
1.修改PM Routine有关超时时间和压力到达条件判断
|
2024-03-26 10:17:56 +08:00 |
Liang Su
|
03130a8f0c
|
V43、V48开启是判断当前载气是否为氢气H2.
|
2024-03-26 09:53:42 +08:00 |
HCL
|
e7e1330215
|
1.修改PM Purge和Clean Routine超时时间和压力达到条件
|
2024-03-26 09:51:36 +08:00 |
Liang Su
|
a15974dca2
|
修正PostProcess、PMPostTransferRoutine和PMToProcessIdleRoutine中未正确设置PSU、SCR加热模式的问题。
|
2024-03-14 15:26:03 +08:00 |
Han Qiang Qiang
|
5a97b64a51
|
Merge branch 'develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into develop
|
2024-03-14 09:52:58 +08:00 |
Han Qiang Qiang
|
8fb1afb227
|
PM腔体和管道压差,在工艺过程中检测,报警等级可配置
|
2024-03-14 09:52:29 +08:00 |
Liang Su
|
dbbca86ee8
|
修正PM进入ProcessIdle时,PSU和SCR加热模式可能错误的问题。
|
2024-03-14 09:41:36 +08:00 |
HCL
|
1f86e5195b
|
1.保留小数后两位
|
2024-03-11 17:43:22 +08:00 |
Han Qiang Qiang
|
66f77567e5
|
启用屏蔽的Coating生长方法
|
2024-03-01 14:28:43 +08:00 |
SIC1016\caipeilun
|
6f24a0e7c3
|
修改PMmodule连接判定
|
2024-02-28 14:37:34 +08:00 |
Han Qiang Qiang
|
72715f0811
|
Merge branch 'develop' into DevelopBase
|
2024-02-27 17:40:19 +08:00 |
HCL
|
2c035c23c1
|
1.Process Exit信息打印
|
2024-02-27 11:17:21 +08:00 |
SIC1016\caipeilun
|
7e38106528
|
Merge branch 'feature/维保界面V1.0' into DevelopBase
# Conflicts:
# SicRT/Config/System.sccfg
# SicRT/Instances/ToolLoader.cs
# SicUI/Bootstrapper.cs
# ThirdParty/MECF.Framework/MECF.Framework.Common.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
# ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
# ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
# ThirdParty/MECF.Framework/Sicentury.Core.dll
# ThirdParty/MECF.Framework/Sicentury.Localization.dll
# ThirdParty/MECF.Framework/zh/Sicentury.Localization.resources.dll
|
2024-02-26 11:02:43 +08:00 |
SIC1016\caipeilun
|
b5a0e2925a
|
更新维护代码
|
2024-02-26 10:47:35 +08:00 |
SIC1016\caipeilun
|
d11d47b687
|
更新MuitiProcess代码
|
2024-02-22 09:40:12 +08:00 |