Commit Graph

238 Commits

Author SHA1 Message Date
Han Qiang Qiang 4c5d250d64 PM添加D0-128Interlock配置 2023-11-23 17:46:23 +08:00
Han Qiang Qiang 68c5f3f7c4 更新版本号至 ## Version 1.1.1.4
修改C2H4_C3H8FlowRatio配置名称
2023-11-22 15:58:31 +08:00
Han Qiang Qiang 8c322bf438 真值表添加配置项 2023-11-22 15:25:48 +08:00
Han Qiang Qiang b20d34d4dc 1更新dll,重新整理LineHeater数据输出
2修改LineHeater配置和界面及后台绑定
2023-11-22 13:12:12 +08:00
Han Qiang Qiang d4f99dff5e 1添加C2H4-C3H8配置项,在PM1 PM2主配置中
2修改PM界面相关显示
3修改真值表,气体流统计显示界面,更新dll
4修改IO名称
2023-11-22 10:22:06 +08:00
Han Qiang Qiang 8fb7a84308 更新dll [2cdf762],修改MFC5控制流程逻辑
1.PM Device配置中使用库中类实例化MFC5控制流程
2.SC配置中添加参数,是否安装MFC5,  PM.{module}.MFC.Mfc5.IsInstalled
3.修改PM主界面显示,根据配置是否显示MFC5
2023-11-21 17:20:54 +08:00
HQQ f04658385a 添加IoN2HighDoping类,配置气阀控制PN2气体 2023-11-19 12:17:29 +08:00
Han Qiang Qiang 1f814517bf 删除PM2多余Interlock配置项
更新版本号至## Version 1.1.1.2
2023-11-17 20:51:03 +08:00
Liang Su c6bcaeeb34 修正Recipe中的C3H8设置项识别错误,全部默认到Purge的问题。
版本号更新至v1.1.1.1
2023-11-17 14:13:53 +08:00
HCL 76664e49c3 1.启用Cassette下降沿信号删除Wafer信息功能 2023-11-15 14:41:55 +08:00
Han Qiang Qiang b70314fedd 1添加机械手真空
2还原PM DI-6 InterLock
2023-11-15 13:23:35 +08:00
Han Qiang Qiang 3c6d04a34e 删除PM DI6 Interlock 2023-11-15 09:32:24 +08:00
Han Qiang Qiang 268c0fd369 修改Recipe C2H4-> UnitName 2023-11-14 15:42:09 +08:00
Han Qiang Qiang cf50e26d9b 删除PM2 DI-33门报警Interlock
修改LineHeat配置SC名称
2023-11-14 14:29:33 +08:00
Han Qiang Qiang 307e9a3ed7 修改气体流量C2H4配置
修改SC对应的气体流量配置
删除DI-33门报警InterLock
2023-11-14 14:03:18 +08:00
Han Qiang Qiang 9c3e075a8b C2H4修改为C3H8 2023-11-14 10:43:36 +08:00
Han Qiang Qiang bbda00b198 1.修改C2H4名称->C3H8
2.IO名称(DI-19,DI 188 189 190  ,AO 211  212 )
3.显示DO43
2023-11-14 10:14:26 +08:00
HCL 81bd96391a 1.修改Purge中Vent超时时间 2023-11-06 13:37:35 +08:00
Han Qiang Qiang 3e66bf4e21 修改TM vent超时问题,由于Routine流程中不区分慢充超时和快充超时,因此统一系统配置参数超时时间VentTimeout 2023-11-06 11:23:12 +08:00
Han Qiang Qiang a5936c017e 1修改加热带配置名称,
2添加启动前检测LineHeater
3添加气柜温度显示
2023-11-06 11:07:48 +08:00
Han Qiang Qiang c24b7db2bb 更新dll [007352e],修改气柜检测
添加SC配置
修改PM的Device配置
2023-11-03 12:33:09 +08:00
HCL 8d89c35b5a 1.修改ROR M11配置文件的错误
2.ROR时间间隔和基础压力可统一设置
2023-10-31 14:20:48 +08:00
HCL 1bb1fd34d6 1.修改Clean流程 2023-10-31 08:57:02 +08:00
Han Qiang Qiang cd3abbd3c3 修改PMIO报警 2023-10-26 14:46:35 +08:00
Han Qiang Qiang 27f6b53a3d 删除无用的AE监控项 2023-10-26 10:14:48 +08:00
Han Qiang Qiang 4a688d93fe 删除DI-29 2023-10-26 09:04:30 +08:00
Han Qiang Qiang 175495e086 Merge branch 'feature/PM1的IO报警配置移植到PM2中' into develop 2023-10-25 17:59:39 +08:00
Han Qiang Qiang c466b3c4ae 1根据PM1的IO报警信息配置PM2配置
2修改PM2水温报警,
3修改PM2水温报警配置名称
2023-10-25 17:59:10 +08:00
Liang Su 8302cccaa1 更新库文件094abb3,修正Recipe保存的一些问题。
修正SicRT\Toolloader中IoManager对象的加载顺序,移至末尾加载,以避免IoManager中启动了InterlockManager,但InterlockManager使用的数据还未在DATA中注册,导致Poll数据失败的问题。
2023-10-25 16:46:33 +08:00
HCL e29b70233c 1.解决MFC ROR测试重做上次MFC ROR流程的问题 2023-10-25 08:53:01 +08:00
HCL fe8c96316a 1.自动设备增加inch类型参数选项 2023-10-24 15:29:21 +08:00
HCL b701df3337 1.优化Purge和Vent可能出现的问题 2023-10-24 09:58:50 +08:00
HCL 2ee8555705 1.修改TM Purge和Vent逻辑,在Vent最终压力的过程中检测是否开启快充流量 2023-10-24 09:50:54 +08:00
SIC1016\caipeilun 6b3d985945 Merge branch 'develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into develop_configChangedV2
# Conflicts:
#	SicRT/Properties/AssemblyInfo.cs
#	SicUI/Properties/AssemblyInfo.cs
#	ThirdParty/MECF.Framework/MECF.Framework.Common.dll
#	ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
#	ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
#	ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
#	ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
#	ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
2023-10-20 16:32:28 +08:00
HCL d19fed6c29 Recipe中取消Pyro选项 2023-10-19 08:33:55 +08:00
SIC1016\caipeilun bd60f6edcc 删除错误复制 2023-10-18 15:29:14 +08:00
Han Qiang Qiang 157dde3317 删除PM Interlock配置的DI-29 2023-10-18 13:27:01 +08:00
HCL 2e4e67fff6 1.PM K阀组增加V111控制 2023-10-18 11:46:15 +08:00
SIC1016\caipeilun 6bf63d4b06 优化: TM开闸板阀时腔体压力直接使用PT1的Feedback,不另外建立IoPressureMeter3s
*错误:TM使用IoPressureMeter3s类,DATA会注册PM1.ChamberPressure.Value,树状图会覆盖掉PM1.ChamberPressure,从而数值不正确
2023-10-12 17:28:57 +08:00
SIC1016\caipeilun 9019666f02 修复 TM purge时 vent延时绑定错误 2023-10-10 09:05:59 +08:00
SIC1016\caipeilun 3f3f66eced 修复:
TM purge时 vent延时绑定错误
2023-10-09 17:33:31 +08:00
SIC1016\caipeilun 611d7b771b Merge branch 'develop_InterlockV1.3' into develop_configChangedV2 2023-10-07 13:38:35 +08:00
SIC1016\caipeilun dbda23b2ba 修复Interlock项: do-100 和 do-49触发前 di-9 必须为0 2023-10-07 13:38:03 +08:00
SIC1016\caipeilun 4d3b740167 Merge branch 'develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into develop_InterlockV1.3 2023-10-07 13:31:13 +08:00
SIC1016\caipeilun fb96e5de9f 修复 EFEM SlitValueRoutine 触发时提示文本缺失名称 2023-10-07 13:23:58 +08:00
SIC1016\caipeilun fce4967a57 更新多用户登录机制:
同时只允许一个用户登录操作A;
多个用户B登录时,有权限用户A将进行确认,若确认后操作权限转移到B,A变成ReadOnly模式,仅有只读权限;
目前ReadOnly模式禁用鼠标键盘功能,只能切换页面,无法操控页面内功能(滚动条、Log等无法点击查看)
2023-10-06 09:50:11 +08:00
SIC1016\caipeilun c18ffff29d 修改 新增的data项 数据库不保存
删除多余代码
版本更新23.9.28.2
2023-10-03 09:08:02 +08:00
SIC1016\caipeilun d4a2d4b252 修改TM的interlock DO-47 48 17 8 10 12 14 16
要求压差小于50
2023-09-28 14:38:55 +08:00
SIC1016\caipeilun b8e3b8c030 Merge branch '_Bypass_InterLock_ReEdit' into develop
# Conflicts:
#	SicRT/Properties/AssemblyInfo.cs
#	SicRT/ReleaseNotes.md
#	SicUI/Properties/AssemblyInfo.cs
#	ThirdParty/MECF.Framework/MECF.Framework.Common.dll
#	ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
#	ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
#	ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
#	ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
#	ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
#	ThirdParty/MECF.Framework/Sicentury.Core.dll
2023-09-25 15:23:25 +08:00
SIC1016\caipeilun aae3721283 1.PM2同步修改V75V76和V72TVInterlock
2.删除PM DI0和DI7 (DO2、40、41、54、112-119、111的互锁 (为了开腔维护时间可以吹扫)
2023-09-25 15:15:58 +08:00