Commit Graph

126 Commits

Author SHA1 Message Date
Han Qiang Qiang 4c5d250d64 PM添加D0-128Interlock配置 2023-11-23 17:46:23 +08:00
Han Qiang Qiang 68c5f3f7c4 更新版本号至 ## Version 1.1.1.4
修改C2H4_C3H8FlowRatio配置名称
2023-11-22 15:58:31 +08:00
Han Qiang Qiang 8c322bf438 真值表添加配置项 2023-11-22 15:25:48 +08:00
Han Qiang Qiang b20d34d4dc 1更新dll,重新整理LineHeater数据输出
2修改LineHeater配置和界面及后台绑定
2023-11-22 13:12:12 +08:00
Han Qiang Qiang d4f99dff5e 1添加C2H4-C3H8配置项,在PM1 PM2主配置中
2修改PM界面相关显示
3修改真值表,气体流统计显示界面,更新dll
4修改IO名称
2023-11-22 10:22:06 +08:00
Han Qiang Qiang 8fb7a84308 更新dll [2cdf762],修改MFC5控制流程逻辑
1.PM Device配置中使用库中类实例化MFC5控制流程
2.SC配置中添加参数,是否安装MFC5,  PM.{module}.MFC.Mfc5.IsInstalled
3.修改PM主界面显示,根据配置是否显示MFC5
2023-11-21 17:20:54 +08:00
HQQ f04658385a 添加IoN2HighDoping类,配置气阀控制PN2气体 2023-11-19 12:17:29 +08:00
Han Qiang Qiang 1f814517bf 删除PM2多余Interlock配置项
更新版本号至## Version 1.1.1.2
2023-11-17 20:51:03 +08:00
HCL 76664e49c3 1.启用Cassette下降沿信号删除Wafer信息功能 2023-11-15 14:41:55 +08:00
Han Qiang Qiang b70314fedd 1添加机械手真空
2还原PM DI-6 InterLock
2023-11-15 13:23:35 +08:00
Han Qiang Qiang 3c6d04a34e 删除PM DI6 Interlock 2023-11-15 09:32:24 +08:00
Han Qiang Qiang 268c0fd369 修改Recipe C2H4-> UnitName 2023-11-14 15:42:09 +08:00
Han Qiang Qiang cf50e26d9b 删除PM2 DI-33门报警Interlock
修改LineHeat配置SC名称
2023-11-14 14:29:33 +08:00
Han Qiang Qiang 307e9a3ed7 修改气体流量C2H4配置
修改SC对应的气体流量配置
删除DI-33门报警InterLock
2023-11-14 14:03:18 +08:00
Han Qiang Qiang 9c3e075a8b C2H4修改为C3H8 2023-11-14 10:43:36 +08:00
Han Qiang Qiang bbda00b198 1.修改C2H4名称->C3H8
2.IO名称(DI-19,DI 188 189 190  ,AO 211  212 )
3.显示DO43
2023-11-14 10:14:26 +08:00
Han Qiang Qiang a5936c017e 1修改加热带配置名称,
2添加启动前检测LineHeater
3添加气柜温度显示
2023-11-06 11:07:48 +08:00
Han Qiang Qiang c24b7db2bb 更新dll [007352e],修改气柜检测
添加SC配置
修改PM的Device配置
2023-11-03 12:33:09 +08:00
HCL 8d89c35b5a 1.修改ROR M11配置文件的错误
2.ROR时间间隔和基础压力可统一设置
2023-10-31 14:20:48 +08:00
Han Qiang Qiang cd3abbd3c3 修改PMIO报警 2023-10-26 14:46:35 +08:00
Han Qiang Qiang 27f6b53a3d 删除无用的AE监控项 2023-10-26 10:14:48 +08:00
Han Qiang Qiang 4a688d93fe 删除DI-29 2023-10-26 09:04:30 +08:00
Han Qiang Qiang 175495e086 Merge branch 'feature/PM1的IO报警配置移植到PM2中' into develop 2023-10-25 17:59:39 +08:00
Han Qiang Qiang c466b3c4ae 1根据PM1的IO报警信息配置PM2配置
2修改PM2水温报警,
3修改PM2水温报警配置名称
2023-10-25 17:59:10 +08:00
Liang Su 8302cccaa1 更新库文件094abb3,修正Recipe保存的一些问题。
修正SicRT\Toolloader中IoManager对象的加载顺序,移至末尾加载,以避免IoManager中启动了InterlockManager,但InterlockManager使用的数据还未在DATA中注册,导致Poll数据失败的问题。
2023-10-25 16:46:33 +08:00
HCL fe8c96316a 1.自动设备增加inch类型参数选项 2023-10-24 15:29:21 +08:00
SIC1016\caipeilun 6b3d985945 Merge branch 'develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into develop_configChangedV2
# Conflicts:
#	SicRT/Properties/AssemblyInfo.cs
#	SicUI/Properties/AssemblyInfo.cs
#	ThirdParty/MECF.Framework/MECF.Framework.Common.dll
#	ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
#	ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
#	ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
#	ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
#	ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
2023-10-20 16:32:28 +08:00
HCL d19fed6c29 Recipe中取消Pyro选项 2023-10-19 08:33:55 +08:00
Han Qiang Qiang 157dde3317 删除PM Interlock配置的DI-29 2023-10-18 13:27:01 +08:00
SIC1016\caipeilun 6bf63d4b06 优化: TM开闸板阀时腔体压力直接使用PT1的Feedback,不另外建立IoPressureMeter3s
*错误:TM使用IoPressureMeter3s类,DATA会注册PM1.ChamberPressure.Value,树状图会覆盖掉PM1.ChamberPressure,从而数值不正确
2023-10-12 17:28:57 +08:00
SIC1016\caipeilun dbda23b2ba 修复Interlock项: do-100 和 do-49触发前 di-9 必须为0 2023-10-07 13:38:03 +08:00
SIC1016\caipeilun 4d3b740167 Merge branch 'develop' of http://118.31.5.210:65000/Sic-Software/Sic08 into develop_InterlockV1.3 2023-10-07 13:31:13 +08:00
SIC1016\caipeilun fce4967a57 更新多用户登录机制:
同时只允许一个用户登录操作A;
多个用户B登录时,有权限用户A将进行确认,若确认后操作权限转移到B,A变成ReadOnly模式,仅有只读权限;
目前ReadOnly模式禁用鼠标键盘功能,只能切换页面,无法操控页面内功能(滚动条、Log等无法点击查看)
2023-10-06 09:50:11 +08:00
SIC1016\caipeilun d4a2d4b252 修改TM的interlock DO-47 48 17 8 10 12 14 16
要求压差小于50
2023-09-28 14:38:55 +08:00
SIC1016\caipeilun b8e3b8c030 Merge branch '_Bypass_InterLock_ReEdit' into develop
# Conflicts:
#	SicRT/Properties/AssemblyInfo.cs
#	SicRT/ReleaseNotes.md
#	SicUI/Properties/AssemblyInfo.cs
#	ThirdParty/MECF.Framework/MECF.Framework.Common.dll
#	ThirdParty/MECF.Framework/MECF.Framework.RT.Core.dll
#	ThirdParty/MECF.Framework/MECF.Framework.RT.EquipmentLibrary.dll
#	ThirdParty/MECF.Framework/MECF.Framework.Simulator.Core.dll
#	ThirdParty/MECF.Framework/MECF.Framework.UI.Client.dll
#	ThirdParty/MECF.Framework/MECF.Framework.UI.Core.dll
#	ThirdParty/MECF.Framework/Sicentury.Core.dll
2023-09-25 15:23:25 +08:00
SIC1016\caipeilun aae3721283 1.PM2同步修改V75V76和V72TVInterlock
2.删除PM DI0和DI7 (DO2、40、41、54、112-119、111的互锁 (为了开腔维护时间可以吹扫)
2023-09-25 15:15:58 +08:00
SIC1016\caipeilun ca98256710 删除PM DI0和DI7 (DO2、40、41、54、112-119、111的互锁 (为了开腔维护时间可以吹扫) => DO-111漏删 2023-09-20 15:48:25 +08:00
SIC1016\caipeilun 76d4a4e83c 1.取消v42v56v60Interlock
2.修正V75Interlock
3.修改V46V50Interlock
4.修正TV触发Interlock无信息提示
2023-09-08 10:26:47 +08:00
SIC1016\caipeilun b7742be1e0 新增interlockV75 2023-09-04 17:13:31 +08:00
SIC1016\caipeilun 5517dfc39d 同步PM2 interlock --V27强制打开配置在PMModuleDevice中 2023-09-04 15:22:09 +08:00
SIC1016\caipeilun 8d1e0e11d2 Interlock新增DO-175 2023-09-04 10:52:32 +08:00
SIC1016\caipeilun 0f9369cce3 新增V46V50InterLock,PMmodule新增属性DI206EqualsTrue_OR_DO177EqualsFalse,或逻辑采用pollbool方式触发 2023-09-04 10:32:20 +08:00
SIC1016\caipeilun 4a78cc0c3d 更新Interlock项-V37S V51 V52 V58 2023-09-01 17:59:21 +08:00
SIC1016\caipeilun f36a6b03d9 更新Interlock
1.DO-46
2.DO-140
3.DO-174
2023-09-01 17:45:20 +08:00
SIC1016\caipeilun 5d4b8d2b81 <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
描述错误,应为DI-52
2023-09-01 17:08:08 +08:00
SIC1016\caipeilun edccc8f2d7 1.更新库文件,库文件interlock表Action项新增全局ignoreReverse,忽略所有limit反转;limit项新增ignoreReverse,可以忽略 单项limit触发action反转
2.删除PMModuleDevice程序内Interlock代码,转用Interlock表控制(好处是UI界面操作和IO操作都能触发Interlock)
3.1.更新DO-100相关Interlock
3.2.更新V42/V56/V60 Interlock
3.3.更新DO-49 Interlock
2023-09-01 17:00:46 +08:00
Han Qiang Qiang 1d15da78cb 删除PM DI0和DI7 (DO2、40、41、54、112-119、111的互锁 (为了开腔维护时间可以吹扫) 2023-09-01 15:27:51 +08:00
Han Qiang Qiang fdd60cfd09 更新dll [52e48c6],
修改加热带伴侣配置名称,修改配置项
2023-08-28 15:01:27 +08:00
HCL 67e78cd19b 配置文件修改 2023-08-28 10:42:24 +08:00
HCL 79ecc312b9 1.可编辑Routine增加Hold选项 2023-08-28 10:03:13 +08:00