using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using SicModules.UnLoads.Routines.Base; namespace SicModules.UnLoads.Routines { public class UnLoadPrepareTransferRoutine : UnLoadBaseRoutine { enum RoutineStep { CheckForelinePressure, RequestPump, RequestPumpDelay, SlowPump, CloseSlowValve, FastPump, PumpDelay, CloseFastValve, Delay, SlowVent, CloseSlowVentValve, TimeDelay1, TimeDelay2, TimeDelay3 } private double _pumpSwitchPressure = 100; private int _slowPumpTimeout = 100; private int _fastPumpTimeout = 100; private int _slowVentTimeout = 100; private double _targetPressure; private double _llVacPressure = 0; private double _balancePressureDiff = 0; private double _pumpBasePressure = 0; private int _pumpDelayTime; public UnLoadPrepareTransferRoutine() { Module = ModuleName.UnLoad.ToString(); Name = "PrepareTransfer"; } public override Result Start(params object[] objs) { Reset(); _targetPressure = SC.GetValue("TM.PressureBalance.BalancePressure"); _llVacPressure = SC.GetValue("UnLoad.VacuumPressureBase"); _pumpBasePressure = SC.GetValue("UnLoad.Purge.PumpBasePressure"); _balancePressureDiff = SC.GetValue("TM.PressureBalance.BalanceMaxDiffPressure"); _pumpSwitchPressure = SC.GetValue("UnLoad.Pump.SlowFastPumpSwitchPressure"); _slowPumpTimeout = SC.GetValue("UnLoad.Pump.SlowPumpTimeout"); _fastPumpTimeout = SC.GetValue("UnLoad.Pump.FastPumpTimeout"); _slowVentTimeout = SC.GetValue("UnLoad.Vent.SlowVentTimeout"); _pumpDelayTime = SC.GetValue("UnLoad.Purge.PumpDelayTime"); //PrepareTrasfer需要把压力调到VacuumBasePressure以下 if (_targetPressure > _llVacPressure) { _targetPressure = _llVacPressure; } string reason; if (!UnLoadDevice.SetFastVentValve(false, out reason) || !UnLoadDevice.SetSlowVentValve(false, out reason)) { EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}"); return Result.FAIL; } if (!UnLoadDevice.SetFastPumpValve(false, out reason) || !UnLoadDevice.SetSlowPumpValve(false, out reason)) { EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}"); return Result.FAIL; } bool isAtmMode = SC.GetValue("System.IsATMMode"); if (isAtmMode) { EV.PostInfoLog(Module, $"system in atm mode, {UnLoadDevice.Module} pump skipped"); return Result.DONE; } if (!UnLoadDevice.CheckLidClose()) { EV.PostAlarmLog(Module, $"Can not pump, door is open"); return Result.FAIL; } if (!TMDevice.CheckSlitValveClose(ModuleHelper.Converter(UnLoadDevice.Module))) { EV.PostAlarmLog(Module, $"LoadLock Can not servo to pressure, slit valve is open"); return Result.FAIL; } //if (Math.Abs(_targetPressure - UnLoadDevice.ChamberPressure) < _balancePressureDiff && UnLoadDevice.CheckVacuum()) //{ // return Result.DONE; //} //LockPump2(out reason); Notify("Start"); return Result.RUN; } public override Result Monitor() { try { TimeDelay((int)RoutineStep.TimeDelay1, 1); SlowPump((int)RoutineStep.SlowPump, _pumpSwitchPressure, _slowPumpTimeout); FastPump((int)RoutineStep.FastPump, _pumpBasePressure, _fastPumpTimeout); TimeDelay((int)RoutineStep.TimeDelay2, _pumpDelayTime); CloseFastPumpValve((int)RoutineStep.CloseFastValve); CloseSlowPumpValve((int)RoutineStep.CloseSlowValve); // 模拟器运行时由于以上动作刷新DI不及时导致触发Interlock,增加一些延时 //TODO IoValue类中检查相关DI状态。 TimeDelay((int)RoutineStep.TimeDelay3, 2); SlowVent((int)RoutineStep.SlowVent, _targetPressure - 5, _slowVentTimeout); CloseVentValveAndWait((int)RoutineStep.CloseSlowVentValve); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { //UnlockPump2(); return Result.FAIL; } //UnlockPump2(); Notify("Finished"); return Result.DONE; } public override void Abort() { base.Abort(); } } }