using System.Collections.Generic; using System.Diagnostics; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Devices; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using SicModules.PMs.Routines.Base; namespace SicModules.PMs.Routines { public class PMPumpRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, ArSupply, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetGroupJ, SetM1to16, SetPC, SetGroupI, //V87-96 SetM2to40, SetM2to40_1, MfcAll, SetGasOut, SetTv, SetTv1, WaitTv1, SetGasIn1, //V65,V67,V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetGasIn2, SetGroupJOpen, OpenFinal2, SetMfcFinal2, PumpDownTimeout, SetTvMode, SetEPV1, SetEPV2, SetTVEnable, SetTVPressMode, SetTvPositionToZero, SetMFCMode, SetPCMode, SetTvOpen, SetTvModeToPress, SetTVto1050, OpenGasIn1, CloseGasIn1, CloseFinanl1, CloseFinanl2, SetGroupV38, SetV76, SetV75, SetGroupV25, SetV31, SetV32, SetV35V36, SetV65, SetTVPositionMode, SetTVPositionMax, CloseM32M35M37, CloseM36, CloseM38, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay12, TimeDelay13, TimeDelay14, } private PMModule _pm1Module; private IoThrottleValve2 _IoThrottle; private IoInterLock _pmIoInterLock; List _lstPcList = new List { 1, 2, 3, 4, 5, 6, 7 }; private int _rotationCheckSpeed =0 ; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout; //旋转停止超时 private int _IoValueOpenCloseTimeout = 10; //开关超时时间 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了) private int _throttleTimeout; //蝶阀调整到指定压力的超时时间 private double _pumpBasePressure; private int _routineTimeOut; //private int _EPV2OpenDelayTime = 9; private Stopwatch _swTimer = new Stopwatch(); public PMPumpRoutine(ModuleName module, PMModule pm1) : base(module, pm1) { Module = module.ToString(); _pm1Module = pm1; Name = "PumpDown"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); _pmIoInterLock = DEVICE.GetDevice($"{Module}.PMInterLock"); } public override Result Start(params object[] objs) { Reset(); _rotationCloseTimeout = SC.GetValue($"PM.{Module}.RotationCloseTimeout"); _pmPressureMaxDiff = SC.GetValue($"PM.{Module}.ThrottlePressureMaxDiff"); _throttleTimeout = SC.GetValue($"PM.{Module}.ThrottlePressureTimeout"); _pumpBasePressure= SC.GetValue($"PM.{Module}.Pump.PumpBasePressure"); _routineTimeOut = SC.GetValue($"PM.{Module}.Pump.RoutineTimeOut"); if (!_pmIoInterLock.SetPMPumpRoutineRunning(true, out string reason)) { EV.PostAlarmLog(Module, $"can not Pump,{reason}"); return Result.FAIL; } _swTimer.Restart(); Notify("Start"); return Result.RUN; } public override Result Monitor() { try { CheckRoutineTimeOut(); //关闭V76,打开V75 SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); //旋转停止,加热停止 SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout); //关闭V72,打开V25 SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); //打开V31,打开V32 SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout); //打开V35,打开V36 SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout); //关闭B/C/E/F/H/K 阀门 SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); //打开D/G 阀门 SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); //设置MFC和PC的模式 SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); //M1-M16设定为default值(M2、M9、M15除外) SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0); //M2、M9、M15、M19-M40 MFC 3s ramp 到 default值 SetMfcToDefaultByGroup((int)RoutineStep.SetM2to40_1, MfcGroupName.M2toM40, 3); //设置所有PC到默认值 SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); //打开V68 SetIoValueByGroup((int)RoutineStep.OpenGasIn1, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout); //打开J阀门 SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout); ////打开V65 //SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout); //打开EPV2 SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay5, 3); //设置蝶阀Enable SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5); //设置蝶阀为压力模式 SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5); //伺服压力设定值到0mbar SetThrottlePressureAndWaitSetPoint((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure, _pmPressureMaxDiff, _throttleTimeout); //M2、M9、M15、M19-M40 MFC 3s ramp到0 SetMfcByGroup((int)RoutineStep.SetM2to40, MfcGroupName.M2toM40, 0, 3); //等待腔体压力Pump到设定值 WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pumpBasePressure, _pmPressureMaxDiff,_throttleTimeout); //蝶阀设置为位置模式,开度设置为最大 SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout); SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout); _pmIoInterLock.SetPMPumpRoutineRunning(false, out _); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); return Result.DONE; } public override void Abort() { _pmIoInterLock.SetPMPumpRoutineRunning(false, out _); PmDevice.SetRotationServo(0, 0); base.Abort(); } private void CheckRoutineTimeOut() { if (_routineTimeOut > 10) { if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) { EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s"); throw (new RoutineFaildException()); } } } } }