Sic08/Modules/Mainframe/UnLoads/Routines/UnLoadPumpRoutine.cs

193 lines
5.9 KiB
C#

using System.Diagnostics;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using SicModules.UnLoads.Routines.Base;
namespace SicModules.UnLoads.Routines
{
public class UnLoadPumpRoutine : UnLoadBaseRoutine
{
enum RoutineStep
{
CheckForelinePressure,
RequestPump,
RequestPumpDelay,
SlowPump,
CloseSlowValve,
FastPump,
PumpDelay,
CloseFastValve,
Delay,
TimeDelay1,
TimeDelay2,
}
private double _pumpBasePressure = 0;
private double _pumpSwitchPressure = 100;
private int _slowPumpTimeout;
private int _fastPumpTimeout;
private int _pumpDelayTime= 5;
private int _routineTimeOut;
private bool _useSettingValue;
private Stopwatch _swTimer = new Stopwatch();
public UnLoadPumpRoutine()
{
Module = ModuleName.UnLoad.ToString();
Name = "Pump";
}
public void Init()
{
_useSettingValue = false;
}
public void Init(double basePressure, int pumpDelayTime)
{
_pumpBasePressure = basePressure;
_pumpDelayTime = pumpDelayTime;
_useSettingValue = true;
}
public override Result Start(params object[] objs)
{
Reset();
string reason;
if (!UnLoadDevice.SetFastVentValve(false, out reason) || !UnLoadDevice.SetSlowVentValve(false, out reason))
{
EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
return Result.FAIL;
}
bool isAtmMode = SC.GetValue<bool>("System.IsATMMode");
_pumpSwitchPressure = SC.GetValue<double>("UnLoad.Pump.SlowFastPumpSwitchPressure");
_slowPumpTimeout = SC.GetValue<int>("UnLoad.Pump.SlowPumpTimeout");
_fastPumpTimeout = SC.GetValue<int>("UnLoad.Pump.FastPumpTimeout");
_routineTimeOut = SC.GetValue<int>("UnLoad.Pump.RoutineTimeOut");
if (!_useSettingValue)
{
_pumpBasePressure = SC.GetValue<double>("UnLoad.Pump.PumpBasePressure");
_pumpDelayTime = SC.GetValue<int>("UnLoad.Pump.PumpDelayTime");
}
if (!TMDevice.SetFastPumpValve(false, out reason))
{
EV.PostAlarmLog(Module, $"can not pump, TM fast pump value can not close");
return Result.FAIL;
}
if (isAtmMode)
{
EV.PostInfoLog(Module, $"system in atm mode, {Module} pump skipped");
return Result.DONE;
}
if (SC.ContainsItem("UnLoad.RunPumpRoutineEventBelowBasePressure") && !SC.GetValue<bool>("UnLoad.RunPumpRoutineEventBelowBasePressure"))
{
if (UnLoadDevice.ChamberPressure < _pumpBasePressure)
{
EV.PostInfoLog(Module, $"{Module} already under pump base pressure");
return Result.DONE;
}
}
if (!UnLoadDevice.CheckLidClose())
{
EV.PostAlarmLog(Module, $"Can not pump, lid is open");
return Result.FAIL;
}
if (!TMDevice.CheckSlitValveClose(ModuleName.UnLoad))
{
EV.PostAlarmLog(Module, $"Can not pump, slit valve is open");
return Result.FAIL;
}
if (!TMDevice.SetTmToUnLoadVent(false, out _))
{
EV.PostAlarmLog(Module, $"can not pump,can not close v85!");
}
if (!EFEMDevice.CheckSlitValveClose(ModuleName.UnLoad,ModuleName.WaferRobot))
{
EV.PostAlarmLog(Module, $"Can not pump, slit valve is open");
return Result.FAIL;
}
if (!TmIoInterLock.SetUnloadPumpRoutineRunning(true, out reason))
{
EV.PostAlarmLog(Module, $"can not pump,{reason}");
return Result.FAIL;
}
//LockPump2(out reason);
_swTimer.Restart();
Notify("Start");
return Result.RUN;
}
public override Result Monitor()
{
try
{
CheckRoutineTimeOut();
SlowPump((int)RoutineStep.SlowPump, _pumpSwitchPressure, _slowPumpTimeout);
FastPump((int)RoutineStep.FastPump, _pumpBasePressure, _fastPumpTimeout);
TimeDelay((int)RoutineStep.PumpDelay, _pumpDelayTime);
CloseFastPumpValve((int)RoutineStep.CloseFastValve);
CloseSlowPumpValve((int)RoutineStep.CloseSlowValve);
TimeDelay((int)RoutineStep.TimeDelay2, 2);
}
catch (RoutineBreakException)
{
return Result.RUN;
}
catch (RoutineFaildException)
{
UnLoadDevice.SetSlowPumpValve(false, out _);
UnLoadDevice.SetFastPumpValve(false, out _);
//UnlockPump2();
return Result.FAIL;
}
TmIoInterLock.SetUnloadPumpRoutineRunning(false, out _);
//UnlockPump2();
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
return Result.DONE;
}
public override void Abort()
{
base.Abort();
}
private void CheckRoutineTimeOut()
{
if (_routineTimeOut > 10)
{
if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
{
EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
throw (new RoutineFaildException());
}
}
}
}
}