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Base
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refactor(Heater): 优化Heater操作视图,优化HeatStrategy等枚举定义。
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2024-04-24 09:21:23 +08:00 |
EditableRoutine
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refactor(Heater): 优化Heater操作视图,优化HeatStrategy等枚举定义。
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2024-04-24 09:21:23 +08:00 |
PMButttomSectionMoveRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
PMChamberMoveBodyRoutine.cs
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1.PM Interlock中用DI-7代替DI-6
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2023-07-05 13:34:33 +08:00 |
PMCleanRoutine.cs
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1.Routine时间修改
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2024-03-27 14:13:06 +08:00 |
PMExchangeMoRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
PMHomeRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
PMLeakCheckRoutine.cs
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1.Routine时间修改
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2024-03-27 14:13:06 +08:00 |
PMMfcRorRoutine.cs
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1.修改PM Routine有关超时时间和压力到达条件判断
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2024-03-26 10:17:56 +08:00 |
PMMfcValueTestRoutine.cs
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1.解决更新Common库后导致数据库处理出现的报错
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2023-07-10 18:29:20 +08:00 |
PMPcCalibrationRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
PMPostTransferRoutine.cs
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1.进度更新
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2024-03-28 13:24:05 +08:00 |
PMPrepareTransferRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
PMProcessAbortRoutine.cs
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1.PM ProcessAbort增加将PSU和SCR设置为Power模式
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2024-04-09 08:54:02 +08:00 |
PMProcessRoutine.cs
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1.整理WaferInfoRt类
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2023-08-10 15:56:27 +08:00 |
PMPumpRoutine.cs
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1.Routine时间修改
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2024-03-27 14:13:06 +08:00 |
PMPurgeRoutine.cs
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1.修改PM Routine有关超时时间和压力到达条件判断
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2024-03-26 10:17:56 +08:00 |
PMServoToPressure.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
PMStopHeatEnableRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
PMToAtmIdleRoutine.cs
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Update from svn. #93 #94
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2023-04-21 15:02:06 +08:00 |
PMToIsolationRoutine.cs
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Mainframe工程更名为SicModules。
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2023-04-13 15:35:13 +08:00 |
PMToProcessIdleRoutine.cs
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修正PostProcess、PMPostTransferRoutine和PMToProcessIdleRoutine中未正确设置PSU、SCR加热模式的问题。
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2024-03-14 15:26:03 +08:00 |
PMVacIdleRoutine.cs
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1.Routine时间修改
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2024-03-27 14:13:06 +08:00 |
PMVentRoutine.cs
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Update from svn. #93 #94
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2023-04-21 15:02:06 +08:00 |