1565 lines
142 KiB
XML
1565 lines
142 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
|
||
<root>
|
||
<MaintainanceGroup>
|
||
<Maintainer Type="Plan" Name="Schedule" Description="周期维护（监控系统时间）
Schedule Preventive Maintenance" Index="0" Module="System" Enable="True" StartDate="2024/1/26 16:13:19" Threshold="360000" TimeDisplayUnit="Hours">
|
||
<MaintainerParent Name="冷却水系统">
|
||
<MaintainerItem Name="厂务进水压力" Id="0" MaintainedDateLatest="2023/12/29 16:06:23" Enable="False" />
|
||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2023/12/29 16:06:22" Enable="False" />
|
||
<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2023/12/29 16:06:03" Enable="False" />
|
||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Unload模块">
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="EFFM模块">
|
||
<MaintainerItem Name="模块清洁" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="TM模块">
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="PM模块">
|
||
<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="温控系统">
|
||
<MaintainerItem Name="测温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="温度校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="真空系统">
|
||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Gas Box">
|
||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="液体源">
|
||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="传送系统">
|
||
<MaintainerItem Name="真空机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="强电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="弱电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="尾排系统">
|
||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="排风系统">
|
||
<MaintainerItem Name="排风能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="IPC">
|
||
<MaintainerItem Name="设备备份" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Load模块">
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2024/1/26 16:13:13" Enable="False" />
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2024/1/26 16:13:15" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2024/1/26 16:13:17" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2024/1/26 16:13:19" Enable="False" />
|
||
</MaintainerParent>
|
||
</Maintainer>
|
||
<Maintainer Type="Plan" Name="Schedule" Description="周期维护（监控系统时间）
Schedule Preventive Maintenance" Index="1" Module="PM1" Enable="True" StartDate="2024/1/29 9:49:54" Threshold="360000" TimeDisplayUnit="Hours">
|
||
<MaintainerParent Name="冷却水系统">
|
||
<MaintainerItem Name="厂务进水压力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="PM模块">
|
||
<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="TM模块">
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Load模块">
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Unload模块">
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="EFFM模块">
|
||
<MaintainerItem Name="模块清洁" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="温控系统">
|
||
<MaintainerItem Name="测温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="温度校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="真空系统">
|
||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Gas Box">
|
||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="液体源">
|
||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="传送系统">
|
||
<MaintainerItem Name="真空机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="强电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="弱电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="尾排系统">
|
||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="排风系统">
|
||
<MaintainerItem Name="排风能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="IPC">
|
||
<MaintainerItem Name="设备备份" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
</Maintainer>
|
||
<Maintainer Type="Plan" Name="Schedule" Description="周期维护（监控系统时间）
Schedule Preventive Maintenance" Index="2" Module="PM2" Enable="True" StartDate="2024/1/29 9:49:58" Threshold="360000" TimeDisplayUnit="Hours">
|
||
<MaintainerParent Name="冷却水系统">
|
||
<MaintainerItem Name="厂务进水压力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="PM模块">
|
||
<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="TM模块">
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Load模块">
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Unload模块">
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="EFFM模块">
|
||
<MaintainerItem Name="模块清洁" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="温控系统">
|
||
<MaintainerItem Name="测温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="温度校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="真空系统">
|
||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Gas Box">
|
||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="液体源">
|
||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="传送系统">
|
||
<MaintainerItem Name="真空机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="强电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="弱电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="尾排系统">
|
||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="排风系统">
|
||
<MaintainerItem Name="排风能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="IPC">
|
||
<MaintainerItem Name="设备备份" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
</Maintainer>
|
||
<Maintainer Type="Plan" Name="Monthly" Description="月度维护
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|
||
<MaintainerParent Name="冷却水系统">
|
||
<MaintainerItem Name="厂务进水压力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="PM模块">
|
||
<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
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|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="TM模块">
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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||
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|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Unload模块">
|
||
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|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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||
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||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="EFFM模块">
|
||
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|
||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
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|
||
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|
||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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||
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|
||
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|
||
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|
||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="真空系统">
|
||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
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|
||
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|
||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Gas Box">
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="液体源">
|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="传送系统">
|
||
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|
||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
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|
||
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|
||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
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|
||
</MaintainerParent>
|
||
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|
||
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|
||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
</Maintainer>
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Gas Box">
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="液体源">
|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="传送系统">
|
||
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|
||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="强电系统">
|
||
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|
||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="弱电系统">
|
||
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|
||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
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|
||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="排风系统">
|
||
<MaintainerItem Name="排风能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="IPC">
|
||
<MaintainerItem Name="设备备份" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Load模块">
|
||
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|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
</Maintainer>
|
||
<Maintainer Type="Plan" Name="Monthly" Description="月度维护
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|
||
<MaintainerParent Name="冷却水系统">
|
||
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|
||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="PM模块">
|
||
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|
||
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||
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|
||
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|
||
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|
||
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|
||
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|
||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
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|
||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
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|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="TM模块">
|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Unload模块">
|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="EFFM模块">
|
||
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|
||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Gas Box">
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
<MaintainerParent Name="液体源">
|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="传送系统">
|
||
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|
||
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|
||
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|
||
<MaintainerItem Name="晶圆机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="强电系统">
|
||
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|
||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="弱电系统">
|
||
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|
||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
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|
||
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|
||
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|
||
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|
||
<MaintainerParent Name="IPC">
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
</Maintainer>
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
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|
||
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|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Unload模块">
|
||
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|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="EFFM模块">
|
||
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|
||
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|
||
</MaintainerParent>
|
||
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|
||
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|
||
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|
||
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|
||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="真空系统">
|
||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Gas Box">
|
||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="液体源">
|
||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="传送系统">
|
||
<MaintainerItem Name="真空机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="晶圆机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="晶圆机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="晶圆机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="托盘机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="托盘机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="托盘机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="寻边器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="寻边器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="寻边器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="强电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="弱电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="尾排系统">
|
||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="排风系统">
|
||
<MaintainerItem Name="排风能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="IPC">
|
||
<MaintainerItem Name="设备备份" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Load模块">
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
</Maintainer>
|
||
<Maintainer Type="Plan" Name="Quarter" Description="季度维护
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|
||
<MaintainerParent Name="冷却水系统">
|
||
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|
||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="PM模块">
|
||
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|
||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
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|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="TM模块">
|
||
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|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Unload模块">
|
||
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|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="EFFM模块">
|
||
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|
||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="温控系统">
|
||
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|
||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="真空系统">
|
||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Gas Box">
|
||
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|
||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="液体源">
|
||
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|
||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="传送系统">
|
||
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|
||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
<MaintainerItem Name="寻边器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="强电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="弱电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="尾排系统">
|
||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="排风系统">
|
||
<MaintainerItem Name="排风能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="IPC">
|
||
<MaintainerItem Name="设备备份" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Load模块">
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
</Maintainer>
|
||
<Maintainer Type="Plan" Name="Quarter" Description="季度维护
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|
||
<MaintainerParent Name="冷却水系统">
|
||
<MaintainerItem Name="厂务进水压力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="PM模块">
|
||
<MaintainerItem Name="Middle层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="旋转机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="TM模块">
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Unload模块">
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="EFFM模块">
|
||
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|
||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="温控系统">
|
||
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|
||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="温度校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="真空系统">
|
||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Gas Box">
|
||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="液体源">
|
||
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|
||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="传送系统">
|
||
<MaintainerItem Name="真空机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="强电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="弱电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="尾排系统">
|
||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="排风系统">
|
||
<MaintainerItem Name="排风能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="IPC">
|
||
<MaintainerItem Name="设备备份" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Load模块">
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
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|
||
</MaintainerParent>
|
||
</Maintainer>
|
||
<Maintainer Type="Plan" Name="Annual" Description="年度维护
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|
||
<MaintainerParent Name="冷却水系统">
|
||
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|
||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="PM模块">
|
||
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|
||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
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|
||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
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|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
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|
||
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|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Unload模块">
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="EFFM模块">
|
||
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|
||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="温控系统">
|
||
<MaintainerItem Name="测温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="温度校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="真空系统">
|
||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Gas Box">
|
||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="液体源">
|
||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="传送系统">
|
||
<MaintainerItem Name="真空机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="晶圆机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="晶圆机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
<MaintainerItem Name="托盘机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="托盘机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="托盘机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="寻边器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="寻边器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="寻边器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="强电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="弱电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
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|
||
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|
||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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||
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||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
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|
||
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|
||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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||
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||
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||
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|
||
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||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Load模块">
|
||
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||
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|
||
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||
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|
||
</MaintainerParent>
|
||
</Maintainer>
|
||
<Maintainer Type="Plan" Name="Annual" Description="年度维护
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|
||
<MaintainerParent Name="冷却水系统">
|
||
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|
||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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||
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<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
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||
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||
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||
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|
||
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|
||
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||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
<MaintainerParent Name="Unload模块">
|
||
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||
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||
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||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="EFFM模块">
|
||
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|
||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
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|
||
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|
||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
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||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="温度校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="真空系统">
|
||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
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||
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|
||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Gas Box">
|
||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
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|
||
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|
||
<MaintainerParent Name="液体源">
|
||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="传送系统">
|
||
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|
||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
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|
||
</MaintainerParent>
|
||
<MaintainerParent Name="强电系统">
|
||
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|
||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
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|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
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|
||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="排风系统">
|
||
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|
||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="IPC">
|
||
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|
||
<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Load模块">
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
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|
||
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|
||
</MaintainerParent>
|
||
</Maintainer>
|
||
<Maintainer Type="Plan" Name="Annual" Description="年度维护
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|
||
<MaintainerParent Name="冷却水系统">
|
||
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|
||
<MaintainerItem Name="厂务进水温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="冷却水流量" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="冷却水流量报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="冷却水温度报警设置" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="PM模块">
|
||
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|
||
<MaintainerItem Name="Show Head层维护" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="旋转机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
<MaintainerItem Name="旋转机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="旋转机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="升降机构" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体内部检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体内部检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="腔体内部检查" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
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|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="TM模块">
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Unload模块">
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="EFFM模块">
|
||
<MaintainerItem Name="模块清洁" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="FFU检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="温控系统">
|
||
<MaintainerItem Name="测温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="测温硬件" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="测温硬件" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="测温硬件" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="控温硬件" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="温控能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="温度校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="真空系统">
|
||
<MaintainerItem Name="PM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TM真空泵" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="控压能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="控压能力" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="安全泄压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Gas Box">
|
||
<MaintainerItem Name="特气压力设定" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="MFC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="PC功能校准" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="加热带温度" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="H2侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="HCL侦测器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="液体源">
|
||
<MaintainerItem Name="TCS鼓泡器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="TCS鼓泡器" Id="3" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="传送系统">
|
||
<MaintainerItem Name="真空机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="真空机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="真空机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="晶圆机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="托盘机械手" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="寻边器" Id="2" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="强电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="EMO功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="漏电保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="弱电系统">
|
||
<MaintainerItem Name="电气接线" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="UPS保护功能" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="PLC硬件检查" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="尾排系统">
|
||
<MaintainerItem Name="厂务负压" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="过滤器" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="尾排管道" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="尾排管道" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="排风系统">
|
||
<MaintainerItem Name="排风能力" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
<MaintainerItem Name="排风管口" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="True" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="IPC">
|
||
<MaintainerItem Name="设备备份" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备备份" Id="1" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="设备重启" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
<MaintainerParent Name="Load模块">
|
||
<MaintainerItem Name="腔体外观" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="清洁腔体" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（自检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
<MaintainerItem Name="模块检漏（氦检）" Id="0" MaintainedDateLatest="2000/1/1 0:00:00" Enable="False" />
|
||
</MaintainerParent>
|
||
</Maintainer>
|
||
</MaintainanceGroup>
|
||
<AllMaintainItemConfigs>
|
||
<MaintainItems Name="冷却水系统" Description="" Index="0">
|
||
<MaintainItem Name="厂务进水压力" Id="0" Index="0" Description="进水压力：0.35Mpa" DefaultRecord="进水压力=" FilePath="" />
|
||
<MaintainItem Name="厂务进水温度" Id="0" Index="1" Description="冷却水常温：20-25℃
工艺时：<35℃" DefaultRecord="冷却水常温=
工艺时=" FilePath="" />
|
||
<MaintainItem Name="冷却水流量" Id="0" Index="2" Description="参照附件1" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="冷却水流量报警设置" Id="0" Index="3" Description="参照附件1" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="冷却水温度报警设置" Id="0" Index="4" Description="水温上限设定：45℃(UI→Configuration→PM→CoolingWater)" DefaultRecord="水温设定=" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="PM模块" Description="PM模块" Index="1">
|
||
<MaintainItem Name="Middle层维护" Id="0" Index="0" Description="参照《SiC CVD 设备维护作业标准》" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="Show Head层维护" Id="0" Index="1" Description="参照《SiC CVD 设备维护作业标准》" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="旋转机构" Id="0" Index="2" Description="600转时电流<2.5A" DefaultRecord="600转时电流=" FilePath="" />
|
||
<MaintainItem Name="旋转机构" Id="1" Index="3" Description="加减速度为3rpm/s" DefaultRecord="加减速度=" FilePath="" />
|
||
<MaintainItem Name="旋转机构" Id="2" Index="4" Description="噪音情况:无异常声音" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="旋转机构" Id="3" Index="5" Description="Wobble测试：Wobble 结果小于 0.2 mm" DefaultRecord="Wobble 结果=" FilePath="" />
|
||
<MaintainItem Name="升降机构" Id="0" Index="6" Description="上下运动顺畅" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="升降机构" Id="2" Index="7" Description="皮带无磨损、变形、错位" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="升降机构" Id="3" Index="8" Description="位置确认：
Chamber Body 平面—Up Position=52mm
Up Position—Down Position=30mm" DefaultRecord="Up Position=
Down Position=" FilePath="" />
|
||
<MaintainItem Name="升降机构" Id="1" Index="9" Description="驱动电机表面温度低于60度" DefaultRecord="表面温度=" FilePath="" />
|
||
<MaintainItem Name="腔体内部检查" Id="0" Index="10" Description="检查GasRingPurge通道接触情况（密封接触、无错位）" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="腔体内部检查" Id="1" Index="11" Description="密封Oring（腔体密封、GasConnector密封）安装正常，无漏装、变形、磨损" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="腔体内部检查" Id="2" Index="12" Description="腔体Parts无破损、Parts居中安装" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="模块检漏（自检）" Id="0" Index="13" Description="模块自检结果<0.5mbar/min" DefaultRecord="模块自检结果=" FilePath="" />
|
||
<MaintainItem Name="模块检漏（氦检）" Id="0" Index="14" Description="模块氦检漏率<1.0*E-9mbar*L/s" DefaultRecord="模块氦检漏率=" FilePath="" />
|
||
<MaintainItem Name="H2侦测器" Id="0" Index="15" Description="H2 Detector 校准" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="HCL侦测器" Id="0" Index="16" Description="HCL Detector校准" DefaultRecord="" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="TM模块" Description="TM模块" Index="2">
|
||
<MaintainItem Name="腔体外观" Id="0" Index="0" Description="腔体外观无破损、视窗玻璃无破损" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="清洁腔体" Id="0" Index="1" Description="腔体内表面没有肉眼可见颗粒" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="模块检漏（自检）" Id="0" Index="2" Description="自检结果<0.5mbar/min" DefaultRecord="自检结果=" FilePath="" />
|
||
<MaintainItem Name="模块检漏（氦检）" Id="0" Index="3" Description="漏率<2.0*E-9mbar*L/s" DefaultRecord="漏率=" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="Load模块" Description="Load模块" Index="3">
|
||
<MaintainItem Name="腔体外观" Id="0" Index="0" Description="腔体外观无破损、视窗玻璃无破损" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="清洁腔体" Id="0" Index="1" Description="腔体内表面没有肉眼可见颗粒" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="模块检漏（自检）" Id="0" Index="2" Description="自检结果<0.5mbar/min" DefaultRecord="自检结果=" FilePath="" />
|
||
<MaintainItem Name="模块检漏（氦检）" Id="0" Index="3" Description="漏率<2.0*E-9mbar*L/s" DefaultRecord="漏率=" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="Unload模块" Description="Unload模块" Index="4">
|
||
<MaintainItem Name="清洁腔体" Id="0" Index="0" Description="腔体内表面没有肉眼可见颗粒" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="腔体外观" Id="0" Index="1" Description="腔体外观无破损、视窗玻璃无破损" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="模块检漏（自检）" Id="0" Index="2" Description="自检结果<0.5mbar/min" DefaultRecord="自检结果=" FilePath="" />
|
||
<MaintainItem Name="模块检漏（氦检）" Id="0" Index="3" Description="漏率<2.0*E-9mbar*L/s" DefaultRecord="漏率=" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="EFFM模块" Description="EFFM模块" Index="5">
|
||
<MaintainItem Name="模块清洁" Id="0" Index="0" Description="EFFM四壁表面没有肉眼可见颗粒" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="FFU检查" Id="0" Index="1" Description="风向向下；分力适中" DefaultRecord="" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="温控系统" Description="温控系统" Index="6">
|
||
<MaintainItem Name="测温硬件" Id="0" Index="0" Description="硬件正常显示" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="测温硬件" Id="1" Index="1" Description="光纤无破损" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="测温硬件" Id="2" Index="2" Description="测温探头无松动" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="测温硬件" Id="3" Index="3" Description="探头内部清洁" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="控温硬件" Id="0" Index="4" Description="硬件正常显示" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="温控能力" Id="0" Index="5" Description="控温精度在±1℃" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="温度校准" Id="0" Index="6" Description="1200℃进行温度校准
参照《光学测温系统参数设置作业标准》" DefaultRecord="" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="真空系统" Description="真空系统" Index="7">
|
||
<MaintainItem Name="PM真空泵" Id="0" Index="0" Description="BP电流：2-3A
BP温度：<65℃
MP电流：6-8A
MP温度：<75℃
N2 Flow：17-81 Pam3/s
Water Flow：3.5-8L/min"" DefaultRecord="BP电流=
BP温度=
MP电流=
MP温度=
N2 Flow=
Water Flow=" FilePath="" />
|
||
<MaintainItem Name="TM真空泵" Id="0" Index="1" Description="MP：0.4-0.8KW
N2 Flow：17-20 Pam3/s
Water Flow：1.5 - 3.0 L/min" DefaultRecord="MP=
N2 Flow=
Water Flow=" FilePath="" />
|
||
<MaintainItem Name="控压能力" Id="0" Index="2" Description="蝶阀控压能力：控压精度<±1 mbar" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="控压能力" Id="1" Index="3" Description="清洁蝶阀阀片" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="安全泄压" Id="0" Index="4" Description="PM ATM Idle可维持在1050-1090mbar之间
当腔体压力>1095mbar时，设备自动关闭Final Valve" DefaultRecord="" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="Gas Box" Description="Gas Box" Index="8">
|
||
<MaintainItem Name="特气压力设定" Id="0" Index="0" Description="H2：50； Ar（PM）：45； Ar（TM）：45；
C2H4：30； SiH4：30； HCL：30；
PN2：30； GN2：100 （单位Psi）" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="MFC功能校准" Id="0" Index="1" Description="设定值与实际值相符；ROR结果<3%
参考《MFC 安装调试作业标准》" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="PC功能校准" Id="0" Index="2" Description="参考《PC校准作业标准》" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="加热带温度" Id="0" Index="3" Description="设备侧温度设定：60℃
TCS厂务侧温度设定：50℃
温差范围：±1℃" DefaultRecord="设备侧温度设定=
TCS厂务侧温度设定=" FilePath="" />
|
||
<MaintainItem Name="H2侦测器" Id="0" Index="4" Description="H2 Detector 校准" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="HCL侦测器" Id="0" Index="5" Description="HCL Detector校准" DefaultRecord="" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="液体源" Description="液体源" Index="9">
|
||
<MaintainItem Name="TCS鼓泡器" Id="0" Index="0" Description="TCS液位：8L或10L" DefaultRecord="TCS液位=" FilePath="" />
|
||
<MaintainItem Name="TCS鼓泡器" Id="1" Index="1" Description="水浴温度：19℃" DefaultRecord="水浴温度=" FilePath="" />
|
||
<MaintainItem Name="TCS鼓泡器" Id="2" Index="2" Description="检查自动补液功能" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="TCS鼓泡器" Id="3" Index="3" Description="检查报警功能" DefaultRecord="" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="传送系统" Description="传送系统" Index="10">
|
||
<MaintainItem Name="真空机械手" Id="0" Index="0" Description="清洁外观及手指" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="真空机械手" Id="1" Index="1" Description="检查机械及电子组件，无松脱及损伤" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="真空机械手" Id="2" Index="2" Description="检查传盘流程动作，无碰撞、无错位" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="晶圆机械手" Id="0" Index="3" Description="清洁外观及手指" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="晶圆机械手" Id="1" Index="4" Description="检查机械及电子组件，无松脱及损伤" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="晶圆机械手" Id="2" Index="5" Description="检查传盘流程动作，无碰撞、无错位" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="托盘机械手" Id="0" Index="6" Description="清洁外观及手指" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="托盘机械手" Id="1" Index="7" Description="检查机械及电子组件，无松脱及损伤" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="托盘机械手" Id="2" Index="8" Description="检查传盘流程动作，无碰撞、无错位" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="寻边器" Id="0" Index="9" Description="清洁寻边器外观及载盘" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="寻边器" Id="1" Index="10" Description="检查机械及电子组件，无松脱及损伤" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="寻边器" Id="2" Index="11" Description="检查寻边流程，无掉片，寻边正常" DefaultRecord="" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="强电系统" Description="强电系统" Index="11">
|
||
<MaintainItem Name="电气接线" Id="0" Index="0" Description="检查接线，无凌乱现象" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="EMO功能" Id="0" Index="1" Description="功能正常
参考《Final Test Record》" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="漏电保护功能" Id="0" Index="2" Description="功能正常
参考《Final Test Record》" DefaultRecord="" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="弱电系统" Description="弱电系统" Index="12">
|
||
<MaintainItem Name="电气接线" Id="0" Index="0" Description="检查接线，无凌乱现象" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="UPS保护功能" Id="0" Index="1" Description="设备异常断电时可以立即切换到UPS供电" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="PLC硬件检查" Id="0" Index="2" Description="硬件无报错" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="PLC硬件检查" Id="1" Index="3" Description="表面清洁、排线整齐" DefaultRecord="" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="尾排系统" Description="尾排系统" Index="13">
|
||
<MaintainItem Name="过滤器" Id="0" Index="0" Description="过滤器维护
参照《SiC CVD 设备维护作业标准》" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="厂务负压" Id="0" Index="1" Description="厂务排查处于负压状态" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="尾排管道" Id="0" Index="2" Description="清洁尾排管道" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="尾排管道" Id="1" Index="3" Description="氦检：漏率<2.0*E-9mbar*L/s" DefaultRecord="漏率=" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="排风系统" Description="排风系统" Index="14">
|
||
<MaintainItem Name="排风能力" Id="0" Index="0" Description="排风管道与设备空间之间的压差：>0.2mbar" DefaultRecord="压差=" FilePath="" />
|
||
<MaintainItem Name="排风管口" Id="0" Index="1" Description="打开状态，风向向外" DefaultRecord="" FilePath="" />
|
||
</MaintainItems>
|
||
<MaintainItems Name="IPC" Description="IPC" Index="15">
|
||
<MaintainItem Name="设备备份" Id="0" Index="0" Description="重要文件（SIC文件）备份" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="设备备份" Id="1" Index="1" Description="数据库备份" DefaultRecord="" FilePath="" />
|
||
<MaintainItem Name="设备重启" Id="0" Index="2" Description="设备重启" DefaultRecord="" FilePath="" />
|
||
</MaintainItems>
|
||
</AllMaintainItemConfigs>
|
||
</root> |